JPH01276410A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH01276410A JPH01276410A JP10480688A JP10480688A JPH01276410A JP H01276410 A JPH01276410 A JP H01276410A JP 10480688 A JP10480688 A JP 10480688A JP 10480688 A JP10480688 A JP 10480688A JP H01276410 A JPH01276410 A JP H01276410A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- magnetic
- gap
- sputtering
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 26
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 15
- 239000010409 thin film Substances 0.000 claims abstract description 12
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 9
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 239000011651 chromium Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910000702 sendust Inorganic materials 0.000 abstract description 10
- 238000004544 sputter deposition Methods 0.000 abstract description 9
- 239000011521 glass Substances 0.000 abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- 230000006866 deterioration Effects 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract description 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 2
- 229910052682 stishovite Inorganic materials 0.000 abstract description 2
- 229910052905 tridymite Inorganic materials 0.000 abstract description 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000006731 degradation reaction Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000007499 fusion processing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- -1 oxygen ions Chemical class 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録再生装置に使用する磁気ヘッドに間す
るものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head used in a magnetic recording/reproducing device.
従来の磁気ヘッドは、第２図に示すように、フェライト
コア１上にセンダスト薄膜３．５ｉｎ２５が順次形成さ
れ、フェライ１〜コア２とガラス６によりガラス融着さ
れていた。In the conventional magnetic head, as shown in FIG. 2, a 3.5 inch 25 Sendust thin film is sequentially formed on a ferrite core 1, and the ferrite 1 to core 2 are glass-fused by a glass 6.
しかし、前述の技術では、フエライＩ−■の接合面は機
械加工による面で、加工変質層があるためガラス融着の
際、ギャップ内に気泡か発生したり、実効ギャップ長が
ばらつくという問題を有する。However, with the above-mentioned technology, the bonding surface of Ferray I-■ is a machined surface and has a damaged layer, so there are problems such as bubbles occurring in the gap and variations in the effective gap length during glass fusing. have
また、センダストとＳｉｎ、が接しているため熱プロセ
スにより酸素イオンが移動し、センダストの磁気特性が
劣化してしまう、そこで本発明はこのような課題を解決
するもので、その目的とするところは、安定した磁気ギ
ャップを有する高性能な磁気ヘッドを提供するところに
ある。In addition, since the sendust and the sin are in contact with each other, oxygen ions move due to the thermal process, degrading the magnetic properties of the sendust.The present invention is intended to solve this problem, and its purpose is to The object of the present invention is to provide a high-performance magnetic head having a stable magnetic gap.
本発明の磁気ヘッドは、磁気ギャップの両側にクロム層
が形成されていることを特徴とする。The magnetic head of the present invention is characterized in that chromium layers are formed on both sides of the magnetic gap.
本発明の上記の構成によれば、強磁性金属薄膜とギャッ
プの拡散が抑制され、またフェライトの接合面に逆スパ
ツタリングを施した後、クロム層を形成することにより
加工変質層が取り除かれ、ガラス融着の際、ギャップ内
に気泡か発生するのを防ぐことができる。According to the above structure of the present invention, the diffusion of the ferromagnetic metal thin film and the gap is suppressed, and after performing reverse sputtering on the bonding surface of the ferrite, the process-altered layer is removed by forming a chromium layer. This can prevent air bubbles from forming within the gap during fusion.
第１図は本発明の実施例における磁気ヘッドの斜視図で
ある。第１図に示すようにトレーリング側となるフェラ
イトコア１上に、逆スパツタリングした後、スパッタリ
ングによりセンタスト薄膜３を３μｍ、クロム層４ａを
５０ＯＡ、さらにギャップとなるＳｉＯ，５を０．５μ
ｍ、順次積層する。FIG. 1 is a perspective view of a magnetic head in an embodiment of the present invention. As shown in FIG. 1, on the ferrite core 1 on the trailing side, after reverse sputtering, a centast thin film 3 with a thickness of 3 μm, a chromium layer 4a with a thickness of 50 OA, and a SiO, 5 layer with a thickness of 0.5 μm, which will form a gap, are formed by sputtering.
m, sequentially stacked.
またリーディング側となるフェライトコア２上に、逆ス
パツタリングした後、スパッタリングによりクロム層４
ｂを５００Ａ形成する。このようにして得られたフエラ
イ１−コア半体対を、突き合わせガラス６によりガラス
融着する。なお、ガラス６の熱膨張係数は、フェライト
、センダストの熱膨張係数かそれぞれ１１５ｘｌＯ−７
／−Ｃ１１３５Ｘ １０−７７”Ｃであることからｌｌ
０ＸＩＯ−７／゛Ｃのものを使用し、作業温度は、セン
ダスト薄膜が磁気的に劣化しない６００℃とした。In addition, after reverse sputtering, a chromium layer 4 is applied to the ferrite core 2 on the leading side by sputtering.
Form b to 500A. The Ferray 1-core half pair thus obtained is glass fused using a butted glass 6. The thermal expansion coefficient of the glass 6 is 115xlO-7, which is the thermal expansion coefficient of ferrite and sendust, respectively.
/-C1135X 10-77”C, so ll
0XIO-7/゛C was used, and the working temperature was 600°C at which the Sendust thin film would not deteriorate magnetically.
このようにして得られた磁気ヘッドの実効ギャップ長は
、フェライト上の加工変質層が取り除かれ、センダスト
薄膜とＳｉＯ２間に反応がないため、光学ギャップ長０
．５１μｍと一致した。The effective gap length of the magnetic head obtained in this way is 0 because the process-affected layer on the ferrite is removed and there is no reaction between the Sendust thin film and SiO2.
．． It was consistent with 51 μm.
本発明により、安定したギャップを有する磁気ヘッドが
得られるとともに、センタスト薄膜の磁気劣化のない高
性能な磁気ヘッドが得られる。According to the present invention, a magnetic head having a stable gap can be obtained, and a high-performance magnetic head without magnetic deterioration of the centast thin film can be obtained.
強磁性金属薄膜として、センダストのほかに、パーマロ
イ、アモルファスを使用しても同等の効果を得ることが
できる。In addition to Sendust, permalloy or amorphous can be used as the ferromagnetic metal thin film to obtain the same effect.
以上述べたように発明によれば、強磁性金属薄膜と、ギ
ャップ材との拡散を防ぎ、フェライト界面からの気泡発
生を防ぎ鮮明なギャップエッヂを有する磁気ヘッドが得
られるという効果を有する。As described above, the invention has the effect of preventing the diffusion of the ferromagnetic metal thin film and the gap material, preventing the generation of bubbles from the ferrite interface, and providing a magnetic head with sharp gap edges.
また、ギャップ形成面に加工変質層がないため、実効ギ
ャップ長と光学ギャップ長が一致し、加工による実効ギ
ャップ長のばらつきがないという効果も有する。Furthermore, since there is no process-affected layer on the gap forming surface, the effective gap length and the optical gap length match, and there is also the effect that there is no variation in the effective gap length due to processing.
第１図は本発明の磁気ヘッドの実施例を示す斜視図。
第２図は、従来の磁気ヘッドを示す斜視図。
１・・・フェライトコア（トレーリング側）２・・・フ
ェライトコア（リーディング＠）３・・・センダスト薄
膜
４ａ、４ｂ
・・・クロム層
５・・・Ｓｉｎ。
６・・・ガラス
以上
出願人 セイコーエプソン株式会社
代理人 弁理士 給水 喜三部（他１名）第 １ 口
名 ｚ！ｉｉ］FIG. 1 is a perspective view showing an embodiment of the magnetic head of the present invention. FIG. 2 is a perspective view showing a conventional magnetic head. 1... Ferrite core (trailing side) 2... Ferrite core (leading@) 3... Sendust thin film 4a, 4b... Chromium layer 5...Sin. 6...Glass and above Applicant Seiko Epson Co., Ltd. agent Patent attorney Water supply Kisanbe (and 1 other person) No. 1 Name z! ii]
Claims (1)
接合面に真空薄膜形成技術により強磁性金属薄膜を形成
し前記磁気コア半体対を突き合わせて磁気ギャップを形
成してなる磁気ヘッドにおいて、前記磁気ギャップの両
側にクロム層が形成されていることを特徴とする磁気ヘ
ッド。In a magnetic head, a ferromagnetic metal thin film is formed on the trailing side joint surface of a pair of magnetic core halves made of ferrite by vacuum thin film formation technology, and a magnetic gap is formed by abutting the pair of magnetic core halves. A magnetic head characterized by a chromium layer formed on both sides of the gap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10480688A JPH01276410A (en) | 1988-04-27 | 1988-04-27 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10480688A JPH01276410A (en) | 1988-04-27 | 1988-04-27 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01276410A true JPH01276410A (en) | 1989-11-07 |
Family
ID=14390673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10480688A Pending JPH01276410A (en) | 1988-04-27 | 1988-04-27 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01276410A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03110617U (en) * | 1990-02-23 | 1991-11-13 | ||
| JPH04205804A (en) * | 1990-11-29 | 1992-07-28 | Matsushita Electric Ind Co Ltd | Magnetic head |
| US6150044A (en) * | 1993-04-27 | 2000-11-21 | Matsushita Electric Industrial Co., Ltd. | Magnetic head |
-
1988
- 1988-04-27 JP JP10480688A patent/JPH01276410A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03110617U (en) * | 1990-02-23 | 1991-11-13 | ||
| JPH04205804A (en) * | 1990-11-29 | 1992-07-28 | Matsushita Electric Ind Co Ltd | Magnetic head |
| US6150044A (en) * | 1993-04-27 | 2000-11-21 | Matsushita Electric Industrial Co., Ltd. | Magnetic head |
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