JPH01274483A - Waveguide type laser array - Google Patents
Waveguide type laser arrayInfo
- Publication number
- JPH01274483A JPH01274483A JP10239388A JP10239388A JPH01274483A JP H01274483 A JPH01274483 A JP H01274483A JP 10239388 A JP10239388 A JP 10239388A JP 10239388 A JP10239388 A JP 10239388A JP H01274483 A JPH01274483 A JP H01274483A
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- waveguides
- laser
- gas
- partial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract description 14
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 5
- 238000005192 partition Methods 0.000 abstract description 4
- 239000001569 carbon dioxide Substances 0.000 abstract description 3
- 230000001427 coherent effect Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract description 2
- 238000002310 reflectometry Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/0315—Waveguide lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、導波形レーザアレーに関し、特に小型で高い
出力を発生することができる導波形レーザアレーに関す
る。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a waveguide laser array, and particularly to a waveguide laser array that is small and can generate high output.
（従来の技術）
気体レーザは適当な種類及び圧力のガスを封入したレー
ザ管に放電を維持してガス分子を励起状態にして誘導放
出させることによって発生させるのであるが、導波形レ
ーザ装置ではレーザ管を導波路として用い、光ビームを
導波路内に閉じ込めながら伝播させるのである。そのた
め、導波形レーザの高出力化を計るために従来より導波
路の径を大きくしたり、或は導波路の長さを長くするこ
とが行なわれている。しかし、導波路の径を大きくする
と単位長さ当りの利得が低下し、径の大きさにも限度が
ある。また、導波路の長さを長くすることは装置が大型
化し、これを防止する方法として複数の導波路を反射鏡
を使用して実質的に導波路の長さを長くすることも出来
るが、この場合。(Prior art) Gas lasers are generated by maintaining a discharge in a laser tube filled with gas of an appropriate type and pressure to excite gas molecules and stimulate them to emit them. However, in waveguide laser devices, laser The tube is used as a waveguide, and the light beam is propagated while being confined within the waveguide. Therefore, in order to increase the output power of a waveguide laser, conventional efforts have been made to increase the diameter of the waveguide or increase the length of the waveguide. However, increasing the diameter of the waveguide lowers the gain per unit length, and there is a limit to the diameter. In addition, increasing the length of the waveguide increases the size of the device, and as a way to prevent this, it is possible to substantially increase the length of the waveguide by using reflective mirrors for multiple waveguides. in this case.
反射鏡のセツティングを極めて精度よく行なう必要があ
る。It is necessary to set the reflecting mirror with extreme precision.
最近、平面上に複数の導波路を並列にし、各導波路から
発生するレーザ光を集束して高出力化することも考えら
れている。しかし、この場合には各導波路から集光部分
までの距離が異なり、また各導波路で別々′にレーザ発
振を行っているため、それぞれの導波路からのレーザ光
は位相関係がなく集光した場合に位相のずれを生ずる欠
点があった。このため、レーザ光を効率よく集光するこ
とは困難となる。これらの欠点をなくす方法とじては第
４図に示すように、それぞれの導波路間に隙間を設ける
ことにより、隣接の導波路内のレーザ光が結合し、レー
ザ光間に光波の位相関係をもたすものがある。この場合
、あたかも一つの導波路からレーザ光が出射したと同様
な効果をもたらし。Recently, it has been considered to arrange multiple waveguides in parallel on a plane and focus the laser light generated from each waveguide to increase the output. However, in this case, the distance from each waveguide to the focusing part is different, and each waveguide performs laser oscillation separately, so the laser beams from each waveguide have no phase relationship and are focused. There is a drawback that a phase shift occurs when For this reason, it becomes difficult to efficiently focus laser light. As shown in Figure 4, a method to eliminate these drawbacks is to provide a gap between each waveguide, so that the laser beams in adjacent waveguides are combined and the phase relationship of the light waves between the laser beams is changed. There is something to bring. In this case, the same effect is produced as if laser light were emitted from a single waveguide.
レーザ光の集光を容易にしようとするものがある。There are methods that attempt to facilitate the focusing of laser light.
しかし、この場合でも平面上に導波路を配列しているた
め、導波路の本数を多くした場合、例えば平面上の中心
付近の導波路と両端付近の導波路と位相関係をもたすの
は困戴であるという報告がある。However, even in this case, the waveguides are arranged on a plane, so if the number of waveguides is increased, for example, the phase relationship between the waveguide near the center of the plane and the waveguides near both ends will be different. There are reports that they are in trouble.
（解決すべき課題）
本発明者は従来の欠点を改良し、導波形レーザ装置を小
型化するとともに高出力を得るべく種々検討した結果、
導波路を円形配置にすることにより、各導波路は位置的
に同じ条件になり、平面配置に比べて位相関係をもたす
ことが容易になることを見出し本発明を完成したもので
あって、本発明の目的は小型で且つ高出力のレーザを発
生することが出来る導波形レーザアレーを提供するにあ
る。(Problems to be Solved) As a result of various studies in order to improve the conventional drawbacks, miniaturize the waveguide laser device, and obtain high output, the present inventor found that
The inventors completed the present invention by discovering that by arranging the waveguides in a circular manner, each waveguide is placed under the same conditions, making it easier to create a phase relationship compared to a planar arrangement. SUMMARY OF THE INVENTION An object of the present invention is to provide a waveguide laser array that is compact and capable of generating a high-output laser.
（課題を解決するための手段）
すなわち１本発明は複数の導波形レーザからなる導波形
レーザアレーにおいて、それぞれの導波形レーザは同一
円周上に配列され、且つ隣接する導波形レーザには導波
路にレーザ光を結合するための共通部分が設けられるこ
とを特徴とする導波形レーザアレーである。本発明にお
いて導波形レーザーを同一円周上に配列するとは中央部
の電極を中心としてそれぞれのレーザが等距離に有るよ
うに導波路の中心を中央電極の中心より等距離に設ける
ことを言うのであって、その断面は例えば鞠挟紋（第１
図参照）や梅鉢紋（第３図参照）のような形状を呈し、
各導波路間の隔壁は例えばアルミナ焼結体で構成されて
いる。両電極間に設ける導波路の本数は特に限定される
ものではないが、通常５〜１０程度が好ましい。このよ
うに、レーザが等距離に有るので極めて容易に集束する
ことが出来る。(Means for Solving the Problem) That is, one aspect of the present invention is that in a waveguide laser array consisting of a plurality of waveguide lasers, each waveguide laser is arranged on the same circumference, and adjacent waveguide lasers are provided with a waveguide. This is a waveguide laser array characterized in that a common portion for coupling laser light to the waveguide type laser array is provided. In the present invention, arranging waveguide lasers on the same circumference means arranging the centers of the waveguides at equal distances from the center of the central electrode so that each laser is equidistant from the central electrode. For example, its cross section is similar to the first one.
(see figure) or plum bowl pattern (see figure 3),
The partition walls between the waveguides are made of, for example, alumina sintered body. Although the number of waveguides provided between both electrodes is not particularly limited, it is usually preferably about 5 to 10. In this way, since the lasers are equidistant, they can be focused very easily.
そして、本発明は、更に、隣接するレーザを結合するた
めの共通部分を設けるものであって、これは隣接する導
波路同志に共通空間を設けることによって達成すること
が出来、該共通空間によりそれぞれの隣接するレーザ同
志が同位相となるのである１本発明において導波路内に
封入する気体としては炭酸ガスレーザの場合には、ＣＯ
□、Ｎ２、Ｈｅ、Ｘｓなどを用いる。また１両電極間の
絶縁体としては前記アルミナ焼結体が使用される。The present invention further provides a common portion for coupling adjacent lasers, which can be achieved by providing a common space between adjacent waveguides, and the common space allows each In the present invention, in the case of a carbon dioxide laser, the gas sealed in the waveguide is CO2.
□, N2, He, Xs, etc. are used. Further, the alumina sintered body is used as an insulator between the two electrodes.
（実施例）
次に、本発明の実施例を以下の図面に基づいて具体的に
説明する６
第１図は、本発明の導波形レーザアレー装置の斜視図を
示し、第２図は該導波形レーザアレー装置の側断面図を
示す。中心部及び円周部に電極１゜２を設置する。導波
路３は直径５〜２０ｍ＋ａの円周上に５〜１５本形成さ
れている。この導波路３を構成する隔壁４はアルミナ焼
結体によって形成され、外周壁に近い部分に結合を行な
うための間隙５が設けられている。導波路３内には、例
えば炭酸ガスレーザの場合には、ＣＯ２ガス＋ Ｈａガ
ス、Ｎ２ガスのようなガスが満たされており、導波路３
の両端には反射鏡６．７が対設され、一方の反射１ｔｔ
６は、例えば反射率９５％の部分透過鏡が用いられてお
り１部分透過窓を兼ねる。この部分透過窓から導波路３
内に発生したレーザが外部に照射され、レンズ８で所定
の箇所に集束される。そして導波形レーザアレー装置の
中心部の電極１及び外壁は適当な手段によって冷却され
る。(Example) Next, an example of the present invention will be specifically described based on the following drawings. 6 FIG. 1 shows a perspective view of a waveguide laser array device of the present invention, and FIG. A side sectional view of the laser array device is shown. Electrodes 1°2 are installed at the center and around the circumference. 5 to 15 waveguides 3 are formed on a circumference with a diameter of 5 to 20 m+a. The partition wall 4 constituting the waveguide 3 is formed of an alumina sintered body, and a gap 5 for bonding is provided in a portion near the outer peripheral wall. For example, in the case of a carbon dioxide laser, the waveguide 3 is filled with a gas such as CO2 gas + Ha gas or N2 gas.
Reflector mirrors 6.7 are installed at both ends of the mirror 1tt.
Reference numeral 6 uses a partially transmitting mirror with a reflectance of 95%, for example, and also serves as a partially transmitting window. From this partially transparent window, the waveguide 3
The laser generated inside is irradiated to the outside and focused on a predetermined location by a lens 8. Then, the central electrode 1 and the outer wall of the waveguide laser array device are cooled by appropriate means.
（比較例）
第４図は、従来知られた導波形レーザアレー装置の斜視
図を示す。導波路３は同一平面上に４本数列して形成さ
れている。この導波路３を構成する隔壁はアルミナ焼結
体によって形成され、一方の電極１に近い部分にレーザ
の結合を行なうための隙間５が設けられている。この導
波路３の上下には電極１．２が設けられ、導波路３内に
は１例えばＣ０２ガスのようなガスが満たされており、
導波路３の両端には反射鏡が対設され、一方の反射鏡は
部分透過鏡が用いられており、部分透過窓を兼ねる。(Comparative Example) FIG. 4 shows a perspective view of a conventionally known waveguide laser array device. Four waveguides 3 are formed in several rows on the same plane. The partition wall constituting the waveguide 3 is formed of an alumina sintered body, and a gap 5 is provided in a portion close to one electrode 1 for laser coupling. Electrodes 1.2 are provided above and below this waveguide 3, and the waveguide 3 is filled with a gas such as CO2 gas,
Reflecting mirrors are provided at both ends of the waveguide 3, one of which is a partially transmitting mirror and also serves as a partially transmitting window.
この部分透過窓から導波路３内発生したレーザが外部に
照射され、レンズで所定の箇所に集束される、そして、
その外壁には適当な手段によって冷却される。The laser generated within the waveguide 3 is irradiated to the outside through this partially transparent window, and is focused at a predetermined location by a lens, and
The outer wall is cooled by suitable means.
上述の実施例の導波路レーザアレー装置において、導波
路本数が６本、導波路長さ３０ａ１の場合、導波形レー
ザーアレー出力は９０すであフた。In the waveguide laser array device of the above embodiment, when the number of waveguides was 6 and the waveguide length was 30a1, the output of the waveguide laser array was 90S.
なお、この場合のレーザ発振は、ガス圧力５０Ｔｏｒｒ
、ガス混合比Ｃｏ２：Ｎｔ：Ｈｅ＝１：１：６、放電電
流１００ｍＡの条件で行なった。Note that the laser oscillation in this case is performed at a gas pressure of 50 Torr.
, gas mixture ratio Co2:Nt:He=1:1:6, and discharge current 100 mA.
（発明の効果）
以上述べたように５本発明においては導波路を同一円周
上に配することによって各導波路レーザが等距離に有り
、且つ隣接する導波路はレーザを結合するための共通部
分が設けられている。このことにより、それぞれの導波
形レーザの出力光の位相が同相となり、極めて容易に各
導波路からのレーザ光を集束することができる。従って
、装置が小型化できると共にコヒーレントな光出力を得
ることができる。(Effects of the Invention) As described above, in the present invention, the waveguides are arranged on the same circumference so that each waveguide laser is equidistant from each other, and adjacent waveguides have a common space for coupling lasers. There are parts. As a result, the output lights of the respective waveguide lasers have the same phase, and the laser light from each waveguide can be focused very easily. Therefore, the device can be made smaller and coherent optical output can be obtained.
第１図は本発明に係る導波形レーザアレーの斜視図、第
２図は第１図の側断面図である。また、第３図は本発明
に係る導波形レーザアレーの他の態様の斜視図である。
第４図は従来の導波形レーザアレーの斜視図である。FIG. 1 is a perspective view of a waveguide laser array according to the present invention, and FIG. 2 is a side sectional view of FIG. 1. Further, FIG. 3 is a perspective view of another embodiment of the waveguide laser array according to the present invention. FIG. 4 is a perspective view of a conventional waveguide laser array.
Claims (1)
て、それぞれの導波形レーザは同一円周上に配列され、
且つ隣接する導波形レーザには導波路にレーザ光を結合
するための共通部分が設けられることを特徴とする導波
形レーザアレー。In a waveguide laser array consisting of a plurality of waveguide lasers, each waveguide laser is arranged on the same circumference,
A waveguide laser array characterized in that adjacent waveguide lasers are provided with a common portion for coupling laser light to the waveguide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10239388A JPH01274483A (en) | 1988-04-27 | 1988-04-27 | Waveguide type laser array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10239388A JPH01274483A (en) | 1988-04-27 | 1988-04-27 | Waveguide type laser array |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01274483A true JPH01274483A (en) | 1989-11-02 |
Family
ID=14326203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10239388A Pending JPH01274483A (en) | 1988-04-27 | 1988-04-27 | Waveguide type laser array |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01274483A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04229676A (en) * | 1990-05-14 | 1992-08-19 | Hughes Aircraft Co | Waveguide substance laser where phases are coupled |
-
1988
- 1988-04-27 JP JP10239388A patent/JPH01274483A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04229676A (en) * | 1990-05-14 | 1992-08-19 | Hughes Aircraft Co | Waveguide substance laser where phases are coupled |
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