JPH01269846A - Circulating air sterilizing and deodorizing system - Google Patents

Circulating air sterilizing and deodorizing system

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Publication number
JPH01269846A
JPH01269846A JP63099035A JP9903588A JPH01269846A JP H01269846 A JPH01269846 A JP H01269846A JP 63099035 A JP63099035 A JP 63099035A JP 9903588 A JP9903588 A JP 9903588A JP H01269846 A JPH01269846 A JP H01269846A
Authority
JP
Japan
Prior art keywords
clean room
circulating air
ozonizer
deodorizing catalyst
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63099035A
Other languages
Japanese (ja)
Other versions
JP2538985B2 (en
Inventor
Yoshibumi Ito
義文 伊藤
Toshiyuki Ota
利行 大田
Tetsuo Yoshida
哲夫 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP63099035A priority Critical patent/JP2538985B2/en
Publication of JPH01269846A publication Critical patent/JPH01269846A/en
Application granted granted Critical
Publication of JP2538985B2 publication Critical patent/JP2538985B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Ventilation (AREA)
  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
  • Treating Waste Gases (AREA)

Abstract

PURPOSE:To improve the sterilizing effect on the circulating air and in a clean room by installing an ozonizer, directional control valve and deodorizing catalyst-packed vessel both in the downstream from the ozonizer, and a bypass pipe for returning the air to the clean room without passing through the deodorizing catalyst-packed vessel. CONSTITUTION:By means of a circulating fan 2 the circulating air in a clean room 1 is sent to an ozonizer 3, where the air is made to pass through an electric discharge part, that is, between a cathode electrode 21 and an anode electrode 22, and from thence, during the daytime, through a directional control valve 4, deodorizing catalyst- packed vessel 5, and filter 6, and returned to a clean room 1; while during the night, the air is made to flow from the directional control valve 4 through a bypass 7 to the filter 6 and return to the clean room 1. An enhanced sterilization effect on the circulating air can be achieved by the passage through the ozonizer 3 wherein bacteria and molds in the circulating air are exterminated or brought in a state of suspended animation by high voltage field strength (for example, 24kV, 60Hz). The deodorizing catalyst-packed vessel 5 may be filled with, for example, a ternary compound oxide of titanium, silicon and zirconium as a deodorizing catalyst. After deodorization in a deodorizing catalyst-packed vessel 5, the circulating air is made to pass through the filter 6.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、例えば食品・薬品工場、病院、劇場。[Detailed description of the invention] [Industrial application field] The present invention can be applied to, for example, food/drug factories, hospitals, and theaters.

映画館等のクリーンルームに適用される循環空気の殺菌
・除臭システムに関する。
This relates to a sterilization and deodorization system for circulating air that is applied to clean rooms such as movie theaters.

〔従来の技術〕[Conventional technology]

従来、クリーンルーム内の空気は、その循環経路に設け
られたポアサイズ0.5μm程度の高効率フィルタ(H
E P A)によって空気中の細菌やカビ類等が除去さ
れているが、高効率フィルタはその物理的特性上 ■ ポアサイズが小さいため除去した菌の処理が不可能
Conventionally, the air in a clean room has been passed through a high-efficiency filter (H
Bacteria and molds in the air are removed by EPA), but due to the physical characteristics of high-efficiency filters, the pore size is small, making it impossible to dispose of the removed bacteria.

■ フィルタ交換時における作業員の安全衛生面で問題
がある。
■ There are health and safety issues for workers when replacing filters.

■ フィルタの廃棄方法等が確立されていない。■ There is no established method for disposing of filters.

などの問題があり、さらに致命的な問題点としてクリー
ンルームそのもの、即ちクリーンルームの゛内壁や内部
の機器等に付着している細菌及びカビ類等については全
く殺菌効果がなかった。
There are problems such as these, and a more fatal problem is that it has no sterilizing effect on the clean room itself, that is, on the bacteria and mold that adhere to the inside walls and internal equipment of the clean room.

また、除具については活性炭などの脱臭触媒を充填した
脱臭触媒充填槽を用いて単独で脱臭を行なっているが、
このような単独の脱臭システムでは脱臭触媒の破過時間
が短いため、脱臭触媒の再生コストや交換コストが増大
するという問題があった。
In addition, deodorization is carried out independently using a deodorizing catalyst filling tank filled with a deodorizing catalyst such as activated carbon.
In such a single deodorizing system, the breakthrough time of the deodorizing catalyst is short, so there is a problem that the regeneration cost and replacement cost of the deodorizing catalyst increase.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述のように、従来ではクリーンルームの循環空気経路
に高効率フィルタ(HEPA)を設置して循環空気中の
細菌やカビ類等を除去していたため、クリーンルームの
内壁や内部の機器等に付着している細菌及びカビ類につ
いては除去することができなかった。また、除具につい
ては活性炭などの脱臭触媒を充填した脱臭触媒充填槽を
単独で用いていたため、脱臭効果が短いという問題があ
った。
As mentioned above, in the past, high-efficiency filters (HEPA) were installed in the circulating air path of the clean room to remove bacteria and mold from the circulating air. It was not possible to remove the bacteria and fungi present. Furthermore, as for the removal tool, a deodorizing catalyst filling tank filled with a deodorizing catalyst such as activated carbon was used alone, so there was a problem that the deodorizing effect was short.

本発明はこのような問題点に鑑みてなされたもので、ク
リーンルーム内および循環空気そのものの殺菌効果を高
めることができ、かつ脱臭触媒の脱臭効果が長時間にわ
たって持続する循環空気殺菌・除臭システムを提供する
ことを目的とするものである。
The present invention has been made in view of these problems, and provides a circulating air sterilization and deodorization system that can enhance the sterilization effect in a clean room and in the circulating air itself, and in which the deodorizing effect of the deodorizing catalyst continues for a long time. The purpose is to provide the following.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するために本発明は、クリーンルームの
循環空気経路にオゾナイザ−を設置するとともに、その
下流側に流路切換弁および脱臭触媒充填槽を設置し、か
つ前記オゾナイザ−を通過した循環空気を前記脱臭触媒
充填槽をバイパスしてクリーンルームへ戻すバイパス流
路を設けたことを特徴とする。
In order to achieve the above object, the present invention installs an ozonizer in the circulating air path of a clean room, and also installs a flow path switching valve and a deodorizing catalyst filling tank on the downstream side of the ozonizer, and the circulating air that has passed through the ozonizer. The present invention is characterized in that a bypass passage is provided for bypassing the deodorizing catalyst filling tank and returning the deodorizing catalyst to the clean room.

〔作 用〕[For production]

本発明では、クリーンルームからの循環空気がオゾナイ
ザ−の放電部を通過するため、循環空気中の細菌及びカ
ビ類を高電圧な電界強度によって死滅または仮死させる
ことができる。また、オゾナイザ−を通過した循環空気
にはオゾンが含まれているため、脱臭触媒をオゾンによ
って活性化させることができる。さらに、循環空気の循
環経路をオゾナイザ−の下流側に設けられた流路切換弁
でバイパス流路側へ切換え、オゾナイザ−を通過した循
環空気を脱臭触媒充填槽をバイパスしてクリーンルーム
へ戻すことにより、クリーンルームの内壁や内部に機器
等に付着している細菌及びカビ類をオゾンによって殺菌
することができる。
In the present invention, since the circulating air from the clean room passes through the discharge section of the ozonizer, bacteria and mold in the circulating air can be killed or suspended by the high-voltage electric field strength. Furthermore, since the circulating air that has passed through the ozonizer contains ozone, the deodorizing catalyst can be activated by ozone. Furthermore, by switching the circulation path of the circulating air to the bypass flow path side with a flow path switching valve provided on the downstream side of the ozonizer, the circulating air that has passed through the ozonizer is returned to the clean room by bypassing the deodorizing catalyst filling tank. Ozone can sterilize bacteria and mold that adhere to the inner walls and equipment inside the clean room.

〔実施例〕〔Example〕

以下、図面を参照して本発明の詳細な説明する。 Hereinafter, the present invention will be described in detail with reference to the drawings.

第1図は本発明の一実施例を示し、図中1はクリーンル
ーム、2はクリーンルーム1内の空気を循環させる循環
ファン、3は循環ファン2の下流側に設けられたオゾナ
イザ−である。このオゾナイザ−3は、第2図に示すよ
うに円筒状に形成されたカソード電極21の内部に複数
本のアノニド電極22を配設して構成されており、前記
循環ファン2からの循環空気は矢印で示すように入口ダ
クト23からオゾナイザ−3内に流入し、カッー払 ド電極21の内部を通って入口ダクト24から流出する
ようになっている。なお、カソード電極21の外側には
冷媒流入口25及び冷媒流出口26を備えたジャケット
27が設けられ、このジャケット27とカソード電極2
1との間に冷媒が流れるようになっている。
FIG. 1 shows an embodiment of the present invention, in which 1 is a clean room, 2 is a circulation fan that circulates the air in the clean room 1, and 3 is an ozonizer provided downstream of the circulation fan 2. As shown in FIG. 2, this ozonizer 3 is constructed by arranging a plurality of anonide electrodes 22 inside a cylindrical cathode electrode 21, and circulates air from the circulation fan 2. As shown by the arrow, the water flows into the ozonizer 3 through the inlet duct 23, passes through the inside of the evaporating electrode 21, and flows out through the inlet duct 24. Note that a jacket 27 having a refrigerant inlet 25 and a refrigerant outlet 26 is provided on the outside of the cathode electrode 21, and this jacket 27 and the cathode electrode 2
Refrigerant is allowed to flow between 1 and 1.

前記オゾナイザ−3の下流側には流路切換弁4が設けら
れ、さらにその下流側には脱臭触媒充填槽5が設けられ
ている。この脱臭触媒充填815内には例えばチタン、
ケイ素、ジルコニウムからなる3元系後合酸化物が脱臭
触媒として充填されており、オゾナイザ−3を出た循環
空気は脱臭触媒充填槽5で脱臭された後、フィルタ6を
通過してクリーンルーム1へ戻るようになっている。
A flow path switching valve 4 is provided on the downstream side of the ozonizer 3, and a deodorizing catalyst filling tank 5 is further provided on the downstream side thereof. For example, titanium,
A ternary post-composite oxide consisting of silicon and zirconium is filled as a deodorizing catalyst, and the circulating air leaving the ozonizer 3 is deodorized in a deodorizing catalyst filling tank 5 and then passes through a filter 6 to the clean room 1. It's starting to go back.

また、図中7はオゾナイザ−3を通過した循環空気を脱
臭触媒充填槽5をバイパスしてクリーンルーム1へ戻す
バイパス流路、8はクリーンルーム1に流入する循環空
気中のオゾン濃度を検出するオゾン濃度計である。この
オゾン濃度計8の出力は電源周波数制御回路9に入力さ
れ、この電源周波数制御回路9で高圧電源10の電源周
波数を調整することにより、オゾナイザ−3で発生する
オゾン濃度が例えば昼間は2ppm以下に、また夜間は
10ppmに制御されている。
In addition, 7 in the figure is a bypass flow path that returns the circulating air that has passed through the ozonizer 3 to the clean room 1 by bypassing the deodorizing catalyst filling tank 5, and 8 is the ozone concentration for detecting the ozone concentration in the circulating air flowing into the clean room 1. It is a total. The output of this ozone concentration meter 8 is input to a power supply frequency control circuit 9, and by adjusting the power supply frequency of the high voltage power supply 10 with this power supply frequency control circuit 9, the ozone concentration generated by the ozonizer 3 is reduced to 2 ppm or less during the daytime, for example. and at night, it is controlled at 10 ppm.

上記のような構成によると、クリーンルーム1゜内の循
環空気は循環ファン2によりオゾナイザ−3に送られ、
このオゾナイザ−3の放電部すなわちカソード電極21
とアノード電極22との間を通過し、昼間は流路切換弁
4.脱臭触媒充填槽5およびフィルタ6を経てクリ−ン
ルーム1へ戻り、夜間は流路切換゛弁4.バイパス通路
7およびフィルタ6を経てクリーンルーム1へ戻る。こ
のとき、循環空気中の細菌及びカビ類はオゾナイザ−3
内の高電圧な電界強度(例えば24KV、60Hz)に
よって死滅または仮死状態となるので、循環空気の殺菌
効果を高めることができる。なお、酵母を用いてクリー
ンルーム1内の循環空気(30m3)を20回/11r
の頻度でパルス印加時間を6.1secとして実験した
結果、第3図に示すように1時間後には酵母初期濃度の
約98%が死滅していた。
According to the above configuration, the circulating air in the clean room 1° is sent to the ozonizer 3 by the circulation fan 2,
The discharge part of this ozonizer 3, that is, the cathode electrode 21
and the anode electrode 22, and during the day, the flow path switching valve 4. It returns to the clean room 1 via the deodorizing catalyst filling tank 5 and the filter 6, and at night the flow path switching valve 4. It returns to the clean room 1 via the bypass passage 7 and the filter 6. At this time, bacteria and mold in the circulating air are removed by ozonizer 3.
The high-voltage electric field strength (for example, 24 KV, 60 Hz) within the air kills or causes the bacteria to enter a state of suspended animation, thereby increasing the sterilization effect of the circulating air. Additionally, yeast was used to circulate the air (30m3) in clean room 1 20 times/11r.
As a result of an experiment with a frequency of pulse application of 6.1 seconds, as shown in FIG. 3, approximately 98% of the initial yeast concentration was killed after one hour.

また、オゾナイザ・−3を出た循環空気にはオゾンが含
まれているので、脱臭触媒充填槽5に充填されている脱
臭触媒をオゾンによって活性化させることができる。す
なわち、オゾンは臭気成分に対してダクト通過中では反
応時間が短いことから臭気が残存し、この残存臭気成分
は未反応オゾンと共に脱臭触媒充填槽5内を通気する。
Moreover, since the circulating air that has exited the ozonizer-3 contains ozone, the deodorizing catalyst filled in the deodorizing catalyst filling tank 5 can be activated by the ozone. That is, since ozone has a short reaction time compared to odor components while passing through the duct, odor remains, and this remaining odor component is vented through the deodorizing catalyst filling tank 5 together with unreacted ozone.

ここで、オゾンは酸化反応のイニシエー・夕となり、主
として次の2段階で脱臭反応が進行する。
Here, ozone acts as an initiator and an oxidation reaction, and the deodorizing reaction mainly proceeds in the following two steps.

(1)オゾンによる触媒の活性化 0、十触媒(M)−活性状態の触媒(M’ ) +o2
(2)活性化された触媒による悪臭物質の酸化(無臭化
)M′十悪臭物質→悪臭物質の酸化物+触媒(M)すな
わち、脱臭触媒(M)はまずオゾン(o3)と迅速に反
応して活性状態(M′)となる。M′はオゾンに比べて
酸化速度が大きく、悪臭物質を容易に酸化脱臭するとと
もに、それ自身は再び元の状態CM)に戻る。従って、
総括反応は次のようになり、 03+悪臭物質−悪臭物質の酸化物+02これによって
脱臭触媒の脱臭効果が長時間にわたって持続するととも
に、オゾンを含んだ循環空気がクリーンルーム1へ流入
することを防いでいる。
(1) Activation of catalyst by ozone 0, 10 catalyst (M) - catalyst in active state (M') + o2
(2) Oxidation (deodorization) of malodorous substances by activated catalyst M' ten malodorous substances → oxide of malodorous substances + catalyst (M) In other words, the deodorizing catalyst (M) first reacts rapidly with ozone (O3) It becomes active state (M'). M' has a higher oxidation rate than ozone, easily oxidizes and deodorizes malodorous substances, and returns itself to its original state (CM). Therefore,
The general reaction is as follows: 03 + malodorous substance - oxide of malodorous substance + 02 This allows the deodorizing effect of the deodorizing catalyst to continue for a long time, and prevents the circulating air containing ozone from flowing into the clean room 1. There is.

なお、循環空気に硫化メチル(DMS)をlpp■含ま
せた場合の脱臭効果を第4図に示す。同図に示すように
、オゾンを含まない場合の脱臭触媒(ここではチタン、
ケイ素、ジルコニウムからなる3元系後合酸化物を脱臭
触媒として使用)は50H「程度で破゛過してしまうの
に対し、オゾンを2 ppm含む場合の脱臭触媒は10
00Hr程度まで脱臭効果がある。なお、脱臭触媒とし
ては活性炭を使用した場合はオゾンを含んでいても、そ
の効果は小さい。
Incidentally, FIG. 4 shows the deodorizing effect when the circulating air contains lpp■ of methyl sulfide (DMS). As shown in the figure, the deodorizing catalyst (here titanium,
A deodorizing catalyst (using a ternary post-synthesized oxide consisting of silicon and zirconium as a deodorizing catalyst) breaks through at about 50 H, whereas a deodorizing catalyst containing 2 ppm of ozone breaks down at about 10 H.
It has a deodorizing effect up to about 00 hours. Note that when activated carbon is used as a deodorizing catalyst, its effect is small even if it contains ozone.

また、本実施例ではオゾンを含んだ循環空気を、夜間は
流路切換弁4.バイパス流路7およびフ、イルタロを経
てクリーンルーム1へ戻すようにしたので、クリーンル
ーム1の内壁や内部の機器等に付着している細菌及びカ
ビ類をオゾンによって殺菌することができる。すなわち
、オゾンを含んだ循環空気がクリーンルーム1内に流入
すると、クリーンルーム1の内壁や内部の機器等に付着
している細菌、カビ類等の細胞壁にオゾンが吸着し、細
胞内に取込まれてタンパク合成ヌクレオチドあるいは核
酸合成、細胞壁合成、細胞膜機能力源代謝などの細胞の
生命維持に必要な代謝機構を破壊してしまうため、クリ
ーンルーム1内の殺菌効果を高めることができる。なお
、クリーンルーム1内の殺菌効果を確認するため、シャ
ーレ中に胞子懸濁液(1,5〜5.8 XIO3個/1
)を満たしたものをクリーンルーム1の床下中央に置き
、オゾンを10ppm含む循環空気を1455 ml/
 sinの流速でクリーンルーム1内に流して生存胞子
数の経時変化を実験した結果、第5図に示すように生存
率が1時間で0.01%まで低下した。
In addition, in this embodiment, circulating air containing ozone is circulated through the flow path switching valve 4 at night. Since the ozone is returned to the clean room 1 through the bypass flow path 7 and the air filter, bacteria and molds adhering to the inner walls and internal equipment of the clean room 1 can be sterilized by ozone. In other words, when circulating air containing ozone flows into the clean room 1, ozone is adsorbed to the cell walls of bacteria, mold, etc. attached to the inner walls of the clean room 1 and internal equipment, and is taken into the cells. The sterilization effect in the clean room 1 can be enhanced because the metabolic mechanisms necessary for maintaining cell life, such as protein synthesis nucleotide or nucleic acid synthesis, cell wall synthesis, and cell membrane function power source metabolism, are destroyed. In addition, in order to confirm the sterilization effect in clean room 1, a spore suspension (3 1.5 to 5.8 XIO/1
) was placed in the center under the floor of clean room 1, and circulated air containing 10 ppm of ozone was pumped in at 1455 ml/
As a result of an experiment on the change in the number of viable spores over time by flowing the spores into the clean room 1 at a flow rate of sin, the survival rate decreased to 0.01% in 1 hour, as shown in FIG.

このように、クリーンルーム1の循環空気経路にオゾナ
イザ−3を設置するとともに、その下流側に流路切換弁
4および脱臭触媒充填槽5を設置し、かつ前記オゾナイ
ザ−3を通過した循環空気を前記脱臭触媒槽5をバイパ
スしてクリーンルーム1−へ戻すバイパス流路7を設け
、昼間はオゾナイザ−3を通過した循環空気を流路切換
弁4.脱臭触媒充填槽5およびフィルタ6を経てクリー
ンルーム1へ戻し、夜間はオゾナイザ−3を通過した循
環空気を流路切換弁4.バイパス流路7およびフィルタ
6を経てクリーンルーム1へ戻すことにより、クリーン
ルーム1内および循環空気そのものの殺菌効果を高める
ことができるとともに、脱臭触媒の脱臭効果を長時間に
わたって持続させることができる。
In this way, the ozonizer 3 is installed in the circulating air path of the clean room 1, and the flow path switching valve 4 and the deodorizing catalyst filling tank 5 are installed on the downstream side thereof, and the circulating air that has passed through the ozonizer 3 is A bypass passage 7 is provided to bypass the deodorizing catalyst tank 5 and return to the clean room 1-, and during the day, the circulating air that has passed through the ozonizer 3 is transferred to the passage switching valve 4. The air is returned to the clean room 1 through the deodorizing catalyst filling tank 5 and the filter 6, and at night the circulating air that has passed through the ozonizer 3 is passed through the flow path switching valve 4. By returning the air to the clean room 1 via the bypass channel 7 and the filter 6, the sterilization effect in the clean room 1 and the circulating air itself can be enhanced, and the deodorizing effect of the deodorizing catalyst can be sustained for a long time.

なお、本発明は上記実施例に限定されるものではない。Note that the present invention is not limited to the above embodiments.

例えば、上記実施例では脱臭触媒とじてチタン、ケイ素
、ジルコニウムからなる3元系後合酸化物を使用したが
、活性炭等を使用してもよい。また、上記実施例ではオ
ゾナイザ−3を通過した循環空気を夜間は流路切換弁4
.バイパス流路7およびフィルタ6を経てクリーンルー
ム1へ戻すようにしたが、流路切換弁4.バイパス流路
7を経てクリーンルーム1へ戻すようにしてもよい。さ
らに、本発明の要旨を逸脱しない範囲で種々の設計的変
更が可能であることは説明するまでもない。
For example, in the above embodiments, a ternary post-composite compound of titanium, silicon, and zirconium was used as the deodorizing catalyst, but activated carbon or the like may also be used. In addition, in the above embodiment, the circulating air that has passed through the ozonizer 3 is transferred to the flow path switching valve 4 at night.
.. Although the flow is returned to the clean room 1 through the bypass flow path 7 and the filter 6, the flow path switching valve 4. It may also be returned to the clean room 1 via the bypass channel 7. Furthermore, it goes without saying that various design changes can be made without departing from the gist of the present invention.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、クリーンルーム内
および循環空気そのものの殺菌効果を高めることができ
、かつ脱臭触媒の脱臭効果が長時間にわたって持続する
循環空気殺菌・除臭システムを提供できる。
As explained above, according to the present invention, it is possible to provide a circulating air sterilization/deodorization system that can enhance the sterilizing effect in a clean room and the circulating air itself, and in which the deodorizing effect of the deodorizing catalyst continues for a long time.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す循環空気殺菌番除臭シ
ステムの概略構成図、第2図はオゾナイザ−の電極構造
を示す図、第3図はオゾナイザ−の電界強度と殺菌効果
の関係を示す線図、第4図は脱臭触媒の脱臭効果を示す
線図、第5図はオゾンによるクリーンルーム内の殺菌効
果を示す線図である。 1・・・クリーンルーム、2・・・循環ファン、3・・
・オゾナイザ−14・・・流路切換弁、5・・・脱臭触
媒充填槽、6・・・フィルタ、7・・・バイパス流路。 出願人代理人 弁理士 鈴江武彦 第4図
Fig. 1 is a schematic configuration diagram of a circulating air sterilization and deodorization system showing an embodiment of the present invention, Fig. 2 is a diagram showing the electrode structure of the ozonizer, and Fig. 3 is a diagram showing the electric field strength and sterilization effect of the ozonizer. FIG. 4 is a diagram showing the relationship, FIG. 4 is a diagram showing the deodorizing effect of the deodorizing catalyst, and FIG. 5 is a diagram showing the sterilizing effect of ozone in the clean room. 1...Clean room, 2...Circulation fan, 3...
- Ozonizer - 14... flow path switching valve, 5... deodorizing catalyst filling tank, 6... filter, 7... bypass flow path. Applicant's agent Patent attorney Takehiko Suzue Figure 4

Claims (1)

【特許請求の範囲】[Claims] クリーンルームの循環空気経路にオゾナイザーを設置す
るとともに、その下流側に流路切換弁および脱臭触媒充
填槽を設置し、かつ前記オゾナイザーを通過した循環空
気を前記脱臭触媒充填槽をバイパスしてクリーンルーム
へ戻すバイパス流路を設けたことを特徴とする循環空気
殺菌・除臭システム。
An ozonizer is installed in the circulating air path of the clean room, and a flow path switching valve and a deodorizing catalyst filling tank are installed downstream of the ozonizer, and the circulating air that has passed through the ozonizer bypasses the deodorizing catalyst filling tank and is returned to the clean room. A circulating air sterilization and deodorization system featuring a bypass flow path.
JP63099035A 1988-04-21 1988-04-21 Circulating air sterilization / deodorization system Expired - Fee Related JP2538985B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63099035A JP2538985B2 (en) 1988-04-21 1988-04-21 Circulating air sterilization / deodorization system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63099035A JP2538985B2 (en) 1988-04-21 1988-04-21 Circulating air sterilization / deodorization system

Publications (2)

Publication Number Publication Date
JPH01269846A true JPH01269846A (en) 1989-10-27
JP2538985B2 JP2538985B2 (en) 1996-10-02

Family

ID=14236150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63099035A Expired - Fee Related JP2538985B2 (en) 1988-04-21 1988-04-21 Circulating air sterilization / deodorization system

Country Status (1)

Country Link
JP (1) JP2538985B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2367016A (en) * 2000-08-04 2002-03-27 Microflow Ltd Apparatus for removing sterilant from a sterilant containing atmosphere
JP2003535665A (en) * 2000-06-20 2003-12-02 アドバンスト・エレクトロン・ビームズ・インコーポレーテッド Air sterilization system
JP2004504869A (en) * 2000-07-11 2004-02-19 マイクロジェニックス テクノロジーズ エルティーディー Air cleaning method and apparatus
US20120129442A1 (en) * 2010-11-19 2012-05-24 Hon Hai Precision Industry Co., Ltd. Container data center
CN112524730A (en) * 2020-12-17 2021-03-19 深圳市政强技术有限公司 Pipeline type fresh air deodorization and sterilization equipment and use method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003535665A (en) * 2000-06-20 2003-12-02 アドバンスト・エレクトロン・ビームズ・インコーポレーテッド Air sterilization system
JP2004504869A (en) * 2000-07-11 2004-02-19 マイクロジェニックス テクノロジーズ エルティーディー Air cleaning method and apparatus
GB2367016A (en) * 2000-08-04 2002-03-27 Microflow Ltd Apparatus for removing sterilant from a sterilant containing atmosphere
US7132083B2 (en) 2000-08-04 2006-11-07 Bioquell Uk Limited Apparatus for removing sterilant from a sterilant containing atmosphere
US20120129442A1 (en) * 2010-11-19 2012-05-24 Hon Hai Precision Industry Co., Ltd. Container data center
CN112524730A (en) * 2020-12-17 2021-03-19 深圳市政强技术有限公司 Pipeline type fresh air deodorization and sterilization equipment and use method thereof

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