JPH01258219A - Magnetic disk - Google Patents
Magnetic diskInfo
- Publication number
- JPH01258219A JPH01258219A JP8632288A JP8632288A JPH01258219A JP H01258219 A JPH01258219 A JP H01258219A JP 8632288 A JP8632288 A JP 8632288A JP 8632288 A JP8632288 A JP 8632288A JP H01258219 A JPH01258219 A JP H01258219A
- Authority
- JP
- Japan
- Prior art keywords
- hardness
- head slider
- magnetic head
- magnetic
- magnetic disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 112
- 230000001681 protective effect Effects 0.000 claims abstract description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 10
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 6
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 6
- 239000000463 material Substances 0.000 abstract description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 6
- 239000001257 hydrogen Substances 0.000 abstract description 6
- 229910045601 alloy Inorganic materials 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 2
- 229910018104 Ni-P Inorganic materials 0.000 abstract 1
- 229910018536 Ni—P Inorganic materials 0.000 abstract 1
- 229910006297 γ-Fe2O3 Inorganic materials 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
- 229910001096 P alloy Inorganic materials 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
この発明は、磁気ディスク装置に搭載される磁気ディス
クに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic disk mounted in a magnetic disk device.
[従来の技術〕
コンピュータの外部記憶装置の−っである固定磁気ディ
スク装置は主に磁気ディスクと磁気ヘッドスライダで構
成されているが、第5図にその概念図を示す、これは、
例えば文献(柳沢雅広「めっき形磁気ディスク媒体のト
ライボロジ」日本応用磁気?会誌、VOL、11 、
NOl 、 1987) G:m詳シく示されている0
図において、(5)は基板に形成された磁気記録媒体層
に情報が記録される磁気ディスク、(6)は磁気ディス
ク(6)に情報を書き込んだり読み出したりする磁気ヘ
ッドスライダ、 (7)は磁気ヘッドスライダ(6)
を磁気ディスク(5)に押し付けるサスペンション、(
8)は磁気ディスク (5)を図中矢印方向に回転させ
るスピンドルであるこのように構成された磁気ディスク
装置において、磁気ディスク (5)に情報を書き込ん
だり読み出したりする場合は、磁気ディスク (5)を
矢印方向に高速回転(例えば3600rpm )させる
、この回転により生じる空気流で、磁気ヘッドスライダ
(6)二ま空気軸受の原理で、磁気ディスク (5)表
面よりサブミクロンの隙間を保って浮上する。すなわち
、サスベンジ1ン (7)の押付力と空気流の押り力が
釣り合って、磁気ヘッドスライダ(6)は安定浮上する
。[Prior Art] A fixed magnetic disk device, which serves as an external storage device for a computer, is mainly composed of a magnetic disk and a magnetic head slider, and a conceptual diagram thereof is shown in FIG.
For example, literature (Masahiro Yanagisawa, “Tribology of plated magnetic disk media,” Journal of the Japan Society for Applied Magnetics, VOL, 11,
NOl, 1987) G:m 0 as shown in detail
In the figure, (5) is a magnetic disk on which information is recorded on a magnetic recording medium layer formed on a substrate, (6) is a magnetic head slider that writes information to and reads information from the magnetic disk (6), and (7) is a magnetic head slider that writes information to and reads information from the magnetic disk (6). Magnetic head slider (6)
a suspension that presses the magnetic disk (5), (
8) is a spindle that rotates the magnetic disk (5) in the direction of the arrow in the figure. In a magnetic disk device configured in this way, when writing or reading information to or from the magnetic disk (5), the magnetic disk (5) is rotated in the direction of the arrow in the figure. ) is rotated at high speed (e.g. 3600 rpm) in the direction of the arrow, and the airflow generated by this rotation causes the magnetic head slider (6) to float above the surface of the magnetic disk (5) with a submicron gap, using the principle of double air bearings. do. That is, the pressing force of the suspension valve 1 (7) and the pressing force of the air flow are balanced, and the magnetic head slider (6) flies stably.
一方、磁気ディスク装♂tを使用しないときは、スピン
ドル(8)の回転は浄上し、磁気ヘッドスライダ(6)
はサスペンション (7)により押し付けられて磁気デ
ィスク (5)上に接触した状態となる。On the other hand, when the magnetic disk drive ♂t is not used, the rotation of the spindle (8) is stopped and the magnetic head slider (6)
is pressed by the suspension (7) and comes into contact with the magnetic disk (5).
第6図、第7図は第5図における磁気ヘッドスライダ付
近の拡大図であり、第6図は磁気ディスク装置の稼動時
(磁気ディスクは回転している)、第7図は磁気ディス
ク装置の停止E時(磁気ディスクは静止している)をそ
れぞれ示す。6 and 7 are enlarged views of the vicinity of the magnetic head slider in FIG. 5. FIG. 6 shows the magnetic disk device when it is in operation (the magnetic disk is rotating), and FIG. Each shows the time of stop E (the magnetic disk is stationary).
磁気ディスク装置は以−ヒのような機構を何するため、
磁気ディスクの始動時には磁気ヘッドスライダは磁気デ
ィスク表面をこすりながら浮上する。同様に停止時には
こすりながら着陸する。この動作をコンタクト・スター
ト・ストップ(CSS)という。What is the purpose of the magnetic disk device as described below?
When the magnetic disk is started, the magnetic head slider flies while rubbing the surface of the magnetic disk. Similarly, when coming to a stop, the aircraft lands with a scrape. This operation is called contact start/stop (CSS).
[発明が解決しようとする課題]
磁気ディスク装置にはこのような磁気ディスクと磁気へ
・戸トスライダのこずれがあるため、磁気ディスク、磁
気ヘッドスライダともにしだいに摩耗してくる。この摩
耗が磁気ディスク装置における最大の問題であった0例
えば、磁気ディスクが摩耗すると記録情報が消失する。[Problems to be Solved by the Invention] Since the magnetic disk drive has such a misalignment between the magnetic disk and the magnetic head slider, both the magnetic disk and the magnetic head slider gradually wear out. This wear is the biggest problem in magnetic disk drives. For example, when a magnetic disk wears out, recorded information is lost.
また、磁気ディスクの表面がf滑になり磁気ヘッドスラ
イダの吸容の原因となる。一方、磁気ヘッドスライダが
摩耗すると2記録用コアの損傷を誘引し記録・再生がで
きなくなる。また磁気ディスク、磁気へ9トスライダの
何れが摩耗しても、その摩耗粉はヘッドクラッシュの原
因となる。Furthermore, the surface of the magnetic disk becomes slippery, which causes absorption of the magnetic head slider. On the other hand, if the magnetic head slider is worn out, the two recording cores will be damaged, making recording and reproduction impossible. Further, even if either the magnetic disk or the magnetic slider wears out, the abrasion powder causes a head crash.
この磁気記録媒体層の傷つきや摩耗を防止するために、
従来よりS i Oを保護膜(特開昭62− In92
22号広報)やカーボン保護膜などが使用されてきた。In order to prevent scratches and abrasion of this magnetic recording medium layer,
Conventionally, SiO was used as a protective film (Japanese Unexamined Patent Publication No. 1983-1992-In92
22 Public Relations) and carbon protective films have been used.
しかし、これらの保護膜の材質が硬すぎると、かえって
磁気ヘッドスライダを傷付け、その摩耗粉が磁気ヘッド
スライダおよび磁気ディスクをさらに傷付けて摩耗を促
進させるという問題点があった。However, if the material of these protective films is too hard, there is a problem in that the magnetic head slider is damaged, and the abrasion powder further damages the magnetic head slider and the magnetic disk, accelerating wear.
この発明は上記のような問題点を解消するためになされ
たもので、磁気ディスクの磁気記録媒体層の傷つきを防
lLするとともに磁気ヘッドスライダの摩耗をも防止す
ることができる磁気ディスクを得ることを目的とする。This invention was made to solve the above-mentioned problems, and it is an object of the present invention to obtain a magnetic disk that can prevent damage to the magnetic recording medium layer of the magnetic disk and also prevent wear of the magnetic head slider. With the goal.
[課題を解決するための手段]
この発明に係る磁気ディスクは、基板に形成された磁気
記録媒体層を保護する保護膜の硬度を磁気ヘッドスライ
ダの硬度±10%の硬度範囲とするものである。[Means for Solving the Problems] A magnetic disk according to the present invention has a hardness of a protective film that protects a magnetic recording medium layer formed on a substrate within a hardness range of ±10% of the hardness of a magnetic head slider. .
[作用]
この発明における保護膜は、その硬度が磁気ヘッドスラ
イダの硬度±10%の硬度範囲というように保護膜およ
び磁気ヘッドスライダの硬度が非常に似通っているので
、磁気ディスク、磁気ヘッドスライダ両方の傷つきや摩
耗を押えることができる。[Function] The protective film of the present invention has a hardness that is within ±10% of the hardness of the magnetic head slider, and the hardness of the protective film and the magnetic head slider is very similar, so it is suitable for both magnetic disks and magnetic head sliders. can prevent scratches and wear.
特にダイヤモンド状炭素膜は、その水素濃度をコントロ
ールすることにより硬度のコントロールが容易に行なえ
る。In particular, the hardness of a diamond-like carbon film can be easily controlled by controlling its hydrogen concentration.
また、酸化ジルコニウムを主成分とする膜も、Als
Os 、SiC,CeO,MgOなどを添加することに
より硬度のコントロールが容易に行なえる。In addition, films mainly composed of zirconium oxide are also
Hardness can be easily controlled by adding Os, SiC, CeO, MgO, etc.
[実施例]
以ド、この発明の一実施例を図について説明する。第1
図において、(11は基板であり、基材(Ia)上に下
地硬化III (lblを設けて構成される。(2)は
磁気記録媒体層、(3)は保護膜である。[Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. 1st
In the figure, (11 is a substrate, which is constructed by providing a base hardening III (lbl) on a base material (Ia). (2) is a magnetic recording medium layer, and (3) is a protective film.
一方、現在、磁気ヘッドスライダとして用いられる材料
は、表に示すように、硬度により大きく一つのグループ
に分けられる。1−、)はAltos、SiC,i’i
Cなとの緻密・高硬度のセラミックスを主成分とする高
硬度スライダ材料であり、もう1つは酸化鉄(フェライ
ト)、ジルコニア。On the other hand, materials currently used for magnetic head sliders are roughly divided into one group based on their hardness, as shown in the table. 1-,) is Altos, SiC, i'i
It is a high-hardness slider material whose main component is dense and hard ceramics such as carbon, and the other materials are iron oxide (ferrite) and zirconia.
T i O*などの遷移元素の酸化物を主成分とする高
硬度スライダ材料である。高硬度スライダ材料のビッカ
ース硬度+(vは1450〜2200.特に1800付
近に集まり、低硬度スライダ材料のビッカース硬度Hv
は650〜+350、特に1000付近に集まっている
。This is a high hardness slider material whose main component is an oxide of a transition element such as T i O*. Vickers hardness of high hardness slider material
are concentrated in the range of 650 to +350, especially around 1000.
例えば、現在広く用いられているA!20.−1” i
Clのf4nA磁気ヘッドスライダのビッカース硬度
Hvは2000である。この磁気ヘッドスライダに適す
る磁気ディスクの構成の一例を示すと、店&(11はA
l−Mg合金塙材(la)−t−にめっきによりN1−
P合金(Ib)を厚さ15μm程度設けて表面を硬化処
理したものであり、磁気記録媒体層(2)はγ−Few
Osから成るスパッタ膜である。For example, the currently widely used A! 20. -1”i
The Vickers hardness Hv of the f4nA magnetic head slider made of Cl is 2000. An example of the configuration of a magnetic disk suitable for this magnetic head slider is shown below.
N1- by plating on l-Mg alloy wall material (la)-t-
The magnetic recording medium layer (2) is made of P alloy (Ib) with a thickness of about 15 μm and hardened on the surface.
This is a sputtered film made of Os.
保護膜(3)は例えば字行平・仮型のプラズマCV D
により成膜されたダイヤモンド状炭素膜である。The protective film (3) is, for example, a type of plasma CVD
This is a diamond-like carbon film formed by.
ダイヤモンド状炭素膜の硬度は第2図に示すように、水
素含有頃と相関があり、このダイヤモンド状炭素膜中の
水素含有jdを左右する要因は、CVD中の基板温度、
CVD圧力、水素ガスとCH3、C1H,などの炭化水
素ガスの混合比および流量、バイアス電圧などである。As shown in Figure 2, the hardness of the diamond-like carbon film is correlated with the hydrogen content, and the factors that influence the hydrogen content jd in the diamond-like carbon film are the substrate temperature during CVD,
These include the CVD pressure, the mixture ratio and flow rate of hydrogen gas and hydrocarbon gas such as CH3, C1H, and bias voltage.
一般に、基板温度を上げ、CVD圧力を下げ、I’l
mガスの割合を上げ、バイアス電圧を下げるほどビッカ
ース硬度は高(なる。なお、ガスの滝川は装置の容看に
より異なる。今回の成膜条件は、基板温度200℃、C
〜’ l)圧力10’rorr、 Ht : CHs
=99 : 1、バイアス電圧1.2KVである。膜厚
は5()〇八であり、ラマン分光分析によりダイヤモン
ド状炭素膜であることが確認された。水素3自には4X
IO”原子個数/ c c 、ビッカース硬度Hvは2
200であった。[重用する磁気ヘッドスライダのビッ
カース硬度Hvが200口であるので、保J膜の硬度は
磁気ヘッドスライダの硬度+10%となっている。In general, increase the substrate temperature, decrease the CVD pressure, and
The Vickers hardness increases as the ratio of m gas is increased and the bias voltage is lowered. Note that the gas Takigawa differs depending on the appearance of the equipment.
~' l) Pressure 10'rorr, Ht: CHs
=99:1, bias voltage 1.2KV. The film thickness was 5()08, and it was confirmed by Raman spectroscopy that it was a diamond-like carbon film. 4X for hydrogen 3
IO” number of atoms/cc, Vickers hardness Hv is 2
It was 200. [Since the Vickers hardness Hv of the magnetic head slider to be used is 200, the hardness of the J-retaining film is the hardness of the magnetic head slider +10%.
このM1気ディスクと磁気ヘッドスライダを用いてコン
タクト・スタート・ストップ試験を2万回?−jなった
ところ、ディスク表面にも磁気ヘッドスライダにも傷つ
きが生じず、摩耗もほとんど確認されなかった。−力、
上記磁気ディスクにたいしてMn−Zn−Forr i
lee (Hv=65[1)より成る磁気ヘッドスラ
イダを用いて同様にコンタクト・スタート・ストップ試
験を2H回行なったところ、第3図に示す磁気ヘッドス
ライダの各部A〜■)の様子を参考写真A−Dで示すよ
うに、各rP動而面ひどく摩耗し、粒界が見えている。20,000 contact start/stop tests using this M1 disk and magnetic head slider? -j, no scratches occurred on the disk surface or the magnetic head slider, and almost no wear was observed. -force,
Mn-Zn-Forr i for the above magnetic disk
When a contact start/stop test was similarly conducted 2H times using a magnetic head slider made of lee (Hv=65 [1), the state of each part A to ■) of the magnetic head slider shown in Fig. 3 was taken as a reference photograph. As shown in A-D, each rP surface was severely worn and grain boundaries were visible.
なお、参考写f4 a Ndはそれぞれコンタクト・ス
タート・ストップ前の上記磁気ヘッドスライダA〜■)
部の様子を示す、第3図において、(6a)はレール、
(6blはテーパ部である。 なお、上記実施例では
保護膜(3)としてダイヤモンド状炭素膜をプラズマC
VDで形成した場合について説明したが、形成方法はこ
れに限るものではなく、例えばスパッタや蒸着を水素を
導入して行なってもよい。In addition, reference photos f4 a and Nd are the above magnetic head sliders A to ■ before contact, start, and stop, respectively)
In Fig. 3, which shows the state of the section, (6a) is the rail,
(6bl is a tapered part. In the above example, a diamond-like carbon film is used as a protective film (3) by plasma C.
Although the case of forming by VD has been described, the forming method is not limited to this, and for example, sputtering or vapor deposition may be performed by introducing hydrogen.
次に、保護膜(3) として酸化ジルコニウムを1成分
とする膜を用いる場合について説明する。酸化ジルコニ
ウムを主成分とする膜は添加物によって硬度を調節でき
ることが知られており、代表的な添加物は、Ym Os
、 A It Oa 、 S iC,CeO,MgO
なとである。第4図に文献(ジャーナル・オブ・マテリ
アルサイエンス、22、+987.P2S5)に示され
た添加物含有量と硬度の関係を示す、基板(1)および
磁気記録媒体層(2)はL記実施例と同じものを用いた
。酸化ジルコニウムを主1+−Q 分とする膜は、純酸
化ジルコニアにアルミナを20%混合し、スパッタによ
り形成した。基板温度は200℃、スパッタパワーは1
0mW、lli厚は500八である。硬度はHv =
201]0である。この磁気ディスクと上記実施例で用
いたH v = 2000の磁気ヘッドスライダを用い
てコンタクト・スタート・ストップ試験を2万回行なっ
たところ、ディスク表面にも磁気ヘッドスライダにも傷
つきが生じず、摩耗もほとんど確認されなかった。一方
、量、記磁気ディスクにたいしてMn−Zn−Fer
r i Le (Hv=650 )より成る磁気ヘッド
スライダを用いて同様にコンタクト・スタート・ストッ
プ試験を2万回行なったところ、磁気ヘッドスライダの
浮動面はひどく摩耗した。 なお、上記’X 絶倒では
いずれも磁気ヘッドスライダとして硬度が2000のA
I t Os −T i C製の高硬度スライダを用
いた場合について説明したがこれに限るものではなく、
他の高硬度スライダや低硬度スライダを用いた場合にも
、保護膜(3)としてその硬度が磁気ヘッドスライダの
硬度±lO%と近いのものを用いれば、E記実施例と同
様に磁気ディスク、磁気ヘッドスライダともに摩耗しに
くい。Next, a case will be described in which a film containing zirconium oxide as one component is used as the protective film (3). It is known that the hardness of films mainly composed of zirconium oxide can be adjusted by adding additives, and a typical additive is YmOs.
, A It Oa , SiC, CeO, MgO
It is Nato. Figure 4 shows the relationship between additive content and hardness shown in the literature (Journal of Materials Science, 22, +987.P2S5). The same one as in the example was used. The film mainly composed of zirconium oxide in 1+-Q was formed by sputtering a mixture of pure zirconia oxide and 20% alumina. Substrate temperature is 200℃, sputter power is 1
0 mW, lli thickness is 5008. Hardness is Hv =
201]0. When a contact start/stop test was performed 20,000 times using this magnetic disk and the magnetic head slider with Hv = 2000 used in the above example, there was no damage to the disk surface or the magnetic head slider, and no wear was observed. was hardly confirmed. On the other hand, for the amount and recording magnetic disk, Mn-Zn-Fer
When a similar contact start/stop test was conducted 20,000 times using a magnetic head slider made of r i Le (Hv=650), the flying surface of the magnetic head slider was severely worn. In addition, in the above '
Although the case where a high hardness slider made of I t Os -T i C is used has been described, the present invention is not limited to this.
Even when other high-hardness sliders or low-hardness sliders are used, if a protective film (3) whose hardness is close to the hardness of the magnetic head slider ±10% is used, the magnetic disk can be Both the magnetic head slider and the magnetic head slider are less likely to wear out.
また、磁気ディスクの構成および材料は上記実施例に限
定されるものではなく、例えば保a膜(3)のうえに潤
滑剤が存在していてもよい。Further, the configuration and materials of the magnetic disk are not limited to those in the above embodiments, and for example, a lubricant may be present on the a-retaining film (3).
[発明の効果]
以上のように、この発明によれば、基板に形成された磁
気記録媒体層を保護する保護膜の硬度を磁気ヘッドスラ
イダの硬度±10%の硬度範囲としたので、コンタクト
・スタート・ストップ動作中に磁気記録媒体層や磁気ヘ
ッドスライダが傷ついたり摩耗したりするのを防+tで
きる効果がある[Effects of the Invention] As described above, according to the present invention, the hardness of the protective film that protects the magnetic recording medium layer formed on the substrate is within the hardness range of ±10% of the hardness of the magnetic head slider. This has the effect of preventing the magnetic recording medium layer and magnetic head slider from being damaged or worn out during start/stop operations.
第1図はこの発明の一実施例による磁気ディスクを示す
断面図、第2図はこの発明の一実施例に係るダイヤモン
ド状炭素膜の水素含有頓と硬度の関係を示す特性図、第
3図は磁気ヘッドスライダを示す平面図、第4図はこの
発明の他の実施例に係る酸化ジルコニウムを主成分とす
る膜の添加物含有看と硬度の関係を示す特性図、′lS
5図は一般的な磁気ディスク装置を示す概念図、第6図
、第7図はそれぞれ第5図の装置の稼動状態および静止
状態における磁気ヘッドスライダの位置を拡大してを示
す概念図である。
図において、(1)は基板、(2)は磁気記録媒体層、
(3)は保護膜、(5)は磁気ディスク、(6)は磁気
ヘッドスライダである。
なお、3図中同一符号は同一または相当部分を示す。FIG. 1 is a cross-sectional view showing a magnetic disk according to an embodiment of the present invention, FIG. 2 is a characteristic diagram showing the relationship between hydrogen content and hardness of a diamond-like carbon film according to an embodiment of the present invention, and FIG. 4 is a plan view showing a magnetic head slider, and FIG. 4 is a characteristic diagram showing the relationship between additive content and hardness of a film mainly composed of zirconium oxide according to another embodiment of the present invention.
FIG. 5 is a conceptual diagram showing a general magnetic disk device, and FIGS. 6 and 7 are conceptual diagrams showing enlarged positions of the magnetic head slider in the operating state and the stationary state of the device shown in FIG. 5, respectively. . In the figure, (1) is a substrate, (2) is a magnetic recording medium layer,
(3) is a protective film, (5) is a magnetic disk, and (6) is a magnetic head slider. Note that the same reference numerals in the three figures indicate the same or corresponding parts.
Claims (2)
より情報の記録・再生を行なうコンタクト・スタート・
ストップ方式の磁気ディスクにおいて、基板に形成され
た磁気記録媒体層を保護する保護膜の硬度を上記磁気ヘ
ッドスライダの硬度±10%の硬度範囲とすることを特
徴とする磁気ディスク。(1) Contact start/start system that records and reproduces information using a magnetic head slider that comes into contact when starting and when stationary.
1. A stop-type magnetic disk, characterized in that the hardness of a protective film for protecting a magnetic recording medium layer formed on a substrate is within a hardness range of ±10% of the hardness of the magnetic head slider.
範囲第1項記載の磁気ディスク。(3)保護膜は酸化ジ
ルコニウムを主成分とする膜である特許請求の範囲第1
項記載の磁気ディスク。(2) The magnetic disk according to claim 1, wherein the protective film is a diamond-like carbon film. (3) The protective film is a film mainly composed of zirconium oxide.
Magnetic disk described in section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8632288A JPH01258219A (en) | 1988-04-08 | 1988-04-08 | Magnetic disk |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8632288A JPH01258219A (en) | 1988-04-08 | 1988-04-08 | Magnetic disk |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01258219A true JPH01258219A (en) | 1989-10-16 |
Family
ID=13883600
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8632288A Pending JPH01258219A (en) | 1988-04-08 | 1988-04-08 | Magnetic disk |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01258219A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0595564A2 (en) * | 1992-10-29 | 1994-05-04 | TDK Corporation | Magnetic recording medium |
JPH07320435A (en) * | 1994-03-31 | 1995-12-08 | Nec Corp | Magnetic head assembly and magnetic disk device formed by using the same |
US6132875A (en) * | 1993-09-12 | 2000-10-17 | Fujitsu Limited | Magnetic recording medium and magnetic head having carbon protective layers |
US6671129B2 (en) * | 1998-06-09 | 2003-12-30 | Nec Corporation | Contact type magnetic disc apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61120342A (en) * | 1984-11-16 | 1986-06-07 | Toshiba Corp | Magnetic recording medium |
-
1988
- 1988-04-08 JP JP8632288A patent/JPH01258219A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61120342A (en) * | 1984-11-16 | 1986-06-07 | Toshiba Corp | Magnetic recording medium |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0595564A2 (en) * | 1992-10-29 | 1994-05-04 | TDK Corporation | Magnetic recording medium |
EP0595564A3 (en) * | 1992-10-29 | 1994-06-15 | Tdk Corp | Magnetic recording medium |
US6132875A (en) * | 1993-09-12 | 2000-10-17 | Fujitsu Limited | Magnetic recording medium and magnetic head having carbon protective layers |
JPH07320435A (en) * | 1994-03-31 | 1995-12-08 | Nec Corp | Magnetic head assembly and magnetic disk device formed by using the same |
US6671129B2 (en) * | 1998-06-09 | 2003-12-30 | Nec Corporation | Contact type magnetic disc apparatus |
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