JPH01255682A - Method for detecting breakage of ion exchange membrane - Google Patents

Method for detecting breakage of ion exchange membrane

Info

Publication number
JPH01255682A
JPH01255682A JP8390488A JP8390488A JPH01255682A JP H01255682 A JPH01255682 A JP H01255682A JP 8390488 A JP8390488 A JP 8390488A JP 8390488 A JP8390488 A JP 8390488A JP H01255682 A JPH01255682 A JP H01255682A
Authority
JP
Japan
Prior art keywords
exchange membrane
ion exchange
pressure
chamber
electrolytic cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8390488A
Other languages
Japanese (ja)
Inventor
Takehiko Takagi
岳彦 高木
Keisuke Watanabe
渡辺 佳資
Shigeo Sugimoto
杉本 茂夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP8390488A priority Critical patent/JPH01255682A/en
Publication of JPH01255682A publication Critical patent/JPH01255682A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)

Abstract

PURPOSE:To easily and safely detect the generation of abnormality such as pinholes of an ion exchange membrane by holding either polar chamber of a cathodic chamber and an anodic chamber in a reduced-pressure state and measuring the change in pressure of the other polar chamber. CONSTITUTION:An electrolytic cell 1 is comparted into an anodic chamber 3 and a cathodic chamber 4 with an ion exchange membrane 2. A decompression device is fitted to either of the aperture nozzles 7-10 and either of the counter electrode chambers having the nozzles fitted to the device is fitted with a pressure measuring machine such as a manometer as the nozzle for pressure measurement. The other aperture nozzles are closed with a rubber stopper, etc. The electrolytic cell 1 is made to a vacant state wherein liquid has been drawn out and the inside of one polar chamber is decompressed at about 10-500mm H2O degree of vacuum by actuating the decompression device. When breakage such as pinholes exists in the ion exchange membrane 2, pressure is leaked through the breakage part and the pressure of the polar chamber of a measurement side is lowered.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、イオン交換膜電解槽に装着された・イオン交
換膜の破損検出方法に関する0、更に詳しくは、イオン
交換膜電解槽の組立時または操業時におけるイオン交換
膜のピンホール等異常の発生を、電解槽に装着したまま
簡便、且つ、安全に検出するイオン交換膜の破損検出方
法に関するものである。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a method for detecting damage to an ion exchange membrane installed in an ion exchange membrane electrolytic cell, and more specifically, to a method for detecting damage to an ion exchange membrane installed in an ion exchange membrane electrolytic cell. Alternatively, the present invention relates to a method for detecting damage to an ion exchange membrane that easily and safely detects the occurrence of abnormalities such as pinholes in the ion exchange membrane during operation while the membrane is attached to an electrolytic cell.

〔従来の技術] 従来からハロゲン化アルカリ水溶液の電解法としては、
水銀法電解で得られる水酸化アルカリ溶液の純度が極め
て良好なことから、水銀法電解が主流であつたが、近年
起こった環境上の問題から、水銀法電解は隔膜電解法ま
たはイオン交換膜電解法に変更され始めた。中でも高純
度の水酸化アルカリ溶液が得られるという観点から、イ
オン交換膜電解法が主流となりつつあり、更にエネルギ
ー節減可能ということから、隔膜電解法からもイオン交
換膜電解法に転換されている。
[Conventional technology] Conventionally, electrolysis methods for aqueous halogenated alkali solutions include:
Mercury electrolysis has been the mainstream because the purity of the alkaline hydroxide solution obtained by mercury electrolysis is extremely good, but due to environmental problems that have arisen in recent years, mercury electrolysis has been replaced by diaphragm electrolysis or ion exchange membrane electrolysis. The law began to change. Among them, the ion-exchange membrane electrolysis method is becoming mainstream from the viewpoint of obtaining a high-purity alkaline hydroxide solution, and the diaphragm electrolysis method is also being replaced by the ion-exchange membrane electrolysis method because it can save energy.

ところでイオン交換膜電解法に用いられるイオン交換膜
電解槽には、隔膜として耐薬品性、機械的強度に優れた
パーフルオロエチレンをベースとした、パーフルオロカ
ルボン酸型及びパーフルオロスルホン酸型の陽イオン交
換膜が使用される。
By the way, the ion exchange membrane electrolyzer used in the ion exchange membrane electrolysis method uses perfluorocarboxylic acid type and perfluorosulfonic acid type cations based on perfluoroethylene, which has excellent chemical resistance and mechanical strength, as a diaphragm. An ion exchange membrane is used.

イオン交換膜を電解槽に組み込む際、咳膜に物理的ダメ
ージを与えないよう細心の注意が払われるが、過度の荷
重がかかったり、折れ曲がったり電極端部の切断部と接
触することによって、亀裂やピンホール等が発生する場
合がある。
When installing an ion exchange membrane into an electrolytic cell, great care is taken to avoid physical damage to the cough membrane, but cracks may occur due to excessive load, bending, or contact with the cut end of the electrode. or pinholes may occur.

イオン交換膜が破損している状態で電解槽の操業、特に
食塩電解を行うと、陰陽両極室間に液漏れを生じて製品
の純度を損なうとともに、電流効率の低下を引き起こす
If an electrolytic cell, especially salt electrolysis, is operated with a damaged ion exchange membrane, liquid leakage will occur between the negative and positive electrode chambers, impairing the purity of the product and causing a decrease in current efficiency.

また長時間の操業により、膜の抵抗が次第に太き(なり
電解摺電圧が上昇し、更には陽極側の塩素ガスと、陰極
側の水素ガスが混合して爆鳴気を形成し、何らかの着火
源により重大事故を招く等積々の弊害をもたらしている
In addition, due to long-term operation, the resistance of the membrane gradually increases (as a result, the electrolytic sliding voltage increases, and furthermore, the chlorine gas on the anode side and the hydrogen gas on the cathode side mix to form explosive gas, causing some kind of deposition. The source of the fire has caused a lot of harm, including serious accidents.

このような問題に対し特開昭61−110789号公報
にみられるように、陰極室または陽極室のいずれか一方
の極室に気体を供給し、他方の極室における気体の圧力
変化を測定するイオン交換膜の破tj1検知方法が開示
されている。
To solve this problem, as shown in Japanese Patent Application Laid-Open No. 61-110789, gas is supplied to either the cathode chamber or the anode chamber, and the pressure change of the gas in the other electrode chamber is measured. A method for detecting tj1 rupture of an ion exchange membrane is disclosed.

[発明が解決しようとする課題〕 しかしながら、上記破損検知方法は極室に気体を供給し
て圧力を上昇させる方法のため、誤って圧力を高くし過
ぎるとイオン交換膜を破損する恐れがあるという問題が
ある。
[Problem to be solved by the invention] However, since the above-mentioned method of detecting damage is a method of increasing the pressure by supplying gas to the electrode chamber, there is a risk of damaging the ion exchange membrane if the pressure is made too high by mistake. There's a problem.

本発明の課題は、イオン交換膜のピンホール等異常の発
生を簡便、且つ、安全に検出する、イオン交換膜の破損
検出方法を提供することにある。
An object of the present invention is to provide a method for detecting damage to an ion exchange membrane that easily and safely detects the occurrence of abnormalities such as pinholes in the ion exchange membrane.

(課題を解決するための手段及び作用〕本発明者らは、
上記問題点を解決するため鋭意検討した結果、電解槽に
イオン交換膜を装着した状態で、いずれか一方の極室を
減圧装置を用いて大気圧より低い圧力に減圧し、他方の
極室の圧力を測定することにより本発明の課題が達成さ
れることを見出し、本発明を完成させるに至った。
(Means and effects for solving the problem) The present inventors
As a result of intensive studies to solve the above problems, we found that with an ion exchange membrane attached to the electrolytic cell, one of the electrode chambers was depressurized to a pressure lower than atmospheric pressure using a pressure reducing device, and the other electrode chamber was depressurized to a pressure lower than atmospheric pressure. The present inventors have discovered that the objects of the present invention can be achieved by measuring pressure, and have completed the present invention.

即ち、本発明は陰陽両電極間に陽イオン交換膜を配し、
ハロゲン化アルカリ水溶液の電気分解からハロゲンガス
、水酸化アルカリ及び水素ガスを生成するイオン交換膜
電解槽において、陰極室もしくは陽極室のいずれか一方
の極室を減圧状態に保ち、同時に他方の極室の圧力変化
を測定することを特徴とするイオン交換膜の破損検出方
法である。
That is, the present invention arranges a cation exchange membrane between both negative and negative electrodes,
In an ion exchange membrane electrolyzer that generates halogen gas, alkali hydroxide, and hydrogen gas from the electrolysis of an aqueous alkali halide solution, either the cathode chamber or the anode chamber is kept in a reduced pressure state, and at the same time the other electrode chamber is kept in a reduced pressure state. This is a method for detecting damage to an ion exchange membrane, which is characterized by measuring pressure changes in the ion exchange membrane.

本発明で極室を減圧状態に保つために真空ポンプまたは
エジェクター等、大気圧より低い圧力に操作可能な減圧
装置を用いる。
In the present invention, in order to maintain the electrode chamber in a reduced pressure state, a pressure reducing device such as a vacuum pump or an ejector that can be operated to a pressure lower than atmospheric pressure is used.

本発明は、イオン交換膜電解槽の組立時の破損のみなら
ず、操業中の運転条件変化による、電解槽内の圧力変動
がもたらす膜の破損等に対し、電解槽停止後に用いるこ
とができる。
The present invention can be used not only for damage during assembly of an ion exchange membrane electrolytic cell, but also for membrane damage caused by pressure fluctuations within the electrolytic cell due to changes in operating conditions during operation, after the electrolytic cell is stopped.

以下本発明を図面に基づき、更に具体的に説明する。The present invention will be explained in more detail below based on the drawings.

第1図は陽極室と陰極室とをイオン交換膜を介して相対
させた、電解槽の基本構造(ユニットセル)を示す概念
図である。
FIG. 1 is a conceptual diagram showing the basic structure (unit cell) of an electrolytic cell in which an anode chamber and a cathode chamber are opposed to each other via an ion exchange membrane.

電解槽1は、イオン交換膜2によって、陽極室3と陰極
室4に区画されている。陽極室3内部には陽極5を配し
、開口ノズル7からハロゲン化アルカリ水溶液が供給さ
れ、電気を流すことによりアルカリ金属イオンは、膜を
透過して陰極へ移動し、ハロゲン化物イオンは陽極酸化
反応により、ハロゲンガスと未反応ハロゲン化アルカリ
水溶液となって、開口ノズル9で気液分離される。−1
陰極室4内部には陰極6を配し、開口ノズル8か・ら、
水または水酸化アルカリ溶液が供給され、陰極反応によ
り水素ガスと水酸化アルカリ溶液となって、開口ノズル
10で気液分離される。
The electrolytic cell 1 is divided into an anode chamber 3 and a cathode chamber 4 by an ion exchange membrane 2. An anode 5 is disposed inside the anode chamber 3, and an alkali halide aqueous solution is supplied from an opening nozzle 7. By passing electricity, alkali metal ions pass through the membrane and move to the cathode, and the halide ions are anodized. As a result of the reaction, the halogen gas and unreacted aqueous halogenated alkali solution are formed, and the aqueous solution is separated into gas and liquid through the opening nozzle 9. -1
A cathode 6 is arranged inside the cathode chamber 4, and from an opening nozzle 8,
Water or an alkaline hydroxide solution is supplied and becomes hydrogen gas and an alkaline hydroxide solution through a cathode reaction, which are separated into gas and liquid by the opening nozzle 10 .

本発明は上記した電解槽を完全に液抜きした中空の状態
とし、いずれか一方の極室を減圧装置を用いて減圧状態
とし、好ましくは約1分間放置後、他方の極室の圧力降
下の有無を確認する。
In the present invention, the electrolytic cell described above is completely drained and is in a hollow state, one of the electrode chambers is reduced in pressure using a pressure reducing device, and after being left for about 1 minute, the pressure drop in the other electrode chamber is reduced. Check whether it is present.

圧力降下の確認方法としては、減圧装置を開口ノズル7
.8.9.10のいずれかに装着し、該装置装着ノズル
の対極室のいずれか一方を圧力測定用ノズルとし、マノ
メーター等の圧力測定機器を装着すると共に、その他の
開口ノズルはゴム栓等で密閉する0次いで減圧装置を作
動して極室内を減圧するが、減圧しすぎると膜破損の原
因となるため、真空度は10〜500■H20が好まし
く、更に好ましくは50〜100閤H80である。真空
度が小さすぎる場合は効果が減少する。
To check the pressure drop, connect the pressure reducing device to opening nozzle 7.
.. 8.9.10, one of the counter electrode chambers of the nozzle installed in the device is used as a pressure measurement nozzle, and a pressure measurement device such as a manometer is attached, and the other opening nozzles are equipped with rubber plugs, etc. The pressure inside the electrode chamber is reduced by operating a pressure reducing device, but too much pressure may cause membrane damage, so the degree of vacuum is preferably 10 to 500 cm H20, more preferably 50 to 100 cm H80. . If the degree of vacuum is too low, the effectiveness will be reduced.

上記測定に於いてイオン交換膜にピンホール等の破損が
ある場合には、該破損部より圧力が漏洩し、測定側の圧
力が低下する。またイオン交換膜に異常が無い場合には
、圧力変化は見られない。
In the above measurement, if the ion exchange membrane has damage such as a pinhole, pressure leaks from the damage and the pressure on the measurement side decreases. Further, if there is no abnormality in the ion exchange membrane, no pressure change will be observed.

次に本発明を食塩電解実用槽で説明する。第2図は該電
解槽を上部からみた概略図である。第3図は第2図のA
−A線側部縦断面図を示す。
Next, the present invention will be explained using a practical salt electrolysis tank. FIG. 2 is a schematic diagram of the electrolytic cell viewed from above. Figure 3 is A of Figure 2.
-A side longitudinal cross-sectional view is shown.

この型式の電解槽のイオン交換膜2は、成型加工して袋
状で用いられ、その内部に陽極5が装着されている。そ
してイオン交換膜2の両側に陽極室3、陰極室4がそれ
ぞれ位置するように複数個のユニットセルが配置されて
いる。イオン交換膜2は上方が開口しているので、シー
リングプラグ11で押さえつけてあり、マニホールド1
2によってそれぞれのユニットセルへ、供給塩水を供給
すると共に、生成する塩素ガス、及び未反応塩水を集約
する構造になっている。
The ion exchange membrane 2 of this type of electrolytic cell is molded and used in the form of a bag, and the anode 5 is mounted inside the bag. A plurality of unit cells are arranged such that an anode chamber 3 and a cathode chamber 4 are located on both sides of the ion exchange membrane 2, respectively. Since the ion exchange membrane 2 is open at the top, it is pressed down with a sealing plug 11 and the manifold 1
2 supplies supply brine to each unit cell, and has a structure in which generated chlorine gas and unreacted brine are collected.

該電解槽について、本発明の破損検出方法を適用する場
合は、マニホールド12を取りはずし、陰極液供給開口
ノズル8に減圧装置を装着し、陽極液供給開口ノズル9
の一方にマノメーターを据え付けた後、その他の開口ノ
ズルは全てゴム栓、またはテープ等で密閉し、減圧装置
で圧力を真空度10〜500IIIIIH!Oに保ちな
がら、順次マノメーターをシーリングプラグ11に位置
する陽極液供給開口ノズル9に差し込んでいき、陽極室
5の圧力が陰極室4の方へリークしているかどうか検出
する。
When applying the damage detection method of the present invention to the electrolytic cell, the manifold 12 is removed, a pressure reducing device is attached to the catholyte supply opening nozzle 8, and the anolyte supply opening nozzle 9 is installed.
After installing the manometer on one side, seal all other open nozzles with rubber plugs or tape, and reduce the pressure to a vacuum level of 10 to 500IIIH using a pressure reducing device. While maintaining the pressure at 0, a manometer is sequentially inserted into the anolyte supply opening nozzle 9 located in the sealing plug 11 to detect whether the pressure in the anode chamber 5 is leaking toward the cathode chamber 4.

上記の様にしてイオン交換膜の破損検出を行えば、個々
のイオン交換膜の破損調査が可能であり仮にピンホール
等の破損が発見された場合、そのユニットセルに装着さ
れたイオン交換膜のみ取替えを実施すれば良く、電解槽
を解体する手間を省くことができる。
By detecting damage to ion exchange membranes as described above, it is possible to investigate damage to individual ion exchange membranes, and if damage such as pinholes is discovered, only the ion exchange membrane attached to that unit cell can be investigated. All you have to do is replace it, and the trouble of disassembling the electrolytic cell can be saved.

本発明のイオン交換膜電解槽は、陽イオン交換膜を有す
る電解槽の総称であり、アスベスト隔膜電解槽を改造し
たイオン交換膜電解槽(以下DI槽と称す)及びフィル
タープレス電解槽等にも適用できる。
The ion exchange membrane electrolytic cell of the present invention is a general term for electrolytic cells having a cation exchange membrane, and can also be used as an ion exchange membrane electrolytic cell (hereinafter referred to as DI cell) which is a modified asbestos diaphragm electrolytic cell, a filter press electrolytic cell, etc. Applicable.

〔実施例〕〔Example〕

以下本発明を実施例により説明する。 The present invention will be explained below with reference to Examples.

実施例−1 DI槽にイオン交換膜を組み込んだ後、陽極液供給開口
ノズルのひとつにマノメーターを据え付け、さらに陰極
液供給開口ノズルに減圧ポンプを設置し、その他の開口
ノズルは全てゴム栓を打って密閉状態とした。
Example 1 After installing an ion exchange membrane in the DI tank, a manometer was installed on one of the anolyte supply opening nozzles, a vacuum pump was installed on the catholyte supply opening nozzle, and all other opening nozzles were fitted with rubber plugs. It was sealed tightly.

減圧ポンプで真空度100mmHzOにて陰極室内を減
圧状態とし、23枚のイオン交換膜について順次リーク
テストをした結果、1枚のイオン交換膜に付随するユニ
ットセルの圧力が低下した。
The inside of the cathode chamber was depressurized at a vacuum level of 100 mmHzO using a vacuum pump, and a leak test was conducted on 23 ion exchange membranes in sequence. As a result, the pressure in the unit cell attached to one ion exchange membrane decreased.

このイオン交換膜のみ取り外して調査したところ、イオ
ン交換膜の下部左端にピンホールが確認された。
When only this ion exchange membrane was removed and investigated, a pinhole was confirmed at the lower left end of the ion exchange membrane.

実施例−2 DI槽運転中、水酸化ナトリウム水溶液中の塩分濃度が
428ppmとなり、また電摺電圧も3.62Vと上昇
したため、直ちに電解槽の運転を停止し、完全に液抜き
を行った後、実施例−1と同様の操作を実施した。その
結果、2個のユニットセルの圧力低下が認められたため
、その部位のイオン交換膜を取り替えた後、再度電解槽
の運転を開始した。再運転後の水酸化ナトリウム水溶液
中の塩分濃度は32ppm 、電摺電圧は3.46Vと
、良好な状態1になった。
Example 2 During operation of the DI tank, the salt concentration in the sodium hydroxide aqueous solution reached 428 ppm, and the electric voltage increased to 3.62V, so the operation of the electrolytic tank was immediately stopped and the liquid was completely drained. , the same operation as in Example-1 was carried out. As a result, a pressure drop in two unit cells was observed, so after replacing the ion exchange membrane at that location, operation of the electrolytic cell was restarted. After restarting the operation, the salt concentration in the sodium hydroxide aqueous solution was 32 ppm, and the electric voltage was 3.46 V, which was a good condition 1.

〔発明の効果〕〔Effect of the invention〕

本発明の方法によれば、電解槽を解体することなく、イ
オン交換膜電解槽の組立時または操業時におけるイオン
交換膜のピンホール等の異常を簡便に、且つ、安全に検
出できるという効果があり、産業上に貢献すること大で
ある。
According to the method of the present invention, it is possible to easily and safely detect abnormalities such as pinholes in the ion exchange membrane during assembly or operation of the ion exchange membrane electrolytic cell without disassembling the electrolytic cell. Therefore, it will greatly contribute to industry.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は電解槽の基本構造を示す概念口、第2図はDI
槽を上部から見た概略図、第3図は第2図のA−A線側
部縦断面図である。 図中、1は電解槽、2はイオン交換膜、3は陽極室、4
は陰極室、5は陽極、6は陰極、7は陽極液入口開口ノ
ズル、8は陰極液入口開口ノズル、9は陽極液気液分離
開口ノズル、10は陰極液気液分離開口ノズル、11は
シーリングプラグ、12はマニホールドである。 特許出願人  三井東圧化学株式会社 第1図 第2図
Figure 1 is a conceptual diagram showing the basic structure of an electrolytic cell, Figure 2 is a DI
A schematic view of the tank viewed from above, and FIG. 3 is a side longitudinal sectional view taken along the line A--A in FIG. 2. In the figure, 1 is an electrolytic cell, 2 is an ion exchange membrane, 3 is an anode chamber, and 4
is a cathode chamber, 5 is an anode, 6 is a cathode, 7 is an anolyte inlet opening nozzle, 8 is a catholyte inlet opening nozzle, 9 is an anolyte liquid gas-liquid separation opening nozzle, 10 is a cathode liquid vapor-liquid separation opening nozzle, 11 is The sealing plug 12 is a manifold. Patent applicant Mitsui Toatsu Chemical Co., Ltd. Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 1 陰陽両電極間に陽イオン交換膜を配し、ハロゲン化
アルカリ水溶液の電気分解からハロゲンガス、水酸化ア
ルカリ及び水素ガスを生成するイオン交換膜電解槽にお
いて、陰極室もしくは陽極室のいずれか一方の極室を減
圧状態に保ち、同時に他方の極室の圧力変化を測定する
ことを特徴とするイオン交換膜の破損検出方法。
1 In an ion exchange membrane electrolytic cell in which a cation exchange membrane is arranged between both negative and positive electrodes and halogen gas, alkali hydroxide, and hydrogen gas are generated from electrolysis of an aqueous halide solution, either the cathode chamber or the anode chamber A method for detecting damage to an ion exchange membrane, characterized by maintaining one electrode chamber in a reduced pressure state and simultaneously measuring pressure changes in the other electrode chamber.
JP8390488A 1988-04-05 1988-04-05 Method for detecting breakage of ion exchange membrane Pending JPH01255682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8390488A JPH01255682A (en) 1988-04-05 1988-04-05 Method for detecting breakage of ion exchange membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8390488A JPH01255682A (en) 1988-04-05 1988-04-05 Method for detecting breakage of ion exchange membrane

Publications (1)

Publication Number Publication Date
JPH01255682A true JPH01255682A (en) 1989-10-12

Family

ID=13815611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8390488A Pending JPH01255682A (en) 1988-04-05 1988-04-05 Method for detecting breakage of ion exchange membrane

Country Status (1)

Country Link
JP (1) JPH01255682A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6027630A (en) * 1997-04-04 2000-02-22 University Of Southern California Method for electrochemical fabrication
US9614266B2 (en) 2001-12-03 2017-04-04 Microfabrica Inc. Miniature RF and microwave components and methods for fabricating such components
US9620834B2 (en) 2001-12-03 2017-04-11 Microfabrica Inc. Method for fabricating miniature structures or devices such as RF and microwave components
US10297421B1 (en) 2003-05-07 2019-05-21 Microfabrica Inc. Plasma etching of dielectric sacrificial material from reentrant multi-layer metal structures
JP2023089662A (en) * 2021-12-16 2023-06-28 トヨタ自動車株式会社 Leakage detection method of water electrolysis apparatus, hydrogen production method, leakage detection program of water electrolysis apparatus, and water electrolysis apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5125482A (en) * 1974-08-28 1976-03-02 Hitachi Ltd
JPS5376997A (en) * 1976-12-20 1978-07-07 Kanegafuchi Chem Ind Co Ltd Sodium chlorde electrolyzing method using three chamber type ion exhange membrane cell
JPS608309A (en) * 1983-06-29 1985-01-17 Toyo Soda Mfg Co Ltd Nitrogen-containing fluorocarbon polymer and its production
JPS61110789A (en) * 1984-11-05 1986-05-29 Tokuyama Soda Co Ltd Method for detecting damage of ion exchange membrane

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5125482A (en) * 1974-08-28 1976-03-02 Hitachi Ltd
JPS5376997A (en) * 1976-12-20 1978-07-07 Kanegafuchi Chem Ind Co Ltd Sodium chlorde electrolyzing method using three chamber type ion exhange membrane cell
JPS608309A (en) * 1983-06-29 1985-01-17 Toyo Soda Mfg Co Ltd Nitrogen-containing fluorocarbon polymer and its production
JPS61110789A (en) * 1984-11-05 1986-05-29 Tokuyama Soda Co Ltd Method for detecting damage of ion exchange membrane

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8603316B2 (en) 1997-04-04 2013-12-10 University Of Southern California Method for electrochemical fabrication
US6475369B1 (en) 1997-04-04 2002-11-05 University Of Southern California Method for electrochemical fabrication
US6572742B1 (en) 1997-04-04 2003-06-03 University Of Southern California Apparatus for electrochemical fabrication using a conformable mask
US7351321B2 (en) 1997-04-04 2008-04-01 Microfabrica, Inc. Method for electrochemical fabrication
US7998331B2 (en) 1997-04-04 2011-08-16 University Of Southern California Method for electrochemical fabrication
US8551315B2 (en) 1997-04-04 2013-10-08 University Of Southern California Method for electromechanical fabrication
US6027630A (en) * 1997-04-04 2000-02-22 University Of Southern California Method for electrochemical fabrication
US9752247B2 (en) 1997-04-04 2017-09-05 University Of Southern California Multi-layer encapsulated structures
US9614266B2 (en) 2001-12-03 2017-04-04 Microfabrica Inc. Miniature RF and microwave components and methods for fabricating such components
US9620834B2 (en) 2001-12-03 2017-04-11 Microfabrica Inc. Method for fabricating miniature structures or devices such as RF and microwave components
US11145947B2 (en) 2001-12-03 2021-10-12 Microfabrica Inc. Miniature RF and microwave components and methods for fabricating such components
US10297421B1 (en) 2003-05-07 2019-05-21 Microfabrica Inc. Plasma etching of dielectric sacrificial material from reentrant multi-layer metal structures
JP2023089662A (en) * 2021-12-16 2023-06-28 トヨタ自動車株式会社 Leakage detection method of water electrolysis apparatus, hydrogen production method, leakage detection program of water electrolysis apparatus, and water electrolysis apparatus

Similar Documents

Publication Publication Date Title
US4915803A (en) Combination seal and frame cover member for a filter press type electrolytic cell
US4892632A (en) Combination seal member and membrane holder for an electrolytic cell
US4898653A (en) Combination electrolysis cell seal member and membrane tentering means
CA2090670A1 (en) Electrochemical cells for use in electrochemical processes
KR860000562B1 (en) Electrode for use in electrolytic cell
US10094029B2 (en) Chlorine dioxide production device and chlorine dioxide production method
JPH01255682A (en) Method for detecting breakage of ion exchange membrane
JPS5933195B2 (en) How to install an ion exchange membrane
US4940518A (en) Combination seal member and membrane holder for a filter press type electrolytic cell
SU878202A3 (en) Method of electrolyzis of sodium chloride aqueous solution
US4886586A (en) Combination electrolysis cell seal member and membrane tentering means for a filter press type electrolytic cell
KR100282769B1 (en) Method for blocking an electrolytic cell having a membrane and an oxygen reduction cathode
US4851099A (en) Electrolytic cell
NO791628L (en) ANODE ELEMENT OF MONOPOLAR FILTER PRESSURE TYPE MONOPOLAR CELLS
US4431495A (en) Location of a structurally damaged membrane
US4469571A (en) Replacement of a structurally damaged membrane
HU207539B (en) Process for detecting damaged ion exchange membrane in monopolar and bipolar electrolizators for electrolizing aquous solutions of alkali-halogenides
CA1281680C (en) Electrolytic cell with electrode material in a non-conducting pipe
JPS621236Y2 (en)
JPS638192B2 (en)
US4595477A (en) Electrolysis cell
JPH06299386A (en) Electrolyzer for gas production
CN217026092U (en) Sampling device of ion membrane electrolytic cell
RU2780741C1 (en) Seal for electrolytic tank and electrolytic tank including seal
JPS61153295A (en) Method for detecting breakage in ion exchange membrane