JPH01228519A - Apparatus to collect metal oxide powder - Google Patents

Apparatus to collect metal oxide powder

Info

Publication number
JPH01228519A
JPH01228519A JP63053725A JP5372588A JPH01228519A JP H01228519 A JPH01228519 A JP H01228519A JP 63053725 A JP63053725 A JP 63053725A JP 5372588 A JP5372588 A JP 5372588A JP H01228519 A JPH01228519 A JP H01228519A
Authority
JP
Japan
Prior art keywords
dust
filter
water
filters
metal oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63053725A
Other languages
Japanese (ja)
Other versions
JPH0551325B2 (en
Inventor
Masakatsu Horii
堀井 政克
Naritaka Nagasawa
長澤 成貴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Tungsten Co Ltd
Original Assignee
Tokyo Tungsten Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Tungsten Co Ltd filed Critical Tokyo Tungsten Co Ltd
Priority to JP63053725A priority Critical patent/JPH01228519A/en
Publication of JPH01228519A publication Critical patent/JPH01228519A/en
Publication of JPH0551325B2 publication Critical patent/JPH0551325B2/ja
Granted legal-status Critical Current

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  • Filtering Materials (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

PURPOSE:To efficiently separate powder dust produced in metal machining by automatically washing a filter which collects powder dust with water and recovering the washed out powder dust. CONSTITUTION:A metal oxide powder collector is composed of a sucking part 10, a filtering part 20, and a discharging part 30. Shower nozzles 4 sandwiching the filters 3 from the upside and the downside are set inside of the filtering part 20. The dust-contg. air is introduced into the sucking part 10 from outside the dust collecting tower 1, filtered by the filters 3, and becomes cleaned air which is moved to a stack 5 of the discharging part. Also, when sensors set in the filters 3 detect the filters are filled up, cleaning water is arranged to be sprayed from the shower nozzle to the surfaces of the filters 3. With the cleaning water, the powder dust flows down to a water tank in the lower part of the dust collecting tower 1 and it is recovered after precipitation.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、W及びMo等の昇華しやすい酸化物を有する
金属加工時に発生した粉塵を分離する金属酸化物粉末集
塵装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a metal oxide powder dust collector for separating dust generated during processing of metals containing easily sublimed oxides such as W and Mo.

[従来の技術] −fiに、W及びMo板は、酸化物を形成し易く、W及
びNoの板、棒状の熱II加工時に昇華性の粒径1〜5
μmの粉塵の発生が多い。このような粉塵は、作業環境
を悪化させ更に大気汚染の源となるので、熱間加工装置
の接地されている周囲空間部には、種々の粉末集n装置
が設置され利用されてきた。
[Prior art] - Fi, W and Mo plates tend to form oxides, and W and No plates have a sublimable particle size of 1 to 5 during heat II processing of rod-like shapes.
A lot of micrometer dust is generated. Since such dust deteriorates the working environment and becomes a source of air pollution, various powder collection devices have been installed and used in the grounded surrounding space of hot processing equipment.

集塵装置としては、例えば、と退部材を有するバグフィ
ルタ集塵機や、通過する空気の流れを回転させて、空気
中に含まれる粉塵を遠心分離させるサイクロン集B機が
一般的に使用されている。
As a dust collector, for example, a bag filter dust collector with a dust removal member or a cyclone collector B that centrifugally separates dust contained in the air by rotating the passing air flow are commonly used. .

特に、サイクロン集塵機は設置面積が小さく、構造が簡
単で、設備費、設置費か安い等の種々の利点を有する。
In particular, the cyclone dust collector has various advantages such as a small installation area, simple structure, and low equipment and installation costs.

[発明が解決しようとする課題] しかしながら、バグフィルタ集塵機は、濾過速度を0.
02〜0.04m/secと遅く設計しなければならず
、設置面積か大きくなるという欠点を存する。また、目
づまりの際のフィルタ交換が容易でなくそして圧力損失
も100〜150mmH2Oと大きい。
[Problems to be Solved by the Invention] However, the bag filter dust collector has a filtration rate of 0.
It has the drawback that it must be designed to be slow at 0.02 to 0.04 m/sec, and the installation area becomes large. Furthermore, it is not easy to replace the filter when it becomes clogged, and the pressure loss is large at 100 to 150 mmH2O.

一方、サイクロン集塵機は、捕集粒度が一般に、10μ
m以上とi[(、W、Mo等のL 〜5 甲m程疫の粉
塵の回収が困難であった。
On the other hand, with a cyclone dust collector, the particle size collected is generally 10μ.
It was difficult to collect dust of L ~ 5 Km such as m or more and i[(, W, Mo, etc.).

本発明は上記欠点に鑑みてなされており、設置面積が狭
く、目づまりがなく、一定の粒度の粉塵を安定に除去で
きる耐久性フィルタを有し、分離した粉塵を容易に回収
できる金属酸化物粉末集塵本発明によれば、粉塵を含む
空気を吸収し、この空気を多段に重畳したフィルタを重
力方向と逆方向に通過させることにより、特定の粒度の
粉塵を分離し、正常な空気を放出する乾式集塵手段と、
上記フィルタを自ら洗浄し、粉塵を洗い流し回収する湿
式粉塵回収手段を有することを特徴とする金属酸化物粉
末集塵装置が得られる。
The present invention has been made in view of the above-mentioned drawbacks, and has a small installation area, no clogging, a durable filter that can stably remove dust of a certain particle size, and a metal oxide powder that can easily collect separated dust. Dust Collection According to the present invention, air containing dust is absorbed, and this air is passed through a multistage superimposed filter in the direction opposite to the direction of gravity, thereby separating dust of a specific particle size and releasing normal air. a dry dust collection means,
A metal oxide powder dust collector is obtained, which is characterized in that it has a wet dust collection means that cleans the filter itself and washes away and collects dust.

[作用] 本発明の作用について説明する。金属粉塵を含む空気は
、ファンにより集塵塔や下方の吸入口から吸入され、多
段に重畳したフィルタにより、粉塵が乾式分離される。
[Function] The function of the present invention will be explained. Air containing metal dust is sucked in by a fan through the dust collection tower and the lower intake port, and the dust is dry-separated by filters stacked in multiple stages.

粉塵が除去された空気は、清浄空気として、集塵塔上方
のスタックを通り大気中へ放出される。フィルタは塩ビ
系繊維ロックフィルタである。フィルタの目詰り時は、
lil械的な払い落しであると、2次粉塵が発生ずるの
で、行わず、湿式払い落しを行届うj、そして、フィル
タは集塵塔下部に設置された水槽がら、供給された洗浄
水をシャワーノズルから吹き付けることにより洗浄され
る。
The air from which dust has been removed is released into the atmosphere as clean air through a stack above the dust collector. The filter is a PVC fiber lock filter. When the filter is clogged,
If mechanical dusting is used, secondary dust will be generated, so instead of using wet dusting, the filter is installed in a water tank installed at the bottom of the dust collection tower, and the supplied cleaning water is removed. It is cleaned by spraying it from a shower nozzle.

この洗浄により洗い流された粉塵は、洗浄水とともに漏
斗により集められ水槽に回収される。このようにフィル
ターが洗浄され、塩ビ系で材質を有するため水切れも良
く、集塵への手間がかからない。
The dust washed away by this washing is collected by a funnel together with washing water and collected in a water tank. The filter is cleaned in this way, and since it is made of PVC-based material, it drains easily and requires no effort to collect dust.

また、水槽内に回収された粉塵は、スラリーとして回収
することかできると共に、ポンプへの供給は水槽の水の
上澄みからなされるので、洗浄水も再利用できる。
Moreover, the dust collected in the water tank can be collected as slurry, and since the pump is supplied from the supernatant of the water in the water tank, the washing water can also be reused.

[実施例] 本発明の実施例に係る金属酸化物粉末集塵装置の具体的
構成について述べる。第1図は、金属酸化物粉末集塵装
置の具体的構成の一例を示す図である。図示された集塵
装置は、吸込部10、f’過郡部20び排気部30とか
ら構成されている。この図において、吸入口として集塵
塔1下方側部に金属酸化物粉塵を含む汚染された空気の
吸入筒2が突出して設けられている。集塵塔1中間部の
p退部20には塩ビ系繊維からなるロックフィルタ3が
二層帰所するように設けられている。
[Example] A specific configuration of a metal oxide powder dust collector according to an example of the present invention will be described. FIG. 1 is a diagram showing an example of a specific configuration of a metal oxide powder dust collector. The illustrated dust collector includes a suction section 10, an f' overflow section 20, and an exhaust section 30. In this figure, a suction tube 2 for contaminated air containing metal oxide dust is provided protruding from the lower side of a dust collector tower 1 as an inlet. A lock filter 3 made of vinyl chloride fiber is provided in a p-recessed part 20 in the middle part of the dust collecting tower 1 so as to have two layers.

このフィルタの段数は粉塵量より計算され、決定されて
いる。さらに濾過部20内にはフィルタ3を上方及び下
方から挾むようにシャワーノズル4が配置されている。
The number of stages of this filter is calculated and determined based on the amount of dust. Furthermore, a shower nozzle 4 is arranged in the filter section 20 so as to sandwich the filter 3 from above and below.

シャワーノズル4は、ポンプ11から配管が施されてい
て、ポンプより供給された洗浄水をフィルタ3に噴出す
る。フィルタ3の上方にある排気部30にはスタック5
が設けられている。この排気部30は吸込部10の吸入
筒2とその横断面積が等しく形成されている。更に、排
気部30内には、ファンが設けられている。
The shower nozzle 4 is connected with piping from the pump 11 and sprays cleaning water supplied from the pump onto the filter 3. A stack 5 is installed in the exhaust section 30 above the filter 3.
is provided. The exhaust section 30 is formed to have the same cross-sectional area as the suction cylinder 2 of the suction section 10. Furthermore, a fan is provided within the exhaust section 30.

このファンは、集塵塔1内の空気導入及び集塵塔l外へ
の排気用に設けられており、清浄空気6はスタック5の
開口部より放出される。
This fan is provided for introducing air into the dust collection tower 1 and exhausting it outside the dust collection tower 1, and clean air 6 is discharged from the opening of the stack 5.

また集塵装置下部の集塵塔底部には、漏斗状の洗浄液回
収部材7と、回収部材からの水を貯え、粉塵を沈澱させ
る水槽8が設けられている。水槽上部に、ポンプ11に
接続する吸込管9が設けられている。
A funnel-shaped cleaning liquid recovery member 7 and a water tank 8 for storing water from the recovery member and for precipitating dust are provided at the bottom of the dust collector at the bottom of the dust collector. A suction pipe 9 connected to a pump 11 is provided at the top of the water tank.

次に具体的に実施例に係る集塵装置の動作について説明
する。
Next, the operation of the dust collector according to the embodiment will be specifically explained.

乾式集塵手段は、吸込筒2、この吸込筒2に連設した集
塵塔1の空間部、フィルタ3、フィルタ3の空間部に連
設したスタック5、スタックに設けれたファンによって
構成される。乾式集塵手段では、排気部30内のファン
により吸気されたMOの粉塵を含む空気は、集塵塔1外
から吸込部10へ導入され、この集塵塔1の空間部から
濾過部にはいる。ここで、フィルタ3で濾過し、M。
The dry dust collecting means is composed of a suction cylinder 2, a space of the dust collection tower 1 connected to the suction cylinder 2, a filter 3, a stack 5 connected to the space of the filter 3, and a fan installed in the stack. Ru. In the dry dust collection means, air containing MO dust sucked in by a fan in the exhaust section 30 is introduced from outside the dust collection tower 1 into the suction section 10, and from the space of the dust collection tower 1 is passed into the filtration section. There is. Here, filter with filter 3 and M.

粉塵を含む空気は沢過されて、その大部分の粉nが収り
除かれ、清浄空気となって排気部のスタック5内に移動
する。さらにファンにより、スタック内の空気は、上端
に設けられた開口部から放出される。
The air containing dust is filtered, most of the dust n is removed, and the air becomes clean and moves into the stack 5 of the exhaust section. Additionally, a fan allows air within the stack to be expelled through an opening provided at the top end.

このときの動作条件を説明すると、MO粉塵の粒度は、
1〜5μmであり、塩ビ系繊維ロックフィルタは、50
m5+の厚さを有するフィルタ板4板で、2枚重ねられ
て一つのフィルタ部が構成されている。集塵塔内の空気
の流速を4〜5 m / sec程度とした。
To explain the operating conditions at this time, the particle size of MO dust is
1 to 5 μm, and the PVC fiber lock filter has a diameter of 50 μm.
One filter section is constructed by stacking two of the four filter plates having a thickness of m5+. The flow rate of air in the dust collection tower was set to about 4 to 5 m/sec.

一方、上記したシャワーノズル4と、漏斗状の洗浄液回
収部材7、集塵塔の底部の水槽8と、ポンプ11と、水
槽上部から洗浄水を吸収するポンプ吸入管9、ポンプ1
2からシャワーノズル4に接続した送出管12の各配管
は湿式粉塵回収手段を構成している。
On the other hand, the shower nozzle 4 described above, the funnel-shaped cleaning liquid collection member 7, the water tank 8 at the bottom of the dust collection tower, the pump 11, the pump suction pipe 9 that absorbs the cleaning water from the top of the water tank, and the pump 1
Each pipe of the delivery pipe 12 connected from the shower nozzle 2 to the shower nozzle 4 constitutes a wet dust collecting means.

次に、この湿式粉塵回収手段の動作について説明する。Next, the operation of this wet dust collecting means will be explained.

シャワーノズルは、送出管12から三方に分岐した管1
3a、13b、13cの先端部に設けられており、フィ
ルタ3面に分散状態で洗浄水を吐出し、フィルタ3表面
に実質的に均等に噴出する。噴出した洗浄水によりフィ
ルタ3の表面の粉塵は洗い流され、洗浄水と共に集塵塔
1下部の漏斗に滴下し、水槽に貯えられる。そして水槽
中の浮遊する粉塵は、しだいに水槽8底部に沈殿する。
The shower nozzle is a pipe 1 branched into three directions from a delivery pipe 12.
They are provided at the tips of 3a, 13b, and 13c, and discharge the cleaning water in a dispersed state onto the filter 3 surface, and spray it substantially evenly onto the filter 3 surface. Dust on the surface of the filter 3 is washed away by the jetted washing water, and the dust is dripped together with the washing water into a funnel at the bottom of the dust collection tower 1, and stored in a water tank. The floating dust in the water tank gradually settles to the bottom of the water tank 8.

この底部の沈殿物はスラリー状態で予め定められた期間
をおいて回収される。一方、分離された上澄み分の洗浄
水はポンプにより吸い上げられ配管12を通り、シャワ
ーノズル3に再び1ノ(給される。
This bottom sediment is collected in a slurry state after a predetermined period of time. On the other hand, the separated supernatant wash water is sucked up by the pump, passes through the pipe 12, and is again supplied to the shower nozzle 3.

空気吸込筒付近のMO粉塵の濃度は、0.13g/N1
3、洗浄空気の濃度は、粉塵が目に見えない濃度0.0
16 g /N13であった。
The concentration of MO dust near the air suction cylinder is 0.13g/N1
3. The concentration of cleaning air is 0.0, where dust is invisible.
It was 16 g/N13.

このときMO粉応の捕集効率は87.7%であった。以
上の洗浄操作でフィルタ3は新品同様となり、また塩ビ
系材料であるため水切れも非常に良く、洗浄後直ちにフ
ァンを動かし、集塵に入っても問題は生じない。
At this time, the collection efficiency of the MO powder reaction was 87.7%. With the above cleaning operation, the filter 3 becomes as good as new, and since it is made of PVC material, water drains very easily, so if the fan is started immediately after cleaning, there will be no problem even if it gets into the dust collection.

さらに、水槽に重力等により沈殿させるのみでなく、ポ
ンプ吸入管の口部9aもしくは、回収部材7、もしくは
水Wi8内の吸上管と回収部材7の水を通常の部材から
なるフィルタまたは多孔管の隔壁により分離する:r−
段を設ければ、洗浄水の汚れが少なく、粉塵用のフィル
タがよりきれいに洗浄できる。また、フィルタ洗浄した
後、更にフィルタをよりきれいにするために、少量の汚
れのない洗浄水を供給する水槽及び供給管を水槽以外に
設けても良い。
Furthermore, in addition to settling the water in the water tank by gravity etc., the water in the mouth 9a of the pump suction pipe, the collection member 7, or the suction pipe and collection member 7 in the water Wi8 is filtered or filtered through a filter made of ordinary members or a porous pipe. separated by a partition wall: r-
By providing a stage, the cleaning water is less contaminated and the dust filter can be cleaned more cleanly. Further, in order to further clean the filter after cleaning the filter, a water tank and a supply pipe for supplying a small amount of clean water may be provided in addition to the water tank.

尚、水槽内の浮遊した粉塵は、1時間経過すると、完全
に底部に沈殿する。
Incidentally, the floating dust in the water tank will completely settle to the bottom after one hour has passed.

実施例に係る集塵装置のフィルタの目づまり検出には、
フィルタ支持部に圧電素子を有するセンサが設けられて
いる。このセンサには圧電素子及び増幅、比12器が内
蔵されており目づまりの際フィルタに加わる圧力が予め
定められた圧力の閾値以上で、検出信号を出力する。検
出信号は、処理部に入力し、記憶部に予め定められた処
理プログラムに従って、各駆動部の制御がなされる。す
なわち、先づファンが停止し、続いてポンプが作動しフ
ィルタの洗浄が開始され、30分間程度の予め定められ
た時間の後ポンプが停止し、続いて、ファンが始動し、
洗浄されたフィルタが室温にて乾燥される。以上のフィ
ルタ洗汁動作か自動的に行われる。
To detect clogging of the filter of the dust collector according to the embodiment,
A sensor having a piezoelectric element is provided on the filter support. This sensor has a built-in piezoelectric element, amplification, and ratio 12, and outputs a detection signal when the pressure applied to the filter when it becomes clogged exceeds a predetermined pressure threshold. The detection signal is input to the processing section, and each drive section is controlled according to a processing program predetermined in the storage section. That is, first the fan stops, then the pump starts to operate and clean the filter, and after a predetermined time of about 30 minutes, the pump stops, then the fan starts,
The washed filter is dried at room temperature. The above filter washing operation is performed automatically.

塩ビ系ロックフィルタは洗浄の後、水はけが良いのでさ
ほどの時間はかからない。
PVC rock filters drain well after cleaning, so it doesn't take much time to clean them.

尚、目づまり検出センサは、圧電素子以外にも、感圧素
子もしくは、圧力差によるフィルタの支持部の変位を検
出できる手段であれば、これに限定はされない。
Note that the clogging detection sensor is not limited to a piezoelectric element, as long as it is a pressure sensitive element or a means capable of detecting displacement of the support portion of the filter due to a pressure difference.

以下余白 [発明の効果]      ゛ 以上述べた通り、本発明によれば、バグフィルタ−の設
置面積の1/10程度ですむ。
Margin below [Effects of the Invention] As stated above, according to the present invention, the installation area of the bag filter can be approximately 1/10.

更に、本発明によれば、高価な金属酸化物からなる粉塵
もスラリーとして回収でき、再利用ができ、資源の節約
につながる。
Furthermore, according to the present invention, dust made of expensive metal oxides can also be recovered as slurry and reused, leading to resource savings.

本発明によれば、フィルタを自動的に洗浄し、また半永
久的な耐久性を有し、また特定の大きさの粉塵を回収で
きるので、常に安定した粉塵の回収が可能である。
According to the present invention, since the filter is automatically cleaned, has semi-permanent durability, and can collect dust of a specific size, stable dust collection is always possible.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例に係る金属粉末集塵装置を示す
図である。 図中、1は集塵塔、3はフィルタ、4はシャワーノズル
、5はスタック、6は清浄空気、7は回収部材、8は水
槽、9.12及び13は配管、10は吸込部、11はポ
ンプ、20は濾過部、30は排気部である。 第1図 1’M1−
FIG. 1 is a diagram showing a metal powder dust collector according to an embodiment of the present invention. In the figure, 1 is a dust collection tower, 3 is a filter, 4 is a shower nozzle, 5 is a stack, 6 is clean air, 7 is a collection member, 8 is a water tank, 9.12 and 13 are piping, 10 is a suction part, 11 20 is a pump, 20 is a filtration section, and 30 is an exhaust section. Figure 1 1'M1-

Claims (1)

【特許請求の範囲】 1、粉塵を含む空気を吸入し、吸入した空気を多段に重
畳したフィルタを重力方向と逆方向に通過させることに
より、特定の粒度の粉塵を分離し、清浄な空気を放出す
る乾式集塵手段と、上記フィルタを自ら自動的に水で洗
浄し、粉塵を洗い流し、回収する湿式粉塵回収手段とを
有することを特徴とする金属酸化物粉末集塵装置。 2、上記湿式粉塵回収手段は回収した粉塵をスラリー状
として貯蔵する水槽と、洗浄用の水を移動するポンプと
、上記フィルタ間の空間に設けられ、洗浄用の水を吹き
付け流し落すシャワーノズルと、上記各部を接続する配
管を有することを特徴とする第1の請求項記載の金属酸
化物粉末集塵装置。 3、上記フィルタは、塩化ビニールよりなることを特徴
とする第1の請求項又は第2の請求項記載の金属酸化物
粉末集塵装置。
[Claims] 1. Dust-containing air is inhaled, and the inhaled air is passed through a multistage superimposed filter in the direction opposite to the direction of gravity, thereby separating dust of a specific particle size and producing clean air. A metal oxide powder dust collector comprising: a dry dust collection means for discharging the dust; and a wet dust collection means for automatically washing the filter with water to rinse and collect the dust. 2. The wet dust collection means includes a water tank for storing the collected dust in the form of slurry, a pump for moving water for cleaning, and a shower nozzle installed in the space between the filters for spraying and washing off the water for cleaning. 2. The metal oxide powder dust collecting device according to claim 1, further comprising piping connecting the respective parts. 3. The metal oxide powder dust collector according to claim 1 or 2, wherein the filter is made of vinyl chloride.
JP63053725A 1988-03-09 1988-03-09 Apparatus to collect metal oxide powder Granted JPH01228519A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63053725A JPH01228519A (en) 1988-03-09 1988-03-09 Apparatus to collect metal oxide powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63053725A JPH01228519A (en) 1988-03-09 1988-03-09 Apparatus to collect metal oxide powder

Publications (2)

Publication Number Publication Date
JPH01228519A true JPH01228519A (en) 1989-09-12
JPH0551325B2 JPH0551325B2 (en) 1993-08-02

Family

ID=12950807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63053725A Granted JPH01228519A (en) 1988-03-09 1988-03-09 Apparatus to collect metal oxide powder

Country Status (1)

Country Link
JP (1) JPH01228519A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06145042A (en) * 1992-11-06 1994-05-24 Kao Corp Bathing agent composition
DE4431767A1 (en) * 1993-09-06 1995-03-09 Lim Kyung Suk Filter containing chaff or chopped straw
JP2009545429A (en) * 2006-08-04 2009-12-24 カーハーエス・アクチエンゲゼルシヤフト Filter unit and sterilization method thereof
JP2010051851A (en) * 2008-08-26 2010-03-11 Nippon Muki Co Ltd Apparatus for cleaning air, and method of replacing filter for the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49107771U (en) * 1972-12-29 1974-09-13
JPS5533369A (en) * 1978-08-29 1980-03-08 Mitsubishi Electric Corp Cathode-ray tube device
JPS6042322U (en) * 1983-08-31 1985-03-25 株式会社日立製作所 Droplet entrainment collection device
JPS6129813U (en) * 1984-07-27 1986-02-22 四国化成工業株式会社 Incinerator flue gas purification device
JPS62110720A (en) * 1985-11-11 1987-05-21 Japan Vilene Co Ltd Electrostatic charged nonwoven fabric

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037641A (en) * 1976-07-16 1977-07-26 The Singer Company Method of fabricating sewing machine needles
JPS6042322B2 (en) * 1978-04-19 1985-09-21 株式会社日立製作所 steam control valve

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49107771U (en) * 1972-12-29 1974-09-13
JPS5533369A (en) * 1978-08-29 1980-03-08 Mitsubishi Electric Corp Cathode-ray tube device
JPS6042322U (en) * 1983-08-31 1985-03-25 株式会社日立製作所 Droplet entrainment collection device
JPS6129813U (en) * 1984-07-27 1986-02-22 四国化成工業株式会社 Incinerator flue gas purification device
JPS62110720A (en) * 1985-11-11 1987-05-21 Japan Vilene Co Ltd Electrostatic charged nonwoven fabric

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06145042A (en) * 1992-11-06 1994-05-24 Kao Corp Bathing agent composition
DE4431767A1 (en) * 1993-09-06 1995-03-09 Lim Kyung Suk Filter containing chaff or chopped straw
JP2009545429A (en) * 2006-08-04 2009-12-24 カーハーエス・アクチエンゲゼルシヤフト Filter unit and sterilization method thereof
US8529670B2 (en) 2006-08-04 2013-09-10 Khs Gmbh Aseptic bottling or container filling plant with a clean room arrangement enclosing the aseptic bottling or container filling plant and a filter unit for filtering air entering the clean room, and a method of operation thereof
JP2010051851A (en) * 2008-08-26 2010-03-11 Nippon Muki Co Ltd Apparatus for cleaning air, and method of replacing filter for the same

Also Published As

Publication number Publication date
JPH0551325B2 (en) 1993-08-02

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