JPH01224927A - Manufacturing device for magnetic recording medium - Google Patents

Abstract

PURPOSE:To stabilize a temperature control and temperature distribution by making a cylindrical can external part into a double wall structure to form a vapor channel continuously connected to a rotary supporting shaft, and being equipped with plural drain tubes by means of vapor discharging force. CONSTITUTION:A cylindrical can 1 is equipped with a vapor supply channel 21 and a discharge channel 22 in a rotary supporting shaft 8, the external peripheral part of the can 1 is made into the double wall structure to form a peripheral part channel 4 continuously connected to the supply channel 21 and the discharge channel 22, and in the middle of the peripheral part channel 4, plural drain tubes 11-13, which are continuously connected to the discharge channel 22 and can siphone drain by means of the vapor discharging force, are provided. Thus, the drain in the can be promptly discharged, the temperature distribution on the can surface can be eliminated to be unified, and temperature controllability such as the rise speed at the time of can temperature rise can be enhanced.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は磁気記録媒体の製造装置に関し、さらに詳しく
は、スパッタ、蒸着などによって支持体上に磁性膜を形
成する際に用いる円筒状キャンの改良された磁気記録媒
体の製造装置に関するものである。Detailed Description of the Invention (Industrial Application Field) The present invention relates to an apparatus for manufacturing a magnetic recording medium, and more specifically to a cylindrical can used when forming a magnetic film on a support by sputtering, vapor deposition, etc. The present invention relates to an improved magnetic recording medium manufacturing apparatus.

（従来技術） 従来、フレキシブルな支持体上に強磁性金属薄膜を形成
する方法として、例えば真空蒸着、スパッタリング、イ
オンプレーテングなど種々の方法によって、高密度記録
に適した磁気記録媒体が製造されている。そして、これ
らの方法を適用した装置は一般に真空槽内に配設した円
筒状キャンに例えばポリエステルフィルム等の非磁性の
支持体を適当角度に巻き付けて走行させ、この円筒状キ
ャン上において蒸着、スパッタ等によって磁性膜を成膜
するものである。(Prior Art) Conventionally, magnetic recording media suitable for high-density recording have been manufactured using various methods such as vacuum evaporation, sputtering, and ion plating to form a ferromagnetic metal thin film on a flexible support. There is. Devices applying these methods generally run a non-magnetic support such as a polyester film wrapped at an appropriate angle around a cylindrical can placed in a vacuum chamber, and perform vapor deposition and sputtering on this cylindrical can. A magnetic film is formed by a method such as the following.

上記の円筒状キャンは、支持体が接する外周部分の温度
調節ができるように、これまで例えばキャン内部に電気
抵抗加熱器や不燃性オイルを熱媒体として循環できるよ
うに構造が用いられていた。The above-mentioned cylindrical can has a structure in which, for example, an electric resistance heater or nonflammable oil can be circulated as a heat medium inside the can so that the temperature of the outer peripheral portion in contact with the support can be adjusted.

しかしながら、電気抵抗加熱器の場合は、主として輻射
熱を用いるために、電源のオン・オフを繰返す場合にキ
ャン表面の温度が所定温度に対して比較的大きく上下動
しやすく、又、高温度の不燃性オイルを熱媒体としてキ
ャン内部を通すようにした場合には、一般に安全対策上
の設備が大かがりになるなどの問題を抱えていた。さら
に、円筒状キャンは成膜する材料によっては、キャン表
面を適宜冷却できるような冷却構造を備えていることが
好都合であるが、上記各加熱構造と冷却構造とを共存さ
せると、キャン内部構造が複雑化すると共にメンテナン
ス性が極めて悪いという問題があった。However, since electric resistance heaters primarily use radiant heat, the temperature of the can surface tends to fluctuate relatively significantly relative to the predetermined temperature when the power is turned on and off repeatedly. In the case where the heating oil is passed through the can as a heat medium, there are generally problems such as the need for large-scale safety equipment. Furthermore, depending on the material being deposited, it is convenient for the cylindrical can to be equipped with a cooling structure that can appropriately cool the surface of the can, but if the above-mentioned heating structures and cooling structures coexist, There were problems in that it was complicated and maintainability was extremely poor.

そこで、これらの問題、即ちキャン温度の制御性の問題
、安全等の取り扱い性の問題やキャン内部構造の複雑化
の問題を解消すべく、水蒸気を熱媒体にした円筒状キャ
ンが提案されている。Therefore, in order to solve these problems, namely, the problem of controllability of the can temperature, the problem of handling safety etc., and the problem of complicating the internal structure of the can, a cylindrical can using water vapor as a heat medium has been proposed. .

しかし、水蒸気を用いた円筒状キャンの場合は、キャン
内にドレンかたまり易く又極めて排出され難いため、キ
ャン上部とドレンの溜っているキャン下部とでは温度差
が生じてしまう。このため、キャン表面に接している支
持体の成膜時の温度条件を安定に保ちにくくなる。又、
製造装置の稼働開始時における円筒状キャンの昇温速度
がドレンによって遅くなる欠点を有していた。However, in the case of a cylindrical can using water vapor, condensate tends to accumulate inside the can and is extremely difficult to discharge, resulting in a temperature difference between the upper part of the can and the lower part of the can where condensate is collected. This makes it difficult to maintain stable temperature conditions during film formation on the support in contact with the can surface. or,
This method has the disadvantage that the temperature increase rate of the cylindrical can at the start of operation of the manufacturing equipment is slowed down by the drain.

（発明の目的） 本発明は上記各問題点に濫みてなされたものであり、内
部構造の複雑化を伴うことなく広範囲の製造条件に対応
でき、温度制御と共に温度分布が安定するように構成さ
れた円筒状キャンを備えた磁気記録媒体の製造装置を提
供することを目的とするものである。(Objective of the Invention) The present invention has been made in view of the above-mentioned problems, and is capable of responding to a wide range of manufacturing conditions without complicating the internal structure, and is configured to stabilize temperature distribution as well as temperature control. An object of the present invention is to provide an apparatus for manufacturing a magnetic recording medium equipped with a cylindrical can.

（発明の構成） 本発明の上記目的は、円筒状キャンに巻き付いて走行す
るフレキシブルな支持体上に真空成膜法により磁性膜を
形成させる磁気記録媒体の製造装置において、前記円筒
状キャンは回転支軸内に水蒸気の供給路及び排出路を備
え、且つ前記支持体と接する外周部が前記供給路と前記
排出路とに連通した周部流路を形成する２重壁構造であ
ると共に、該周部流路の途中には前記排出路と連通して
茎気排出力によりドレンを吸出し可能なドレン管を複数
備えたことを特徴とする磁気記録媒体の製造装置により
達成される。(Structure of the Invention) The above object of the present invention is to provide an apparatus for manufacturing a magnetic recording medium in which a magnetic film is formed by a vacuum film forming method on a flexible support that travels around a cylindrical can, in which the cylindrical can rotates. It has a double wall structure in which a water vapor supply path and a water vapor discharge path are provided in the support shaft, and an outer peripheral portion in contact with the support body forms a peripheral flow path communicating with the supply path and the discharge path, and This is achieved by a magnetic recording medium manufacturing apparatus characterized in that a peripheral flow path is provided with a plurality of drain pipes that communicate with the discharge path and are capable of sucking out drain by a stem air discharge force.

以下、図面に例示した本発明の実施態様について詳細に
説明する。Embodiments of the present invention illustrated in the drawings will be described in detail below.

第１図は本発明による磁気記録媒体の製造装置の要部で
あり、蒸気によって加熱するように構成された円筒状キ
ャンの回転軸線に沿った断面図を示し、第２図は第１図
に示す円筒状キャンのＡ−入線に沿った断面図及び支持
体へのスパッタリングによる成膜工程を示す慨略図であ
る。FIG. 1 is a cross-sectional view along the axis of rotation of a cylindrical can configured to be heated by steam, which is the main part of a magnetic recording medium manufacturing apparatus according to the present invention, and FIG. 2 is the same as FIG. 1. FIG. 2 is a cross-sectional view of the cylindrical can taken along the A-incoming line, and a schematic diagram showing a film forming process by sputtering on a support.

第１図に示すように、円筒状キャン１はその胴部を回転
自在に支える中空の回転支軸８を有し、。As shown in FIG. 1, the cylindrical can 1 has a hollow rotating support shaft 8 that rotatably supports the body of the can.

該回転支軸８内にはパイプ９が内蔵されており、蒸気の
異なった方向の流れを許容する二重流路を形成できるよ
うに構成されている。また、磁気記録媒体が接するキャ
ン外表面を構成する外周部分は、外周壁２と内周壁３と
によって空間が形成されているとともに、該空間内に螺
旋状に設けられたワイヤー状の仕切り部材５により、キ
ャン端部から他方のキャン端部まで延びた螺旋状の周部
流路４が形成されている。前記周部流路４は連通管６に
より蒸気の供給路２］ａを形成した前記パイプ９の内側
と連通され、もう１つの連通管７により前記パイプ９の
外側の排出路２２ａと連通されている。更にまた、前記
周部流路４の途中には適宜間隔で前記連通管６．７より
も細い３本のドレン管１１１２、■３がキャン半径方向
に延びて前記排出路２２ａにつながっている。A pipe 9 is built into the rotary support shaft 8, and is configured to form a double flow path that allows steam to flow in different directions. Further, in the outer circumferential portion constituting the outer surface of the can in contact with the magnetic recording medium, a space is formed by an outer circumferential wall 2 and an inner circumferential wall 3, and a wire-shaped partition member 5 is spirally provided in the space. As a result, a spiral peripheral flow path 4 extending from one end of the can to the other end of the can is formed. The peripheral flow path 4 communicates with the inside of the pipe 9 forming the steam supply path 2]a through a communication pipe 6, and communicates with the discharge path 22a outside the pipe 9 through another communication pipe 7. There is. Furthermore, three drain pipes 1112 and 13, which are thinner than the communication pipe 6.7, extend in the can radial direction and are connected to the discharge passage 22a at appropriate intervals along the circumferential flow path 4.

前記回転支軸８は製造装置のケーシング２ｏに密封固定
された軸受部１ｏに回転自在に保持されており、キャン
胴部と一緒に回転するが、前記パイプ９は蒸気の供給パ
イプ２１に接続固定されているので、パイプ先端９ａと
密封部材９ｂとが嵌合して摺動出来るように構成されて
いる。The rotating support shaft 8 is rotatably held by a bearing portion 1o that is sealed and fixed to a casing 2o of the manufacturing device, and rotates together with the can body, while the pipe 9 is connected and fixed to a steam supply pipe 21. Therefore, the pipe tip 9a and the sealing member 9b are configured to be able to fit and slide.

磁気記録媒体の製造にあたり、その準備として前記円筒
状キャン１に前記供給パイプ２１を介して蒸気を所定の
圧力で送り込む。送り込まれた蒸気は前記パイプ９を通
ってキャン最深部（図中左方向）まで行き、前記連通管
６から前記周部流路４内に送り込まれ外周部分を螺旋状
に流れて、前記連通管７を通って前記排出路２２ａを経
て排出パイプ２２からキャン外部に排出される。In preparation for manufacturing a magnetic recording medium, steam is fed into the cylindrical can 1 through the supply pipe 21 at a predetermined pressure. The steam sent in passes through the pipe 9 to the deepest part of the can (to the left in the figure), is sent into the peripheral flow path 4 from the communication pipe 6, flows spirally around the outer peripheral part, and then passes through the communication pipe 6. 7 and is discharged from the discharge pipe 22 to the outside of the can via the discharge path 22a.

このようにキャン表面が蒸気によって所定の温度まで高
められる昇温過程に於いて、前記周部流路４には蒸気の
凝結水（ドレン）が発生するが、前記ドレン管１１１２
．１３によって吸い上げて迅速に排出することが出来る
。すなわち、前記ドレン管】ｌ、１２．１３が前記周部
流路４の途中から前記排出路２１ａが繋がっていること
によって、キャン回転による遠心力に勝るサイホン作用
によって効果的に排出できる。従って、ドレンによる昇
温妨害作用を極めて効果的に回避することができ、装置
の温度立ち上がり時間を短くすることができる。In this temperature raising process in which the can surface is raised to a predetermined temperature by steam, condensed water (drain) of the steam is generated in the peripheral flow path 4, but the drain pipe 1112
．． 13 allows it to be sucked up and quickly discharged. That is, since the drain pipes 1 and 12.13 are connected to the discharge passage 21a from the middle of the peripheral flow passage 4, they can be effectively discharged by a siphon action that overcomes the centrifugal force caused by can rotation. Therefore, it is possible to very effectively avoid the effect of hindering temperature rise due to the drain, and it is possible to shorten the temperature rise time of the device.

また、成膜時においては第２図に示すように、支持体３
３はガイドローラ３２を介して前記円筒状キャン１に適
宜張力で巻きつけられて一定方向（矢印Ｂ方向）に走行
されており、基本的にはキャン下方のスパッタ源３０　
（ターゲット）にイオン銃（図示しない）などでイオン
ビームを適宜角度で照射することによってターゲット表
面から放出される所要のスパッタ原子の作用によって、
またマスク３１などにより成膜域等の制御をしながら前
記支持体３３の表面に磁性薄膜を形成する。Also, during film formation, as shown in FIG.
3 is wound around the cylindrical can 1 with appropriate tension via a guide roller 32 and runs in a certain direction (direction of arrow B), and basically the sputter source 30 is located below the can.
(target) by irradiating an ion beam at an appropriate angle with an ion gun (not shown), etc., and by the action of the required sputtered atoms released from the target surface.
Further, a magnetic thin film is formed on the surface of the support 33 while controlling the film forming area etc. using a mask 31 or the like.

このような成膜工程において、前記円筒状キャン１は熱
媒体が熱伝達効率の良い蒸気であるとともにキャン内に
ドレンが溜まらないように構成されているので、キャン
全体の温度が一定かつ安定に保たれ前記支持体３３の温
度を成膜に適する好条件に保つことができる。従って、
例えば前記円筒状キャンｌをステンレス製、直径５００
φ、幅４００龍に構成し、蒸気温度１５０℃、蒸気圧１
５　ｋｇ　／　ｃｔの場合において、キャン上部とキャ
ン下部の表面温度差を２℃以内（ドレン管が無い場合は
同し条件で５℃程度の表面温度差を生しる）にすること
ができた。In such a film forming process, the cylindrical can 1 uses steam as a heat medium with good heat transfer efficiency and is configured to prevent condensate from accumulating inside the can, so that the temperature of the entire can remains constant and stable. Thus, the temperature of the support 33 can be maintained at favorable conditions suitable for film formation. Therefore,
For example, the cylindrical can L is made of stainless steel and has a diameter of 500 mm.
φ, width 400mm, steam temperature 150℃, steam pressure 1
In the case of 5 kg/ct, we were able to keep the surface temperature difference between the upper part of the can and the lower part of the can within 2°C (if there was no drain pipe, there would be a difference in surface temperature of about 5°C under the same conditions). .

な、本実施態様における蒸気の排気系においては、前記
排出パイプ２２を、冷却水の入った水槽内に比較的長い
距離蛇行させることにより、使用済みの蒸気を低温にす
ると共に凝結させ、あまり大がかりな装置を用いること
なく自然に排出するように構成されている。In the steam exhaust system of this embodiment, the exhaust pipe 22 is meandered for a relatively long distance into a water tank containing cooling water, so that the used steam is lowered to a lower temperature and condensed. It is constructed so that it can be discharged naturally without using any special equipment.

本実施態様においては、前記周部流路４が螺旋状である
ことにより、蒸気の流れをキャン外周部分に沿った整然
とした流れにでき、温度分布の均一化の向上および熱伝
達の高効率化を図ることができる。In this embodiment, since the circumferential passage 4 has a spiral shape, the steam can flow in an orderly manner along the outer circumference of the can, improving uniformity of temperature distribution and high efficiency of heat transfer. can be achieved.

上記実施態様においては、キャン内に蒸気を通す場合に
ついて述べたが、本発明による装置は蒸気の代わりに冷
水を通すようにするだけで、そのまま冷却用にも簡単に
使用することができる。In the above embodiment, a case has been described in which steam is passed through the can, but the device according to the present invention can be easily used for cooling as is by simply passing cold water instead of steam.

、（発明の効果） 以上述べたように、本発明によれば円筒状キャンがその
回転支軸受内に水蒸気の供給路及び排出路を備え、且つ
磁性膜を形成する支持体と接する外周部分が前記供給路
ならびに排出路とに連通した周部流路を形成する２重壁
構造とし、さらに前記周部流路には前記排出路に連通し
たドレン管を複数備えた構造であるので、キャン内のド
レン排出が迅速にてきキャン表面の温度分布のばらつき
をなくし均一化できると共にキャン昇温時の立ち上がり
速度が向上する等の温度制御性が向上する。(Effects of the Invention) As described above, according to the present invention, the cylindrical can is provided with a water vapor supply path and a water vapor discharge path within its rotation support bearing, and the outer peripheral portion in contact with the support forming the magnetic film is The double-walled structure forms a circumferential passage communicating with the supply passage and the discharge passage, and the circumferential passage includes a plurality of drain pipes communicating with the discharge passage. The drain can be quickly discharged to eliminate variations in the temperature distribution on the surface of the can, making it uniform, and improving temperature controllability, such as increasing the rising speed when raising the temperature of the can.

又、キャン内部には蒸気の通る流路以外に別の冷却用媒
体の通る流路を設けな（とも蒸気用の流路を用いて冷水
を流すことができるので、従来のようにキャン内部構造
の？Ｊｉ　ｌ化を伴うことなく、円筒状キャンの使用範
囲を広げることができる。従って、高品質な磁気記録媒
体を製造するために必要な好条件を整えることのできる
円筒状キャンを備えた磁気記録媒体の製造装置を提供す
ることができる。In addition, there is no need to provide a flow path for another cooling medium inside the can in addition to the flow path for steam. It is possible to expand the range of use of cylindrical cans without having to change the magnetic recording medium.Therefore, the use of cylindrical cans that can provide favorable conditions necessary for manufacturing high-quality magnetic recording media. An apparatus for manufacturing a magnetic recording medium can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の磁気記録媒体の製造装置の一実施Ｂ様
を示す要部断面図、第２図は第１図に示す円筒状キャン
のＡ−Ａ線に沿った部分の断面図及び支持体への成膜工
程を示す概略図である。 ｌ・・・円筒状キャン、２・・・外周壁、３・・・内周
壁、４・・・周部流路、５・・・仕切り部材、６．７・
・・連通管、８・・・回転支軸受、９・・・パイプ、９
ａ・・・パイプ先端、９ｂ・・・密封部材、１０・・・
軸受部、１１．１２．１３・・・ドレン管、２０・・・
ケーシング、２１・・・供給パイプ、２１ａ・・・供給
路、２２・・・排出パイプ、２２ａ・・・排出路、３０
・・・スパッタ源、３１・・・マスク、３２・・・ガイ
ドローラ、３３・・・（ほか３名） 第　　２　　図 ３０、 ＝＝出 手続ネ山正書 特Ｒ午庁長′白　　殿　　　　　　平成　１」”　１月
２５８５、　補正命令の日付＝　（自　発）FIG. 1 is a sectional view of a main part showing an embodiment B of the magnetic recording medium manufacturing apparatus of the present invention, and FIG. 2 is a sectional view of a portion of the cylindrical can shown in FIG. 1 along line A-A. It is a schematic diagram showing a film formation process on a support body. l... Cylindrical can, 2... Outer peripheral wall, 3... Inner peripheral wall, 4... Peripheral flow path, 5... Partition member, 6.7.
...Communication pipe, 8...Rotation support bearing, 9...Pipe, 9
a... Pipe tip, 9b... Sealing member, 10...
Bearing part, 11.12.13...Drain pipe, 20...
Casing, 21... Supply pipe, 21a... Supply path, 22... Discharge pipe, 22a... Discharge channel, 30
...Spatter source, 31...Mask, 32...Guide roller, 33...(and 3 other people) 2nd Figure 30, ==Issuance Procedures Neyama Seisho TokuRyou Bureau Chief' Haku-dono Heisei 1”” January 2585, date of amendment order = (voluntary)

Claims (1)

【特許請求の範囲】[Claims] 円筒状キャンに巻き付いて走行するフレキシブルな支持
体上に真空成膜法により磁性膜を形成させる磁気記録媒
体の製造装置比おいて、前記円筒状キャンは回転支軸内
に水蒸気の供給路及び排出路を備え、かつ前記支持体と
接する外周部が前記供給路と前記排出路とに連通した周
部流路を形成する２重壁構造であると共に、該周部流路
の途中には前記排出路と連通して蒸気排出力によりドレ
ンを吸い出し可能なドレン管を複数備えたことを特徴と
する磁気記録媒体の製造装置。In a manufacturing device for a magnetic recording medium, in which a magnetic film is formed by a vacuum film forming method on a flexible support that runs around a cylindrical can, the cylindrical can has a water vapor supply path and a water vapor discharge path within a rotating shaft. It has a double wall structure in which an outer circumferential portion that is in contact with the support body forms a circumferential channel that communicates with the supply channel and the discharge channel, and the discharge channel is provided in the middle of the circumferential channel. 1. An apparatus for manufacturing a magnetic recording medium, comprising a plurality of drain pipes communicating with a pipe and capable of sucking out drain by means of steam exhaust force.