JPH01189443A - Clean room unit - Google Patents
Clean room unitInfo
- Publication number
- JPH01189443A JPH01189443A JP1097988A JP1097988A JPH01189443A JP H01189443 A JPH01189443 A JP H01189443A JP 1097988 A JP1097988 A JP 1097988A JP 1097988 A JP1097988 A JP 1097988A JP H01189443 A JPH01189443 A JP H01189443A
- Authority
- JP
- Japan
- Prior art keywords
- air
- unit
- box body
- fan
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 230000003068 static effect Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 238000007664 blowing Methods 0.000 abstract description 2
- 239000002245 particle Substances 0.000 abstract description 2
- 239000000498 cooling water Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 230000003749 cleanliness Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、半導体工場や医薬品工場の既存の建物内に
クリーンルームユニットを配置することにより，配置・
移設が自由フ，天井高さを十分確保できしかも高度な清
浄度のクリーンルームな提供するもの！ある。なお床部
に吸込ロユニツトヲ設けると吹出口ユニットから吹出さ
れた気流は並行流のピストン７ロー状となり，理想的な
気流状態・清浄度が得られる。[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a clean room unit that can be installed in an existing building of a semiconductor factory or a pharmaceutical factory.
It provides a clean room that can be moved freely, has sufficient ceiling height, and has a high level of cleanliness! be. If the suction unit is installed on the floor, the airflow blown out from the outlet unit will be in the shape of parallel flow pistons, providing ideal airflow conditions and cleanliness.
半導体工場など高度な清浄度を必要どする工場のクリー
ンルームの構築の方法として１部屋全体をクリーンルー
ム化する方法と、クリーンルームユニットを天井から吊
って、トンネル状のクリーンルームな構築する方法があ
る。前者は生産機器のレイアウトなどに対する自由度は
高いものの。There are two ways to construct a clean room in a factory that requires a high degree of cleanliness, such as a semiconductor factory, by converting an entire room into a clean room, and by suspending a clean room unit from the ceiling to create a tunnel-shaped clean room. Although the former has a high degree of freedom regarding the layout of production equipment, etc.
設備費と運転費は美大なものとなる。後者は清浄域が限
定されるが運転費は少なくて済む。Equipment costs and operating costs will be enormous. The latter has a limited clean area, but has low operating costs.
第２図は従来のクリーンルームユニットヲ天井から吊る
ことによってクリーンルームな構築する方法の説明図１
ある、クリーンルームユニット５０はフィルタチャンバ
５１とファンチャンバ５３から構成され、その内部にそ
れぞれ高性能フィルタ５２、ファン５４が設置されてい
る。送風機で吸引された空気はフィルタチャンバに送出
され、高性能フィルタ″′１％濾過されて室内に吹き出
される。Figure 2 is an explanatory diagram 1 of how to construct a clean room by hanging a conventional clean room unit from the ceiling.
A certain clean room unit 50 is composed of a filter chamber 51 and a fan chamber 53, and a high performance filter 52 and a fan 54 are installed inside the filter chamber 51 and fan chamber 53, respectively. The air sucked in by the blower is sent to the filter chamber, filtered by 1% by a high-performance filter, and then blown into the room.
この時高性能フィルタの抵抗圧損により、濾過された空
気はほぼ一様の風速で室内に吹出されることになる。At this time, the filtered air is blown into the room at a substantially uniform wind speed due to the resistance pressure drop of the high-performance filter.
従来のクリーンルームユニットを天井部に設置する方法
はフィルターチャンバ内に高性能フィルタが設けられ、
また空気の通路も確保しなければならず、高さ寸法が大
きくなる欠点があった。また吊り込む際にも作業スペー
スが必要となり、結局建物の階扁を有効に利用すること
がフきす、クリーンルーム内の有効天井高が小さくなり
更に天井を貼り替えなければならないという致命的欠点
があった。ＬＳＩの生産機器のうちには背の高いものも
あり従来の方法は不都合フあった。In the conventional method of installing a clean room unit on the ceiling, a high-performance filter is installed inside the filter chamber.
In addition, an air passage must be secured, which has the disadvantage of increasing the height dimension. In addition, a work space is required when hanging, and in the end, it is difficult to make effective use of the floor space of the building, which has the fatal disadvantage of reducing the effective ceiling height in the clean room and requiring the ceiling to be replaced. Ta. Some of the LSI production equipment is tall, so the conventional method was inconvenient.
またフィルタチャンバは鋼板等で作るため、重量が大き
くなり、いったん設置してしまうと移設はほぼ不可能に
近かった。ところが半導体産業！はＬＳＩの集積度が３
年″１１％４倍となると言われるほど技術革新が激しい
ので、生産機器の取り替えやライン変更は頻繁に行われ
る。従って、容易に設置、移動が１きるクリーンルーム
ユニットが望まれていた、
〔問題点を解決するための手段〕
この発明では、床置自立のファンフィルタユニットの上
に、清浄空気を吹出す多孔板を有する吹出口ユニットを
載せ、床部に天板全体が吸込面となる吸込口ユニットを
設け、ファンフィルタユニットと吸込口ユニットを押し
つけ設置するととＫより、天井高の十分確保！きるクリ
ーンルームが得られたものｆある。（尚天井高さが必要
なときは、吸込口ユニットは省略することが１きる。、
）〔実施例〕
第１図は実施例を示す説明図ｔあり、以下この図により
説明する。図において、床置・自立の箱体１の内部に送
風機１５、高性能エアフィルタ１１、冷水コイル１６．
温水コイル１４、加湿器１２、を設け、床付近に空気吸
引ロ１７最上部に空気吹出口１６を設けてファンフイ”
ルタユニット１としている。吸引口１７から吸引された
空気はファン１５−１’加圧され、冷水コイル１３など
で温湿度調整された後、奥行の大きい原型高性能エアフ
ィルタ１１″ｔ％汚染粒子が除去され、クリーンな状態
フ吹出口１６から出てゆく、原型高性能エアフィルタ１
１はＦ紙の折り込み長さを極力大きくしたもので、炉材
通過風速を小さく押えて塵埃捕集効率は高く保ちつつ大
風量処理を可能にしている、吹出口ユニット２は非帯電
性の樹脂又は非帯電性処理した樹脂１作ることにより、
その重量を軽減するとともに塵埃が壁面内に付着するこ
とを防いｆいる。吹出口ユニット２にはファンフィルタ
ユニットの吹出口と同じ大きさの空気流入口２１と空気
が流路抵抗や孔を通過する際の圧損を考慮して、均一速
度で流出するように孔径な決めた多数の細口を設けた空
気吹出部２２および吹出口ユニット２とファンフィルタ
ユニット１を連結させるための接続機ｓ４から成り豆っ
ている、吸込口ユニット３は上面の全面にわたってグレ
ーチング床材を敷きつめるか、必要箇所に複数個の吸込
口６１をもち、また場合によっては側面にも吸込口（図
示せず）をもつもの１．吸引された空気は空気流出口６
２より出てゆき、吸込口１７からファンフィルタユニッ
ト１内に入る。吸込口ユニット３は吹出口ユニット２か
ら吹出された気流をピストンクロー状に流すために非常
に有効受ある。Furthermore, since the filter chamber is made of steel plate or the like, it is heavy and once installed, it is almost impossible to relocate it. However, the semiconductor industry! The LSI integration degree is 3
As technological innovation is so intense that it is said to increase by 11% per year and quadruple, production equipment must be replaced and lines changed frequently.Therefore, there was a desire for a clean room unit that could be easily installed and moved.[Problem] [Means for Solving the Problems] In the present invention, an air outlet unit having a perforated plate for blowing out clean air is mounted on a floor-standing free-standing fan filter unit, and a suction outlet unit is installed on the floor where the entire top plate becomes the suction surface. In some cases, a clean room with sufficient ceiling height can be obtained by installing a fan filter unit and a suction port unit by pressing the fan filter unit and suction port unit together. can be omitted.
) [Example] FIG. 1 is an explanatory diagram t showing an example, and the following description will be made with reference to this diagram. In the figure, inside a floor-standing, free-standing box 1, there is a blower 15, a high-performance air filter 11, a cold water coil 16.
A hot water coil 14 and a humidifier 12 are provided, and an air suction port 17 is provided near the floor with an air outlet 16 at the top.
router unit 1. The air sucked in from the suction port 17 is pressurized by the fan 15-1', and after the temperature and humidity are adjusted by the cold water coil 13, etc., the air is filtered into a large-depth prototype high-performance air filter 11'', where t% of contaminant particles are removed and the air is clean. Prototype high-performance air filter 1 exiting from the air outlet 16
1 is the F paper with the folded length as large as possible, which enables large air volume processing while keeping the wind speed passing through the furnace material low and keeping the dust collection efficiency high.The air outlet unit 2 is made of non-static resin. Or by making a non-static treated resin 1,
This reduces the weight and prevents dust from adhering to the wall surface. The outlet unit 2 has an air inlet 21 that is the same size as the outlet of the fan filter unit, and the hole diameter is determined so that the air flows out at a uniform speed, taking into account flow path resistance and pressure loss when passing through the hole. The suction port unit 3 consists of an air blowout section 22 with a large number of narrow ports and a connecting device s4 for connecting the blowout port unit 2 and the fan filter unit 1.The suction port unit 3 is made up of a grating floor material spread over the entire upper surface. 1. Or, it has a plurality of suction ports 61 at necessary locations, and in some cases also has a suction port (not shown) on the side. The sucked air is sent to the air outlet 6
2 and enters the fan filter unit 1 through the suction port 17. The suction port unit 3 is a very effective receiver for causing the airflow blown out from the blowout port unit 2 to flow in a piston claw shape.
天井高さがさらに必要な場合には、吸込口ユニット３は
設置しなくともよい。この場合、吹出口ユニット２から
吹出された気流は直接ファンフィルタユニット１の吸込
口１７から吸引される。If a higher ceiling height is required, the suction port unit 3 may not be installed. In this case, the airflow blown out from the air outlet unit 2 is directly sucked through the suction port 17 of the fan filter unit 1.
この発明のクリーンルームユニットは床置自立のファン
フィルタユニットに吹出口ユニットと床吸込口ユニット
を接続することによりクリーンルームな構築することが
マきるの！、設置・移設が容易であり、吹出口ユニット
は空気の通路と分配の役割のみなので薄型軽量とするこ
とが１き、天井高さを高く確保できる。床吸込口を取り
外せば更に高さを確保することができる、The clean room unit of this invention allows you to construct a clean room by connecting the air outlet unit and floor suction port unit to the floor-standing free-standing fan filter unit! It is easy to install and relocate, and since the air outlet unit only plays the role of air passage and distribution, it can be made thin and lightweight, and a high ceiling height can be ensured. Further height can be secured by removing the floor suction port.
第１図は本発明の実施例、第２図は従来のユニットタイ
プクリーンルームな示す説明図である。
符号の説明
１・・・ファンフィルタユニット、１１・・・ＨＥＰＡ
フィルタ、１２・・・加湿器、１６・・・冷水コイル、
１４・・・温水コイル、１５・・・ファン、１６・・・
吹出口。
１７・・・吸込口、２・・・吹出口ユニット、２１・・
・流入口、２２・・・空気吹出口、６・・・吸込口ユニ
ット、３１・・・吸込口、３２・・・空気流出口、３３
・・・吸込口。
４・・・接続機構。FIG. 1 is an explanatory diagram showing an embodiment of the present invention, and FIG. 2 is an explanatory diagram showing a conventional unit type clean room. Explanation of symbols 1...Fan filter unit, 11...HEPA
Filter, 12... Humidifier, 16... Cold water coil,
14... Hot water coil, 15... Fan, 16...
Air outlet. 17... Suction port, 2... Outlet unit, 21...
・Inflow port, 22... Air outlet, 6... Suction port unit, 31... Suction port, 32... Air outlet, 33
...Suction port. 4... Connection mechanism.
Claims (5)
ィルタおよび最上部に空気吹出口をもつ箱体と、空気を
導いて下方へ吹出す箱体とから成るクリーンルームユニ
ット。(1) A clean room unit consisting of a box body with an air inlet at the bottom, a fan above it, a high-performance filter, and an air outlet at the top, and a box body that guides and blows out air downward.
空気導入口に天板部に吸込口をもち、側板に空気導出口
を有する箱体を押しつけ設置することを特徴とした前記
特許請求の範囲第１項に記載したクリーンルームユニッ
ト。(2) The above-mentioned patent claim is characterized in that a box body having a suction port on the top plate and an air outlet port on the side plate is pressed against the lower air inlet of the box body having the fan and the high-performance filter. Clean room units listed in Scope 1.
通過風速を小さくしたことを特徴とした前記特許請求の
範囲第１項に記載したクリーンルームユニット。(3) The clean room unit as set forth in claim 1, wherein the high-performance filter has an increased depth and a reduced air velocity passing through the filter material.
施した樹脂で作り、ファンとフィルタを有する箱体の空
気吹出口と同位置同寸法の開口をもち、ファンとフィル
タを有する箱体と接しないクリーンルームの天井に対応
する部分に抵抗損失を考慮して空気が均一に流れるよう
に口径を決めた孔を多数もつことを特徴とする前記特許
請求の範囲第１項に記載したクリーンルームユニット。(4) The above-mentioned blow-off box is made of non-static resin or resin treated with non-static treatment, and has an opening in the same position and size as the air outlet of the box body, which has a fan and a filter, and has a fan and a filter. Claim 1 is characterized in that a portion corresponding to the ceiling of the clean room that is not in contact with the box body has a large number of holes whose diameters are determined so that air flows uniformly in consideration of resistance loss. clean room unit.
吹出口を有する箱体を載せて両者を締結固定することを
特徴とした前記特許請求の範囲第１項に記載したクリー
ンルームユニット。(5) The clean room unit as set forth in claim 1, wherein a box body having an air outlet is placed on top of the box body having the fan and filter, and both are fastened and fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1097988A JPH01189443A (en) | 1988-01-22 | 1988-01-22 | Clean room unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1097988A JPH01189443A (en) | 1988-01-22 | 1988-01-22 | Clean room unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01189443A true JPH01189443A (en) | 1989-07-28 |
Family
ID=11765279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1097988A Pending JPH01189443A (en) | 1988-01-22 | 1988-01-22 | Clean room unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01189443A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04148139A (en) * | 1990-10-11 | 1992-05-21 | Asahi Kogyosha:Kk | Clean room |
| JP2002156137A (en) * | 2000-11-17 | 2002-05-31 | Takasago Thermal Eng Co Ltd | Air-conditioning humidifying equipment |
| JP2021011966A (en) * | 2019-07-04 | 2021-02-04 | 株式会社Trinc | Clean room unit and clean room |
| CN113847688A (en) * | 2021-09-18 | 2021-12-28 | 珠海格力电器股份有限公司 | Internal fan control method and device, air conditioner and computer readable storage medium |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59181167A (en) * | 1983-03-30 | 1984-10-15 | 日立プラント建設株式会社 | Sickroom unit |
-
1988
- 1988-01-22 JP JP1097988A patent/JPH01189443A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59181167A (en) * | 1983-03-30 | 1984-10-15 | 日立プラント建設株式会社 | Sickroom unit |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04148139A (en) * | 1990-10-11 | 1992-05-21 | Asahi Kogyosha:Kk | Clean room |
| JP2002156137A (en) * | 2000-11-17 | 2002-05-31 | Takasago Thermal Eng Co Ltd | Air-conditioning humidifying equipment |
| JP2021011966A (en) * | 2019-07-04 | 2021-02-04 | 株式会社Trinc | Clean room unit and clean room |
| CN113847688A (en) * | 2021-09-18 | 2021-12-28 | 珠海格力电器股份有限公司 | Internal fan control method and device, air conditioner and computer readable storage medium |
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