JPH01178858A - Manufacture of humidity sensor - Google Patents
Manufacture of humidity sensorInfo
- Publication number
- JPH01178858A JPH01178858A JP292188A JP292188A JPH01178858A JP H01178858 A JPH01178858 A JP H01178858A JP 292188 A JP292188 A JP 292188A JP 292188 A JP292188 A JP 292188A JP H01178858 A JPH01178858 A JP H01178858A
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- resistance value
- sensitive film
- comb
- humidity sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 8
- 244000126211 Hericium coralloides Species 0.000 claims description 7
- 238000000605 extraction Methods 0.000 claims description 6
- 238000009966 trimming Methods 0.000 abstract description 12
- 239000007788 liquid Substances 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 229920000620 organic polymer Polymers 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は有機高分子膜を有する湿度センナの製造方法に
関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a method for manufacturing a humidity sensor having an organic polymer film.
（発明の概要）
本発明は湿度センナの製造上の抵抗値のバラツキを調整
し、歩留を向上させ安価なセンサを提供するために、く
し歯電極及び信号取り出し用電極をセラミック基板上に
形成後、前記くし歯電極を覆うように感湿膜を形成し、
感湿膜及びくし歯電極をレーザートリミングを行い、さ
らに感湿膜を保護膜で覆った湿度センサの製造方法であ
る。(Summary of the Invention) The present invention forms comb-shaped electrodes and signal extraction electrodes on a ceramic substrate in order to adjust the variation in resistance value during manufacturing of humidity sensors, improve yield, and provide an inexpensive sensor. After that, a moisture-sensitive film is formed to cover the comb-shaped electrode,
This is a method for manufacturing a humidity sensor in which a moisture-sensitive film and a comb-shaped electrode are laser trimmed, and the humidity-sensitive film is further covered with a protective film.
（従来の技術）
従来、第５図（ａ）（ｂ）及び第６図に示されるように
セラミック基板１１上に信号数シ出し用電極０Ｗ−Ｐｄ
）１２及びくし歯電極（Ａｕ）１３を形成後、くし歯電
極１３を覆うように感湿膜液を塗布・乾燥させ、感湿膜
１４を形成し、その後保護膜１５及び保護膜１６を形成
する工程にて製造される。(Prior Art) Conventionally, as shown in FIGS. 5(a) and 6, electrodes 0W-Pd for outputting signal numbers are provided on a ceramic substrate 11.
) 12 and the comb-shaped electrode (Au) 13, a moisture-sensitive film liquid is applied and dried to cover the comb-shaped electrode 13 to form the moisture-sensitive film 14, and then the protective film 15 and the protective film 16 are formed. Manufactured in the process of
また有機高分子膜湿度センナの抵抗値調整は感湿膜液の
濃度調整、コーティング膜厚、対向電極の面積等の制御
によシ行われている。Further, the resistance value of the organic polymer film humidity sensor is adjusted by controlling the concentration of the humidity sensitive film liquid, the coating film thickness, the area of the counter electrode, etc.
（発明が解決しようとする問題点）
上記のように抵抗値の調整を行っていたが、抵抗値のば
らつきも大きく、また感湿膜形成後、抵抗値の再調整は
行われておらず目標範囲外のセンサは不良として処分さ
れている。このため歩留りが悪く製造原価が高くなシや
すい。(Problems to be Solved by the Invention) Although the resistance value was adjusted as described above, the resistance value varied greatly, and the resistance value was not readjusted after the moisture-sensitive film was formed. Sensors outside the range are disposed of as defective. This tends to result in poor yields and high manufacturing costs.
（問題を解決するだめの手段）
本発明はくし歯電極及び信号取り出し用電極をセラミッ
ク基板上に形成後、前記くし歯電極を覆うように感湿膜
を形成し、感湿膜及びくし歯電極をレーザートリミング
を用いて抵抗値を調節し、さらに保護膜を形成する。(Means for solving the problem) The present invention forms a comb-shaped electrode and a signal extraction electrode on a ceramic substrate, and then forms a moisture-sensitive film to cover the comb-shaped electrode. The resistance value is adjusted using laser trimming, and a protective film is further formed.
（発明の作用）
本発明は上記のように湿度センサの抵抗調整を感湿膜形
成後に行うため、抵抗値のしぼり込みが可能となり、歩
留の改善がはかれるとともに製造原価を低くおさえるこ
とが可能となる。(Function of the invention) As described above, the resistance of the humidity sensor is adjusted after the humidity sensitive film is formed, so the resistance value can be reduced, yield can be improved, and manufacturing costs can be kept low. becomes.
（実施例）
以下に本発明の一実施例を図面を用いて説明する０
第１図は、本発明の一実施例のレーザートリミング後の
状態及びレーザートリミングの施行箇所を示す図、第２
図は第１図のＡ−Ａ’断面図、第３図は、同実施例の湿
度センサの抵抗等価回路図、第４図は同実施例の工程フ
ローチャートを示す。(Example) An example of the present invention will be described below with reference to the drawings. Fig. 1 is a diagram showing the state after laser trimming of an example of the present invention and the location where laser trimming is performed.
The figure shows a sectional view taken along the line AA' in FIG. 1, FIG. 3 shows a resistance equivalent circuit diagram of the humidity sensor of the same embodiment, and FIG. 4 shows a process flowchart of the same embodiment.
ｌはレーザートリミング跡、２は感湿膜、３はくし歯電
極、４はセラミック基板、５は信号取り出し用電極、６
はレーザートリミング部である。1 is a laser trimming trace, 2 is a moisture-sensitive film, 3 is a comb-shaped electrode, 4 is a ceramic substrate, 5 is a signal extraction electrode, 6
is the laser trimming section.
第１図及び第４図に示されるようにくし歯電極３及び信
号取り出し電極５は、セラミック基板４上に形成され、
基板洗浄後、くし歯電極３を覆うように感湿膜液を塗布
・乾燥させ感湿膜２を形成する。感湿膜２を形成後、湿
度センサの抵抗値を計測し、目標抵抗値以下の場合、レ
ーザートリミング装置によシ感湿膜２及びくし歯電極３
をともに昇華し電気的に切断する。このトリミングによ
り切断部分の抵抗値は無限大となり湿度センサの抵抗値
はくし歯電極面積減少分、抵抗値が増加する。具体的に
は、第３図に示す湿度センサの抵抗等価回路のＲ＋ 、
Ｒｚ、 Ｒ３がオープン状態になることに等しい。以
上の様にレーザートリミング装置を用いてくし歯電極Ｒ
１−ＲＩ２をＲ１より順次切断し、湿度センサの抵抗値
を目標値以内になるまで調節し、その後保護膜（第５図
参照、１５．１６に相当する）を形成する。ここでＲｏ
とはくし歯電極Ｒ】〜ＲＩ２のすべてを切断した時のセ
ンサの抵抗値である。As shown in FIGS. 1 and 4, the comb tooth electrode 3 and the signal extraction electrode 5 are formed on a ceramic substrate 4,
After cleaning the substrate, a moisture-sensitive film liquid is applied and dried to cover the interdigitated electrodes 3 to form a moisture-sensitive film 2. After forming the humidity sensitive film 2, the resistance value of the humidity sensor is measured, and if the resistance value is less than the target resistance value, the humidity sensitive film 2 and the comb electrode 3 are removed by a laser trimming device.
Both are sublimated and electrically cut. By this trimming, the resistance value of the cut portion becomes infinite, and the resistance value of the humidity sensor increases by the decrease in the area of the comb-like electrodes. Specifically, R+ of the resistance equivalent circuit of the humidity sensor shown in FIG.
This is equivalent to Rz and R3 being open. As described above, the comb-tooth electrode R is
1-RI2 is cut sequentially from R1, the resistance value of the humidity sensor is adjusted until it falls within the target value, and then a protective film (see FIG. 5, corresponding to 15.16) is formed. Here Ro
is the resistance value of the sensor when all of the comb-tooth electrodes R] to RI2 are cut.
（発明の効果）
このように抵抗値調節後保護膜を形成するので、抵抗値
のばらつきもなく、また、歩留の改善もはかれるので安
価で高精度な湿度センサを市場に提供可能である。(Effects of the Invention) Since the protective film is formed after adjusting the resistance value in this way, there is no variation in resistance value, and the yield can be improved, so that inexpensive and highly accurate humidity sensors can be provided on the market.
第１図は本発明の一実施例の湿度センサのレーザートリ
ミング後の状態図、第２図は第１図のＡ−Ａ’断面図、
第３図は同実施例の湿度センサの抵抗等価回路図、第４
図は同実施例の工程フローチャート、第５図は従来例の
湿度センサの外観図、第６図は従来例の工程フローチャ
ートである。
■・・レーザートリミング跡、２・・・感湿膜、３・・
・くし歯電極、４・・・セラミック基板、５・・・信号
取り出し用電極、６・・・レーザートリミング部。
代理人 弁理士 杉 山 毅 至（他１名）第１図
第３図
（ａ） （ｂ）
第５図
、′を埒
塗布
社層
工喧才
Ｊ膚すコプ
π巧−ｉ’ｉ。
Ｉ【乾プ
一一一一一一一一一一一一一一一、とシＬ戸−−−ぞｉ
−一一−−−−−−−−−−−−−」≠Ｅ：些可［−第
６ ニシロ
ロ
］
ロ
ロ
日
］
］
］FIG. 1 is a state diagram of a humidity sensor according to an embodiment of the present invention after laser trimming, FIG. 2 is a sectional view taken along line AA' in FIG.
Figure 3 is a resistance equivalent circuit diagram of the humidity sensor of the same example.
This figure is a process flowchart of the same embodiment, FIG. 5 is an external view of a conventional humidity sensor, and FIG. 6 is a process flowchart of a conventional example. ■...Laser trimming marks, 2...Moisture sensitive film, 3...
- Comb tooth electrode, 4... Ceramic substrate, 5... Signal extraction electrode, 6... Laser trimming section. Agent Patent attorney Takeshi Sugiyama (and 1 other person) Figure 1 Figure 3 (a) (b)
FIG. I Possible [-6th Nishiroro] Roro day] ] ]
Claims (1)
基板上に形成後、前記くし歯電極を覆うように感湿膜を
形成し、感湿膜及びくし歯電極をレーザートリミングを
行い、さらに感湿膜を保護膜で覆うことを特徴とする湿
度センサの製造方法。1. After forming a comb-tooth electrode and a signal extraction electrode on a ceramic substrate, a moisture-sensitive film is formed to cover the comb-tooth electrode, the moisture-sensitive film and the comb-tooth electrode are laser trimmed, and the moisture-sensitive film is further protected. A method for manufacturing a humidity sensor characterized by covering it with a film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP292188A JPH01178858A (en) | 1988-01-08 | 1988-01-08 | Manufacture of humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP292188A JPH01178858A (en) | 1988-01-08 | 1988-01-08 | Manufacture of humidity sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01178858A true JPH01178858A (en) | 1989-07-17 |
Family
ID=11542813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP292188A Pending JPH01178858A (en) | 1988-01-08 | 1988-01-08 | Manufacture of humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01178858A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1387164A1 (en) * | 2002-07-29 | 2004-02-04 | Yamatake Corporation | Capacitive type sensor |
-
1988
- 1988-01-08 JP JP292188A patent/JPH01178858A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1387164A1 (en) * | 2002-07-29 | 2004-02-04 | Yamatake Corporation | Capacitive type sensor |
| US6882165B2 (en) | 2002-07-29 | 2005-04-19 | Yamatake Corporation | Capacitive type sensor |
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