JPH0117354B2 - - Google Patents
Info
- Publication number
- JPH0117354B2 JPH0117354B2 JP57205220A JP20522082A JPH0117354B2 JP H0117354 B2 JPH0117354 B2 JP H0117354B2 JP 57205220 A JP57205220 A JP 57205220A JP 20522082 A JP20522082 A JP 20522082A JP H0117354 B2 JPH0117354 B2 JP H0117354B2
- Authority
- JP
- Japan
- Prior art keywords
- motor device
- elastic body
- vibration
- ultrasonic
- moving body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002123 temporal effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 7
- 238000005452 bending Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】
（技術分野）
この発明は、超音波振動を利用したモータ装置
に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a motor device that utilizes ultrasonic vibrations.
さらに詳しくは、この発明は、超音波の持つ強
力な振動エネルギーを利用した新規なモータ装置
に関するものである。 More specifically, the present invention relates to a novel motor device that utilizes the powerful vibrational energy of ultrasonic waves.
（背景技術）
従来から広く用いられている各種モータ装置
は、その駆動源として電磁力を応用したものが大
部分であり、各種用途に使われている。しかしな
がらこれら装置の大きさや質量および回転力（ト
ルク）等には用いられる材料によつて制限があ
る。何故ならば、これらの大きさや質量、さらに
は回転力等は用いられる材料の磁気的特性等によ
つて決められるものであり、これらの特性を超え
た装置は回転駆動を行うことが不可能となるため
である。(Background Art) Most of the various motor devices that have been widely used in the past utilize electromagnetic force as their driving source, and are used for various purposes. However, the size, mass, rotational force (torque), etc. of these devices are limited by the materials used. This is because the size, mass, rotational force, etc. are determined by the magnetic properties of the materials used, and it is impossible for devices that exceed these properties to be driven in rotation. This is to become.
一方、上記各種の従来のモータ装置の制約を克
服し、これに代替する装置として、本発明者によ
つて〓超音波振動を利用したモータ装置〓特許第
1262645号［特公昭59−30912号（特願昭55−
40656号）］、〓超音波振動を利用した回転駆動装
置〓特許第1264258号［特公昭59−37672号（特願
昭54−31955号）］、〓超音波振動を利用した一方向
駆動装置〓特許第1264269号［特公昭59−37673号
（特願昭55−152753号）］がすでに提案されてい
る。これらの本発明者による先行の発明は、超音
波振動子により振動する振動体の一端と動体の一
端面を相互に対向する位置に配置し、両者間に板
状または棒状の振動片を介在させて、該振動片を
適当な角度で傾けて超音波振動子の往復運動を動
体の一方向運動に変換する装置に関するものであ
る。 On the other hand, as a device that overcomes the limitations of the various conventional motor devices mentioned above and replaces them, the present inventor has proposed a motor device that utilizes ultrasonic vibrations.
No. 1262645 [Special Publication No. 59-30912 (Special Patent Application No. 1982-30912)
40656)], Rotary drive device using ultrasonic vibrations Patent No. 1264258 [Special Publication No. 59-37672 (Patent Application No. 54-31955)], Unidirectional drive device using ultrasonic vibrations Patent No. 1264269 [Japanese Patent Publication No. 59-37673 (Japanese Patent Application No. 55-152753)] has already been proposed. In these prior inventions by the present inventor, one end of a vibrating body vibrated by an ultrasonic vibrator and one end face of a moving body are arranged at positions facing each other, and a plate-shaped or rod-shaped vibrating piece is interposed between the two. The present invention relates to a device that converts the reciprocating motion of an ultrasonic transducer into unidirectional motion of a moving body by tilting the vibrating piece at an appropriate angle.
また、別に特許第1345496号［特公昭58−32518
号（特願昭50−105847号）］にも開示されている
ように、圧電素子に高周波電圧を印加させたとき
に生ずる振動を用いてロータを回転駆動させるも
のが提案されてもいる。 In addition, there is a separate patent No. 1345496 [Special Publication No. 58-32518
As disclosed in Japanese Patent Application No. 50-105847, a method has been proposed in which a rotor is rotationally driven using vibrations generated when a high frequency voltage is applied to a piezoelectric element.
これらの先行する技術は、超音波の持つ強力な
振動エネルギーを回転または直進運動に変換する
ことによつて小形にして軽量かつ、従来の電磁モ
ータに比べて巻線が不要のため、構造が簡単なモ
ータ装置を実現したものであるが、共通している
ことはいずれも定在波を用いた超音波モータであ
ることを特徴としており、その構造と性能には大
きな制約がある。たとえば、耐久性に乏しく、回
転が一方向に限られることなどの欠点がある。 These advanced technologies convert the powerful vibrational energy of ultrasonic waves into rotational or linear motion, making them compact and lightweight, and compared to conventional electromagnetic motors, they do not require windings, so they have a simpler structure. However, what they all have in common is that they are all ultrasonic motors that use standing waves, and there are significant restrictions on their structure and performance. For example, they have drawbacks such as poor durability and rotation only in one direction.
（発明の開示）
この発明は、以上の通りの従来のモータ装置と
は全く異なつた、高特性で、機能性に優れた新し
いモータ装置を提供することを目的としている。(Disclosure of the Invention) An object of the present invention is to provide a new motor device with high characteristics and excellent functionality, which is completely different from the conventional motor devices as described above.
この目的を実現するために、この発明のモータ
装置は、位相差をもつように配列した複数個の電
歪素子および弾性体によつて超音波振動子を構成
し、かつ、その電歪素子に位相の異なる高周波電
圧を印加することにより超音波振動子の所定の表
面に楕円振動を形成し得る進行波を生じさせ、さ
らに、その超音波振動の所定の表面に、動体を加
圧接触するように配置することによつて、その動
体を所定の方向に摩擦駆動させることを原理的な
方法としている。 In order to achieve this object, the motor device of the present invention configures an ultrasonic vibrator with a plurality of electrostrictive elements and an elastic body arranged so as to have a phase difference, and By applying high-frequency voltages with different phases, a traveling wave capable of forming elliptical vibrations is generated on a predetermined surface of the ultrasonic transducer, and a moving object is brought into pressure contact with the predetermined surface of the ultrasonic vibration. The principle method is to frictionally drive the moving body in a predetermined direction by arranging the moving body in a predetermined direction.
この発明は、この方法に基づいてリング状弾性
体の板体とこれに積層して接合した複数の位相差
配列した電歪素子とからなる平板リング状超音波
振動子を有し、この振動子の弾性体板体のリング
状表面に円形回転子の表面を加圧接触させてなる
ことを特徴とする進行波摩擦駆動による平板型超
音波モータ装置を提供する。 Based on this method, the present invention has a flat ring-shaped ultrasonic transducer consisting of a ring-shaped elastic plate and a plurality of electrostrictive elements arranged in a phase difference array laminated and bonded to the plate. Provided is a flat plate type ultrasonic motor device driven by traveling wave friction, characterized in that the surface of a circular rotor is brought into pressure contact with the ring-shaped surface of an elastic plate.
この発明は、以上の特徴によつて、
正逆転が容易に行える超音波振動を利用した
モータ装置、
耐久性が高い超音波振動を利用したモータ装
置、
平板型の形状機能性に優れた超音波振動を利
用したモータ装置、
を実現するものである。 Due to the above-mentioned features, the present invention provides a motor device using ultrasonic vibration that can easily perform forward and reverse rotation, a motor device using ultrasonic vibration that is highly durable, and an ultrasonic device that has a flat plate shape and excellent functionality. This is a motor device that uses vibration.
以下図面を参照してこの発明の方法とモータ装
置の動作原理と実施例に関し詳細に説明する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS The operating principle and embodiments of the method and motor device of the present invention will be described in detail below with reference to the drawings.
第１図は、この発明の背景となる進行波摩擦駆
動動作原理を説明するための一部拡大斜視図であ
る。１は金属等の弾性体である。なお、この図に
おいては、電歪素子または磁歪素子等の振動源は
示しておらず、弾性体の表面１′上に横振動と縦
振動が合成された楕円振動を形成し得る進行波が
発生した状態を拡大して示している。 FIG. 1 is a partially enlarged perspective view for explaining the operating principle of a traveling wave friction drive, which is the background of the present invention. 1 is an elastic body such as metal. Note that this figure does not show a vibration source such as an electrostrictive element or a magnetostrictive element, and a traveling wave that can form an elliptical vibration that is a combination of transverse vibration and longitudinal vibration is generated on the surface 1' of the elastic body. The state shown is enlarged.
上記進行波を発生するには、一般的には一つの
方法としてレイリー法と呼ばれる、弾性体の表面
に沿つて伝わる表面波を用いることがある。この
レイリー波／表面波についてはすでに論理的に解
明されている。固体中を伝わる弾性波には縦波と
横波とがあり、それぞれ独立に存在するが、表面
という境界条件のため互いに錯綜し合つて合成さ
れる。このレイリー波を発生させるには、超音波
振動子に縦または横振動をする電歪素子等を設け
て励振させればよい。 One method for generating the traveling wave described above is to use a surface wave that propagates along the surface of an elastic body, which is generally called the Rayleigh method. This Rayleigh wave/surface wave has already been logically clarified. There are two types of elastic waves that propagate through a solid: longitudinal waves and transverse waves, each of which exists independently, but due to the boundary condition of the surface, they intertwine and become synthesized. In order to generate this Rayleigh wave, an electrostrictive element or the like that vibrates vertically or horizontally may be provided in the ultrasonic vibrator and excited.
また、他の方法としては、棒状または板状弾性
体の屈曲振動を用いることができる。これは、弾
性体の所定の表面で縦波と横波とが合成された、
楕円振動を形成し得る進行波が発生することを利
用するものである。 Further, as another method, bending vibration of a rod-like or plate-like elastic body can be used. This is because longitudinal waves and transverse waves are combined on a given surface of an elastic body.
It utilizes the generation of traveling waves that can form elliptical vibrations.
この発明のモータ装置は、以上の屈曲振動波に
基づく進行波によつて駆動するものである。 The motor device of the present invention is driven by a traveling wave based on the above bending vibration wave.
この屈曲振動波を発生させるには、超音波振動
子に設けた、位相差をもつように配列した複数個
の電歪素子に位相の異なる高周波電圧を印加すれ
ばよい。 To generate this bending vibration wave, high frequency voltages with different phases may be applied to a plurality of electrostrictive elements arranged in an ultrasonic transducer so as to have a phase difference.
さて、今、第１図に示した弾性体の表面上の質
点Ｂに着目すると、質点Ｂは横振巾ａ（上下方向）
と縦振巾ｂ（左右方向）との合成された楕円Ｑ上
を矢印Ｍの方向に運動しており、その進行波は、
位相速度λf（ただし、λは波長、ｆは振動数）の
スピードで矢印Ｕの方向に進行している。 Now, if we pay attention to mass point B on the surface of the elastic body shown in Fig. 1, mass point B has a lateral amplitude a (vertical direction).
It is moving in the direction of arrow M on an ellipse Q, which is a composite of the vertical oscillation width b (horizontal direction), and its traveling wave is
It is moving in the direction of arrow U at a speed of phase velocity λf (where λ is the wavelength and f is the frequency).
この状態下で動体２を弾性体１の表面上に加圧
接触させると、該動体２は、弾性体１の楕円振動
の頂点ＡおよびA′の部分でのみ接触する。しか
も頂点Ａ，A′は振動速度ｖ＝2πfb（ただしｆは振
動数）で矢印Ｎの方向に運動しているので、加圧
接触する動体２は弾性体１との摩擦力によつて矢
印Ｎの方向に駆動されることになる。 When the moving body 2 is pressed into contact with the surface of the elastic body 1 under this condition, the moving body 2 comes into contact only at the apexes A and A' of the elliptical vibration of the elastic body 1. Furthermore, since the vertices A and A' are moving in the direction of the arrow N at a vibration velocity v = 2πfb (where f is the frequency), the moving body 2 in pressurized contact is moved by the arrow N due to the frictional force with the elastic body 1. It will be driven in the direction of.
なお、屈曲振動による進行波については、第２
図はその特性を示すことができる。 Regarding the traveling wave due to bending vibration, the second
A diagram can show its characteristics.
すなわち、この第２図に示したように弾性体１
の中立軸３から離れるに従つて縦振動成分（縦
波）があらわれ、屈曲弾性体の表面４上には、縦
振動と横振動が合成された楕円振動が形成され
る。 That is, as shown in FIG. 2, the elastic body 1
As the distance from the neutral axis 3 increases, a longitudinal vibration component (longitudinal wave) appears, and elliptical vibration, which is a combination of longitudinal vibration and transverse vibration, is formed on the surface 4 of the bending elastic body.
この楕円振動によつて、第１図に示したように
動体２の駆動が可能となる。 This elliptical vibration enables the moving body 2 to be driven as shown in FIG.
このような動作原理を踏まえてモータ装置の一
例を示したものが第３図である。 FIG. 3 shows an example of a motor device based on such an operating principle.
第３図イはこの例の断面図であり、第３図ロ
は、圧電体の分極状態図である。この例において
は、圧電体５には弾性体板体６を積層し、このリ
ング状の弾性体板体６の表面６Ａには円形回転子
７を加圧接触させている。 FIG. 3A is a sectional view of this example, and FIG. 3B is a polarization state diagram of the piezoelectric body. In this example, an elastic plate 6 is laminated on the piezoelectric body 5, and a circular rotor 7 is brought into pressure contact with the surface 6A of the ring-shaped elastic plate 6.
弾性体板体６の表面に形成された進行波によつ
て円形回転子７は回転し、この回転は回転軸８に
伝えられる。 The circular rotor 7 is rotated by the traveling waves formed on the surface of the elastic plate 6, and this rotation is transmitted to the rotating shaft 8.
分極状態についてみると、第３図ロに示したよ
うに、90゜位相のずれた２回路の高周波電圧をそ
れぞれの電極端子ａ，ｂに印加し、圧電体５を励
振させる。リング状の弾性体板体６は振動を発生
し、その表面６Ａには、横波と縦波の合成された
表面進行波が形成される。この動きは第１図に示
したようになる。 Regarding the polarization state, as shown in FIG. 3B, high frequency voltages of two circuits with a 90° phase shift are applied to the respective electrode terminals a and b to excite the piezoelectric body 5. The ring-shaped elastic plate 6 generates vibration, and a surface traveling wave, which is a combination of a transverse wave and a longitudinal wave, is formed on its surface 6A. This movement is as shown in Figure 1.
分極ピツチを進行波の波長の1/2とし、圧電体
５の分極状態を、（＋）（−）（＋）（−）……とす
る。この（＋）（−）（＋）（−）……の表示は高
周波電圧の印加状態を示すものではない。この際
に電極群ＡとＢを、この例においては1/4波長ず
らしている。こうすることにより90゜位相のずれ
た高周波電圧を印加すると、弾性体板体６の表面
に進行波が形成される。 The polarization pitch is set to 1/2 the wavelength of the traveling wave, and the polarization state of the piezoelectric body 5 is set to (+) (-) (+) (-)... This (+) (-) (+) (-)... display does not indicate the application state of the high frequency voltage. At this time, electrode groups A and B are shifted by 1/4 wavelength in this example. In this way, when high frequency voltages with a phase shift of 90° are applied, a traveling wave is formed on the surface of the elastic plate 6.
このような構成を一部断面図として示したもの
が第４図である。電極９群ＡとＢとは1/4波長ず
らして配置している。 FIG. 4 is a partially cross-sectional view of such a configuration. Electrode 9 groups A and B are arranged with a 1/4 wavelength shift.
もちろん、この発明は、以上の例に限定される
ものではない。 Of course, the invention is not limited to the above examples.
位相差配列についても適宜なものとしえること
はいうまでもない。 It goes without saying that the phase difference array may be any suitable arrangement.
このように細部については様々な態様が可能な
この発明のモータ装置は、実用的なものとしてこ
れまでに類を見なかつたものである。 The motor device of the present invention, which can be modified in various ways in terms of details, is unprecedented as a practical device.
電歪素子に代えて磁歪素子を用いることもでき
る。 A magnetostrictive element can also be used instead of an electrostrictive element.
（発明の効果）
以上この発明に係る超音波振動を利用したモー
タ装置に関して背景となるその駆動原理と実施例
の詳細な説明を行つたが、従来の各種モータ装置
と異なり、この発明は、位相差をもつように配列
した複数個の電歪素子および弾性体によつて超音
波振動子を形成し、かつ、その電歪素子または磁
歪素子に位相の異なる高周波電圧を印加すること
により超音波振動子の所定の表面に楕円振動を形
成し得る進行波を生じさせ、さらに、その超音波
振動子の所定の表面には動体を加圧接触するよう
に配置することによつて、その動体が摩擦駆動さ
れる超音波振動を利用していることから、
強力な回転力、駆動力を持ち、小型軽量であ
らゆる用途に適用することが可能である、
正逆転が容易に行える、
耐久性が高い、
という大きな効果を有し、さらにまた平板薄型の
モータ装置であることから、以下のような特有の
効果を実現する。(Effects of the Invention) The driving principles and embodiments of the motor device using ultrasonic vibration according to the present invention have been explained in detail above. Ultrasonic vibrations are generated by forming an ultrasonic vibrator with a plurality of electrostrictive elements and an elastic body arranged so as to have a phase difference, and applying high frequency voltages with different phases to the electrostrictive elements or magnetostrictive elements. A traveling wave capable of forming elliptical vibration is generated on a predetermined surface of the ultrasonic transducer, and a moving object is placed in pressure contact with the predetermined surface of the ultrasonic transducer, thereby causing the moving object to generate friction. Because it uses driven ultrasonic vibrations, it has strong rotational force and driving force, is small and lightweight, and can be applied to all kinds of applications, can be easily rotated forward and backward, and is highly durable. Furthermore, since it is a flat, thin motor device, it achieves the following unique effects.
(ア) 平板型とするために、リング状弾性体と電歪
素子との平面固定が容易で、かつ均一固定が可
能となる。(a) Since it is a flat plate type, it is easy to fix the ring-shaped elastic body and the electrostrictive element in a plane, and uniform fixation is possible.
(イ) 回転子への均一な駆動力の伝達が可能とな
る。(a) Uniform driving force can be transmitted to the rotor.
(ウ) 薄方の構造とすることができ、小さなスペー
スで使用できる。このため応用の範囲は広い。(c) It can have a thin structure and can be used in a small space. Therefore, the range of applications is wide.
第１図および第２図は本発明の動作原理を説明
するための一部拡大斜視図、第３図イ，ロは、
各々、本発明の実施例を示した一部断面図と圧電
体の分極状態を示している。第４図は、その一部
断面図である。
１…弾性体、２…動体、３…中立軸、４…弾性
体表面、５…圧電体、６…リング状弾性体板体、
７…円形回転子、８…回転軸、９…電極。
FIGS. 1 and 2 are partially enlarged perspective views for explaining the operating principle of the present invention, and FIGS. 3A and 3B are
Each shows a partial cross-sectional view showing an embodiment of the present invention and a polarization state of a piezoelectric body. FIG. 4 is a partial sectional view thereof. DESCRIPTION OF SYMBOLS 1... Elastic body, 2... Moving body, 3... Neutral axis, 4... Elastic body surface, 5... Piezoelectric body, 6... Ring-shaped elastic body plate,
7... Circular rotor, 8... Rotating shaft, 9... Electrode.
Claims (1)
波振動子を有し、弾性体表面に動体を加圧接触さ
せ、並列する電歪素子に時間的に位相の異なる高
周波電圧を印加して動体を駆動する超音波モータ
装置において、電歪素子を固定した平板リング状
弾性体板体の表面に平板円形回転子を加圧接触さ
せてなることを特徴とする平板型超音波モータ装
置。 ２ 複数の電歪素子を二つの群に分け、各々を1/
４波長の距離を置いて配置してなる特許請求の範
囲第１項記載の平板型超音波モータ装置。[Claims] 1. An ultrasonic transducer including a plurality of electrostrictive elements fixed to an elastic body, a moving body is brought into pressure contact with the surface of the elastic body, and the parallel electrostrictive elements are caused to have a temporal phase difference. An ultrasonic motor device for driving a moving body by applying different high-frequency voltages, characterized in that a flat plate is formed by bringing a flat circular rotor into pressure contact with the surface of a flat ring-shaped elastic plate to which an electrostrictive element is fixed. Type ultrasonic motor device. 2 Divide the multiple electrostrictive elements into two groups, and divide each into 1/
A flat plate type ultrasonic motor device according to claim 1, which is arranged at a distance of four wavelengths.
Priority Applications (12)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57205220A JPS5996881A (en) | 1982-11-22 | 1982-11-22 | Motor device utilizing supersonic vibration |
| CA000421908A CA1208269A (en) | 1982-02-25 | 1983-02-18 | Motor device utilizing ultrasonic oscillation |
| GB08304897A GB2120462B (en) | 1982-02-25 | 1983-02-22 | Motor |
| NL8300700A NL8300700A (en) | 1982-02-25 | 1983-02-24 | ENGINE DEVICE USING ULTRASONIC OSCILLATION. |
| CH1049/83A CH665511A5 (en) | 1982-02-25 | 1983-02-24 | MOTOR USING ULTRASOUND VIBRATIONS. |
| FR838303019A FR2522216B1 (en) | 1982-02-25 | 1983-02-24 | MOTOR DEVICE USING ULTRASONIC OSCILLATION |
| BR8300874A BR8300874A (en) | 1982-02-25 | 1983-02-24 | ENGINE DEVICE USING ULTRA - SONICA OSCILLATION |
| IT19758/83A IT1169116B (en) | 1982-02-25 | 1983-02-24 | MOTOR DEVICE USING AN ULTRASONIC OSCILLATION |
| ES520082A ES520082A0 (en) | 1982-02-25 | 1983-02-24 | ULTRASONIC OSCILLATION MOTOR. |
| DE19833306755 DE3306755A1 (en) | 1982-02-25 | 1983-02-25 | DRIVE USING ULTRASOUND VIBRATIONS |
| US06/610,933 US4562374A (en) | 1982-02-25 | 1984-05-16 | Motor device utilizing ultrasonic oscillation |
| US07/135,187 USRE33390E (en) | 1982-02-25 | 1987-12-18 | Motor device utilizing ultrasonic oscillation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57205220A JPS5996881A (en) | 1982-11-22 | 1982-11-22 | Motor device utilizing supersonic vibration |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5996881A JPS5996881A (en) | 1984-06-04 |
| JPH0117354B2 true JPH0117354B2 (en) | 1989-03-30 |
Family
ID=16503394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57205220A Granted JPS5996881A (en) | 1982-02-25 | 1982-11-22 | Motor device utilizing supersonic vibration |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5996881A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009144885A1 (en) | 2008-05-27 | 2009-12-03 | 株式会社村田製作所 | Ultrasonic motor |
| US8513857B2 (en) | 2010-02-08 | 2013-08-20 | Nikon Corporation | Vibrational wave motor, lens barrel and camera |
| US8531086B2 (en) | 2009-03-31 | 2013-09-10 | Nikon Corporation | Vibration actuator, lens barrel, and camera |
| US8749117B2 (en) | 2010-12-20 | 2014-06-10 | Canon Kabushiki Kaisha | Vibrating body of vibratory drive unit and vibratory drive unit |
| US8786163B2 (en) | 2010-12-06 | 2014-07-22 | Nikon Corporation | Vibrational wave motor, lens barrel and camera |
| US9366940B2 (en) | 2012-02-28 | 2016-06-14 | Nikon Corporation | Drive apparatus, drive method, and optical device |
| WO2019078239A1 (en) | 2017-10-18 | 2019-04-25 | 株式会社ニコン | Vibration wave motor and optical device |
| US11043910B2 (en) | 2016-06-30 | 2021-06-22 | Nikon Corporation | Vibration wave motor and optical device |
| WO2021246028A1 (en) | 2020-06-04 | 2021-12-09 | 株式会社ニコン | Vibration body and vibration wave motor |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59109038A (en) * | 1982-12-14 | 1984-06-23 | Canon Inc | Driving device of optical system |
| JPS59201685A (en) * | 1983-04-30 | 1984-11-15 | Canon Inc | Vibration wave motor |
| JPS6096183A (en) * | 1983-10-26 | 1985-05-29 | Canon Inc | Surface wave motor |
| JPS6130972A (en) * | 1984-07-18 | 1986-02-13 | Taga Denki Kk | Supersonic motor device |
| JPS6139870A (en) * | 1984-07-27 | 1986-02-26 | Marcon Electronics Co Ltd | Piezoelectric linear motor |
| JPS6139871A (en) * | 1984-07-28 | 1986-02-26 | Marcon Electronics Co Ltd | Piezoelectric linear motor |
| JP2663380B2 (en) * | 1984-11-19 | 1997-10-15 | マルコン電子 株式会社 | Piezoelectric ultrasonic linear motor |
| JPS61166429A (en) * | 1985-01-18 | 1986-07-28 | Motoda Electronics Co Ltd | Ultrasonic conveyer |
| JPS61180582A (en) * | 1985-02-04 | 1986-08-13 | Marcon Electronics Co Ltd | Piezoelectric supersonic wave motor |
| JPS6277068A (en) * | 1985-08-31 | 1987-04-09 | Shinsei Kogyo:Kk | Improvement in support of surface wave motor |
| JPS62114478A (en) * | 1985-11-11 | 1987-05-26 | Taga Denki Kk | Ultrasonic vibrator and control method for drive thereof |
| JPS62152377A (en) * | 1985-12-24 | 1987-07-07 | Taga Denki Kk | Drive-controlling method for ultrasonic wave vibrator |
| JPS62126874A (en) * | 1985-11-27 | 1987-06-09 | Taga Denki Kk | Ultrasonic vibrator and drive controlling method thereof |
| JPS62152378A (en) * | 1985-12-24 | 1987-07-07 | Taga Denki Kk | Ultrasonic wave vibrator and its drive-controlling method |
| JPS62141980A (en) * | 1985-12-16 | 1987-06-25 | Taga Denki Kk | Ultrasonic vibrator and drive controlling method thereof |
| JPH0687672B2 (en) * | 1987-11-11 | 1994-11-02 | 松下電器産業株式会社 | Ultrasonic motor device |
| JPH0819939B2 (en) * | 1987-11-30 | 1996-03-04 | 日本電気ホームエレクトロニクス株式会社 | Feed guide mechanism |
| JP2874762B2 (en) * | 1989-06-05 | 1999-03-24 | キヤノン株式会社 | Motor drive |
| US5136200A (en) * | 1989-07-27 | 1992-08-04 | Olympus Optical Co., Ltd. | Ultransonic motor |
| EP0791969A1 (en) * | 1991-08-22 | 1997-08-27 | Mitsubishi Jukogyo Kabushiki Kaisha | Control system for ultrasonic motor |
| AU2001278697A1 (en) | 2000-08-11 | 2002-02-25 | Ecchandes Inc. | Overlapping type piezoelectric stator, overlapping type piezoelectric acturator and applications thereof |
| JP2003047264A (en) * | 2001-08-02 | 2003-02-14 | Canon Inc | Housing structure of motor |
| ATE489734T1 (en) | 2005-05-26 | 2010-12-15 | Nikon Corp | VIBRATING ACTUATOR AND METHOD OF OPERATING A VIBRATING ACTUATOR |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58148682A (en) * | 1982-02-25 | 1983-09-03 | Toshio Sashita | Motor device using supersonic vibration |
-
1982
- 1982-11-22 JP JP57205220A patent/JPS5996881A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58148682A (en) * | 1982-02-25 | 1983-09-03 | Toshio Sashita | Motor device using supersonic vibration |
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|---|---|---|---|---|
| WO2009144885A1 (en) | 2008-05-27 | 2009-12-03 | 株式会社村田製作所 | Ultrasonic motor |
| US8531086B2 (en) | 2009-03-31 | 2013-09-10 | Nikon Corporation | Vibration actuator, lens barrel, and camera |
| US8513857B2 (en) | 2010-02-08 | 2013-08-20 | Nikon Corporation | Vibrational wave motor, lens barrel and camera |
| US8786163B2 (en) | 2010-12-06 | 2014-07-22 | Nikon Corporation | Vibrational wave motor, lens barrel and camera |
| US8749117B2 (en) | 2010-12-20 | 2014-06-10 | Canon Kabushiki Kaisha | Vibrating body of vibratory drive unit and vibratory drive unit |
| US9869921B2 (en) | 2012-02-28 | 2018-01-16 | Nikon Corporation | Drive apparatus, drive method, and optical device |
| US9366940B2 (en) | 2012-02-28 | 2016-06-14 | Nikon Corporation | Drive apparatus, drive method, and optical device |
| US10871700B2 (en) | 2012-02-28 | 2020-12-22 | Nikon Corporation | Drive apparatus, drive method, and optical device |
| US11043910B2 (en) | 2016-06-30 | 2021-06-22 | Nikon Corporation | Vibration wave motor and optical device |
| US11594985B2 (en) | 2016-06-30 | 2023-02-28 | Nikon Corporation | Lens barrel and imaging device |
| WO2019078239A1 (en) | 2017-10-18 | 2019-04-25 | 株式会社ニコン | Vibration wave motor and optical device |
| US11522473B2 (en) | 2017-10-18 | 2022-12-06 | Nikon Corporation | Vibration wave motor and optical device |
| US11757381B2 (en) | 2017-10-18 | 2023-09-12 | Nikon Corporation | Lens barrel and imaging device with element and elastic body for producing vibration wave |
| WO2021246028A1 (en) | 2020-06-04 | 2021-12-09 | 株式会社ニコン | Vibration body and vibration wave motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5996881A (en) | 1984-06-04 |
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