JPH0116790B2 - - Google Patents

Info

Publication number: JPH0116790B2
Authority: JP; Japan
Prior art keywords: silicon; silicon carbide; sintered body; metal; metallic
Prior art date: 1981-10-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP56161540A

Other languages

English (en)

Japanese (ja)

Other versions

JPS5864284A (ja

Inventor

Shigeru Takahata

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Shin Etsu Chemical Co Ltd

Original Assignee

Shin Etsu Chemical Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-10-09

Filing date

1981-10-09

Publication date

1989-03-27

1981-10-09 Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd

1981-10-09 Priority to JP56161540A priority Critical patent/JPS5864284A/ja

1983-04-16 Publication of JPS5864284A publication Critical patent/JPS5864284A/ja

1989-03-27 Publication of JPH0116790B2 publication Critical patent/JPH0116790B2/ja

Status Granted legal-status Critical Current

Links

XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 42
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 38
229910052710 silicon Inorganic materials 0.000 claims description 37
239000010703 silicon Substances 0.000 claims description 37
229910010271 silicon carbide Inorganic materials 0.000 claims description 37
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 11
229910052581 Si3N4 Inorganic materials 0.000 claims description 11
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 11
229910001873 dinitrogen Inorganic materials 0.000 claims description 9
239000002344 surface layer Substances 0.000 claims description 9
238000004519 manufacturing process Methods 0.000 claims description 6
239000000126 substance Substances 0.000 claims description 2
229910052751 metal Inorganic materials 0.000 description 18
239000002184 metal Substances 0.000 description 18
238000000034 method Methods 0.000 description 14
HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
238000005121 nitriding Methods 0.000 description 8
239000000203 mixture Substances 0.000 description 6
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
229910004298 SiO 2 Inorganic materials 0.000 description 4
238000006243 chemical reaction Methods 0.000 description 4
238000000354 decomposition reaction Methods 0.000 description 4
239000010410 layer Substances 0.000 description 4
238000002844 melting Methods 0.000 description 4
230000008018 melting Effects 0.000 description 4
235000011121 sodium hydroxide Nutrition 0.000 description 4
239000000243 solution Substances 0.000 description 4
XWROUVVQGRRRMF-UHFFFAOYSA-N F.O[N+]([O-])=O Chemical compound F.O[N+]([O-])=O XWROUVVQGRRRMF-UHFFFAOYSA-N 0.000 description 3
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
229910052799 carbon Inorganic materials 0.000 description 3
230000007423 decrease Effects 0.000 description 3
239000007789 gas Substances 0.000 description 3
238000010438 heat treatment Methods 0.000 description 3
238000005488 sandblasting Methods 0.000 description 3
KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 2
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
238000002441 X-ray diffraction Methods 0.000 description 2
229910052782 aluminium Inorganic materials 0.000 description 2
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
239000011230 binding agent Substances 0.000 description 2
229960002050 hydrofluoric acid Drugs 0.000 description 2
239000011261 inert gas Substances 0.000 description 2
239000000463 material Substances 0.000 description 2
239000000155 melt Substances 0.000 description 2
229910017604 nitric acid Inorganic materials 0.000 description 2
239000002245 particle Substances 0.000 description 2
229920001568 phenolic resin Polymers 0.000 description 2
239000005011 phenolic resin Substances 0.000 description 2
229920003257 polycarbosilane Polymers 0.000 description 2
229920002050 silicone resin Polymers 0.000 description 2
238000005245 sintering Methods 0.000 description 2
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
239000007864 aqueous solution Substances 0.000 description 1
229910052786 argon Inorganic materials 0.000 description 1
229910021383 artificial graphite Inorganic materials 0.000 description 1
238000007664 blowing Methods 0.000 description 1
238000001354 calcination Methods 0.000 description 1
239000003054 catalyst Substances 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
238000001816 cooling Methods 0.000 description 1
229920001971 elastomer Polymers 0.000 description 1
238000001125 extrusion Methods 0.000 description 1
150000002222 fluorine compounds Chemical class 0.000 description 1
238000007731 hot pressing Methods 0.000 description 1
239000001257 hydrogen Substances 0.000 description 1
229910052739 hydrogen Inorganic materials 0.000 description 1
230000002706 hydrostatic effect Effects 0.000 description 1
238000010297 mechanical methods and process Methods 0.000 description 1
229920000609 methyl cellulose Polymers 0.000 description 1
239000001923 methylcellulose Substances 0.000 description 1
239000011259 mixed solution Substances 0.000 description 1
238000002156 mixing Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
238000012986 modification Methods 0.000 description 1
238000000465 moulding Methods 0.000 description 1
229910052754 neon Inorganic materials 0.000 description 1
GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
239000011225 non-oxide ceramic Substances 0.000 description 1
235000014593 oils and fats Nutrition 0.000 description 1
230000003647 oxidation Effects 0.000 description 1
238000007254 oxidation reaction Methods 0.000 description 1
239000012188 paraffin wax Substances 0.000 description 1
239000000843 powder Substances 0.000 description 1
239000002994 raw material Substances 0.000 description 1
238000007493 shaping process Methods 0.000 description 1
239000007858 starting material Substances 0.000 description 1
229920003002 synthetic resin Polymers 0.000 description 1
239000000057 synthetic resin Substances 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
229910000859 α-Fe Inorganic materials 0.000 description 1

Landscapes

Ceramic Products (AREA)

JP56161540A 1981-10-09 1981-10-09 炭化けい素焼結体の製造方法 Granted JPS5864284A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP56161540A JPS5864284A (ja)	1981-10-09	1981-10-09	炭化けい素焼結体の製造方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP56161540A JPS5864284A (ja)	1981-10-09	1981-10-09	炭化けい素焼結体の製造方法

Publications (2)

Publication Number	Publication Date
JPS5864284A JPS5864284A (ja)	1983-04-16
JPH0116790B2 true JPH0116790B2 (no)	1989-03-27

Family

ID=15737035

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP56161540A Granted JPS5864284A (ja)	1981-10-09	1981-10-09	炭化けい素焼結体の製造方法

Country Status (1)

Country	Link
JP (1)	JPS5864284A (no)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS61197483A (ja) *	1985-02-27	1986-09-01	株式会社リケン	セラミックス摺動部材の製造方法
JPS61295289A (ja) *	1985-06-20	1986-12-26	バブコツク日立株式会社	炭化珪素焼結体およびその製造法
JPH0770494B2 (ja) *	1986-10-15	1995-07-31	東海高熱工業株式会社	半導体製造用ウエハ−ボ−トの製法

1981
- 1981-10-09 JP JP56161540A patent/JPS5864284A/ja active Granted

Also Published As

Publication number	Publication date
JPS5864284A (ja)	1983-04-16

Publication	Publication Date	Title
US4040849A (en)	1977-08-09	Polycrystalline silicon articles by sintering
JP2542402B2 (ja)	1996-10-09	金属及び塩熔融物に耐える材料、それらの製造及びそれらの使用
JPH0139989B2 (no)	1989-08-24
JPS6047225B2 (ja)	1985-10-21	高密度化ケイ素製品の製造法
JPS5844630B2 (ja)	1983-10-04	シリコ−ンカ−バイドシヨウケツセイケイタイノセイゾウホウホウ
US3011982A (en)	1961-12-05	Refractory and method of making the same
JPH0116790B2 (no)	1989-03-27
JPH0532458A (ja)	1993-02-09	半導体熱処理装置および半導体熱処理装置用高純度炭化珪素質部材とその製造方法
JP4068825B2 (ja)	2008-03-26	炭化ケイ素焼結体の製造方法
JPH031271B2 (no)	1991-01-10
JPH03146470A (ja)	1991-06-21	炭化ケイ素質材料
JP2002338366A (ja)	2002-11-27	高純度炭化珪素発熱体およびその製造方法
JP2000351679A (ja)	2000-12-19	炭化ケイ素質多孔体の製造方法および炭化ケイ素質多孔体
US3261701A (en)	1966-07-19	Composition of matter containing aluminum nitride and aluminum boride
JPS6058190B2 (ja)	1985-12-18	窒化けい素−炭化けい素系成型体の製造方法
JP3482480B2 (ja)	2003-12-22	耐酸化性に優れた黒鉛−炭化珪素複合体及びその製造方法
JPS589882A (ja)	1983-01-20	超硬耐熱セラミックスの製造方法
JPS5915112B2 (ja)	1984-04-07	高密度炭化珪素焼結体の製造方法
KR19990018885A (ko)	1999-03-15	알루미나/알루미늄 복합체의 제조방법
JPH0345034B2 (no)	1991-07-09
JPS6236067A (ja)	1987-02-17	高純度な再結晶炭化珪素質焼成体の製造方法
JPS61136963A (ja)	1986-06-24	窒化ケイ素基焼結体の製造方法
JPS624351B2 (no)	1987-01-29
US3056685A (en)	1962-10-02	Ceramic product and method of
JP2588278B2 (ja)	1997-03-05	炭化珪素多孔質焼結体の製造方法