JPH01165666U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案によるイオンレーザ管の好まし
い一態用を示す断面図であり、第２図、第３図は
従来のイオンレーザ管を示す断面図である。 １……細管部品、２……放電路用貫通孔、３…
…外囲部材、４……ガス帰遷路用貫通孔、５……
パイプ、６……筒状接続部材、７……アノード、
８，１２……端子部材、９……換気管、１０，１
３……端部金属部材、１１……カソード、１４…
…ブリユースター窓、１５……低融点封着用ガラ
ス。 FIG. 1 is a sectional view showing a preferred embodiment of the ion laser tube according to the present invention, and FIGS. 2 and 3 are sectional views showing a conventional ion laser tube. 1...Thin tube parts, 2...Through hole for discharge path, 3...
...Enclosing member, 4... Through hole for gas return path, 5...
pipe, 6... cylindrical connection member, 7... anode,
8, 12... Terminal member, 9... Ventilation pipe, 10, 1
3... End metal member, 11... Cathode, 14...
...Bryustar window, 15...Low melting point sealing glass.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 放電路用貫通孔を備え、プラズマに対する耐ス
パツタ特性が良好な材質で形成された細管部品を
、ガス帰還路用の貫通孔を備え、非導電性かつ高
熱伝導性のセラミツク材料によつて形成された外
囲部材の中心部に設けた貫通孔内に挿入し、ガス
帰還路用の貫通孔を内包できる内径を有する筒状
接続部材と該外囲部材とを交互に且つ気密に接続
することにより放電路が形成されたイオンレーザ
管において、前記細管部品の一部を前記外囲部材
から突出させ、この突出部外周に非導電性のパイ
プを被せたことを特徴とするイオンレーザ管。 A thin tube part is equipped with a through hole for a discharge path and is made of a material with good spatter resistance against plasma, and a through hole for a gas return path is made of a non-conductive and highly thermally conductive ceramic material. By inserting into the through hole provided in the center of the outer surrounding member, the outer surrounding member is alternately and airtightly connected to a cylindrical connecting member having an inner diameter that can accommodate the through hole for the gas return path. An ion laser tube having a discharge path formed therein, characterized in that a part of the thin tube component protrudes from the surrounding member, and a non-conductive pipe covers the outer periphery of the protrusion.