JPH01165185U - - Google Patents
Info
- Publication number
- JPH01165185U JPH01165185U JP1988060808U JP6080888U JPH01165185U JP H01165185 U JPH01165185 U JP H01165185U JP 1988060808 U JP1988060808 U JP 1988060808U JP 6080888 U JP6080888 U JP 6080888U JP H01165185 U JPH01165185 U JP H01165185U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- stage
- trimming device
- power
- laser trimming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009966 trimming Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第１図は本考案の１実施例に係るレーザトリミ
ング装置の概略図、第２図は第１図に示す実施例
のパワーメータ取付部分における拡大断面図、第
３図は本考案の他の実施例の概略図である。
１……ガルバノメータ、２……集光レンズ、３
……ダイクロイツクミラー、４……ビームエキス
パンダ、５……全反射鏡、６……載物台、７……
パワーメータ、８……レーザ遮蔽板、９……レー
ザパワー測定ユニツト。
FIG. 1 is a schematic diagram of a laser trimming device according to an embodiment of the present invention, FIG. 2 is an enlarged cross-sectional view of the power meter installation part of the embodiment shown in FIG. 1, and FIG. 3 is another embodiment of the present invention. FIG. 2 is an example schematic diagram. 1... Galvanometer, 2... Condensing lens, 3
... Dichroic mirror, 4... Beam expander, 5... Total reflection mirror, 6... Stage, 7...
Power meter, 8... Laser shielding plate, 9... Laser power measurement unit.
Claims (1)
物台とを含むレーザトリミング装置において、前
記載物台に、加工面におけるレーザパワーを直接
測定することが可能なパワーメータを組み込んだ
ことを特徴とするレーザトリミング装置。 In a laser trimming device including a YAG laser, a focusing optical system, a measurement system, and a stage, a power meter capable of directly measuring the laser power on the processed surface is incorporated in the stage. A laser trimming device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988060808U JPH01165185U (en) | 1988-05-09 | 1988-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988060808U JPH01165185U (en) | 1988-05-09 | 1988-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165185U true JPH01165185U (en) | 1989-11-17 |
Family
ID=31286505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988060808U Pending JPH01165185U (en) | 1988-05-09 | 1988-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165185U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009297726A (en) * | 2008-06-10 | 2009-12-24 | Kataoka Seisakusho:Kk | Laser beam machine |
| JP2012011431A (en) * | 2010-07-02 | 2012-01-19 | Sumitomo Heavy Ind Ltd | Laser beam machining device, and laser beam machining method |
-
1988
- 1988-05-09 JP JP1988060808U patent/JPH01165185U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009297726A (en) * | 2008-06-10 | 2009-12-24 | Kataoka Seisakusho:Kk | Laser beam machine |
| JP2012011431A (en) * | 2010-07-02 | 2012-01-19 | Sumitomo Heavy Ind Ltd | Laser beam machining device, and laser beam machining method |