JPH01156845U - - Google Patents
Info
- Publication number
- JPH01156845U JPH01156845U JP5364788U JP5364788U JPH01156845U JP H01156845 U JPH01156845 U JP H01156845U JP 5364788 U JP5364788 U JP 5364788U JP 5364788 U JP5364788 U JP 5364788U JP H01156845 U JPH01156845 U JP H01156845U
- Authority
- JP
- Japan
- Prior art keywords
- axis direction
- axis
- stage
- laser beam
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
Description
図面は本考案による移動ステージの直進ずれ補
正装置の１実施例を示し、第１図は平面図、第２
図及び第３図はそれぞれ直進ずれのない場合及び
ある場合を示し、それぞれのａは集光レンズ及び
全反射ミラーにおける光路説明用平面図、それぞ
れのｂは他分割フオトセンサの側面図である。
１……移動ステージ、３……Ｙ軸アクチユエー
タ、４……レーザ光源、８……多分割フオトセン
サ、９……集光レンズ、１０……全反射ミラー。
The drawings show one embodiment of the device for correcting linear displacement of a moving stage according to the present invention, and FIG. 1 is a plan view, and FIG.
3A and 3B show the case where there is no straight-line deviation and the case where there is a straight-line deviation, respectively, where a is a plan view for explaining the optical path in the condenser lens and the total reflection mirror, and b is a side view of the other divided photo sensor. DESCRIPTION OF SYMBOLS 1...Moving stage, 3...Y-axis actuator, 4...Laser light source, 8...Multi-segment photo sensor, 9...Condensing lens, 10...Total reflection mirror.
Claims (1)
ジ上に配設されたレーザ光源と、前記ステージの
直進線上に固設されＸ軸方向の中心軸を有しＸ軸
方向に出射された前記レーザ光源の出射レーザビ
ームが入射する集光レンズ及び該レンズを透過し
たレーザビームを全反射する法線がＸ軸方向の全
反射ミラーと、前記ステージ上に配設され中心部
が前記出射レーザビームの光軸と一致し前記ミラ
ーで全反射されて前記レンズを透過した反射レー
ザビームを受光する多分割フオトセンサと、該セ
ンサの出力信号により駆動し前記反射レーザビー
ムの光軸が前記センサの中心軸に一致するように
前記ステージをＹ軸方向及びＺ軸方向に移動する
Ｙ軸アクチユエータ及びＺ軸アクチユエータとを
備えてなる移動ステージの直進ずれ補正装置。 A moving stage that moves straight in the X-axis direction, a laser light source disposed on the stage, and the laser light source that is fixed on the straight line of the stage and has a central axis in the X-axis direction and is emitted in the X-axis direction. a condensing lens into which the emitted laser beam is incident; a total reflection mirror whose normal line is in the X-axis direction to totally reflect the laser beam transmitted through the lens; and a total reflection mirror whose normal line is in the X-axis direction; a multi-segment photo sensor that receives a reflected laser beam that coincides with the axis, is totally reflected by the mirror, and passes through the lens, and is driven by an output signal of the sensor so that the optical axis of the reflected laser beam coincides with the central axis of the sensor. A linear displacement correction device for a moving stage, comprising a Y-axis actuator and a Z-axis actuator that move the stage in the Y-axis direction and the Z-axis direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5364788U JPH01156845U (en) | 1988-04-20 | 1988-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5364788U JPH01156845U (en) | 1988-04-20 | 1988-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156845U true JPH01156845U (en) | 1989-10-27 |
Family
ID=31279612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5364788U Pending JPH01156845U (en) | 1988-04-20 | 1988-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156845U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001157951A (en) * | 1999-11-30 | 2001-06-12 | Univ Chuo | Shape accuracy measuring device by sequential two-point method, and method for measuring space between laser displacement meter for measuring shape accuracy by sequential two-point method |
-
1988
- 1988-04-20 JP JP5364788U patent/JPH01156845U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001157951A (en) * | 1999-11-30 | 2001-06-12 | Univ Chuo | Shape accuracy measuring device by sequential two-point method, and method for measuring space between laser displacement meter for measuring shape accuracy by sequential two-point method |