JPH01153654U - - Google Patents
Info
- Publication number
- JPH01153654U JPH01153654U JP1988044214U JP4421488U JPH01153654U JP H01153654 U JPH01153654 U JP H01153654U JP 1988044214 U JP1988044214 U JP 1988044214U JP 4421488 U JP4421488 U JP 4421488U JP H01153654 U JPH01153654 U JP H01153654U
- Authority
- JP
- Japan
- Prior art keywords
- melting point
- point metal
- film
- imaging device
- state imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 230000008018 melting Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
第１図は本考案の固体撮像装置の基本的な構成
例を示す要部断面図、第２図は本考案の固体撮像
装置の一例の断面図、第３図は本考案の固体撮像
装置の他の一例の断面図、第４図は従来の固体撮
像装置の一例の要部断面図である。
１……遮光膜、５，６……高融点金属シリサイ
ド膜。
FIG. 1 is a sectional view of essential parts showing an example of the basic configuration of the solid-state imaging device of the invention, FIG. 2 is a sectional view of an example of the solid-state imaging device of the invention, and FIG. 3 is a sectional view of the solid-state imaging device of the invention. A sectional view of another example, FIG. 4 is a sectional view of a main part of an example of a conventional solid-state imaging device. 1... Light shielding film, 5, 6... High melting point metal silicide film.
Claims (1)
属膜若しくは高融点金属を含有する膜とすること
を特徴とする固体撮像装置。 A solid-state imaging device characterized in that a light-shielding film that determines an aperture of a sensor section is a high-melting point metal film or a film containing a high-melting point metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988044214U JPH01153654U (en) | 1988-04-01 | 1988-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988044214U JPH01153654U (en) | 1988-04-01 | 1988-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01153654U true JPH01153654U (en) | 1989-10-23 |
Family
ID=31270582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988044214U Pending JPH01153654U (en) | 1988-04-01 | 1988-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01153654U (en) |
-
1988
- 1988-04-01 JP JP1988044214U patent/JPH01153654U/ja active Pending