JPH01149645U - - Google Patents
Info
- Publication number
- JPH01149645U JPH01149645U JP4572688U JP4572688U JPH01149645U JP H01149645 U JPH01149645 U JP H01149645U JP 4572688 U JP4572688 U JP 4572688U JP 4572688 U JP4572688 U JP 4572688U JP H01149645 U JPH01149645 U JP H01149645U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- end surface
- adhesive layer
- pressure
- sensitive adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims description 4
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
Description
第１図は本考案の一実施例の使用状態を示す断
面図、第２図はその要部を示す断面図である。
１……感圧接着層、２……支持枠、３……ペリ
クル、４……フオトマスク、１１，１３，１５，
１７……粘着剤、１２，１４，１６……フイルム
。
FIG. 1 is a cross-sectional view showing an embodiment of the present invention in use, and FIG. 2 is a cross-sectional view showing its essential parts. 1... Pressure sensitive adhesive layer, 2... Support frame, 3... Pellicle, 4... Photomask, 11, 13, 15,
17... Adhesive, 12, 14, 16... Film.
Claims (1)
端面に装着用の感圧接着層を備えてなるペリクル
装着用装置において、前記感圧接着層が少なくと
も２枚のフイルムと、少なくとも３層の粘着剤を
交互に積層したものであることを特徴とするペリ
クル装着用装置。 In a pellicle attachment device comprising a support frame having a pellicle attached to one end surface and a pressure-sensitive adhesive layer for attachment on the other end surface, the pressure-sensitive adhesive layer includes at least two films and at least three layers. A device for attaching a pellicle, characterized in that the adhesive is alternately laminated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4572688U JPH01149645U (en) | 1988-04-06 | 1988-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4572688U JPH01149645U (en) | 1988-04-06 | 1988-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01149645U true JPH01149645U (en) | 1989-10-17 |
Family
ID=31272026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4572688U Pending JPH01149645U (en) | 1988-04-06 | 1988-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01149645U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006119477A (en) * | 2004-10-22 | 2006-05-11 | Lasertec Corp | Mask structure and method for manufacturing semiconductor device using the same |
-
1988
- 1988-04-06 JP JP4572688U patent/JPH01149645U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006119477A (en) * | 2004-10-22 | 2006-05-11 | Lasertec Corp | Mask structure and method for manufacturing semiconductor device using the same |
| JP4512782B2 (en) * | 2004-10-22 | 2010-07-28 | レーザーテック株式会社 | Mask structure and semiconductor device manufacturing method using the same |