JPH01147254U - - Google Patents

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Publication number
JPH01147254U
JPH01147254U JP3963388U JP3963388U JPH01147254U JP H01147254 U JPH01147254 U JP H01147254U JP 3963388 U JP3963388 U JP 3963388U JP 3963388 U JP3963388 U JP 3963388U JP H01147254 U JPH01147254 U JP H01147254U
Authority
JP
Japan
Prior art keywords
raw material
container
contact
cvd apparatus
surface level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3963388U
Other languages
Japanese (ja)
Other versions
JPH0623565Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988039633U priority Critical patent/JPH0623565Y2/en
Publication of JPH01147254U publication Critical patent/JPH01147254U/ja
Application granted granted Critical
Publication of JPH0623565Y2 publication Critical patent/JPH0623565Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の第１の実施例の縦断面図、第
２図は本考案の第２の実施例の縦断面図である。 記号の説明：１，２１……可動接点、２……固
定接点、３……原料粉末、４……密閉容器、５，
６……信号導入端子、１１……ヒータ。 FIG. 1 is a longitudinal cross-sectional view of a first embodiment of the present invention, and FIG. 2 is a longitudinal cross-sectional view of a second embodiment of the present invention. Explanation of symbols: 1, 21...Movable contact, 2...Fixed contact, 3...Raw material powder, 4...Airtight container, 5,
6... Signal introduction terminal, 11... Heater.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 固体粉末の原料を収納し該原料を加熱気化して
原料ガスとしてＣＶＤ装置に供給する密閉形の原
料収納容器であつて、容器中の原料粉末の表面レ
ベルの減少に追随する可動接点と、前記原料粉末
の表面レベルが一定値以下に下つたときに前記可
動接点と接触する固定接点と、これらの接点と外
部との導通をとるための信号導入端子とを有する
ことを特徴とするＣＶＤ装置用原料収納容器。 A closed raw material storage container that stores a solid powder raw material, heats and vaporizes the raw material, and supplies the raw material gas as a raw material gas to a CVD apparatus, the container having a movable contact that follows a decrease in the surface level of the raw material powder in the container; For use in a CVD apparatus, characterized in that it has a fixed contact that comes into contact with the movable contact when the surface level of the raw material powder falls below a certain value, and a signal introduction terminal that establishes continuity between these contacts and the outside. Raw material storage container.
JP1988039633U 1988-03-28 1988-03-28 Raw material storage container for CVD equipment Expired - Lifetime JPH0623565Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988039633U JPH0623565Y2 (en) 1988-03-28 1988-03-28 Raw material storage container for CVD equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988039633U JPH0623565Y2 (en) 1988-03-28 1988-03-28 Raw material storage container for CVD equipment

Publications (2)

Publication Number Publication Date
JPH01147254U true JPH01147254U (en) 1989-10-11
JPH0623565Y2 JPH0623565Y2 (en) 1994-06-22

Family

ID=31266133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988039633U Expired - Lifetime JPH0623565Y2 (en) 1988-03-28 1988-03-28 Raw material storage container for CVD equipment

Country Status (1)

Country Link
JP (1) JPH0623565Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002083777A (en) * 2000-05-31 2002-03-22 Shipley Co Llc Bubbler
JP2016104912A (en) * 2002-07-23 2016-06-09 インテグリス・インコーポレーテッド Evaporator conveyance ampule

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7078341B2 (en) * 2003-09-30 2006-07-18 Tokyo Electron Limited Method of depositing metal layers from metal-carbonyl precursors

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888122U (en) * 1981-12-09 1983-06-15 日立造船株式会社 Tank liquid detection device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888122U (en) * 1981-12-09 1983-06-15 日立造船株式会社 Tank liquid detection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002083777A (en) * 2000-05-31 2002-03-22 Shipley Co Llc Bubbler
JP2016104912A (en) * 2002-07-23 2016-06-09 インテグリス・インコーポレーテッド Evaporator conveyance ampule

Also Published As

Publication number Publication date
JPH0623565Y2 (en) 1994-06-22

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