JPH01144372A - Vibrator for ultrasonic motor - Google Patents
Vibrator for ultrasonic motorInfo
- Publication number
- JPH01144372A JPH01144372A JP62303525A JP30352587A JPH01144372A JP H01144372 A JPH01144372 A JP H01144372A JP 62303525 A JP62303525 A JP 62303525A JP 30352587 A JP30352587 A JP 30352587A JP H01144372 A JPH01144372 A JP H01144372A
- Authority
- JP
- Japan
- Prior art keywords
- elastic
- piezoelectric ceramic
- vibrator
- plate
- ceramic plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 26
- 238000009826 distribution Methods 0.000 claims abstract description 9
- 230000003068 static effect Effects 0.000 claims abstract description 4
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 5
- 239000010935 stainless steel Substances 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract 3
- 238000003466 welding Methods 0.000 abstract 1
- 238000005452 bending Methods 0.000 description 12
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、超音波振動エネルギーを利用したモータに関
するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a motor that utilizes ultrasonic vibration energy.
（従来の技術）
超音波紙送り用モータとして、従来弾性板の片面に圧電
セラミック板を接触し、長さ縦振動と幅屈曲振動の二つ
の共振周波数を一致もしくは接近させ、その近傍の周波
数の電界を圧電体に印加することにより前記二つの振動
を縮退状態で励振する振動子（以後縦屈曲多重モード振
動子と呼ぶ）を利用する超音波モータが提案されている
。以下図面を参照しながら説明する。(Prior art) Conventionally, as an ultrasonic paper feeding motor, a piezoelectric ceramic plate is brought into contact with one side of an elastic plate, and the two resonance frequencies of longitudinal vibration and width bending vibration are made to match or approach each other. An ultrasonic motor has been proposed that utilizes a vibrator (hereinafter referred to as a longitudinal bending multimode vibrator) that excites the two vibrations in a degenerate state by applying an electric field to a piezoelectric body. This will be explained below with reference to the drawings.
まず縦屈曲多重モード振動子の一例を第４図に示す。こ
れは長さ方向の一次の縦振動と幅方向の一次の屈曲振動
を縮退状態で励振する振動子である。第４図（ａ）は・
正面図、第４図（Ｃ）は側面図である。゛厚さ方向に一
様に分極した圧電セラミック板４２の上下両面に金属電
極膜４３を設け、それを弾性板４１の底面に張り合わせ
ている。このとき弾性板４１と圧電セラミック板４２は
、長さ方向の１次の縦振動モードと幅方向の１次の屈曲
振動モードの共振周波数が一致するような寸法となって
いる。このような振動子の金属電極間に２つの振動モー
ドの共振周波数と等しい交流圧電を印加する事により、
第４図（ｂ）、（ｄ）で表される振幅変位分布を持つ定
在波が励振される。ここで第４図（ｂ）における４４は
長さ方向の１次の縦振動の変位分布、第４図（ｄ）にお
ける４５は幅方向の一次の屈曲振動の変位分布を示す。First, FIG. 4 shows an example of a longitudinal bending multimode vibrator. This is a vibrator that excites first-order longitudinal vibration in the length direction and first-order bending vibration in the width direction in a degenerate state. Figure 4(a) is...
FIG. 4(C) is a front view, and FIG. 4(C) is a side view. ``Metal electrode films 43 are provided on both upper and lower surfaces of a piezoelectric ceramic plate 42 that is uniformly polarized in the thickness direction, and these are bonded to the bottom surface of the elastic plate 41. At this time, the elastic plate 41 and the piezoelectric ceramic plate 42 are dimensioned so that the resonant frequencies of the first-order longitudinal vibration mode in the length direction and the first-order bending vibration mode in the width direction match. By applying AC piezoelectricity equal to the resonance frequency of the two vibration modes between the metal electrodes of such a vibrator,
A standing wave having an amplitude displacement distribution shown in FIGS. 4(b) and 4(d) is excited. Here, 44 in FIG. 4(b) indicates a displacement distribution of first-order longitudinal vibration in the length direction, and 45 in FIG. 4(d) indicates a displacement distribution of first-order bending vibration in the width direction.
このように縦屈曲多重モード振動子は２種類の異なる振
動モードを縮退させて使用していた。In this way, the vertical bending multimode vibrator uses two different vibration modes in a degenerate manner.
（発明が解決しようとする問題点）
上記振動子を利用した超音波モータは、従来の進行波を
利用した超音波モータと比較して、速度・駆動力が共に
大きく、弾性板の形状に工夫を凝らすことにより、更に
高速度・高駆動力化が可能である。(Problems to be solved by the invention) The ultrasonic motor using the above-mentioned vibrator has higher speed and driving force than the conventional ultrasonic motor using traveling waves, and the shape of the elastic plate has been devised. By elaborating on this, it is possible to achieve even higher speeds and higher driving forces.
しかしながら、特にハイパワー励振時に於て圧電セラミ
ック板が圧電的に伸縮したとき、接着面にずれ応力が加
わるため圧電体が剥がれ易いといった欠点があった。However, when the piezoelectric ceramic plate expands and contracts piezoelectrically, especially during high-power excitation, shear stress is applied to the bonded surface, which causes the piezoelectric body to easily peel off.
また、長さ縦振動と幅屈曲振動という複数のモードの共
振周波数を一致させる必要があるために、振動子を設計
する際に自由度が小さく、実際に使用する共振モードで
ある長さ縦振動モード付近に複数の高次の長さ屈曲振動
によるスプリアス振動が発生し、これらのスプリアス振
動を抑える事は極めて難しかった。そのため自励式で駆
動することが困難であるといった欠点があった。In addition, because it is necessary to match the resonant frequencies of multiple modes of longitudinal vibration and width bending vibration, there is a small degree of freedom when designing a vibrator, and the resonance mode actually used is longitudinal vibration. Spurious vibrations caused by multiple high-order longitudinal bending vibrations occur near the modes, and it is extremely difficult to suppress these spurious vibrations. Therefore, there was a drawback that it was difficult to drive in a self-excited manner.
（問題点を解決するための手段）
本発明は、静的圧縮応力バイアスが印加された圧電セラ
ミック板の両端に弾性板が付加されており一方の弾性板
の端部またはその近傍に、厚さ方向の質量分布が前記弾
性板とは異なる弾性体を前記弾性板と一体となるように
設け、その弾性体により、弾性板の長手方向の振動を厚
さ方向の振動に変換し、これら２種類の振動の合成であ
る楕円振動を発生させ得る構造を特徴とする超音波モー
タ用振動子である。(Means for Solving the Problems) The present invention has an elastic plate attached to both ends of a piezoelectric ceramic plate to which a static compressive stress bias is applied. An elastic body whose mass distribution in the direction is different from that of the elastic plate is provided so as to be integrated with the elastic plate, and the elastic body converts vibrations in the longitudinal direction of the elastic plate into vibrations in the thickness direction. This is an ultrasonic motor vibrator characterized by a structure capable of generating elliptical vibration, which is a combination of vibrations.
（作用）
振動子を上記の構成とすることで、高速度かつ高駆動力
の超音波モータが実現できる。以下図面を参照しながら
説明する。(Function) By configuring the vibrator as described above, an ultrasonic motor with high speed and high driving force can be realized. This will be explained below with reference to the drawings.
第１図は本発明における振動子の基本構成の側面図であ
る。弾性板１１の間に圧電セラミック仮１２を挿入し、
弾性板端部には弾性体１３が設けられている。ここで、
弾性板１１と圧電セラミック仮１２の重心１４及び弾性
体１３の重心１５のそれぞれの２座標の値が異なる、即
ち厚さ方向の質量分布が異なるところが重要な点である
。FIG. 1 is a side view of the basic configuration of a vibrator in the present invention. A piezoelectric ceramic temporary 12 is inserted between the elastic plates 11,
An elastic body 13 is provided at the end of the elastic plate. here,
The important point is that the values of the two coordinates of the center of gravity 14 of the elastic plate 11 and the temporary piezoelectric ceramic 12 and the center of gravity 15 of the elastic body 13 are different, that is, the mass distribution in the thickness direction is different.
この様な振動子に於て圧電セラミック板１２に交流電界
を印加すると、振動子は矢印１６のようにＸ軸方向の伸
縮を繰り返し、これが縦振動となる。この縦振動は弾性
板１１から弾性体１３に伝わるが、弾性体１３は弾性板
１１よりも重心が上方に位置しているためにＸ軸方向の
振動１６から２軸方向の振動成分１７が発生する。その
結果弾性体１３上面に於て楕円振動１８を得ることがで
きる。When an alternating current electric field is applied to the piezoelectric ceramic plate 12 in such a vibrator, the vibrator repeats expansion and contraction in the X-axis direction as shown by the arrow 16, resulting in longitudinal vibration. This longitudinal vibration is transmitted from the elastic plate 11 to the elastic body 13, but since the center of gravity of the elastic body 13 is located above the elastic plate 11, a vibration component 17 in the two-axis direction is generated from the vibration 16 in the X-axis direction. do. As a result, elliptical vibration 18 can be obtained on the upper surface of the elastic body 13.
第４図に示すように従来の縦屈曲多重モード振動子では
、弾性板４１の底面に圧電セラミック板４２を取り付け
る構造となっているので弾性板４１と電極４３の間の接
着面にずれ応力が加わる。そのため振動子を大きなパワ
ーで振動させると圧電セラミック板４２が剥がれ易いと
いった欠点があった。しかしながら本発明の方法を用い
ると、圧電セラミック板１２と弾性板１１の接触面は振
動方向１６に垂直であるために、構造上弾性体１１と圧
電セラミック板１２の間に全くずれ応力が発生する余地
がない。As shown in FIG. 4, the conventional vertical bending multi-mode vibrator has a structure in which a piezoelectric ceramic plate 42 is attached to the bottom surface of an elastic plate 41, so that shear stress is generated on the bonding surface between the elastic plate 41 and the electrode 43. join. Therefore, when the vibrator is vibrated with high power, the piezoelectric ceramic plate 42 tends to peel off. However, when the method of the present invention is used, since the contact surface between the piezoelectric ceramic plate 12 and the elastic plate 11 is perpendicular to the vibration direction 16, no shear stress is generated between the elastic body 11 and the piezoelectric ceramic plate 12 due to the structure. There's no room.
従って圧電セラミック板１２が剥がれ難くなり、より大
きなパワーでの振動が可能となる。Therefore, the piezoelectric ceramic plate 12 becomes difficult to peel off, and vibration with greater power becomes possible.
従来の縦屈曲多重モード振動子では２種類の振動モード
の共振周波数を一致させる必要があり、これらの共振周
波数は振動子の形状に大きく依存する。従って二つの異
なる振動モードの共振周波数を一致させるためには、振
動子に対して厳密な寸法が要求されるのみならず、振動
子を構成する材料の材料定数に関しても厳しい要求があ
る。従って、実際に上記縦屈曲多重モード振動子を製造
する場合は、二つの振動モードの周波数調整が必要不可
欠であった。これに対して本発明の方法によれば、１種
類の振動モードだけを用いるので寸法の自由度がはるか
に大きくなる。またスプリアス振動が本質的に少ないた
めに、使用共振モードにおいて自励発振が容易になる。In a conventional longitudinal bending multimode vibrator, it is necessary to match the resonance frequencies of two types of vibration modes, and these resonance frequencies largely depend on the shape of the vibrator. Therefore, in order to match the resonance frequencies of two different vibration modes, not only strict dimensions are required for the vibrator, but also strict requirements are placed on the material constants of the material constituting the vibrator. Therefore, when actually manufacturing the longitudinal bending multimode vibrator, it is essential to adjust the frequencies of the two vibration modes. In contrast, according to the method of the present invention, only one type of vibration mode is used, so the degree of freedom in dimensions is much greater. Furthermore, since spurious vibrations are essentially low, self-oscillation is facilitated in the used resonance mode.
（実施例）
以下、本発明の実施例について図を参照しながら説明す
る。(Example) Hereinafter, an example of the present invention will be described with reference to the drawings.
第２図（ａＸｂ）は本発明の超音波モータ、の実施例の
一つを示す図で、第２図（ａ）はシートフィーダ用超音
波モータの側面図、第２図（ｂ）は振動子の平面図であ
る。２１．２４はステンレスで作製された弾性板及び弾
性体、２２はＰＺＴ圧電セラミック板、２３は銀の焼付
は電極である。振動子の寸法は、本体（弾性板２１．圧
電セラミック板２２２弾性板２１）が長さ９３ｍｍ、幅
２０ｍｍ、厚さ５ｍｍ、弾性体２４が長さ１５ｍｍ、幅
２０ｍｍ、厚さ８ｍｍ、圧電セラミック板２２が長さ５
０ｍｍ５ 幅２０ｍｍ、厚さ５ｍｍ、 また第２図
（ａ）中ａ＝３ｍｍ、ｂ＝５ｍｍとなっており、直径３
ｍｍのボルト２５によって圧電セラミック板２２に静的
圧縮応力バイアスを印加しな。ここではボルトはステン
レス製弾性体にねじ込まれる形になっている。このバイ
アス印加方法はボルトに限らない。本振動子において長
さ方向縦振動の共振周波数は２５ｋＨｚとなる。Figure 2 (aXb) is a diagram showing one embodiment of the ultrasonic motor of the present invention, Figure 2 (a) is a side view of the ultrasonic motor for sheet feeder, and Figure 2 (b) is a vibration It is a top view of a child. 21 and 24 are elastic plates and elastic bodies made of stainless steel, 22 is a PZT piezoelectric ceramic plate, and 23 is a silver baked electrode. The dimensions of the vibrator are as follows: The main body (elastic plate 21, piezoelectric ceramic plate 222, elastic plate 21) is 93 mm long, 20 mm wide, and 5 mm thick; the elastic body 24 is 15 mm long, 20 mm wide, and 8 mm thick; 22 is length 5
0mm5 Width 20mm, thickness 5mm, and in Figure 2 (a) a = 3mm, b = 5mm, diameter 3
A static compressive stress bias is applied to the piezoelectric ceramic plate 22 by the mm bolts 25. Here, the bolt is screwed into a stainless steel elastic body. This bias application method is not limited to volts. In this vibrator, the resonance frequency of longitudinal vibration in the longitudinal direction is 25 kHz.
弾性体２４上部に薄い紙２７を載せ、幅１０ｍｍ、直径
１５ｍｍのステンレス製ローラ２６を弾性体端面より１
０ｍｍの位置に置き、このローラ２６で紙２７を圧接し
た。焼付は電極２３から圧電セラミック板２２に、２５
ｋＨｚの交流電界を印加したところローラ２６は矢印２
８の方向に回転し、紙２７は矢印２９の方向に進んだ。A thin paper 27 is placed on top of the elastic body 24, and a stainless steel roller 26 with a width of 10 mm and a diameter of 15 mm is placed 1 inch from the end surface of the elastic body.
The roller 26 was placed at a position of 0 mm, and the paper 27 was pressed against the roller 26 . Baking is performed from the electrode 23 to the piezoelectric ceramic plate 22, 25
When an alternating current electric field of kHz was applied, the roller 26 moved in the direction of arrow 2.
8, the paper 27 advanced in the direction of arrow 29.
第４図に示すような従来型の縦屈曲多重モード振動子を
用いたシートフィーダ用超音波モータの場合、入力パワ
ーＬＯＷ以上では約１／３の振動子で圧電セラミック板
４２の剥離が生じたが、第２図の振動子の場合入力パワ
ー２５Ｗでも圧電セラミック板２２の剥離は起きなかっ
た。この様に大きなパワーで振動させることができるで
、結果として、圧電セラミックの体積が同じ場合的１．
５倍の最高速度及び約２．５倍の起動駆動力が得られた
。In the case of an ultrasonic motor for a sheet feeder using a conventional vertically bent multimode vibrator as shown in FIG. 4, peeling of the piezoelectric ceramic plate 42 occurred in about 1/3 of the vibrators when the input power was LOW or higher. However, in the case of the vibrator shown in FIG. 2, the piezoelectric ceramic plate 22 did not peel off even at an input power of 25 W. In this way, it is possible to vibrate with a large power, and as a result, when the volume of the piezoelectric ceramic is the same, 1.
A maximum speed of 5 times and a starting driving force of about 2.5 times were obtained.
第３図は回転型モータとしての実施例の一つで、第２図
の紙を除き、弾性板３４で直接ローラ３６を回転させる
ものである。ローラの圧接力を１．０ｋｇとした。FIG. 3 shows one embodiment of a rotary motor, in which a roller 36 is directly rotated by an elastic plate 34, except for the paper shown in FIG. The pressing force of the roller was 1.0 kg.
ときに、従来よりある進行波を用いた円輪型超音波モー
タに比べて約１．８倍の起動トルクが得られた。In some cases, a starting torque of about 1.8 times was obtained compared to a conventional circular ring type ultrasonic motor using a certain type of traveling wave.
（発明の効果）
以上述べたように、本発明によれば超音波エネルギーを
利用した薄型高駆動力のモータが実現でき、例えばプリ
ンタ、ファクシミリ等の紙送り機構の超薄型化が図れる
といった長所を有し、工業的価値が多大である。(Effects of the Invention) As described above, according to the present invention, it is possible to realize a thin, high-driving-power motor that utilizes ultrasonic energy, and has the advantage that, for example, the paper feeding mechanism of printers, facsimile machines, etc. can be made ultra-thin. It has great industrial value.
第１図は本発明の振動子の基本構成図、第２図、第３図
は実施例構成図、第４図（ａ）、（ｃ）は従来型振動子
の基本構成図、第４図（ｂ）、（ｄ）は変位分布図であ
る。
図において、
１１．２１，３１，４１は弾性板、１２は圧電体、１３
，２４．３４は弾性体、１４は弾性板１１と圧電体１２
の重心、１５は弾性体１３の重心、１６はＸ軸方向の振
動の様子、１７は２軸方向の振動の様子、１８は楕円振
動の様子、２２．３２．４２は圧電セラミック板、２３
．３３．４３は銀の焼付は電極、２５．３５は締め付は
用ボルト、２６，３６はローラ、２７は薄い紙、２８．
３７はローラの回転方向、２９は紙の進行方向、４４．
４５は変位分布をそれぞれ示す。FIG. 1 is a basic configuration diagram of a vibrator of the present invention, FIGS. 2 and 3 are configuration diagrams of an embodiment, and FIGS. 4(a) and (c) are basic configuration diagrams of a conventional vibrator. (b) and (d) are displacement distribution maps. In the figure, 11. 21, 31, 41 are elastic plates, 12 is a piezoelectric body, 13
, 24.34 is an elastic body, 14 is an elastic plate 11 and a piezoelectric body 12.
15 is the center of gravity of the elastic body 13, 16 is the state of vibration in the X-axis direction, 17 is the state of vibration in the two-axis direction, 18 is the state of elliptical vibration, 22, 32, 42 is the piezoelectric ceramic plate, 23
．． 33.43 is the electrode for the silver printing, 25.35 is the bolt for tightening, 26, 36 is the roller, 27 is the thin paper, 28.
37 is the rotation direction of the roller, 29 is the paper traveling direction, 44.
45 each indicates a displacement distribution.
Claims (1)
両端に弾性板が付加されており一方の弾性板の端部また
はその近傍に、厚さ方向の質量分布が前記弾性板とは異
なる弾性体を設けたことを特徴とする超音波モータ用振
動子。Elastic plates are attached to both ends of the piezoelectric ceramic plate to which a static compressive stress bias is applied, and an elastic body whose mass distribution in the thickness direction is different from that of the elastic plate is attached at or near the end of one of the elastic plates. A vibrator for an ultrasonic motor, characterized by the following:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62303525A JPH0732611B2 (en) | 1987-11-30 | 1987-11-30 | Ultrasonic motor oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62303525A JPH0732611B2 (en) | 1987-11-30 | 1987-11-30 | Ultrasonic motor oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01144372A true JPH01144372A (en) | 1989-06-06 |
| JPH0732611B2 JPH0732611B2 (en) | 1995-04-10 |
Family
ID=17922040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62303525A Expired - Lifetime JPH0732611B2 (en) | 1987-11-30 | 1987-11-30 | Ultrasonic motor oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0732611B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009240148A (en) * | 2008-03-04 | 2009-10-15 | Taiheiyo Cement Corp | Ultrasonic motor |
| JP2009240149A (en) * | 2008-03-06 | 2009-10-15 | Taiheiyo Cement Corp | Ultrasonic motor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59230472A (en) * | 1983-06-13 | 1984-12-25 | Hitachi Ltd | Drive device |
| JPS60109776A (en) * | 1983-11-18 | 1985-06-15 | Matsushita Electric Ind Co Ltd | Piezoelectric motor |
| JPS60200776A (en) * | 1984-03-23 | 1985-10-11 | Hitachi Ltd | Driving device |
-
1987
- 1987-11-30 JP JP62303525A patent/JPH0732611B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59230472A (en) * | 1983-06-13 | 1984-12-25 | Hitachi Ltd | Drive device |
| JPS60109776A (en) * | 1983-11-18 | 1985-06-15 | Matsushita Electric Ind Co Ltd | Piezoelectric motor |
| JPS60200776A (en) * | 1984-03-23 | 1985-10-11 | Hitachi Ltd | Driving device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009240148A (en) * | 2008-03-04 | 2009-10-15 | Taiheiyo Cement Corp | Ultrasonic motor |
| JP2009240149A (en) * | 2008-03-06 | 2009-10-15 | Taiheiyo Cement Corp | Ultrasonic motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0732611B2 (en) | 1995-04-10 |
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