JPH01142508A - Waveguide type optical device - Google Patents
Waveguide type optical deviceInfo
- Publication number
- JPH01142508A JPH01142508A JP30059487A JP30059487A JPH01142508A JP H01142508 A JPH01142508 A JP H01142508A JP 30059487 A JP30059487 A JP 30059487A JP 30059487 A JP30059487 A JP 30059487A JP H01142508 A JPH01142508 A JP H01142508A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- optical fiber
- circuit element
- waveguide
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 44
- 239000013307 optical fiber Substances 0.000 claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 239000000853 adhesive Substances 0.000 abstract description 7
- 230000001070 adhesive effect Effects 0.000 abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Landscapes
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、光回路素子と光ファイバとの接続構造に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a connection structure between an optical circuit element and an optical fiber.
基板内又は基板上に光導波路を設けた光回路素子に光フ
ァイバを接続する場合の構造として、従来第４図あるい
は第５図に示したものが知られている。第４図のものに
おいて、１３はガラス等の基板中に先導波路を形成した
光回路素子であり、この素子１３に設けられた光導波路
の入出力端に光ファイバ群１８Ａ、１８Ｂ、１８Ｃを接
続するに当り、これら光ファイバの先端部を、保持具１
４．１５に形成したガイド溝１９Ａ、１９Ｂ。As a structure for connecting an optical fiber to an optical circuit element in which an optical waveguide is provided in or on a substrate, the structure shown in FIG. 4 or 5 is conventionally known. 4, 13 is an optical circuit element in which a guiding waveguide is formed in a substrate such as glass, and optical fiber groups 18A, 18B, and 18C are connected to the input and output ends of the optical waveguide provided in this element 13. When doing this, hold the tips of these optical fibers in the holder 1.
4. Guide grooves 19A and 19B formed in 15.
１９Ｃにセットし、蓋板１６．１７を被せて保持具、光
ファイバ、蓋板の王者を相互に接着固定した後端面を鏡
面研磨仕上げして、液面を光回路素子Ｌ３の端面に、光
軸調整後に接着剤で接合する。19C, cover the cover plates 16 and 17, and glue and fix the holder, optical fiber, and cover plate to each other.The rear end surface is mirror-polished, and the liquid level is placed on the end surface of the optical circuit element L3. After adjusting the axis, join with adhesive.
第５図のものは、基板２０上に、火炎加水分解反応を利
用した石英系光導波膜の堆積法等と反応性イオンエツチ
ング法等との組み合せにより、先導波路２１を突出形成
し、この導波路の形成時に、導波路入出射端付近に、間
隔をおいて対向配置した一対のガイド部２２Ａ、２２Ｂ
、２２Ｃをそれぞれ設け、これら各ガイド部の各間隙内
に光ファイバ２３Ａ、２３Ｂ、２３Ｃの先端を嵌装して
光軸が合うよう位置決めした後、接着剤により固定して
いる。In the example shown in FIG. 5, a leading waveguide 21 is formed protrudingly on a substrate 20 by a combination of a silica-based optical waveguide film deposition method using flame hydrolysis reaction and a reactive ion etching method. When forming a waveguide, a pair of guide portions 22A and 22B are arranged facing each other with an interval in the vicinity of the input and output ends of the waveguide.
, 22C are provided, and the tips of optical fibers 23A, 23B, and 23C are fitted into the gaps between these guide portions, positioned so that their optical axes are aligned, and then fixed with adhesive.
〔発明が解決しようとする問題点］
第４図の組み立て構造では、光回路素子１３と光ファイ
バ保持具１４．１５が独立となっているため、端面研磨
の際に端面が斜めになることがあリ、各々の光軸が角度
ずれを持ってしまうおそれがあった。また光軸調整には
片側で４軸ないし５軸の調整を要するという欠点があっ
た。[Problems to be Solved by the Invention] In the assembly structure shown in FIG. 4, the optical circuit element 13 and the optical fiber holders 14 and 15 are independent, so the end face may become oblique during end face polishing. There was a risk that each optical axis would have an angular misalignment. Another drawback is that optical axis adjustment requires adjustment of four or five axes on one side.
第５図の組み立て構造では、同一基板２０上に、光導波
路２１及び光ファイバガイド２２Ａ〜２２Ｇが形成され
ているので、光ファイバ２３Ａ〜２３Ｃの光軸調整は、
第４図の従来例はど難しくはないが、その精度は光ファ
イバガイド２２Ａ〜２２Ｃの作製精度に依存し、また光
ファイバ２３Ａ〜２３Ｃの固定方法を別途考える必要が
あった。In the assembly structure shown in FIG. 5, since the optical waveguide 21 and the optical fiber guides 22A to 22G are formed on the same substrate 20, the optical axis adjustment of the optical fibers 23A to 23C is as follows.
Although the conventional example shown in FIG. 4 is not difficult, its accuracy depends on the manufacturing accuracy of the optical fiber guides 22A to 22C, and it was necessary to separately consider a method for fixing the optical fibers 23A to 23C.
光導波路を有する光回路素子と、該先導波路端に接続さ
れる光ファイバを保持する光ファイバ保持具とを共通の
基板上に固着して一体化した。An optical circuit element having an optical waveguide and an optical fiber holder that holds an optical fiber connected to the end of the leading waveguide are fixed and integrated on a common substrate.
上記構造によれば、単一の基板上に光回路素子及び光フ
ァイバを配置できるので、光軸調整は片側で１軸ないし
２軸でよい。According to the above structure, since the optical circuit element and the optical fiber can be arranged on a single substrate, the optical axis may be adjusted by one or two axes on one side.
また光ファイバは光ファイバ保持具により保持されてお
り、接着固定する際にも接着面が大であるから、充分な
接着強度を持たせることができる効果がある。Further, since the optical fiber is held by an optical fiber holder and the adhesive surface is large when adhesively fixing it, sufficient adhesive strength can be provided.
以下本発明を図面に示した実施例に基づいて詳細に説明
する。The present invention will be described in detail below based on embodiments shown in the drawings.
第１図ないし第３図において、４は光導波路７が埋め込
み形成されている光回路素子、２．３は片側表面に光フ
ァイバガイド溝６Ａ〜６Ｃが形成された光ファイバ保持
具、５Ａ〜５Ｃは端面出しされた光ファイバあり、これ
ら各部品は単一の組立て用基板１上に、光導波路と光フ
ァイバとの光軸を合せた上で接着固定されている。組み
立てに当っては、まず光ファイバ保持具２．３に形成さ
れている光ファイバガイド溝６Ａ〜６Ｃ中に光ファイバ
５Ａ〜５Ｃをそれぞれセットする。このとき光ファイバ
の端面ば、へき開等により鏡面とされていることが必要
である。In FIGS. 1 to 3, 4 is an optical circuit element in which an optical waveguide 7 is embedded, 2.3 is an optical fiber holder having optical fiber guide grooves 6A to 6C formed on one side surface, and 5A to 5C. There is an optical fiber whose end is exposed, and each of these parts is adhesively fixed on a single assembly board 1 with the optical axes of the optical waveguide and the optical fiber aligned. In assembling, the optical fibers 5A to 5C are first set in the optical fiber guide grooves 6A to 6C formed in the optical fiber holder 2.3, respectively. At this time, it is necessary that the end face of the optical fiber be made into a mirror surface by cleavage or the like.
次に、先導波路の端面が鏡面にされた光回路素子４と、
上記光ファイバのセットされた光ファイバ保持具２．３
とを、単一の組み立て用基板上に配置する。Next, an optical circuit element 4 in which the end surface of the leading waveguide is mirror-finished;
Optical fiber holder 2.3 with the above optical fiber set
and placed on a single assembly board.
次に、光ファイバ保持具２．３及び光回路素子４を光軸
と垂直な面内で調整し、その後光ファイバ５Ａ〜５Ｃの
端面と光回路素子の端面とを密着させた後、全体を接着
剤により固定する。Next, the optical fiber holder 2.3 and the optical circuit element 4 are adjusted in a plane perpendicular to the optical axis, and then the end faces of the optical fibers 5A to 5C and the end faces of the optical circuit element are brought into close contact, and then the whole Fix with adhesive.
なお図示例では、組み立て用基板１の、光ファイバ保持
具及び光回路素子を配置する面を−様な平坦面としてい
るが、光ファイバの径と光導波路の径とが異なり、光軸
の調整ができない場合には、基板ｌの光回路素子４を配
置する一部だけに凹又は凸状のフラットな面を設けても
よい。In the illustrated example, the surface of the assembly board 1 on which the optical fiber holder and the optical circuit element are placed is a --shaped flat surface, but the diameter of the optical fiber and the diameter of the optical waveguide are different, and it is difficult to adjust the optical axis. If this is not possible, a concave or convex flat surface may be provided only on the part of the substrate 1 where the optical circuit element 4 is arranged.
また光ファイバ保持具２．３は、光回路素子４の対向側
面にそれぞれ配置するかわりに、いずれか一方の側面の
みに接続する構造としてもよい。Further, instead of being arranged on the opposite side surfaces of the optical circuit element 4, the optical fiber holders 2.3 may be connected to only one side surface.
さらに、光ファイバの端面が鏡面であれば、光ファイバ
保持具の端面ば必ずしも鏡面である必要はない。Furthermore, if the end surface of the optical fiber is a mirror surface, the end surface of the optical fiber holder does not necessarily need to be a mirror surface.
第１図（ａ）、 （ｂ）は本発明の一実施例を示すそれ
ぞれ平面図及び側面図、第２図は第１図の■−■線に沿
った横断面図、第３図は第１図のＩＩＩ−ＩＩＩ線に沿
った横断面図である。
１・・・組み立て用基板、２，３・・・光ファイバ保持
具、４・・・光回路素子、５Ａ、５Ｂ、５Ｃ・・・光フ
ァイバ、６Ａ、６Ｂ、６Ｃ・・・光ファイバガイド溝、
７・・・光導波路。
第１図
第２図 第３図
第４図
昭和４２年Σ月２２日1(a) and 1(b) are a plan view and a side view, respectively, showing an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along the line ■-■ in FIG. 1, and FIG. FIG. 2 is a cross-sectional view taken along line III-III in FIG. 1; DESCRIPTION OF SYMBOLS 1... Assembly board, 2, 3... Optical fiber holder, 4... Optical circuit element, 5A, 5B, 5C... Optical fiber, 6A, 6B, 6C... Optical fiber guide groove ,
7... Optical waveguide. Figure 1 Figure 2 Figure 3 Figure 4 Σ Month 22, 1962
Claims (1)
される光ファイバを保持する光ファイバ保持具とを共通
の基板上に固着して成る導波路型光デバイス。A waveguide type optical device comprising an optical circuit element having an optical waveguide and an optical fiber holder that holds an optical fiber connected to the end of the optical waveguide, which are fixed on a common substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30059487A JPH01142508A (en) | 1987-11-28 | 1987-11-28 | Waveguide type optical device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30059487A JPH01142508A (en) | 1987-11-28 | 1987-11-28 | Waveguide type optical device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01142508A true JPH01142508A (en) | 1989-06-05 |
Family
ID=17886725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30059487A Pending JPH01142508A (en) | 1987-11-28 | 1987-11-28 | Waveguide type optical device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01142508A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002082139A1 (en) * | 2000-12-15 | 2002-10-17 | Intel Corporation | Alignment of fiber optic ribbon to waveguide array using an epoxy |
| US6628865B2 (en) | 2000-12-15 | 2003-09-30 | Intel Corporation | Alignment of optical fibers to an etched array waveguide |
| US6886989B2 (en) | 2000-12-15 | 2005-05-03 | Intel Corporation | Alignment of fiber optic bundle to array waveguide using pins |
| CN103492920A (en) * | 2011-04-19 | 2014-01-01 | 日本电信电话株式会社 | Optical component |
-
1987
- 1987-11-28 JP JP30059487A patent/JPH01142508A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002082139A1 (en) * | 2000-12-15 | 2002-10-17 | Intel Corporation | Alignment of fiber optic ribbon to waveguide array using an epoxy |
| US6628865B2 (en) | 2000-12-15 | 2003-09-30 | Intel Corporation | Alignment of optical fibers to an etched array waveguide |
| US6707970B2 (en) | 2000-12-15 | 2004-03-16 | Intel Corporation | Alignment of fiber optic bundle to array waveguide using an epoxy |
| US6886989B2 (en) | 2000-12-15 | 2005-05-03 | Intel Corporation | Alignment of fiber optic bundle to array waveguide using pins |
| CN103492920A (en) * | 2011-04-19 | 2014-01-01 | 日本电信电话株式会社 | Optical component |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6099684A (en) | Procedure for assembling the ends of optical fibers into a sheet | |
| US4796975A (en) | Method of aligning and attaching optical fibers to substrate optical waveguides and substrate optical waveguide having fibers attached thereto | |
| GB2184255A (en) | Optical fibre integrated optical device coupler | |
| JPH04316005A (en) | Manufacture of coupled body of light guide substrate and substrate for optical fiber arraying | |
| JPH01142508A (en) | Waveguide type optical device | |
| JPS57158824A (en) | Optical connector | |
| US6665475B2 (en) | Precision fiber optic alignment and attachment apparatus | |
| JPS63316009A (en) | Optical coupling structure | |
| JPS5735820A (en) | Multicore optical fiber connector | |
| JP2628682B2 (en) | Optical waveguide component and its connection method | |
| JPH02156211A (en) | Auxiliary device for coupling plane optical waveguide and optical fiber | |
| JPH08160242A (en) | Optical fiber array | |
| JP2584008Y2 (en) | Optical element coupling structure | |
| JPS63301005A (en) | Optical fiber array | |
| JPH05224079A (en) | Coupling structure of optical waveguide path and optical fiber | |
| JP2000009958A (en) | Optical fiber connector and optical coupling element | |
| JPH03134603A (en) | Adhesion method of high precision | |
| JPH0486607A (en) | Method and device for connecting optical waveguide and optical fiber | |
| JPH01130110A (en) | Structure for connecting optical fiber of waveguide | |
| JPS6266214A (en) | Positioning substrate for optical parts | |
| JPS6377010A (en) | Connecting method for optical fiber | |
| JP2001033655A (en) | Pitch changing adaptor, and connection part for optical fiber | |
| JPH05188234A (en) | Method for connecting optical fiber cables | |
| JPH0469923B2 (en) | ||
| JPH0311306A (en) | Coupling structure between optical waveguide and optical fiber |