JPH01139146U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案を示す第１の実施例の概念図、
第２図は円錐ばね位置決め部を示す断面図、第３
図は本考案を示す第２の実施例の概略図、第４図
は本考案を示す第３の実施例の概略図、第５図、
第６図は従来技術を示す概略図、第７図はＳＴＭ
装置の概略図、第８図は除振特性を示す説明図で
ある。 １……トンネルユニツト、２，３，４，１６…
…プレート、７……ダンピング材、１３……円錐
ばね、１４……バランスウエイト。 FIG. 1 is a conceptual diagram of a first embodiment of the present invention;
Figure 2 is a sectional view showing the conical spring positioning part, Figure 3 is a sectional view showing the conical spring positioning part;
The figures are a schematic diagram of a second embodiment of the present invention, FIG. 4 is a schematic diagram of a third embodiment of the present invention, and FIG.
Figure 6 is a schematic diagram showing the conventional technology, Figure 7 is STM
FIG. 8, which is a schematic diagram of the device, is an explanatory diagram showing vibration isolation characteristics. 1...Tunnel unit, 2, 3, 4, 16...
... plate, 7 ... damping material, 13 ... conical spring, 14 ... balance weight.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 測定装置に対する外部振動を除去するための除
振装置で、プレートとばねとダンピング部材から
成る除振装置において、ばねに円錐ばねを使用し
たことを特徴とする除振装置。 A vibration isolator for removing external vibrations from a measuring device, the vibration isolator comprising a plate, a spring, and a damping member, characterized in that a conical spring is used as the spring.