JPH01135466A - Polishing device using magnetic fluid - Google Patents
Polishing device using magnetic fluidInfo
- Publication number
- JPH01135466A JPH01135466A JP62287439A JP28743987A JPH01135466A JP H01135466 A JPH01135466 A JP H01135466A JP 62287439 A JP62287439 A JP 62287439A JP 28743987 A JP28743987 A JP 28743987A JP H01135466 A JPH01135466 A JP H01135466A
- Authority
- JP
- Japan
- Prior art keywords
- container
- magnetic fluid
- driving
- jig
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 32
- 239000011553 magnetic fluid Substances 0.000 title claims abstract description 31
- 239000006061 abrasive grain Substances 0.000 claims abstract description 21
- 238000003825 pressing Methods 0.000 claims abstract description 5
- 238000003754 machining Methods 0.000 description 15
- 239000012530 fluid Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 239000010431 corundum Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
【発明の詳細な説明】
４０発明の目的
この発明は、磁性流体に砥粒を分散させた研磨用液を磁
場の作用下で使用して物体の表面を研磨する？ｔ２ｔに
関するもので、例えばボールベアリングその他に使用さ
れる球体を研磨して、真球度が ′高い球体を効率よく
製造するための装置に関するものである。Detailed Description of the Invention 40 Purpose of the Invention This invention polishes the surface of an object using a polishing liquid in which abrasive grains are dispersed in a magnetic fluid under the action of a magnetic field. This invention relates to t2t, and relates to an apparatus for efficiently manufacturing spheres with high sphericity by polishing spheres used in ball bearings and the like.
【え立且遣
磁性流体に砥粒を分散させた研磨用液を磁場の作用下て
使用して物体の表面を研磨する方法は。[A method of polishing the surface of an object using a polishing liquid in which abrasive grains are dispersed in a magnetic fluid under the action of a magnetic field.
特開昭５１−１０４９９号、特開昭５７−１６３０５７
号、特開昭５７−１５８２８０号、特開昭５８−７７４
４７号、特開昭５９−１０２５６９号等の明細書に記載
されているが、いずれも平面を研磨する方法か主体であ
る。JP-A-51-10499, JP-A-57-163057
No., JP-A-57-158280, JP-A-58-774
No. 47, JP-A No. 59-102569, etc., but all of them are mainly methods of polishing a flat surface.
特開昭６２−１７３１６６号には、砥粒を含有する磁性
流体中に浸漬した球体を、磁性流体の外部の一方の側よ
り働く外部磁場の作用により排出力を与えて、その対向
側に位置させた駆動用治具の面に押しつけ、それによっ
て該駆動用治具の運動を球体に伝達して砥粒を含有する
磁性流体中で運動させ、該球体のＭ動を案内面によって
制御することを特徴とする磁性流体を用いる球体の研磨
方法及び装置か開示されている。JP-A No. 62-173166 discloses that a sphere immersed in a magnetic fluid containing abrasive grains is placed on the opposite side by applying an ejecting force by the action of an external magnetic field acting from one side of the outside of the magnetic fluid. The ball is pressed against the surface of a driving jig that has been moved, thereby transmitting the movement of the driving jig to the sphere to move it in a magnetic fluid containing abrasive grains, and controlling the M movement of the sphere by a guide surface. A method and apparatus for polishing a sphere using a magnetic fluid are disclosed.
またこの際５球体の外部磁場側に位置するように浮力板
を挿入すると、この浮力板にも外部磁場の作用による排
出力が与えられ１球体をより強く駆動用治具の駆動面に
押しつけるので研磨効率が著しく向上することが開示さ
れている。At this time, if a buoyancy plate is inserted so as to be located on the external magnetic field side of the 5 spheres, this buoyancy plate will also be given ejection force by the action of the external magnetic field, pressing the 1 sphere more strongly against the drive surface of the drive jig. It is disclosed that polishing efficiency is significantly improved.
第４図は直径的９ ｍ ｍの５ｉ３Ｎａ球体を研磨した
場合の磁石上面と球体又は浮力板との間の隙間（横軸：
ｍｍ）と加工荷重（縦軸二Ｎ）との関係を測定した例
を示す図、第５図は加工荷重（横軸二Ｎ）と研磨速度（
縦軸：ＪＬｍ／ｍ１ｎ）との関係を測定した例を示す図
で、○印は浮力板を用いた場合のデータ、Δ印は浮力板
を用いない場合のデータである。Figure 4 shows the gap between the top surface of the magnet and the sphere or buoyancy plate (horizontal axis:
Figure 5 shows an example of the relationship between the machining load (vertical axis: 2 N) and the machining load (horizontal axis: 2 N) and the polishing rate (mm) and the polishing rate (
Vertical axis: JLm/m1n) is a diagram showing an example of measuring the relationship, in which the ◯ mark is data when a buoyancy plate is used, and the Δ mark is data when a buoyancy plate is not used.
第４図及び第５図より、砥粒な含有する磁性流体による
研磨方法では、外部磁場を与える磁石と被研磨物との間
の距離が小さいほど強い排出力力く作用して大きな加工
荷重が与えられ、そして加工荷重が大きいほど研磨速度
が早くなること、また浮力板を用いると加工荷重がかよ
り大きく研磨速度がより大になることが明らかである。From Figures 4 and 5, in the polishing method using magnetic fluid containing abrasive grains, the smaller the distance between the magnet that applies the external magnetic field and the object to be polished, the stronger the ejection force acts, and the greater the machining load. It is clear that the higher the machining load is, the faster the polishing rate is, and that when a buoyant plate is used, the higher the machining load is, the faster the polishing rate is.
か じよ−と 。 占
上記のように、砥粒を含有する磁性流体を用いる研磨に
おいて研磨速度を高めるためには、砥粒を含有する磁性
流体中に被研磨物を配置した後。Kajiyoto. As mentioned above, in order to increase the polishing rate in polishing using a magnetic fluid containing abrasive grains, the object to be polished is placed in the magnetic fluid containing abrasive grains.
駆動用治具の位置を調節して磁石上面と被研磨物又は浮
力板との間の隙間ができるだけ小さくなるようにする必
要がある。しかし磁石上面と被研磨物又は浮力板とが直
接接触してはならない。従って反復作業においてこの初
期条件が常に最適かつ一定であるように設定するのは容
易てはない。It is necessary to adjust the position of the driving jig so that the gap between the upper surface of the magnet and the object to be polished or the buoyant plate is made as small as possible. However, the upper surface of the magnet and the object to be polished or the buoyant plate must not come into direct contact. Therefore, it is not easy to set these initial conditions so that they are always optimal and constant during repeated operations.
しかも研磨の進行に伴なって被研磨物や駆動用治具が摩
滅すると、磁石との距離が遠くなり、結果的に加工荷重
が次第に小さくなり研磨速度はどんどん小さくなる。こ
れを防止するためには、常時監視して駆動用治具の位置
の調整を頻繁に行う必要があり、繁雑であった。Moreover, as the workpiece to be polished and the driving jig wear out as polishing progresses, the distance from the magnet increases, and as a result, the machining load gradually decreases and the polishing speed gradually decreases. In order to prevent this, it is necessary to constantly monitor and frequently adjust the position of the driving jig, which is complicated.
本発明はこのような不都合を解消し、初期条件を常に最
適かつ一定であるように設定することが容易で、しかも
研磨中目動的に加工荷重を一定に保つことができる研磨
装置を提供することを目的とする。The present invention eliminates such inconveniences, and provides a polishing device that allows easy setting of initial conditions to be optimal and constant at all times, and that can dynamically keep the machining load constant during polishing. The purpose is to
口９発明の構成
。 占 た の本発明の磁性
流体を用いる研磨装置は、下部に駆動面を有する駆動用
治具の下方に、底部に磁石か配置され且つ砥粒を含有す
る磁性流体か充填された容器を配置し、前記容器又は駆
動用治具を上下方向にスライドして容器と駆動用治具と
を一定の荷重で相互に押し付ける機構を設けたことを特
徴とする。9. Composition of the invention. A polishing device using a magnetic fluid according to the present invention includes a container filled with a magnetic fluid containing abrasive grains and a magnet arranged at the bottom below a driving jig having a driving surface at the bottom. The present invention is characterized in that a mechanism is provided for sliding the container or the driving jig in the vertical direction and pressing the container and the driving jig against each other with a constant load.
浮力板は付加しても付加しなくてもよいが、付加する方
が好ましい。The buoyancy plate may or may not be added, but it is preferable to add it.
第１図は容器が上下方向にスライドするようにした装置
の具体的構造の一例を示すもので、下部に駆動面ＩＡを
有する駆動用治具ｌの下方に、底部に磁石２が配置され
砥粒を含有する磁性流体３か充填され更に磁性流体中に
浮力板４が収納された容器５が基台６Ａ上に配置されて
おり、基台６Ａはそれを貫通するガイドボスト７に沿っ
て上下方向にスライドするようにしである。従って容器
５は基台６Ａと共に上下方向にスライドする。FIG. 1 shows an example of the specific structure of a device in which a container slides in the vertical direction. A magnet 2 is arranged at the bottom of a driving jig l having a driving surface IA at the bottom. A container 5 filled with a magnetic fluid 3 containing particles and containing a buoyancy plate 4 in the magnetic fluid is placed on a base 6A, and the base 6A is vertically moved along a guide post 7 passing through it. It is designed to slide in the direction. Therefore, the container 5 slides in the vertical direction together with the base 6A.
容器５は、基台６Ａを介して、その上方に設置されたロ
ーラー８にかけられたローブ９により懸吊されており、
ローラー８の反対側に懸垂させたロープ９の他端に重錘
１０を設けである。The container 5 is suspended by a lobe 9 placed on a roller 8 installed above the base 6A.
A weight 10 is provided at the other end of a rope 9 suspended on the opposite side of the roller 8.
磁石２、磁性流体３．浮力板４、容′ｘ５及び基台６Ａ
′＄の合計型を−をＢとすれば、重錘ｌＯの合計重量か
Ｂの時に丁度バランスするのて、１ｌＮ４ｉ１０の合計
重量をＢ＋Ｗとすれば、基台６Ａと共に容器５は上方に
スライドして、容器５と駆動用治具ｌとは一定の荷重Ｗ
で相互に押し付けられることになる。この荷重Ｗは浮力
板４と被研磨物１２の浮力の合計に等しく、被研磨物１
２の加Ｔ、ｔｒｌｔとなる。Magnet 2, magnetic fluid 3. Buoyancy plate 4, capacity x5 and base 6A
If the total type of '$ is - and B is the total weight of the weights 1O, then the balance will be exactly when the total weight of the weights 10 is B. If the total weight of 11N4i10 is B+W, the container 5 will slide upward together with the base 6A. Therefore, the container 5 and the driving jig l are subjected to a constant load W.
will be forced upon each other. This load W is equal to the sum of the buoyancy of the buoyancy plate 4 and the object to be polished 12, and
The addition of 2 becomes T, trlt.
なお記号１３は駆動用治具ｌの駆動用モータ。In addition, symbol 13 is a driving motor for driving jig l.
記号１４は駆動用治具ｌを支えるフレーム、記号１５は
Ｂ＋Ｗの値を検知するロードセル、記％ １６は容器５
の支点である。Symbol 14 is a frame that supports the driving jig l, symbol 15 is a load cell that detects the value of B+W, and % 16 is a container 5.
It is the fulcrum of
第２図は駆動用油ＡＩか上下方向にスライドするように
した装置の具体的構造の一例を示すもので、下部に駆動
面ＩＡを有する駆動用治具ｌは基台６Ｂ上に配置されて
おり、基台６Ｂはそれを貫通するガイドボスト７に沿っ
てと下方向にスライドするようにしである。従ワて駆動
用治具ｌは基台６Ｂと共に上下方向にスライドする。FIG. 2 shows an example of a specific structure of a device in which the driving oil AI is slid in the vertical direction, and the driving jig l having the driving surface IA at the bottom is placed on the base 6B. The base 6B is configured to slide downward along a guide post 7 passing through it. The subordinate workpiece driving jig 1 slides in the vertical direction together with the base 6B.
駆動用治！Ｌ：Ｉは、基台６Ｂを介して、その上方に設
置されたローラー８にかけられたロープ９により懸吊さ
れており、ローラー８の反対側に懸垂させたロープ９の
他端に重錘ｌＯを設けである。Driving treatment! L:I is suspended by a rope 9 hung on a roller 8 installed above the base 6B, and a weight lO is attached to the other end of the rope 9 suspended on the opposite side of the roller 8. This is provided.
一方容器５は駆動用治具ｌの下方に固定配置されている
。On the other hand, the container 5 is fixedly arranged below the driving jig l.
駆動用治具ｌ、モータ１３及び基台６Ｂ等の合計ｉＲｕ
をＣとすれば１重錘ｉｏの合計重量かＣの時に丁度バラ
ンスするのて、重錘ｌＯの合計重量をＣ−Ｗとすれば基
台６Ｂと共に駆動用治Ａｌは下方にスライドし、駆動用
治具ｌと容器５とは一定の荷 Ｗて相互に押し付けられ
ることになる。Total iRu of drive jig l, motor 13, base 6B, etc.
If C is the total weight of one weight IO, the balance will be exactly when C. If the total weight of one weight IO is C-W, then the driving jig Al will slide downward together with the base 6B, and the driving The jig l and the container 5 are pressed against each other by a constant load W.
この荷重Ｗは浮力板４と被研磨物１２の浮力の合計に等
しく、被研磨物１２の加工荷重となる。This load W is equal to the sum of the buoyancy of the buoyancy plate 4 and the object to be polished 12, and serves as a processing load for the object to be polished 12.
第３１′／ｉｌは容器か上下方向にスライドするように
した装置の具体的構造の他の例を示すものて、容器５を
ノ＾台６Ａごと流体ジヤツキ１７Ａの上に設置し、この
流体ジヤツキ１７Ａと連結した流体ジヤツキ１７Ｂに重
錘１０を載せれば、第１図により説明したのと同様に、
磁石２、磁性流体３．浮力板４．容器５及び基台６Ａ等
の合計重量をＢとすれば重錘ｌＯの重量がＢの時に丁度
バランスするのて、ｔ［（９１０の重量をＢ＋Ｗとすれ
ば基台６Ａと共に容器５は上方にスライドして、容器５
と駆動用治具ｌとは一定の荷重Ｗで相互に押し付けられ
ることになる。No. 31'/il shows another example of the specific structure of the device in which the container is slid in the vertical direction. If the weight 10 is placed on the fluid jack 17B connected to the fluid jack 17A, the same as explained in FIG.
Magnet 2, magnetic fluid 3. Buoyancy plate 4. If the total weight of the container 5, base 6A, etc. is B, the weight of the weight lO is exactly balanced, and if the weight of t[(910 is B + W), the container 5 and the base 6A move upward. Slide container 5
and the driving jig I are pressed against each other with a constant load W.
容器又は駆動用治具を上下方向にスライドして容器と駆
動用治具とを一定の荷重て相互に押し付ける機構として
は第１図〜第３図により具体的に説明した構造に限定さ
れるものではなく、任意の手段を用いることができる。The mechanism for sliding the container or the driving jig in the vertical direction and pressing the container and the driving jig against each other with a constant load is limited to the structure specifically explained in FIGS. 1 to 3. Instead, any means can be used.
例えば、第１図及び第２図に示したローラーとロープを
用いる機構の代わりに、てこの原理を応用して重錘を作
用させてもよい。For example, instead of the mechanism using rollers and ropes shown in FIGS. 1 and 2, a weight may be applied by applying the lever principle.
あるいは第３図において、対となる流体ジャ・ンキ１７
Ｂを設けずに、ｙｔ体ジヤツキ１７Ａにポンプ等で加圧
された流体を供給するとか、メカニカルジヤツキを用い
るとかしてもよい、その場合、容器５が受ける荷重をロ
ードセル１５で検知してそれか一定になるようにジヤツ
キを上下させるように制御すればよい。Alternatively, in FIG. 3, the paired fluid jack 17
B may be omitted and pressurized fluid may be supplied to the YT body jack 17A using a pump or the like, or a mechanical jack may be used. In that case, the load applied to the container 5 may be detected by the load cell 15 and the It is only necessary to control the jacking to move it up and down so that it remains constant.
以−Ｆか本発明の要旨とするところであるが、その他砥
粒を含有する磁性流体を用いる研磨装置についての一般
的な知見について述べる。In addition to the gist of the present invention, general knowledge regarding polishing apparatuses using magnetic fluids containing abrasive grains will be described below.
磁石２は単一磁石または極性を揃えて配置した磁石群で
あってもよいか、むしろ隣り合う磁石の極が互いに異な
るように（図で矢印で示す）組合せた磁石群であること
か好ましい。The magnet 2 may be a single magnet or a group of magnets arranged with the same polarity, or preferably a group of magnets combined so that adjacent magnets have different polarities (as indicated by arrows in the figure).
この磁石または磁石群は永久磁石でも電磁石でもよい。This magnet or group of magnets may be a permanent magnet or an electromagnet.
磁性流体中に含有される砥粒は、公知の研磨用砥粒を適
宜選択して使用することができる０例えばＡｕ２０ｓ（
コランダム）、５ｉＣ（炭化ケイ素二カーボランダム）
、ダイヤモンド等であり。As the abrasive grains contained in the magnetic fluid, known polishing abrasive grains can be appropriately selected and used. For example, Au20s (
corundum), 5iC (silicon carbide dicarborundum)
, diamond etc.
あるいは磁性を付加した砥粒でもよい。Alternatively, abrasive grains with added magnetism may be used.
駆動用治具ｌのＭｆｈは、主軸を中心とする回転運動、
水平方向の往復運動、あるいは上下方向の振動のいずれ
であってもよい。Mfh of the driving jig l is the rotational movement around the main axis,
Either horizontal reciprocating motion or vertical vibration may be used.
駆動用治具の運動が水平方向の往復Ｍ動である場合は容
器の形状は箱型となる。When the movement of the driving jig is horizontal reciprocating M movement, the shape of the container is box-shaped.
第１図、第２図及び第３図には容器の形状が円筒状で、
駆動用治具は主軸（図の場合垂直軸）を中心とする回転
運動を行うように構成されている装置を示しである。こ
れは球体を研磨するに適した装置である。In Figures 1, 2, and 3, the shape of the container is cylindrical;
The driving jig is a device configured to perform rotational movement around a main axis (vertical axis in the figure). This is a device suitable for polishing spheres.
駆動用治具ｌの駆動面ＩＡは、下方から押しつけらる球
体にＪ！ｌ！動を伝達すると共に、球体研磨のためのラ
ップ盤（上部ラップ盤）としても働く。The driving surface IA of the driving jig l is J! l! In addition to transmitting motion, it also functions as a lapping machine (upper lapping machine) for polishing spheres.
砥粒を含有する磁性流体３中に浸漬された球状の被研磨
物１２は、下方より働く磁場の作用により磁気浮揚現象
を生じて、その上方に位置する駆動用治具ｌの駆動面Ｉ
Ａに押しつけられる。駆動用治具ｌか運動すれば、その
Ｍ動は球状の被研磨物１２に伝達され、球状の被研磨物
１２は砥粒な含有する磁性克体３中でＭ動するようにな
る６球状の被研磨物の運動は案内面として作用する容器
５の側壁内面及び駆動用治具の駆動面によって制御され
る。The spherical object to be polished 12 immersed in the magnetic fluid 3 containing abrasive grains causes a magnetic levitation phenomenon due to the action of the magnetic field acting from below, and the driving surface I of the driving jig l located above it.
Pressed against A. When the driving jig l moves, its M motion is transmitted to the spherical object to be polished 12, and the spherical object to be polished 12 moves M in the magnetic material 3 containing abrasive grains. The movement of the object to be polished is controlled by the inner surface of the side wall of the container 5, which acts as a guide surface, and the driving surface of the driving jig.
浮力板４は被研磨物１２の下部に位置するように挿入さ
れ、駆動面への球状の被研磨物の押しっけを増強し、ま
た運動を制御する案内面の作用もする。The buoyancy plate 4 is inserted so as to be positioned below the object to be polished 12, and enhances the pushing of the spherical object to be polished toward the driving surface, and also acts as a guide surface to control the movement.
磁性流体と被研磨物の比重差及びｍ気による浮揚力の関
係か被研ｆｆｊ物を浮揚させるに不十分な場゛ 合
でも、浮揚力の大きい浮力板を使用して被研磨物を駆動
面に押しつけることかできる。Even if the relationship between the specific gravity difference between the magnetic fluid and the object to be polished and the buoyancy force due to m air is insufficient to levitate the object to be polished, a buoyancy plate with a large buoyancy force can be used to lift the object to the driving surface. You can force it on someone.
浮力板の比重は砥粒を含有する磁性流体の比重よりも軽
いことは絶対必要な条件ではなく、下方より働く外部磁
場の作用により浮力を生じるものてあればよい。It is not absolutely necessary that the specific gravity of the buoyancy plate is lighter than the specific gravity of the magnetic fluid containing abrasive grains, but it is sufficient that the buoyancy plate generates buoyancy by the action of an external magnetic field acting from below.
１月
本発明装置を使用するに先立って、予備試験を行って所
望の研磨速度及び仕上がりを与える加工荷重Ｗを求める
。Prior to using the apparatus of the present invention, a preliminary test is conducted to determine the machining load W that provides the desired polishing rate and finish.
第１図及び第３図に例示した装はの場合は１重錘ｌＯと
してその合計値が磁石２．磁性流体３、浮力板４、容器
５及び基台６等の合計重量Ｂと重Ｈｗとの合計重量に相
当するものを使用すれば、容器と駆動用治具とは一定の
荷重Ｗて相互に押し付けられ、この荷重Ｗが加工荷重と
して働く。In the case of the device illustrated in FIGS. 1 and 3, the total value is 1 weight lO, and the total value is 2. If a weight equivalent to the total weight B and weight Hw of the magnetic fluid 3, buoyancy plate 4, container 5, base 6, etc. is used, the container and the driving jig can be mutually attached with a constant load W. This load W acts as a machining load.
第２図に例示した装置の場合は、重！！ＩＯとしてその
合計値か駆動用治具ｌ、モータ１１及び基台６Ｂ！：Ｊ
の合計型７ｉｌｃ重Ｈｗとの差に相当する重量のものを
使用すれば、駆動用治具１と容器５とは一定つ荷重Ｗで
相互に押し付けられ、この荷重Ｗが加工荷重として働く
。In the case of the device illustrated in Figure 2, heavy! ! The total value as IO, driving jig l, motor 11 and base 6B! :J
If a weight corresponding to the difference between the total type 7ilc weight Hw is used, the driving jig 1 and the container 5 are pressed against each other with a constant load W, and this load W acts as a processing load.
容器５中の砥粒を含有する磁性流体中に被研磨物１２を
浸漬して駆動用油ＡＩを作動させれば、被研磨物１２は
加工荷重Ｗで駆動用治具の駆動面に押圧された状態で研
磨される。When the workpiece 12 to be polished is immersed in the magnetic fluid containing abrasive grains in the container 5 and the driving oil AI is activated, the workpiece 12 to be polished is pressed against the drive surface of the drive jig by the machining load W. Polished in a polished state.
研磨の進行に伴なって被研磨物や駆動用治具か摩減し磁
石との距離が遠くなり、加工荷重か小さくなろうとする
と、容器又は駆動用治具を上下方向にスライドして容器
と駆動用治具とを一定の荷重で相互に押し付ける機構が
作動して加工荷重は自動的に一定値（Ｗ）に保たれ、る
。As polishing progresses, the distance between the object to be polished and the driving jig wears down, and the distance between the magnet and the machining load decreases. A mechanism that presses the drive jig against each other with a constant load operates, and the machining load is automatically maintained at a constant value (W).
砥粒を含有する磁性流体に磁力が作用すると、磁性成分
は磁石の側に引き寄せられ、砥粒は磁気排出現象により
上層に浮揚して高濃度の砥粒層を形成する。When a magnetic force acts on a magnetic fluid containing abrasive grains, the magnetic component is attracted to the magnet side, and the abrasive grains are floated to the upper layer due to the magnetic ejection phenomenon, forming a highly concentrated abrasive grain layer.
被研磨物１２が非磁性材料よりなる場合には、被研磨物
１２にも同様に磁気排出現象による浮力が作用して、被
研磨物１２は駆動用治具ｌの下面に押しつけられ、駆動
用治具の運動と共に被研磨物１２も運動する。When the object to be polished 12 is made of a non-magnetic material, buoyancy due to the magnetic discharge phenomenon also acts on the object to be polished 12, and the object to be polished 12 is pressed against the lower surface of the driving jig l. As the jig moves, the object to be polished 12 also moves.
この場合駆動用治具ｌの駆動面ＩＡは上部ラップ盤とし
て作用する。In this case, the driving surface IA of the driving jig 1 acts as an upper lapping plate.
第１図〜第３図に示した装置の場合は被研磨物１２は容
器５の壁面に押しつけられるので、容器５の壁面は側部
ラップ盤として作用する。In the case of the apparatus shown in FIGS. 1-3, the workpiece 12 is pressed against the wall of the container 5, so that the wall of the container 5 acts as a side lapping plate.
さらに浮力板４を被研磨物１２の下部に設置した場合、
浮力板４は浮揚して被研磨物を下から押し上げて駆動用
治具（兼上部うウブＩ！１）に押しつけると共に、浮力
板も被研磨物に押しつけられるので、下部ラップ盤とし
て作用する。Furthermore, when the buoyancy plate 4 is installed below the object to be polished 12,
The buoyancy plate 4 levitates and pushes up the object to be polished from below and presses it against the driving jig (also known as the upper part I!1), and since the buoyancy plate 4 is also pressed against the object to be polished, it acts as a lower lapping machine.
ハ７発明の効果
初期条件を常に最適かつ一定であるように設定すること
か容易で、しかも研磨中目動的に加工荷重を一定に保つ
ことができ、研磨効率を高めることができる。C7 Effects of the Invention It is easy to always set the initial conditions to be optimal and constant, and the machining load can be kept constant dynamically during polishing, thereby increasing polishing efficiency.
第１図、第２図及び第３図は本発明に係る装置の一例の
側面図、第４図は磁石上面と被研磨物又は浮力板との間
の隙間と加工荷重との関係を測定した例を示す図、第５
図は加工荷重と研磨速度との関係を測定した例を示す図
で、Ｑ印は浮力板を用いた場合のデータ、Δ印は浮力板
を用いない場合のデータである。Figures 1, 2, and 3 are side views of an example of the device according to the present invention, and Figure 4 shows the relationship between the gap between the top surface of the magnet and the object to be polished or the buoyant plate and the machining load. Figure 5 showing an example
The figure shows an example of measuring the relationship between machining load and polishing rate, where Q marks are data when a buoyancy plate is used, and Δ marks are data when a buoyancy plate is not used.
Claims (1)
磁石が配置され且つ砥粒を含有する磁性流体が充填され
た容器を配置し、前記容器又は駆動用治具を上下方向に
スライドして容器と駆動用治具とを一定の荷重で相互に
押し付ける機構を設けたことを特徴とする磁性流体を用
いる研磨装置。 ２ 容器に充填された磁性流体中に浮力板が収納されて
いる特許請求の範囲第１項載の磁性流体を用いる研磨装
置。[Scope of Claims] 1. A container having a magnet disposed at the bottom and filled with a magnetic fluid containing abrasive grains is disposed below a driving jig having a driving surface at the bottom, and the container or the driving jig is A polishing device using a magnetic fluid, characterized by having a mechanism for sliding a tool in the vertical direction and pressing a container and a driving jig against each other with a constant load. 2. A polishing apparatus using a magnetic fluid according to claim 1, wherein a buoyancy plate is housed in a magnetic fluid filled in a container.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62287439A JPH01135466A (en) | 1987-11-16 | 1987-11-16 | Polishing device using magnetic fluid |
| US07/152,937 US4821466A (en) | 1987-02-09 | 1988-02-05 | Method for grinding using a magnetic fluid and an apparatus thereof |
| SE8800380A SE464565B (en) | 1987-02-09 | 1988-02-05 | PROCEDURES FOR GRINDING USING A MAGNETIC FLUID AND DEVICE THEREOF |
| DE3803773A DE3803773A1 (en) | 1987-02-09 | 1988-02-08 | GRINDING METHOD USING A MAGNETIC FLUID AND DEVICE THEREFOR |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62287439A JPH01135466A (en) | 1987-11-16 | 1987-11-16 | Polishing device using magnetic fluid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01135466A true JPH01135466A (en) | 1989-05-29 |
Family
ID=17717335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62287439A Pending JPH01135466A (en) | 1987-02-09 | 1987-11-16 | Polishing device using magnetic fluid |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01135466A (en) |
-
1987
- 1987-11-16 JP JP62287439A patent/JPH01135466A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4821466A (en) | Method for grinding using a magnetic fluid and an apparatus thereof | |
| US5957753A (en) | Magnetic float polishing of magnetic materials | |
| Umehara et al. | Magnetic fluid grinding–a new technique for finishing advanced ceramics | |
| US20130273816A1 (en) | Automatic polishing device for surface finishing of complex-curved-profile parts | |
| US7438626B2 (en) | Apparatus and method for removing material from microfeature workpieces | |
| JPH02127373A (en) | Drive control device | |
| Childs et al. | The material removal mechanism in magnetic fluid grinding of ceramic ball bearings | |
| KR20160054409A (en) | METHOD OF POLISHING A SiC SUBSTRATE | |
| US5305554A (en) | Moisture control in vibratory mass finishing systems | |
| JPH01135466A (en) | Polishing device using magnetic fluid | |
| CN110653693A (en) | Surface treatment device for processing and manufacturing non-ferrous metal alloy material | |
| JPH0584656A (en) | Magnetic fluid polishing method | |
| JPH0541394B2 (en) | ||
| US6478659B2 (en) | Chemical mechanical polishing method for slurry free fixed abrasive pads | |
| JPH01234160A (en) | Polishing and polishing device | |
| JPH0541395B2 (en) | ||
| US4837979A (en) | Polishing device | |
| JPH03117558A (en) | Ceramic ball machining method and device | |
| JPH0248169A (en) | Grinder with magnetic fluid | |
| JPH01271163A (en) | Polishing device using magnetic fluid | |
| JPH01271161A (en) | Polishing device using magnetic fluid | |
| JPH01271166A (en) | Polishing device using magnetic fluid | |
| JPH01271162A (en) | Polishing device using magnetic fluid | |
| JPS60186368A (en) | Polishing method utilizing magnetic fluid | |
| JP5628563B2 (en) | Polishing equipment |