JPH0112240Y2 - - Google Patents
Info
- Publication number
- JPH0112240Y2 JPH0112240Y2 JP1981012195U JP1219581U JPH0112240Y2 JP H0112240 Y2 JPH0112240 Y2 JP H0112240Y2 JP 1981012195 U JP1981012195 U JP 1981012195U JP 1219581 U JP1219581 U JP 1219581U JP H0112240 Y2 JPH0112240 Y2 JP H0112240Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- window
- scanning
- scanning tube
- foil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 38
- 239000011888 foil Substances 0.000 claims description 12
- 230000003014 reinforcing effect Effects 0.000 claims description 12
- 238000000605 extraction Methods 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000000498 cooling water Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
Description
【考案の詳細な説明】
［産業上の利用分野］
本考案は電子線照射装置、特に、停電時に残留
電荷による電子線放出による走査管の底部金属箔
の熱的な破壊防止を目的としてなされたものであ
る。[Detailed description of the invention] [Field of industrial application] The present invention was made for the purpose of preventing thermal destruction of the metal foil at the bottom of the scanning tube due to electron beam emission due to residual charge during an electron beam irradiation device, especially during a power outage. It is something.
［従来技術と問題点］
すでに第１図に示すような二つの電子線取出し
窓を有する電子線照射装置は知られている。この
ような装置によれば、大電流出力を得ることがで
きる。[Prior Art and Problems] An electron beam irradiation device having two electron beam extraction windows as shown in FIG. 1 is already known. According to such a device, a large current output can be obtained.
図において、１はＸ−X′軸走査コイルであり、
２はＹ−Y′軸走査コイルであり、７は電子線８
の加速管であり、電子線８は前記走査コイル１，
２に適当な駆動電流を流すことにより、間隔をあ
けて設けられた２つの電子線取出し窓５を矢印方
向に、ある周期で繰返走査され、電子線８の取出
し窓５に密封する金属窓箔を通過して、大気中の
下部の被照射体に到達する。前記電子ビーム系は
真空状態に維持される走査管体に封入されてい
る。 In the figure, 1 is the X-X' axis scanning coil,
2 is a Y-Y′ axis scanning coil, 7 is an electron beam 8
is an acceleration tube, and the electron beam 8 is connected to the scanning coil 1,
The metal window 2 is repeatedly scanned at a certain period in the direction of the arrow in the direction of the arrow by passing an appropriate drive current through the electron beam extraction window 5 provided at a distance, and the metal window is sealed to the electron beam extraction window 5. It passes through the foil and reaches the irradiated object below in the atmosphere. The electron beam system is enclosed in a scanning tube maintained in a vacuum state.
通常の運転時に、電子線が走査される走査管の
窓箔等冷却のため、電子線取出し窓の周辺に冷却
水を流すほか、電子線取出し窓をわける補強梁を
熱容量の大きなものとして、熱伝導により、走査
管の周辺より外界に放散させるとか、補強梁その
ものに冷却水を流すといつた手段を採つている
が、後述のような停電時における熱の発生問題を
考慮するとこれは必ずしも対策になつているとは
いえない。 During normal operation, in order to cool the window foil of the scanning tube where the electron beam is scanned, cooling water is flowed around the electron beam extraction window, and the reinforcing beams separating the electron beam extraction window are made of high heat capacity material. Measures have been taken to dissipate heat from around the scanning tube to the outside world through conduction, or to flow cooling water through the reinforcing beams themselves, but considering the problem of heat generation during power outages, which will be discussed later, this is not necessarily a solution. I can't say I'm getting used to it.
電子線照射装置において、付勢電源に停電を生
じた場合、前記の走査コイル１，２に対する附勢
は急速に消減するが、電子線８はしばらく放出を
続け、残留電荷で窓箔が熱的に破壊されることが
ある。 In the electron beam irradiation device, when a power outage occurs in the energizing power supply, the energizing to the scanning coils 1 and 2 is rapidly reduced, but the electron beam 8 continues to be emitted for a while, and the window foil becomes thermally heated due to the residual charge. may be destroyed.
これを避けるため、停電が生じた場合、その停
電を検出して、瞬時に別途用意されたバツテリー
により、走査コイルを附勢して、電子線８を走査
管の壁にしばらく偏向させるような方式を採つて
いる。なお図において３は正常な電子線走査位
置、４は停電時の電子線位置を示している。 In order to avoid this, a system is developed in which when a power outage occurs, the power outage is detected and the scanning coil is instantly energized by a separately prepared battery to deflect the electron beam 8 toward the wall of the scanning tube for a while. are being taken. In the figure, 3 indicates the normal electron beam scanning position, and 4 indicates the electron beam position during a power outage.
［考案の目的・構成］
これに対して、本考案は前述のような別電源を
準備するような必要はなく、極めて簡単な構成に
よつて停電時における窓箔等の破損を防止するも
のであつて、電子線走査管の底部の電子線取出し
窓を、電子線取出し窓の窓箔を固定する窓周囲の
フランジと一体に形成された中央補強梁によつて
二つに分け、前記中央補強梁上に冷却パイプを配
置し、停電時、残留電荷による電子線が前記冷却
パイプに当るように構成したものである。[Purpose and structure of the invention] In contrast, the present invention does not require the preparation of a separate power source as described above, and has an extremely simple structure that prevents damage to window foils, etc. during power outages. The electron beam extraction window at the bottom of the electron beam scanning tube is divided into two by a central reinforcing beam formed integrally with a flange around the window that fixes the window foil of the electron beam extraction window, and the central reinforcement A cooling pipe is arranged on the beam, and the configuration is such that, in the event of a power outage, electron beams due to residual charges will hit the cooling pipe.
以下第２図、第３図に示す本考案の実施例につ
いて説明する。第２図は走査管の一部を切断し、
一部内部を示す外観図であり、第３図は第２図の
切断部正面図である。９は金属板よりなる走査管
を示し、走査管９はその頂部に加速部７、また図
示していないが、電子発生部を備えている。１０
はすでに説明した走査用コイル部を示し、走査管
９に底部は第１図Ｘ−X′軸方向およびＹ−Y′軸
方向にひろがりのある電子線走査が行えるような
断面矩形状のひろがりを有し、そのすそは外側に
折曲されて例えばチタン箔のような金属窓箔１１
を固定支持するフランジ１２が形成される。そう
して、この実施例の場合矢印Ｙ−Y′で示す方向
に長い矩形状の底部を有する形状とされている
が、この矩形状の底部に前記フランジ１２に一体
に中央補強梁１３がＹ−Y′軸方向に形成され、
走査管９の底部はこの中央補強梁１３によつて二
分され、二分された部分はすでに説明したように
それぞれ電子線８の取出し窓となる。１４は前記
走査管９の底部のフランジ１２、中央補強梁１３
に対応した形状の抑えフランジであり、金属窓箔
１１は抑えフランジ１４によつて、前記フランジ
１２、中央補強梁１３との間に固定される。金属
窓箔１１はチタンよりなるものが好適である。前
記中央補強梁１３および抑えフランジ１４の中央
補強梁１３に対応する部分も前記窓箔１１を固定
するのと同時に、真空状態にある走査管９に対
し、窓部分を補強するものである。 The embodiment of the present invention shown in FIGS. 2 and 3 will be described below. Figure 2 shows a part of the scanning tube cut away.
FIG. 3 is an external view showing a part of the inside, and FIG. 3 is a front view of the cut portion of FIG. 2. Reference numeral 9 indicates a scanning tube made of a metal plate, and the scanning tube 9 is equipped with an accelerating section 7 and an electron generating section (not shown) at the top thereof. 10
1 shows the scanning coil part already explained, and the bottom of the scanning tube 9 has a rectangular cross-sectional shape that allows electron beam scanning to be performed in the X-X' axis direction and the Y-Y' axis direction in FIG. The hem thereof is bent outward to form a metal window foil 11 such as titanium foil.
A flange 12 is formed to fixedly support the. In this embodiment, the shape has a rectangular bottom that is long in the direction indicated by the arrow Y-Y', and the central reinforcing beam 13 is integrally attached to the flange 12 at the bottom of the rectangle. −Y′ axis direction,
The bottom of the scanning tube 9 is divided into two by the central reinforcing beam 13, and each of the two halves serves as an extraction window for the electron beam 8, as described above. 14 is a flange 12 at the bottom of the scanning tube 9, and a central reinforcing beam 13.
The metal window foil 11 is fixed between the flange 12 and the central reinforcing beam 13 by the holding flange 14. The metal window foil 11 is preferably made of titanium. The central reinforcing beam 13 and the portions of the restraining flange 14 corresponding to the central reinforcing beam 13 also serve to fix the window foil 11 and, at the same time, to reinforce the window portion of the scanning tube 9 in a vacuum state.
次に、中央補強梁１３上で、その長さ方向全長
にわたり、例えばステンレス鋼のパイプ１５を接
して配置し、これに冷却水を通すようにする。パ
イプ１５は走査管９の管壁を通過する部分におい
て密封保持され、外部冷却水管と連結されるが、
取付けは一例として溶接取付となるので、梁に溝
切加工したものと比べ取替えやすく、漏れが発生
した場合にも容易に修理できる。 Next, a pipe 15 made of stainless steel, for example, is placed in contact with the central reinforcing beam 13 over its entire length in the longitudinal direction, and cooling water is passed through the pipe 15 . The pipe 15 is kept sealed at the part where it passes through the tube wall of the scanning tube 9 and is connected to an external cooling water pipe.
For example, the installation is done by welding, so it is easier to replace than a beam with grooves cut into it, and it can be easily repaired if a leak occurs.
走査される電子線は停電があつた場合、残留電
荷による電子線が直接上記パイプ１５上に当るも
のとする。 It is assumed that the electron beam to be scanned is such that in the event of a power outage, the electron beam due to the residual charge will directly hit the pipe 15.
［考案の効果］
以上説明したように、本考案では水冷パイプ１
５は走査管９内の真空度に耐えればよく、中央補
強梁１３はそれ自体必要とされる機械的強度を考
慮すればよいことになり、設計は極めて単純化さ
れ、その補強梁の真上にある水冷パイプ１５はパ
イプ面で電子線により生ずる熱を集熱することに
なるから、冷却効率は著しく向上し、すでに述べ
た停電の際に生ずる電子線による事故を十分排除
することができる。[Effects of the invention] As explained above, in this invention, the water cooling pipe 1
5 only needs to withstand the degree of vacuum in the scanning tube 9, and the central reinforcing beam 13 itself only needs to take into account the required mechanical strength. Since the water-cooled pipe 15 located in the pipe 15 collects the heat generated by the electron beam on the pipe surface, the cooling efficiency is significantly improved, and the accidents caused by the electron beam during the aforementioned power outage can be sufficiently eliminated.
第１図は複数の電子線チヤンネルを有する電子
線照射装置の走査説明図である。第２図は本考案
の電子線照射装置の実施例を一部断面により内部
も示す外観図である。第３図は第２図実施例の断
面部の正面拡大図である。
５……電子線取出し窓、７……電子線加速部、
９……走査管、１０……走査用コイル部、１１…
…窓箔、１２……フランジ、１３……中央補強
梁、１４……抑えフランジ、１５……冷却パイ
プ。
FIG. 1 is a scanning explanatory diagram of an electron beam irradiation device having a plurality of electron beam channels. FIG. 2 is an external view of an embodiment of the electron beam irradiation device of the present invention, partially in section, also showing the inside. FIG. 3 is an enlarged front view of the cross section of the embodiment shown in FIG. 5...Electron beam extraction window, 7...Electron beam acceleration section,
9...Scanning tube, 10...Scanning coil section, 11...
... Window foil, 12 ... Flange, 13 ... Central reinforcement beam, 14 ... Holding flange, 15 ... Cooling pipe.
Claims (1)
線取出し窓の窓箔を固定する窓周囲のフランジと
一体に形成された中央補強梁によつて二つに分
け、前記中央補強梁上に冷却パイプを配置し、停
電時、残留電荷による電子線が前記冷却パイプに
あたるように電子線方向を定めた電子線照射装
置。 The electron beam extraction window at the bottom of the electron beam scanning tube is divided into two parts by a central reinforcing beam that is integrally formed with a flange around the window that fixes the window foil of the electron beam extraction window. An electron beam irradiation device in which a cooling pipe is arranged and the direction of the electron beam is determined so that the electron beam due to residual charge hits the cooling pipe during a power outage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981012195U JPH0112240Y2 (en) | 1981-01-29 | 1981-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981012195U JPH0112240Y2 (en) | 1981-01-29 | 1981-01-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57124800U JPS57124800U (en) | 1982-08-03 |
| JPH0112240Y2 true JPH0112240Y2 (en) | 1989-04-10 |
Family
ID=29810312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981012195U Expired JPH0112240Y2 (en) | 1981-01-29 | 1981-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0112240Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50118199A (en) * | 1974-03-01 | 1975-09-16 |
-
1981
- 1981-01-29 JP JP1981012195U patent/JPH0112240Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50118199A (en) * | 1974-03-01 | 1975-09-16 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57124800U (en) | 1982-08-03 |
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