JPH01112607A - Pattern-shaped electrolytic oxidated film and its manufacture - Google Patents
Pattern-shaped electrolytic oxidated film and its manufactureInfo
- Publication number
- JPH01112607A JPH01112607A JP26988787A JP26988787A JPH01112607A JP H01112607 A JPH01112607 A JP H01112607A JP 26988787 A JP26988787 A JP 26988787A JP 26988787 A JP26988787 A JP 26988787A JP H01112607 A JPH01112607 A JP H01112607A
- Authority
- JP
- Japan
- Prior art keywords
- film
- monomer
- patterned
- conductor
- electrolyte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000178 monomer Substances 0.000 claims abstract description 44
- 239000003792 electrolyte Substances 0.000 claims abstract description 39
- 239000004020 conductor Substances 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims abstract description 26
- 150000001491 aromatic compounds Chemical class 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 30
- 239000012528 membrane Substances 0.000 claims description 23
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 11
- 238000007738 vacuum evaporation Methods 0.000 abstract description 8
- 229920006254 polymer film Polymers 0.000 abstract description 4
- 125000003118 aryl group Chemical group 0.000 abstract description 3
- 238000007650 screen-printing Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 72
- 239000000243 solution Substances 0.000 description 16
- 238000007254 oxidation reaction Methods 0.000 description 11
- 230000003647 oxidation Effects 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- BBEAQIROQSPTKN-UHFFFAOYSA-N pyrene Chemical compound C1=CC=C2C=CC3=CC=CC4=CC=C1C2=C43 BBEAQIROQSPTKN-UHFFFAOYSA-N 0.000 description 8
- CUFNKYGDVFVPHO-UHFFFAOYSA-N azulene Chemical compound C1=CC=CC2=CC=CC2=C1 CUFNKYGDVFVPHO-UHFFFAOYSA-N 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- -1 spraying Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthrene Natural products C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- LYTMVABTDYMBQK-UHFFFAOYSA-N 2-benzothiophene Chemical compound C1=CC=CC2=CSC=C21 LYTMVABTDYMBQK-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- MCVFFRWZNYZUIJ-UHFFFAOYSA-M lithium;trifluoromethanesulfonate Chemical compound [Li+].[O-]S(=O)(=O)C(F)(F)F MCVFFRWZNYZUIJ-UHFFFAOYSA-M 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- KKFHAJHLJHVUDM-UHFFFAOYSA-N n-vinylcarbazole Chemical compound C1=CC=C2N(C=C)C3=CC=CC=C3C2=C1 KKFHAJHLJHVUDM-UHFFFAOYSA-N 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- GEZGAZKEOUKLBR-UHFFFAOYSA-N 1-phenylpyrrole Chemical compound C1=CC=CN1C1=CC=CC=C1 GEZGAZKEOUKLBR-UHFFFAOYSA-N 0.000 description 1
- NFEBPMFFSGVANX-UHFFFAOYSA-N 9-ethynylcarbazole Chemical compound C1=CC=C2N(C#C)C3=CC=CC=C3C2=C1 NFEBPMFFSGVANX-UHFFFAOYSA-N 0.000 description 1
- PWERSDAXNCUOIB-UHFFFAOYSA-N 9-hydroxycarbazole Chemical compound C1=CC=C2N(O)C3=CC=CC=C3C2=C1 PWERSDAXNCUOIB-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 235000015854 Heliotropium curassavicum Nutrition 0.000 description 1
- 244000301682 Heliotropium curassavicum Species 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 241000047703 Nonion Species 0.000 description 1
- 229920002873 Polyethylenimine Polymers 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 210000000170 cell membrane Anatomy 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000012769 display material Substances 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 1
- 150000002391 heterocyclic compounds Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000909 polytetrahydrofuran Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 125000005581 pyrene group Chemical group 0.000 description 1
- 230000002468 redox effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 125000005207 tetraalkylammonium group Chemical group 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- 150000003577 thiophenes Chemical class 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Abstract
Description
〔産業上の利用分野〕
本発明は改良されたパターン状電解酸化膜およびその作
製方法に関する。
（従来の技術および問題点）
近年、液晶表示をはじめとしｌζディジタル表示＠首や
、タッチベン方式の手ひ：き人力装置、ファクシミリ装
置等の０激な需要の増加が見られる。
これらの宅内装置の入出力部品の表示部、コネクター、
例えば液晶表示装置やエレクトロクロミンク表示装置の
表示部、電極取出部の接続、タッチベンの人力、ファク
シミリにＪ３Ｇプるイメージセン号−の出り取出し等に
対して、任急のパター′ン状に高導電性を右づる安価な
フィルムが請求されている。また、センサー素子におい
ても年々小型化とソリッドスデート化が進められ、例え
ばイオンセン１ノーについても微少な電極部分に対して
（■意のパターン状に導電性や酸化還元性のある均質な
フィルムを作製することが要求されている、。
従来、Ｑ ＠’Ｈ性の高分子フィルムとしてｔよ、各種
の熱可塑性樹脂に導電性充填材を混入し、それを成形し
てフィルム化しｌｃらの、高分子フィルムの表面に導電
性の材料を焦眉、スプレー塗布、又Ｃよメツ４したもの
等が使用されてきた。これらいずれの−ノイルムＣら、
均一な導電性のノイルムを得ることは容易であるが、所
望のパターン状にのみ導電性を付与したフィルムを得る
には、ノイルムに何らかのパターン成形工程を施す必要
がある。
他方、このよう４[Industrial Field of Application] The present invention relates to an improved patterned electrolytic oxide film and a method for producing the same. (Prior Art and Problems) In recent years, there has been a dramatic increase in demand for liquid crystal displays, digital displays, touch-ben type manual devices, facsimile machines, and the like. Displays, connectors, and input/output parts of these in-house devices
For example, the display part of a liquid crystal display device or an electrochromic display device, the connection of the electrode extraction part, the manual labor of the touch panel, the extraction of the image sensor number from J3G to the facsimile, etc., in an urgent pattern. There is a demand for inexpensive films with high conductivity. In addition, sensor elements are also becoming smaller and more solid-state each year. Conventionally, Q@'H polymer films have been prepared by mixing various thermoplastic resins with conductive fillers and molding them into films. The surface of a polymer film has been coated with a conductive material by coating, spraying, or coating with a conductive material.
Although it is easy to obtain a uniformly conductive Noilm, in order to obtain a film that is imparted with conductivity only in a desired pattern, it is necessary to perform some pattern forming process on the Noilm. On the other hand, like this 4
【金属やカーボンと各種樹脂との複合
系とは異なり、高分子材自体が導電性をイ」づる導゛１
１１性高分子材が、その高い導電性ゆえに注目を浴びて
いる。すなわら、ある種の芳香族化合物は、電解質を添
加した溶媒中に溶解して、これを電解酸化することによ
り、導電性の高分子膜を電極基板上に形成さＵることが
できる。このような芳香族化合物としては、ピ［１−ル
類、チオフェン類等の複素環式化合物、アズレン、ピレ
ン、ｌ・リフエニレン等の多環芳香族化合物が知られて
いル（１ｓ）Ｉえば、Ｊ、バーボン（Ｊ、Ｂａｒｇｏｎ
） 、 ３．Ｕ−−マント（Ｓ、Ｈｏｔ＋１Ｉｌａｎｄ
） 、 Ｒ、Ｊ 、ウォルトマン（Ｒ，Ｊ、Ｗａｌｔ
ｍａｎ ） 、 Ｉ ［３Ｍ ジｌｙ−ナル オブ
リサーブ アンド デベロップメント（ＩＢＭＪｏｕｒ
ｎａｌ ｏｆ Ｒｅ５ｅａｒｃｈ ＆ Ｄｅｖｅｌｏｐ
ｍｅｎｔ ）第２７巻第４）： 第３３０員（１９８３
年）参照］１．これらの高分子は、導電性を示す以外に
も可逆な酸化）マ元性を持ら、エレク［・ロクロミズム
性を示し、電池や表示、センサーＩｎとしても注目され
ている。
しかしながら、電極基板上での“電解酸化によりへ分子
膜を形成する方法では、形成される高分子の溶＋Ｍ庚の
ため使用可能なＵツマ−が制限される、形成された膜の
均質性が低い、形成される膜のｔＭに比較して使用づる
モノマーのＹｌｌが多い、°市７Ｉｉ′溶媒の汚染が著
しい、等の神々の問題がある１、また、１５１られる導
電性高分子のフィルムは一般に脆く、成形加工が難しい
ため、これをパターン化ザる技術は（イｒ立され（いむ
かった。さらに、このような七ツマー溶液からの電解重
合では溶液中の−Ｌモノマー°市極表面に拡散し′ＣΦ
合づるが、電ＪＡｉ面て゛は中心と周辺でのモノマーの
拡散状１ぷが異なるために小合速庶が異なり、′市極ト
の各位置Ｃ均′はな弔合膜を１！］ることが難しい。パ
ターン状電極を用いた場合には、パターンの大小やパタ
ーン畜麿に、」、りモノマーの拡散状態が複雑になるた
め均一な膜とはならず、重合の制御も難しい。
１ｄ近、パターン化された導電部位を持つ基板上にポリ
塩化ビニルのごとき汎用高分子を塗布し、これを°１１
イ神としてしツマ−溶液中で電解酸化する方法が見出さ
れでいる。しかし、この方法で１５１られたパターン状
導電性高分子膜は、Ｄ電性品分−ｒが汎用高分子中に分
散されたものとなり、導電性が極度に小さくなる（よか
、酸１ヒ）−λ几速磨ち小ざく４１す、エレクトロク］
コミズム性やレンザーとしての感受性も低Ｆりる１、ま
た、重合自体も汎用高分子中の−〔ツマ−の拡散に依存
し−（おり、これに伴う重合の不均一性の問題（ま何ら
解決されてい７ｊい。
本発明はｉＹｉ記従来の火熱を除去するためになされた
しのＣ゛あり、その目的は高い均質性をＩＴ’Ｊるパタ
ーン状高分子（電解酸化）膜、ｄ３よび、それらの効・
ｔ・′よい作製方法を提供づることにある。
〔問題員を解決するための手段〕
本発明を概説１れぼ、本発明の第１の発明はパターン状
電解酸化ＩＩ’／＞の発明であって、電極基板上に芳香
族系化合物モノマー膜を作製する工程と、この芳香族化
合物七ツマー膜の七に電解質膜をパターン状に作製する
工程と、このパターン状電解質膜上に導電体を作！ｌ？
ｌる工程と、前記芳香族化合物モノマーを電解酸化する
工程の各工程を包含することを特徴どする。
また、本発明の第２の発明はパターン状電解酸化膜の作
製方法の発明であって、電極１．ル仮」−に″１テ香族
系化合物七ツマー膜が形成され、この芳古ｈｘ系化合物
モノマーの膜上に電解質膜がパターン状に形成され、こ
のパターン状゛市解質膜上に導電体が形成され、前記芳
香族化合物七ノン−が電解酸化され（なることを特徴と
する。
前記しＩζように、従来性われてきたパターン状高分子
膜の作製は、高分子材と導雷性材斜の混合あるいは積層
化、芳占族系化合物セノマーの溶液からの電解−０合の
方法によってｄ３す、作ラリしたフィルムへの煩雑なパ
ターン成形工程、溶解１１に起因ηる使用ｉ１能モノマ
ーの制限、電解溶媒の汚染、パターン状゛、：ｙ ４〜
の作製の必“用件、；、；７７ｉｉ性の不均一性等の多
くの問題を伴っている。
これに対し、本発明では、あらかじめ導電性基板上に、
真空蒸着、スパッタリング等の通常の膜形成技術の適用
により平滑な芳香族系化合物１ツマ−膜を作興する。次
いで、この芳香族系化合物モノマー膜上に、電解質の膜
を、真空蒸着、スパッタリング、スクリーン印刷等の方
法ににリパターン状に作製゛する。さらに、パターン状
電解質膜上に導電体を真空蒸着、スパッタリング等によ
り作製したのち、導電性基板と導電体との間に適当４に
直流電圧を印加Ｊることにより、パターン状の電解酸化
膜を１するものである。
本発明の発明者らは、この様な、芳香族系化合物モノマ
ー膜とパターン状の電解質１ｍと導電体とを右する電々
へ基板上でも電解酸１ヒ反応が進行し、従来の均−溶液
系からの高分子膜作製が困ガなモノマーを用いた場合で
も、電極基板上に安定なパターン伏型＠酸化膜を作製で
きることを見出した。
なお、本発明で言う「高分子１とは、前記モノマーが二
つ以上結合した状態を示す。
以下、本発明のパターン状電解酸化膜およびその作製方
法をより詳細に説明する。
本発明のパターン状電解酸化膜を作製するに必要な芳香
族系化合物モノマーは、電解酸化可能なものであれば特
に限定されないが、例えば、ビフエニル、「）−ターフ
ェニル、０−ターフェニル、ｐ−クォータフェニル、２
−ヒトし】キシビフェニル、Ｎ−ビニルｈルバゾール、
Ｎ−エチニルカルバゾール、ターヂオフエン、Ｎ−フェ
ニルピロールなど、通常の一七解酸化による重合で用い
られている七ツマー類や、これらの誘導体、数吊体のオ
リゴマー状態になったものを用いることが′Ｃ″きる。
電極基板上の芳香族系化合物モノマーの膜は、電解酸化
時に剥離しない程度の密着力で基板上に付着していれば
良く、例えば、前記モノマーを電１４ Ｌ−＜板上に真
空蒸着またはスパッタリングする、あるいは、芳香族系
化合物上ツマ−を含む溶液を電暑緑ｌ（叛［−にスピン
コードしたのら乾燥づる、あるいは、芳香族系化合物上
ツマ−を含む溶液中に電極基板を浸漬したの１５乾燥す
ることにより作製づることができる。りなわら、本発明
において、芳香族系化合物モノマー膜の作製方法は限定
されるしのではない。電（１１上に作％Ａりる芳香族系
化合物モノマー膜は、単一組成でも、複数のモノマーの
８２合でもよい。また、複数のモノマーの積ｈ′りした
ものでもよい。
電極基板としｒｔま、導電性の部分を右し、かつ、電解
反応溶液により侵食されないものであれば特に限定され
ない。例えば、ガラスやプラスチックフィルｌ＼、セラ
ミックス、紙、鉱物に金属あるいは金属酸化物をコート
したもの、あるいは金属く−のもの、などを挙げること
ができる。
１述の方法により作製さ桟だパターン状の芳香族系化合
物モノマー膜の上に作製する電＠質膜の材質としでは、
芳′ｆｔ族系化合物七ツマー膜中に拡散可能なイオンを
含むものであれば特に限定されないが、例えばアルカリ
、アルカリ土類金属の各種塩類（ノノニオンがＭ、ｌ３
ｒ−、Ｃ］−９Ｉ（Ａｌ１０３）−、Ｎ３−、Ｐ２３７
− 、ＣＦ３５０３−、ＣＪＯ，＋−，５ＣＮ−、ＢＦ
４−、Ｎ（ｈ−。
ＣＩ：３ＣＯＯ−、など）やテトラアルキルアンモ二ｒ
クムのフルオロボレート、バークロレート、ザルノＩ−
ト、スルフォネート、あるいはそれらの誘導体、Ｐｂ
Ｂｒ ２ 、ＡＣ＋ （８０３ＣＦ３）２ 。
７ｎ （ＳＯ３ＣＦ３ ）２．２ｎ ＣＩ２ 、Δｇ
Ｃノ０１などの各種塩類を用いることがぐきる。また、
それらとともに電解質の拡散を助[Unlike composite systems of metals, carbon, and various resins, the polymer material itself provides conductivity.
11 polymer materials are attracting attention because of their high conductivity. In other words, a conductive polymer film can be formed on an electrode substrate by dissolving a certain type of aromatic compound in a solvent containing an electrolyte and electrolytically oxidizing the compound. Known examples of such aromatic compounds include heterocyclic compounds such as pyrols and thiophenes, and polycyclic aromatic compounds such as azulene, pyrene, and l-lihuenylene. J, Bourbon
), 3. U--Cloak (S, Hot+1Iland
), R, J, Waltman (R, J, Walt
man), I [3M General Observation and Development (IBM Jour)
nal of Research & Develop
ment) Volume 27, No. 4): 330th member (1983
year)] 1. In addition to exhibiting electrical conductivity, these polymers also have reversible oxidation properties and electrochromic properties, and are attracting attention as batteries, displays, and sensors. However, in the method of forming a molecular film by electrolytic oxidation on an electrode substrate, the usable U-layer is limited due to the dissolution of the formed polymer, and the homogeneity of the formed film is limited. There are problems such as low tM, large amount of Yll in the monomer used compared to the tM of the formed film, and significant contamination of the solvent. In general, it is brittle and difficult to mold, so the technology for patterning it has been difficult.Furthermore, in electrolytic polymerization from such a seven-mer solution, the -L monomer in the solution is spread to ′CΦ
However, on the electric JAi surface, the diffusion rate of the monomer is different between the center and the periphery, so the small combining rate is different, and the combined film is not uniform at each position of the city pole. ] It is difficult to do. When a patterned electrode is used, the diffusion state of the monomer becomes complicated depending on the size of the pattern and the size of the pattern, so a uniform film cannot be obtained and it is difficult to control polymerization. Near 1d, a general-purpose polymer such as polyvinyl chloride is coated on a substrate with patterned conductive parts, and this is heated at 11°C.
Finally, a method of electrolytic oxidation in a Shizuma solution has been discovered. However, in the patterned conductive polymer film prepared by this method, the D conductive component -r is dispersed in the general-purpose polymer, and the conductivity is extremely low (yet, acid ) - λ Rapid Polishing Kozaku 41su, Electroc]
The comisism and sensitivity as a lens are also low, and the polymerization itself also depends on the diffusion of -[summer] in general-purpose polymers. The present invention has been made in order to eliminate the heat generated by conventional flames. , their effects/
The objective is to provide a good manufacturing method. [Means for solving the problem] An overview of the present invention: The first invention of the present invention is an invention of patterned electrolytic oxidation II'/>, in which an aromatic compound monomer film is formed on an electrode substrate. A process of fabricating a patterned electrolyte membrane on this aromatic compound seven-layer membrane, and a process of fabricating a conductor on this patterned electrolyte membrane! l?
The method is characterized in that it includes the following steps: 1 step and a step of electrolytically oxidizing the aromatic compound monomer. Moreover, the second invention of the present invention is an invention of a method for producing a patterned electrolytic oxide film, and the electrode 1. A monomer film of aromatic compound monomer is formed on the monomer layer, an electrolyte film is formed in a pattern on the film of the aromatic hx compound monomer, and a conductive film is formed on the electrolyte film in the pattern. The aromatic compound heptanone is electrolytically oxidized. Mixing or layering of the senomeric compound, electrolysis from a solution of the aromatic compound senomer, cumbersome pattern forming process on the prepared film, and use of the i1 function due to dissolution. Limitation of monomer, contamination of electrolytic solvent, pattern shape:y 4~
However, in the present invention, in advance, on a conductive substrate,
A smooth single film of an aromatic compound is produced by applying ordinary film forming techniques such as vacuum evaporation and sputtering. Next, on this aromatic compound monomer film, an electrolyte film is formed in a repatterned manner by a method such as vacuum evaporation, sputtering, or screen printing. Furthermore, after producing a conductor on the patterned electrolyte film by vacuum evaporation, sputtering, etc., a patterned electrolytic oxide film is formed by applying a DC voltage to an appropriate voltage between the conductive substrate and the conductor. 1. The inventors of the present invention have discovered that the electrolytic acid reaction progresses even on the substrate between the aromatic compound monomer film, the patterned electrolyte 1m, and the conductor, and that We have discovered that even when using monomers that are difficult to fabricate polymer films from, it is possible to fabricate stable patterned oxide films on electrode substrates. In addition, "polymer 1" as used in the present invention refers to a state in which two or more of the above monomers are bonded.Hereinafter, the patterned electrolytic oxide film of the present invention and the method for producing the same will be explained in more detail.Pattern of the present invention The aromatic compound monomer necessary for producing the electrolytic oxide film is not particularly limited as long as it can be electrolytically oxidized, but examples include biphenyl, )-terphenyl, 0-terphenyl, p-quarterphenyl, 2
-Human] xybiphenyl, N-vinylhrubazole,
It is possible to use heptamers, such as N-ethynylcarbazole, tadiophene, N-phenylpyrrole, etc., which are used in polymerization by normal deoxidation, and their derivatives, which are in the state of oligomers of several chains. The film of the aromatic compound monomer on the electrode substrate only needs to be attached to the substrate with an adhesion strength that does not peel off during electrolytic oxidation. Vacuum evaporation or sputtering, or spin-coding a solution containing an aromatic compound to a hot green l (-) and drying it, or depositing it in a solution containing an aromatic compound. It can be prepared by dipping the electrode substrate and drying it for 15 minutes.However, in the present invention, the method for preparing the aromatic compound monomer film is not limited. The aromatic compound monomer film may have a single composition, a composition of multiple monomers, or a product of multiple monomers. There are no particular limitations on the material as long as it does not corrode by the electrolytic reaction solution.For example, glass, plastic film, ceramics, paper, minerals coated with metals or metal oxides, or metal foils. The material of the electrolyte membrane to be produced on the cross-shaped aromatic compound monomer film produced by the method described in 1 above is as follows:
There are no particular limitations on aromatic compounds as long as they contain ions that can be diffused into the membrane, but for example, various salts of alkali and alkaline earth metals (nonions are
r-, C]-9I(Al103)-, N3-, P237
-, CF3503-, CJO, +-, 5CN-, BF
4-, N (h-. CI:3COO-, etc.) and tetraalkyl ammonium dir
cum fluoroborate, barchlorate, zarno I-
Pb, sulfonate, or derivatives thereof, Pb
Br2, AC+ (803CF3)2. 7n (SO3CF3)2.2n CI2, Δg
Various salts such as C-01 can be used. Also,
Together with them, it helps electrolyte diffusion.
【ノる低分子あるいは
高分子のマトリクス材料を含有させることもできる。そ
のようなマトリクス材料としては、例えばクラウン１−
アル等の低分子イオンキャリア、ポリエチレンオキシド
、ボリブτコピレンオキシド、ポリテトラヒドロフラン
、ポリ〔（アルニｌＡニジ）ノオスファピン〕、ポリ（
Ｎ−アセデルニブルイミン）、ポリごニルアセゲート、
ポリエチレンイミン等の＾分子、イオンキャリアを１１
目、ｊした高分子等を挙げることができる。これらの°
：ｔｉ ｗ￥ Ｏの膜を芳香族系化合物１ツマー膜上に
パターン状に作製りるに【、上、真空蒸着、スパッタリ
ング、ＣＶＤ法、スクリーン印刷等の手法と、所望のパ
ターンをイ１ηるマスク雪を組合わせて用いることがで
きる。
パターン状？！２解質膜の上に作製りる導電体の材質と
しては、導電性ひあり、かつ、電解反応により侵食され
ないものであれば特に限定されない。
金、白金、パラジウム、ニッケル、クロム、アルミニウ
ム、酸化スズ、その他の金属ヤ）金属酸化物などを用い
ることができる。これらの物質からなる導電体の作製に
は、真空蒸着、スパッタリング、ＣＶＤ法などの手法を
用いることができる１、導電体は、全面に形成しても良
いし、またパターン状電解質膜に接しくいればその一部
に形成しても良い。
上述の方法により作製された芳香族系化合物上ツマ−Ｉ
１９とパターン状電解質膜および導電体を有ザる電極基
板の、基板１ｕ極を正極、導電体を負極どしく、適当な
直流電圧を印加ηることによりパターン状の電解酸化膜
が得られる。
本発明の方法の代表例を第１図に示す。すなわち、第１
図は本発明の代表例の作製工程の一部の役式図である。
第１図におい′〔、符号１は導電性基根、２（よトン電
性１１（機の導゛用性部分、３は適当な電圧の印加によ
りパターン状電解酸化膜となる芳香族系化合物モノマー
膜、４ｔよパターン状゛Ｉｔ解質膜、５は電解質膜上に
作製した導電体を意味する。
このようにしで得られたパターン状電解酸化膜は、電極
基板上に作製されたビンボールや凹凸のない七ツマー膜
がイのままパターン状に電解酸化されたものであり、も
とのモノマー膜と同様の良１（１，ｔの構造を保つ（い
る。これらのｒＩｉ Ｍ Ｗ化膜ｔよ電解質や導電体と
複合化された状態で利用ザることか可能であるが、電解
質やモノマーを溶解Ｊ゛る溶媒に浸漬して電解質膜、未
反応の七ツマー膜および導電体を除去することにより、
パターン状電解酸化膜のみを取り出しでｌｊ＋独で利用
することも可能′Ｃ″ある。また、電解反応に必要な原
料上ツマ−は電解基板表面に存在づるものしか必要と１
！づ゛、ざらに、従来の均一・溶液系のような、（Ｈ解
反応中の芳香族系化合物モノマーの消失が起こることも
ない。従って、電極り根状上に形成りる゛電解酸化膜の
量、膜ｙす等をあらかじめ設定しておくことも可能とな
る。ｉ［金時間や電解ｌ！１パターンの占イＪ面積を調
節づることにより、七ツマー薄膜全体を導電性膜にする
ことも可能である。
この、］；うに平泪で良質の電解酸化膜が得られる理由
は、パターン状電解質膜中の電解質成分が電極基板上に
作製されたテＹ古族系化合物七ツマー膜内に拡散しＣ電
極表面に達し、それによって導通部分が形成され、電解
反応が起き、電極面上で電極酸化反応が進（−Ｊし、パ
ターン状電解質膜の近傍に電極基根側から′七ｙＨ酸化
膜が形成されるためである。したがって、電解質が拡散
可能な芳香族系化合物上ツマ−と′、１ｆ′Ｍ質を選択
ηることにＪ：す、均一なパターン状電解酸化膜が得ら
れる。
〔実施例〕
以ト、本発明を実施例により更に具体的に説明するが、
本発明ｔよそれらに限定されるものではない。
（実施例１）
ネ舎ナガラス基板十に真空蒸着によりピレン膜（膜厚；
０．５μＴｒＬ）を作製した。この膜上にメタルマスク
を密着させてトリノロ１」メタンスル１１＼ン酸リチウ
ムとポリオキシエチレンの湿合物とからなる電解質の膜
を真空黒着りることにより、１ ｍｍピッチの１次元格
子を持つパターン状電解質膜を作製した。次いで、導電
体とじＣ白金をスパッタリングし、ネサガラス基板を正
極、導電体を負極として２．５ｖの定電圧でピレンの電
解酸化を行った。約１ｊンの電圧印加にＪ：す、半透明
のネナガラス基板側から観察される２（（（色のピレン
薄膜は、パターン状に組合した。電Ｖｆ！−酸化後、得
られた膜をアセトニトリル中に浸漬して゛電解質と未反
応の七ツマー膜と導電体とを除去し、−Ｕｉ夜乾燥した
後に顕微鏡観察を行ったところ、従来の溶液法にＪ、る
ｂのに比較して、非常に均質性に優れたパターン状の電
解酸化ピレン族が形成されＣいることが確認された。
（実施例２）
ネ（ツガラス基板上に溶液塗布によりカルバゾール（膜
１；／：０．４μＴｒＬ）を作製した。この膜上に実施
例１で使用したしのと同様のメタルマスクを密析させて
トリフロロメタンスルホン酸リチウムとポリオキシエチ
レンを含む水溶液を塗布することにより、１ｍピッチの
１次元格子を持つパターン状電解質膜を作製した。次い
で、導電体として白金をスパッタリングし、ネサガラス
基板を正極、導電体を負極としく ２．５Ｖの定電圧
でカルバゾールの電解酸化を行った。約１分の電Ｌ１−
印加により、半透明のネサガラス基板側から観察される
無色のカルバゾール薄膜は、パターン状に暗緑色に変化
した。電解酸化後、得られた１１２をアセトニトリル中
に浸）ｖして電解質と未反応の七ツマー膜と導電体とを
除去し、−昼夜乾燥した後に顕微鏡観察を行ったところ
、従来の溶液法によるものに比較し°（、非常に均質性
に（９れたパターン状の電＠酸化カルバゾール膜が形成
されていることが確認された。
（実施例３〜１０）
導電性基板上に、真空蒸石法あるいは溶液塗布法により
イソチアナフテン（実施例３）、アズレン（実施例４）
、メヂルアズレン（実施例５）、Ｎ−ノＩニルビ１］−
ル（実施例６）、ナフタレン（実施例７）、ｌ−リフエ
ニレン（実施例８）、ビ゛ノエニル（実施例９）、Ｎ−
ビニルカルバゾール（実施例１０）の膜を作製した。次
に、実施例１で使用したものと同様のメタルマスクをモ
ノマー膜上に密着ざＩＳ電解質を真空蒸着するか、ある
いは、溶液を塗布後、乾燥することにより、七ツマー膜
上にパターン状の電解質膜を作製した。ざらに、この電
解質膜上にスパッタリング法により導°電体を作製し、
導電性基板を正極、導電体を負極として２．５ｖの定電
圧でモノマーの電解酸化を行った。電′Ｍ酸化後、得ら
れた膜を適当な溶媒に浸漬して電解質と未反応のモノマ
ーとの導電体を除去し、−昼夜乾燥したのち、顕微鏡観
察を行った。この結果、いずれの場合にも、従来の溶液
法ににるしのに比較して、非常に均質性に優れたパター
ン状の電解酸化膜が形成されていることが確認された。
実施条件を表１に示す。
（実施例１１）
ネＶガラス基板上に溶液塗イ１＋にＪ、リカルバゾール
〈膜厚：０．５μＴｒＬ）を作製した。この股上に実施
例１で使用したものと同様のメタルマスクを密着さＵで
トリフロロメタンスルホン酸リチウムとポリオキシ丁ブ
レンを含む水溶液をｌ ｎｉ ’ｉることにより、１Ｍ
ピッチの１次元格子を持つパターン状電解質膜を作製し
た。次いで、同じメタルマスクを用いて導“、ｔ（Ａど
して白金をスパッタリング１にとによりパターン状電解
質膜」−に電極を形成した。ネサガラスｔｉｔ坂を１１
Ｅｒ框、′４電休を負１〜どして２．５Ｖの定電圧でｊ
Ｊルバゾールの電解酸化を行った。約１分の電圧印加に
より、゛ｒ透明のネザガラス基板側から観察される無色
のカルバゾールＡ９膜警よ、パターン状に暗緑色に変化
した。電Ｗ？酸化後、ｉジノられた膜をアセトニトリル
中に浸油して電解質と未反応の七ツマー膜と導゛市体と
を除去し、−（）侵乾燥した後に顕微！ＪＩ １１５２
察を行ったところ、従来の溶液法によるｂのに比較しで
、非常に均質性に浸れたパターン状の電解酸化カルバゾ
ール膜が形成されていることが確認された。
（発明の効果）
以十説明したように、本発明に従って電極基機上に芳占
族系化合物七ツマー膜とパターン状の電解質膜を作製し
、その−しに導電体を作製した後、モノマー膜を゛占ｙ
Ｉ’ｌ’耐化づることにより、均質性に優れたパターン
状電解酸化膜を簡便に作製することが可能であるという
格別顕−ルな効果が秦けられる。得られるパターン状電
解酸化膜は、通常の電解手合で得られる膜と同様に、導
電性の向上や、酸化還元性、エレクトＩ】り［コミズム
杆をイ］する。
従っ℃、２次−■（池、とりわけ簿膜電池、ざらに、セ
ンサー、表示用材料として有用である。[It is also possible to contain a low-molecular or high-molecular matrix material. Examples of such matrix materials include Crown 1-
Low molecular weight ion carriers such as Al, polyethylene oxide, bolibuty copylene oxide, polytetrahydrofuran, poly[(alni lAni di)noosphapine], poly(
N-acedelnibruimine), polygonyl acegate,
11 molecules such as polyethyleneimine, ion carriers
Polymers such as those with a diameter of 100 cm or more may be mentioned. These °
:ti w￥ To create a patterned film of O on a film of an aromatic compound, use techniques such as vacuum evaporation, sputtering, CVD, screen printing, etc., and create the desired pattern. Can be used in combination with mask snow. Pattern-like? ! The material of the conductor fabricated on the 2-cell membrane is not particularly limited as long as it is highly conductive and is not eroded by electrolytic reactions. Gold, platinum, palladium, nickel, chromium, aluminum, tin oxide, other metals, and metal oxides can be used. Methods such as vacuum evaporation, sputtering, and CVD methods can be used to fabricate conductors made of these materials.1 The conductor may be formed on the entire surface, or it may be formed in contact with the patterned electrolyte membrane. If there is, it may be formed on a part of it. Aromatic compound I produced by the above method
A patterned electrolytic oxide film is obtained by applying an appropriate DC voltage to an electrode substrate 19 having a patterned electrolyte membrane and a conductor, with the substrate 1u being the positive electrode and the conductor being the negative electrode. A representative example of the method of the present invention is shown in FIG. That is, the first
The figure is a schematic diagram of a part of the manufacturing process of a representative example of the present invention. In Figure 1, 1 is a conductive base, 2 is a highly conductive part (11), and 3 is an aromatic compound that becomes a patterned electrolytic oxide film by applying an appropriate voltage. Monomer film, 4t, patterned It electrolyte film, 5 means the conductor produced on the electrolyte membrane. The seven-layer film without irregularities is electrolytically oxidized in a pattern as it is, and it maintains the same 1, t structure as the original monomer film. Although it is possible to use it in a composite state with an electrolyte or conductor, it is necessary to remove the electrolyte membrane, unreacted membrane, and conductor by immersing it in a solvent that dissolves the electrolyte and monomer. By this,
It is also possible to take out only the patterned electrolytic oxide film and use it for 1.
! In general, there is no loss of aromatic compound monomers during the H-lysis reaction, unlike in conventional homogeneous/solution systems. It is also possible to preset the amount of film, film size, etc. By adjusting the time and area of the electrolytic pattern, the entire thin film can be made into a conductive film. The reason why a high-quality electrolytic oxide film can be obtained with this method is that the electrolyte component in the patterned electrolyte film is formed on the electrode substrate. C diffuses inside and reaches the electrode surface, thereby forming a conductive part, electrolytic reaction occurs, and electrode oxidation reaction progresses on the electrode surface (-J). This is because a 7yH oxide film is formed.Therefore, a uniform patterned electrolytic oxide film is selected by selecting a material on an aromatic compound that allows the electrolyte to diffuse. [Examples] Hereinafter, the present invention will be explained in more detail with reference to Examples.
The present invention is not limited thereto. (Example 1) A pyrene film (film thickness;
0.5 μTrL) was prepared. A one-dimensional lattice with a pitch of 1 mm was created by attaching a metal mask to this film and vacuum-depositing an electrolyte film made of a mixture of lithium methanesulfate and polyoxyethylene. We fabricated a patterned electrolyte membrane with Next, C platinum was sputtered as a conductor, and pyrene was electrolytically oxidized at a constant voltage of 2.5 V using the Nesa glass substrate as a positive electrode and the conductor as a negative electrode. After applying a voltage of about 1 j, the pyrene thin film observed from the translucent Nena glass substrate side was assembled in a pattern. After removing the conductor and the electrolyte-unreacted seven-layer membrane by immersing it in the solution, and observing it under a microscope after drying it overnight, it was found that compared to the conventional solution method, It was confirmed that a patterned electrolytically oxidized pyrene group with excellent homogeneity was formed on the substrate. A one-dimensional lattice with a pitch of 1 m was fabricated by closely depositing a metal mask similar to the one used in Example 1 on this film and applying an aqueous solution containing lithium trifluoromethanesulfonate and polyoxyethylene. Next, platinum was sputtered as a conductor, and carbazole was electrolytically oxidized at a constant voltage of 2.5 V using the Nesa glass substrate as a positive electrode and the conductor as a negative electrode for about 1 minute. Electric L1-
As a result of the application, the colorless carbazole thin film observed from the translucent Nesaglass substrate side changed to dark green in a pattern. After electrolytic oxidation, the obtained 112 was immersed in acetonitrile to remove the electrolyte and unreacted 7-mer membrane and conductor, and after drying day and night, microscopic observation was performed. It was confirmed that a highly homogeneous patterned conductive carbazole oxide film was formed compared to the conductive substrate. (Examples 3 to 10) Isothianaphthene (Example 3) and azulene (Example 4) by stone method or solution coating method
, medyl azulene (Example 5), N-noI nylbi 1]-
(Example 6), naphthalene (Example 7), l-lifenylene (Example 8), vinylenyl (Example 9), N-
A film of vinyl carbazole (Example 10) was prepared. Next, a metal mask similar to that used in Example 1 is closely attached to the monomer film, and the IS electrolyte is vacuum-deposited, or a patterned IS electrolyte is formed on the monomer film by applying the solution and drying it. An electrolyte membrane was prepared. Roughly, a conductor was fabricated on this electrolyte membrane by sputtering method,
Electrolytic oxidation of the monomer was performed at a constant voltage of 2.5 V using the conductive substrate as the positive electrode and the conductor as the negative electrode. After electrolytic oxidation, the obtained membrane was immersed in a suitable solvent to remove the conductor of the electrolyte and unreacted monomer, and after drying day and night, microscopic observation was performed. As a result, it was confirmed that in each case, a patterned electrolytic oxide film was formed with extremely superior homogeneity compared to the conventional solution method. The implementation conditions are shown in Table 1. (Example 11) Licarbazole (film thickness: 0.5 μTrL) was prepared by solution coating on a glass substrate. A metal mask similar to that used in Example 1 was closely attached to this crotch, and an aqueous solution containing lithium trifluoromethanesulfonate and polyoxyethylene was applied to the crotch to form a 1M solution.
A patterned electrolyte membrane with a one-dimensional pitch lattice was fabricated. Next, using the same metal mask, an electrode was formed on the electrolyte film (patterned by sputtering platinum using A).
Er frame, set the '4 power rest to negative 1 and set it to a constant voltage of 2.5V.
J Rubazol was electrolytically oxidized. By applying voltage for about 1 minute, the colorless carbazole A9 film observed from the transparent nether glass substrate side changed to dark green in a pattern. Electric W? After oxidation, the electrolyte, unreacted 7-mer membrane and conductive material are removed by immersing the i-di-inated membrane in acetonitrile, followed by -() immersion drying, followed by microscopy! JI 1152
Upon inspection, it was confirmed that a patterned electrolytically oxidized carbazole film with extremely high homogeneity was formed compared to the conventional solution method (b). (Effects of the Invention) As explained above, according to the present invention, an aromatic compound 7-mer film and a patterned electrolyte film are prepared on an electrode substrate, a conductor is prepared therebetween, and then a monomer Seize the membrane
The I'l' resistance makes it possible to easily produce a patterned electrolytic oxide film with excellent homogeneity, which is a particularly remarkable effect. The resulting patterned electrolytic oxide film has improved electrical conductivity, redox properties, and electrolytic properties, similar to films obtained by ordinary electrolytic techniques. Therefore, it is useful as a secondary cell, especially as a cell membrane battery, a sensor, and a display material.
第１図は本発明の代表例１の作製工程の一部を示１概ｌ
ｔ８断面図である。
１・・・・・・導電性基板、
２・・・・・・導電性基板の導電性部分、３・・・・・
・適当な電圧の印加によりパターン状電解酸化膜となる
若香族系化合物七ツマー膜、４・・・・・・パターン状
雷解ｔ１膜、５・・・・・・電解賀模上に作製した導′
市体。
出願人 口木゛七信′１′七話株式会ネ］代理人
弁理士 志 賀 正 武 −゛。
１：導電性基板、２：導電性基板の導電性部分３：芳香
族系化合物モノマー膜Figure 1 shows a part of the manufacturing process of representative example 1 of the present invention.
It is a t8 sectional view. 1... Conductive substrate, 2... Conductive portion of the conductive substrate, 3...
・A young aromatic compound seven-layer film that becomes a patterned electrolytic oxide film by applying an appropriate voltage, 4... Patterned lightning t1 film, 5... Produced on an electrolytic oxidation film The guidance
City body. Applicant Kuchiki Nananobu'1'Nanagi Co., Ltd.] Agent
Patent attorney Masatake Shiga −゛. 1: Conductive substrate, 2: Conductive portion of conductive substrate 3: Aromatic compound monomer film
Claims (2)
れ、この芳香族系化合物モノマーの膜上に電解質膜がパ
ターン状に形成され、このパターン状電解質膜上に導電
体が形成され、前記芳香族系化合物モノマーが電解酸化
されてなることを特徴とするパターン状電解酸化膜。(1) An aromatic compound monomer film is formed on the electrode substrate, an electrolyte film is formed in a pattern on the aromatic compound monomer film, a conductor is formed on the patterned electrolyte film, and the A patterned electrolytic oxide film characterized by being formed by electrolytically oxidizing an aromatic compound monomer.
る工程と、この芳香族系化合物モノマー膜の上に電解質
膜をパターン状に作製する工程と、このパターン状電解
質膜上に導電体を作製する工程と、前記芳香族系化合物
モノマーを電解酸化する工程の各工程を包含することを
特徴とするパターン状電解酸化膜の作製方法。(2) A process of producing an aromatic compound monomer film on an electrode substrate, a process of producing a patterned electrolyte membrane on this aromatic compound monomer film, and a process of forming a conductor on this patterned electrolyte membrane. A method for producing a patterned electrolytic oxide film, comprising the steps of producing the aromatic compound monomer and electrolytically oxidizing the aromatic compound monomer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26988787A JPH01112607A (en) | 1987-10-26 | 1987-10-26 | Pattern-shaped electrolytic oxidated film and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26988787A JPH01112607A (en) | 1987-10-26 | 1987-10-26 | Pattern-shaped electrolytic oxidated film and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01112607A true JPH01112607A (en) | 1989-05-01 |
Family
ID=17478597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26988787A Pending JPH01112607A (en) | 1987-10-26 | 1987-10-26 | Pattern-shaped electrolytic oxidated film and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01112607A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6960967B2 (en) | 2000-07-10 | 2005-11-01 | Murata Manufacturing Co., Ltd. | Dielectric resonator device, filter, duplexer, and communication apparatus |
| CN108873453A (en) * | 2018-06-28 | 2018-11-23 | 武汉华星光电技术有限公司 | Color membrane substrates and preparation method thereof, display panel |
-
1987
- 1987-10-26 JP JP26988787A patent/JPH01112607A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6960967B2 (en) | 2000-07-10 | 2005-11-01 | Murata Manufacturing Co., Ltd. | Dielectric resonator device, filter, duplexer, and communication apparatus |
| CN108873453A (en) * | 2018-06-28 | 2018-11-23 | 武汉华星光电技术有限公司 | Color membrane substrates and preparation method thereof, display panel |
| CN108873453B (en) * | 2018-06-28 | 2021-04-27 | 武汉华星光电技术有限公司 | Color film substrate, preparation method thereof and display panel |
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