JPH01104637U - - Google Patents
Info
- Publication number
- JPH01104637U JPH01104637U JP20143387U JP20143387U JPH01104637U JP H01104637 U JPH01104637 U JP H01104637U JP 20143387 U JP20143387 U JP 20143387U JP 20143387 U JP20143387 U JP 20143387U JP H01104637 U JPH01104637 U JP H01104637U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- base
- elastic body
- holding device
- roughened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Description
第１図は、この考案の一実施例に係る基板保持
装置を示す縦断面図である。第２図は、従来の基
板保持装置の一例を示す縦断面図である。
２……基板、４……ベース、４１……接着面、
６……弾性体、８……押えリング、１０……イオ
ンビーム。
FIG. 1 is a longitudinal sectional view showing a substrate holding device according to an embodiment of this invention. FIG. 2 is a longitudinal sectional view showing an example of a conventional substrate holding device. 2...Substrate, 4...Base, 41...Adhesive surface,
6... Elastic body, 8... Holding ring, 10... Ion beam.
Claims (1)
基板支持領域の表面に装着された弾性体と、基板
の周縁部をベースに向けて押え付ける押えリング
とを備えるものにおいて、前記ベースの弾性体と
の接着面を、ＪＩＳの表面あらさ表示で３５Ｓ以
上に粗面化したことを特徴とする基板保持装置。 A base for supporting a substrate, an elastic body attached to the surface of a substrate support area of the base, and a presser ring for pressing a peripheral edge of the substrate toward the base, wherein the elastic body of the base and A substrate holding device characterized in that the adhesive surface of the substrate is roughened to 35S or more in terms of JIS surface roughness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20143387U JPH01104637U (en) | 1987-12-29 | 1987-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20143387U JPH01104637U (en) | 1987-12-29 | 1987-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01104637U true JPH01104637U (en) | 1989-07-14 |
Family
ID=31491792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20143387U Pending JPH01104637U (en) | 1987-12-29 | 1987-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01104637U (en) |
-
1987
- 1987-12-29 JP JP20143387U patent/JPH01104637U/ja active Pending