JP7492551B2 - 容器及び基板処理システム - Google Patents
容器及び基板処理システム Download PDFInfo
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- JP7492551B2 JP7492551B2 JP2022087346A JP2022087346A JP7492551B2 JP 7492551 B2 JP7492551 B2 JP 7492551B2 JP 2022087346 A JP2022087346 A JP 2022087346A JP 2022087346 A JP2022087346 A JP 2022087346A JP 7492551 B2 JP7492551 B2 JP 7492551B2
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- 239000000758 substrate Substances 0.000 title claims description 170
- 238000000034 method Methods 0.000 claims description 92
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- 230000033001 locomotion Effects 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 29
- 238000010586 diagram Methods 0.000 description 19
- 235000012431 wafers Nutrition 0.000 description 15
- 239000010453 quartz Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 230000006837 decompression Effects 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 4
- 239000004696 Poly ether ether ketone Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000005674 electromagnetic induction Effects 0.000 description 3
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- 229920002530 polyetherether ketone Polymers 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
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- 239000002245 particle Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
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- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Description
20 容器
21 第1容器
22 第2容器
W 基板
N ノッチ
R リング部材
FZ フラットゾーン
RZ ラウンドゾーン
G アライン溝
30 リングキャリア
31 胴体
32 開口
33 アラインホール
34 ガイド突起
35 第1ガイド突起
35F 第1フラット部
35R 第1ラウンド部
36 第2ガイド突起
36F 第2フラット部
36R 第2ラウンド部
200 整列ユニット
210 チャック
220 照射部
230 受光部
310 ロードロックチャンバ
311 ハウジング
312 内部空間
313 ベントホール
314 減圧ホール
320 支持棚
510 処理容器
511 処理空間
512 搬入口
514 排気ホール
520 ゲートバルブ
530 排気ライン
540 電源ユニット
542 電源
544 整合機
550 支持ユニット
552 チャック
554 絶縁板
556 クオーツリング
R リング部材
560 第1リフトピンモジュール
570 第2リフトピンモジュール
580 バッフル板
582 バッフルホール
590 ガス供給ユニット
592 ガス供給源
594 ガス供給ライン
610 胴体
611 開閉センサー
612 収納空間
620 ドア
630 ヘッド
640 棚部
641 第1位置センサー
642 第2位置センサー
650 充電モジュール
651 充電部
652 支持部
653 ガイド部
654 駆動部
654a 駆動源
654b 駆動伝達源
654c アーム
660 バッテリー部
700 制御機
Claims (20)
- 基板型センサーを収納する容器において、
一側が開放された収納空間を有する胴体と、
前記収納空間を選択的に開閉するドアと、
前記収納空間で前記基板型センサーを支持する棚部と、及び
前記棚部に支持された前記基板型センサーを充電する充電モジュールを含み、
前記充電モジュールは、
待機位置と前記棚部に支持された前記基板型センサーを充電する充電位置との間で移動可能に提供される充電部を含み、
前記待機位置は、前記一側から離れた位置であり、
前記充電位置は、前記待機位置より前記一側と近い位置であることを特徴とする
容器。 - 前記充電モジュールは、
前記棚部に支持される前記基板型センサーの一面に平行な一方向に前記充電部の移動をガイドするガイド部と、
前記ガイド部に沿って移動して前記充電部を支持する支持部と、及び
前記支持部を前記一方向に移動させる駆動部をさらに含むことを特徴とする請求項1に記載の容器。 - 前記駆動部は、
駆動力を発生させる駆動源と、及び
前記充電部と結合され、前記駆動力によって前記充電部を前記一方向に移動させるアームを含むことを特徴とする請求項2に記載の容器。 - 前記充電部は、
前記棚部に支持された前記基板型センサーより下側領域で移動可能に提供されることを特徴とする請求項1乃至請求項3のうちで何れか一つに記載の容器。 - 前記棚部及び前記充電モジュールは複数で提供され、
前記充電モジュールらは、
前記棚部らそれぞれに支持される前記基板型センサーそれぞれを充電できるように提供されることを特徴とする請求項1乃至請求項3のうちで何れか一つに記載の容器。 - 基板型センサーを収納する容器において、
一側が開放された収納空間を有する胴体と、
前記収納空間を選択的に開閉するドアと、
前記収納空間で前記基板型センサーを支持する棚部と、及び
前記棚部に支持された前記基板型センサーを充電する充電モジュールと、
前記棚部に前記基板型センサーが安着されたかの如何を検出する第1位置センサーと、
充電部の位置を検出する第2位置センサーと、及び
前記収納空間の開閉如何を検出する開閉センサーを含み、
前記充電モジュールは、
待機位置と前記棚部に支持された前記基板型センサーを充電する充電位置との間で移動可能に提供される前記充電部を含む
ことを特徴とする容器。 - 前記充電部は、
前記第1位置センサーが前記棚部に前記基板型センサーが安着されることを検出し、前記開閉センサーが前記収納空間が前記ドアによって閉鎖されたことを検出する場合前記充電位置に移動されることを特徴とする請求項6に記載の容器。 - 前記充電部は、
前記第2位置センサーが前記充電部が前記充電位置への移動が完了したことを検出する場合前記基板型センサーに対する充電を始めることを特徴とする請求項7に記載の容器。 - 前記充電部は、
前記基板型センサーの充電が完了されるか、または、前記開閉センサーが前記収納空間が開放されたことを検出する場合前記待機位置に移動されることを特徴とする請求項6に記載の容器。 - 基板を処理するシステムにおいて、
ロードポートを有するインデックス部と、
前記インデックス部から基板の返送を受けて前記基板を処理する工程処理部と、及び
前記ロードポートに置かれて、前記工程処理部に搬入される基板型センサーを収納する容器を含み、
前記容器は、
一側が開放された収納空間を有する胴体と、
前記収納空間を選択的に開閉するドアと、
前記収納空間で前記基板型センサーを支持する棚部と、及び
前記棚部に支持された前記基板型センサーを充電する充電モジュールを含み、
前記充電モジュールは、
第1位置及び前記第1位置より前記一側と近い第2位置との間に移動可能に提供される充電部と、を含むことを特徴とする基板処理システム。 - 前記容器は、
前記棚部に前記基板型センサーが安着されたかの如何を検出する第1位置センサーと、
前記充電部の位置を検出する第2位置センサーと、及び
前記収納空間の開閉如何を検出する開閉センサーを含むことを特徴とする請求項10に記載の基板処理システム。 - 前記システムは、
制御機をさらに含み、
前記制御機は、
前記第1位置センサー、前記第2位置センサー、または、前記開閉センサーが検出する検出値に根拠して前記充電モジュールを制御することを特徴とする請求項11に記載の基板処理システム。 - 前記制御機は、
前記検出値に根拠し、前記充電モジュールが前記棚部に支持される前記基板型センサーを充電する充電モードと、または、前記充電モジュールの前記充電部が前記第1位置に位置される待機モードになるように前記充電モジュールを制御することを特徴とする請求項12に記載の基板処理システム。 - 前記制御機は、
前記第1位置センサーが前記棚部に前記基板型センサーが安着されることを検出及び前記開閉センサーが前記収納空間が前記ドアによって閉鎖されたことを検出する場合、前記充電モジュールが前記充電モードになるように前記充電モジュールを制御することを特徴とする請求項13に記載の基板処理システム。 - 前記制御機は、
前記基板型センサーの充電が完了されるか、または、前記第1位置センサーが前記棚部に前記基板が置かれなかったことを検出するか、または、前記開閉センサーが前記収納空間が前記開放されたことを検出する場合、前記充電モジュールが前記待機モードになるように前記充電モジュールを制御することを特徴とする請求項13に記載の基板処理システム。 - 前記充電モジュールは、
前記棚部に支持される前記基板型センサーの一面に平行な一方向に前記充電部の移動をガイドするガイド部と、
前記ガイド部に沿って移動して前記充電部を支持する支持部と、及び
前記支持部を前記一方向に移動させる駆動部をさらに含むことを特徴とする請求項10乃至請求項15のうちで何れか一つに記載の基板処理システム。 - 前記駆動部は、
駆動力を発生させる駆動源と、及び
前記充電部と結合され、前記駆動力によって前記充電部を前記一方向に移動させるアームを含むことを特徴とする請求項16に記載の基板処理システム。 - 基板を処理するシステムにおいて、
返送ロボットとロードポートを有するインデックス部と、
前記インデックス部から基板の返送を受けて前記基板を処理する工程処理部と、及び
前記ロードポートに置かれて、前記工程処理部に搬入される基板型センサーを収納する容器を含み、
前記容器は、
一側が開放された収納空間を有する胴体と、
前記収納空間を選択的に開閉するドアと、
前記収納空間で前記基板型センサーを支持する棚部と、及び
無線充電方式で前記棚部に支持された前記基板型センサーを充電する充電モジュールを含み、
前記充電モジュールは、
待機位置及び前記待機位置より前記一側と近い充電位置との間に移動可能に提供され、前記棚部に支持された前記基板型センサーより下側領域で移動可能に提供される充電部と、
前記棚部に前記基板型センサーが安着されたかの如何を検出する第1位置センサーと、
前記充電部の位置を検出する第2位置センサーと、及び
前記収納空間の開閉如何を検出する開閉センサーを含む基板処理システム。 - 前記充電モジュールは、
前記棚部に支持される前記基板型センサーの一面に平行な一方向に前記充電部の移動をガイドするガイド部と、
前記ガイド部に沿って移動して前記充電部を支持する支持部と、及び
前記支持部を前記一方向に移動させる駆動部をさらに含み、
前記駆動部は、
駆動力を発生させる駆動源と、及び
前記充電部と結合され、前記駆動力によって前記充電部を前記一方向に移動させるアームを含むことを特徴とする請求項18に記載の基板処理システム。 - 前記システムは、
制御機をさらに含み、
前記制御機は、
前記第1位置センサーが前記棚部に前記基板型センサーが安着されたことを検出し、前記開閉センサーが前記収納空間が前記ドアによって閉鎖されたことを検出する場合前記充電部を前記充電位置に移動させる制御信号を発生させ、
前記第2位置センサーが前記充電部が前記充電位置への移動が完了されたことを検出する場合前記基板型センサーに対する充電を始める制御信号を発生させ、
前記基板型センサーの充電が完了したか、または、前記開閉センサーが前記収納空間が開放されたことを検出する場合前記充電部を前記待機位置に移動させる制御信号を発生させることを特徴とする請求項18または請求項19に記載の基板処理システム。
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