JP7486934B2 - 回路基板 - Google Patents
回路基板 Download PDFInfo
- Publication number
- JP7486934B2 JP7486934B2 JP2019190512A JP2019190512A JP7486934B2 JP 7486934 B2 JP7486934 B2 JP 7486934B2 JP 2019190512 A JP2019190512 A JP 2019190512A JP 2019190512 A JP2019190512 A JP 2019190512A JP 7486934 B2 JP7486934 B2 JP 7486934B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- circuit board
- conductor layer
- section
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004020 conductor Substances 0.000 claims description 111
- 239000004065 semiconductor Substances 0.000 claims description 88
- 230000007423 decrease Effects 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 131
- 238000000034 method Methods 0.000 description 35
- 229920005989 resin Polymers 0.000 description 28
- 239000011347 resin Substances 0.000 description 28
- 238000004519 manufacturing process Methods 0.000 description 24
- 239000010409 thin film Substances 0.000 description 19
- 239000003990 capacitor Substances 0.000 description 18
- 238000010586 diagram Methods 0.000 description 17
- 229910000679 solder Inorganic materials 0.000 description 13
- 239000000463 material Substances 0.000 description 10
- 238000005422 blasting Methods 0.000 description 9
- 239000011162 core material Substances 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 239000003365 glass fiber Substances 0.000 description 4
- 229920001955 polyphenylene ether Polymers 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 239000004721 Polyphenylene oxide Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- -1 for example Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 229920006380 polyphenylene oxide Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- CMLFRMDBDNHMRA-UHFFFAOYSA-N 2h-1,2-benzoxazine Chemical compound C1=CC=C2C=CNOC2=C1 CMLFRMDBDNHMRA-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- OJMOMXZKOWKUTA-UHFFFAOYSA-N aluminum;borate Chemical compound [Al+3].[O-]B([O-])[O-] OJMOMXZKOWKUTA-UHFFFAOYSA-N 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920006231 aramid fiber Polymers 0.000 description 1
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 239000004643 cyanate ester Substances 0.000 description 1
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 238000013532 laser treatment Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920013636 polyphenyl ether polymer Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Laminated Bodies (AREA)
Description
図1は、本発明の第1の実施形態による半導体IC内蔵回路基板100の構造を説明するための模式的な断面図である。
図18は、本発明の第2の実施形態による薄膜キャパシタ内蔵回路基板200の構造を説明するための模式的な断面図である。
11,12 ランドパターン
20 ハンダ
100 半導体IC内蔵回路基板
101 半導体IC内蔵回路基板の下面
102 半導体IC内蔵回路基板の上面
111~114 絶縁層
113a,113b,114a,114b,261~265,271,272 開口部
121,122 ソルダーレジスト
130 モールド樹脂
200 薄膜キャパシタ内蔵回路基板
211,212,221~224,231,241~243 配線パターン
251~256 ビア導体
253a,255a,256a ビア
300 半導体IC
321 再配線層
321a,321b 再配線パターン
322 保護膜
400 電子部品
401 端子電極
402 ハンダ
500 薄膜キャパシタ
501,502 端子電極
600 半導体IC
601~605 パッド電極
602 パッド電極
606 ハンダ
C ビア
E1,E2 外部端子
L ランドパターン
L1~L4 導体層
S1,S2 区間
Claims (2)
- 第1及び第2の導体層と、
前記第1の導体層と前記第2の導体層の間に位置する絶縁層と、
前記絶縁層を貫通して設けられたビアの内部に形成され、前記第1の導体層と前記第2の導体層を接続するビア導体と、
前記絶縁層に埋め込まれた半導体ICと、を備え、
前記ビアは、前記第1の導体層側から前記第2の導体層側に向かう深さ方向に径が縮小する形状を有しており、
前記ビアは、前記第1の導体層側に位置する第1の区間と、前記第2の導体層側に位置する第2の区間を含み、
前記第1の区間における単位深さ当たりの径の縮小量は、前記第2の区間における単位深さ当たりの径の縮小量よりも大きく、
前記半導体ICの厚みは前記第2の区間の深さ未満であり、且つ、前記半導体ICの深さ位置は前記第2の区間の範囲内にあり、
前記深さ方向に見て、前記半導体ICは前記第1の区間と重なりを有する、回路基板。 - 前記第1の区間は、深さ位置が深くなるに従って、単位深さ当たりの径の縮小量が増加する形状であることを特徴とする請求項1に記載の回路基板。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/724,232 US11393761B2 (en) | 2018-12-25 | 2019-12-21 | Circuit board and its manufacturing method |
CN201911356395.8A CN111385971B (zh) | 2018-12-25 | 2019-12-25 | 电路基板及其制造方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018241119 | 2018-12-25 | ||
JP2018241119 | 2018-12-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020107877A JP2020107877A (ja) | 2020-07-09 |
JP7486934B2 true JP7486934B2 (ja) | 2024-05-20 |
Family
ID=71450989
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019190512A Active JP7486934B2 (ja) | 2018-12-25 | 2019-10-17 | 回路基板 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP7486934B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2022091957A1 (ja) * | 2020-10-30 | 2022-05-05 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002523891A (ja) | 1998-08-12 | 2002-07-30 | ミネソタ マイニング アンド マニュファクチャリング カンパニー | 導電バイアを備えたフレキシブル回路及びその作製方法 |
JP2009200356A (ja) | 2008-02-22 | 2009-09-03 | Tdk Corp | プリント配線板及びその製造方法 |
JP2010232648A (ja) | 2009-03-04 | 2010-10-14 | Nec Corp | 半導体装置及びその製造方法 |
JP2013229548A (ja) | 2012-03-27 | 2013-11-07 | Tdk Corp | 電子部品内蔵基板及びその製造方法 |
JP2014017339A (ja) | 2012-07-06 | 2014-01-30 | Sharp Corp | 構造体および構造体の製造方法 |
JP2014165483A (ja) | 2013-02-28 | 2014-09-08 | Kyocer Slc Technologies Corp | 配線基板、これを用いた実装構造体および配線基板の製造方法 |
WO2015064642A1 (ja) | 2013-10-30 | 2015-05-07 | 京セラ株式会社 | 配線基板およびこれを用いた実装構造体 |
WO2015068555A1 (ja) | 2013-11-07 | 2015-05-14 | 株式会社村田製作所 | 多層基板およびその製造方法 |
WO2018092480A1 (ja) | 2016-11-17 | 2018-05-24 | 大日本印刷株式会社 | 貫通電極基板、貫通電極基板を用いた半導体装置、および貫通電極基板の製造方法 |
-
2019
- 2019-10-17 JP JP2019190512A patent/JP7486934B2/ja active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002523891A (ja) | 1998-08-12 | 2002-07-30 | ミネソタ マイニング アンド マニュファクチャリング カンパニー | 導電バイアを備えたフレキシブル回路及びその作製方法 |
JP2009200356A (ja) | 2008-02-22 | 2009-09-03 | Tdk Corp | プリント配線板及びその製造方法 |
JP2010232648A (ja) | 2009-03-04 | 2010-10-14 | Nec Corp | 半導体装置及びその製造方法 |
JP2013229548A (ja) | 2012-03-27 | 2013-11-07 | Tdk Corp | 電子部品内蔵基板及びその製造方法 |
JP2014017339A (ja) | 2012-07-06 | 2014-01-30 | Sharp Corp | 構造体および構造体の製造方法 |
JP2014165483A (ja) | 2013-02-28 | 2014-09-08 | Kyocer Slc Technologies Corp | 配線基板、これを用いた実装構造体および配線基板の製造方法 |
WO2015064642A1 (ja) | 2013-10-30 | 2015-05-07 | 京セラ株式会社 | 配線基板およびこれを用いた実装構造体 |
WO2015068555A1 (ja) | 2013-11-07 | 2015-05-14 | 株式会社村田製作所 | 多層基板およびその製造方法 |
WO2018092480A1 (ja) | 2016-11-17 | 2018-05-24 | 大日本印刷株式会社 | 貫通電極基板、貫通電極基板を用いた半導体装置、および貫通電極基板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2020107877A (ja) | 2020-07-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5540276B2 (ja) | 電子部品内蔵基板及びその製造方法 | |
JP6221221B2 (ja) | 電子部品内蔵基板及びその製造方法 | |
JP5605414B2 (ja) | 電子部品内蔵基板及びその製造方法 | |
JP7486934B2 (ja) | 回路基板 | |
JP6269626B2 (ja) | 半導体装置、電子部品内蔵基板、及びこれらの製造方法 | |
CN111385971B (zh) | 电路基板及其制造方法 | |
KR20150043135A (ko) | 금속막을 포함한 인쇄회로기판 및 그것을 포함한 반도체 패키지 | |
JP5903973B2 (ja) | 電子部品内蔵基板及びその製造方法 | |
JP7342445B2 (ja) | 電子部品内蔵基板及びその製造方法 | |
WO2022091957A1 (ja) | 電子部品内蔵基板 | |
TWI767597B (zh) | 電子零件內藏式電路基板及其製造方法 | |
US11682628B2 (en) | Semiconductor IC-embedded substrate having heat dissipation structure and its manufacturing method | |
JP7225787B2 (ja) | 半導体ic内蔵回路基板及びその製造方法 | |
TWI789781B (zh) | 具有腔部之電路基板及其製造方法 | |
US12040272B2 (en) | Connector for implementing multi-faceted interconnection | |
CN116724391A (zh) | 电子部件内置基板 | |
US20230275023A1 (en) | Connector for implementing multi-faceted interconnection | |
JP7272046B2 (ja) | 電子部品内蔵回路基板及びその製造方法 | |
JP2021040061A (ja) | 電子部品内蔵回路基板及びその製造方法 | |
JP2013219247A (ja) | 配線基板及びその製造方法 | |
JP2020161607A (ja) | 電子部品内蔵回路基板及びその製造方法 | |
JP2016219646A (ja) | 半導体装置及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220826 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230621 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230711 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230829 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20231205 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240124 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240430 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240508 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7486934 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |