JP7486654B1 - 太陽電池 - Google Patents
太陽電池 Download PDFInfo
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- JP7486654B1 JP7486654B1 JP2023185271A JP2023185271A JP7486654B1 JP 7486654 B1 JP7486654 B1 JP 7486654B1 JP 2023185271 A JP2023185271 A JP 2023185271A JP 2023185271 A JP2023185271 A JP 2023185271A JP 7486654 B1 JP7486654 B1 JP 7486654B1
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- 238000002161 passivation Methods 0.000 claims abstract description 64
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 41
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 41
- 239000010703 silicon Substances 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 20
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 51
- 229910052796 boron Inorganic materials 0.000 claims description 48
- 239000000463 material Substances 0.000 claims description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 9
- 230000003667 anti-reflective effect Effects 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 239000000470 constituent Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 92
- 238000000034 method Methods 0.000 description 26
- 238000009792 diffusion process Methods 0.000 description 14
- 235000012431 wafers Nutrition 0.000 description 14
- 238000004140 cleaning Methods 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000005215 recombination Methods 0.000 description 6
- 230000006798 recombination Effects 0.000 description 6
- 238000000137 annealing Methods 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 229910015844 BCl3 Inorganic materials 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000012459 cleaning agent Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910015845 BBr3 Inorganic materials 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910004012 SiCx Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
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Abstract
Description
第1表面及び第2表面を有するN型シリコン基体と、
前記第1表面に形成されたトンネルパッシベーション構造及び第1パッシベーション反射防止膜と、
前記第2表面に形成されたホウ素ドーピングエミッタ構造層と、
前記エミッタ構造層に形成された第2パッシベーション反射防止膜と、
第1電極と、
第2電極と、を備え、
前記エミッタ構造層は、第1エミッタ層及び第2エミッタ領域を含み、ここで、前記第1エミッタ層の接合深さは、前記第2エミッタ領域の接合深さよりも小さく、前記第1エミッタ層のホウ素の総ドーピング量は、前記第2エミッタ領域のホウ素の総ドーピング量よりも小さく、
前記第1電極は、前記第2エミッタ領域に電気的に接触するように配置され、
前記第2電極は、前記トンネルパッシベーション構造と電気的に接触するように配置される。
Claims (12)
- 太陽電池であって、
第1表面及び第2表面を有するN型シリコン基体と、
前記第1表面に形成されたトンネルパッシベーション構造及び第1パッシベーション反射防止膜と、
前記第2表面に形成されたホウ素ドーピングエミッタ構造層と、
前記ホウ素ドーピングエミッタ構造層に形成された第2パッシベーション反射防止膜と、
第1電極と、
第2電極と、を備え、
前記ホウ素ドーピングエミッタ構造層は、第1エミッタ層及び第2エミッタ領域を含み、ここで、前記第1エミッタ層の接合深さは、前記第2エミッタ領域の接合深さよりも小さく、前記第1エミッタ層の最高ホウ素ドーピング濃度は、前記第2エミッタ領域の最高ホウ素ドーピング濃度よりも大きく、前記第1エミッタ層のホウ素の総ドーピング量は、前記第2エミッタ領域のホウ素の総ドーピング量よりも小さい、
前記第1電極は、前記第2エミッタ領域に電気的に接触するように配置され、
前記第2電極は、前記トンネルパッシベーション構造と電気的に接触するように配置され、
前記第1エミッタ層のECVドーピング曲線における第1エミッタ層表面からの深さが0.02~0.6μmの範囲において、前記第1エミッタ層における最高ホウ素ドーピング濃度と最低ホウ素ドーピング濃度との差異は1桁より大きく、
前記第2エミッタ領域のECVドーピング曲線における第2エミッタ領域表面からの深さが0.05~0.7μmの範囲において、前記第2エミッタ領域における最高ホウ素ドーピング濃度と最低ホウ素ドーピング濃度との差異は1桁未満である。 - 前記トンネルパッシベーション構造は、トンネル酸化物層と、パッシベーション接触材料層とを含み、前記トンネル酸化物層は、前記N型シリコン基体と前記パッシベーション接触材料層との間に設けられている
請求項1に記載の太陽電池。 - 前記パッシベーション接触材料層の構成材料は、ドーピングアモルファスシリコン、ドーピングド多結晶シリコン、炭化ケイ素から選択される1つ又は複数である
請求項2に記載の太陽電池。 - 前記第2電極は、前記パッシベーション接触材料層と電気的に接触するように配置されている
請求項2に記載の太陽電池。 - 前記第1エミッタ層の接合深さは、0.7μm以下である
請求項1に記載の太陽電池。 - 前記第2エミッタ領域の接合深さは、0.8μm以上である
請求項1に記載の太陽電池。 - 前記第2エミッタ領域のホウ素ドーピング濃度は2×1019atm/cm3以下である
請求項1に記載の太陽電池。 - 前記第1エミッタ層のECVドーピング曲線における最高点は、第1エミッタ層の表面からの深さが0.05~0.5μmの内部位置にある
請求項7に記載の太陽電池。 - 前記第1エミッタ層のシート抵抗は、前記第2エミッタ領域のシート抵抗より大きい
請求項1に記載の太陽電池。 - 前記第1エミッタ層のシート抵抗は150ohm/sq以上であり、前記第2エミッタ領域のシート抵抗は150ohm/sq以下である
請求項9に記載の太陽電池。 - 前記第1電極の幅は、前記第2エミッタ領域の幅よりも小さい
請求項1に記載の太陽電池。 - 前記第1パッシベーション反射防止膜と前記第2パッシベーション反射防止膜の材料は、酸化アルミニウム、酸化ケイ素、窒化ケイ素、酸窒化ケイ素から選ばれる1種又は複数種の組み合わせである、請求項1に記載の太陽電池。
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011155199A1 (ja) | 2010-06-10 | 2011-12-15 | 株式会社アルバック | 太陽電池製造装置及び太陽電池製造方法 |
JP2012151265A (ja) | 2011-01-19 | 2012-08-09 | Sharp Corp | 太陽電池の製造方法および該方法に基づいて製造された太陽電池 |
JP2013222961A (ja) | 2012-04-17 | 2013-10-28 | Lg Electronics Inc | 太陽電池及びその製造方法 |
JP2014229851A (ja) | 2013-05-27 | 2014-12-08 | 住友重機械工業株式会社 | 太陽電池セルの製造方法 |
US20150372183A1 (en) | 2011-09-07 | 2015-12-24 | Lg Electronics Inc. | Solar cell and manufacturing method thereof |
WO2016080348A1 (ja) | 2014-11-21 | 2016-05-26 | 三菱電機株式会社 | 太陽電池の製造方法および太陽電池 |
CN113809201A (zh) | 2021-08-20 | 2021-12-17 | 泰州隆基乐叶光伏科技有限公司 | 一种硼扩散方法及太阳能电池 |
CN115642202A (zh) | 2022-10-13 | 2023-01-24 | 三一硅能(株洲)有限公司 | 背结太阳能电池及其制备方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101937941B (zh) * | 2010-08-26 | 2012-07-18 | 常州天合光能有限公司 | 一种晶体硅太阳电池选择性发射结的制作方法 |
JP2014197578A (ja) * | 2013-03-29 | 2014-10-16 | パナソニック株式会社 | 太陽電池の製造方法 |
CN108258082B (zh) * | 2018-01-10 | 2021-06-04 | 张家港协鑫集成科技有限公司 | 太阳能电池的制备方法 |
CN110600558B (zh) * | 2019-07-27 | 2021-06-25 | 江苏顺风光电科技有限公司 | 一种适用于p+选择性发射极电池的硼工艺 |
CN111106188B (zh) * | 2019-12-17 | 2022-03-18 | 晶澳(扬州)太阳能科技有限公司 | N型电池及其选择性发射极的制备方法、以及n型电池 |
CN111162145A (zh) * | 2020-02-26 | 2020-05-15 | 泰州中来光电科技有限公司 | 具有选择性发射极结构的钝化接触太阳能电池及其制备方法 |
CN111952409B (zh) * | 2020-06-30 | 2022-04-19 | 泰州中来光电科技有限公司 | 一种具有选择性发射极结构的钝化接触电池的制备方法 |
CN112331742A (zh) * | 2020-11-10 | 2021-02-05 | 帝尔激光科技(无锡)有限公司 | 一种选择性发射极钝化接触太阳电池及其制备方法 |
CN112670353A (zh) * | 2020-12-17 | 2021-04-16 | 浙江正泰太阳能科技有限公司 | 一种硼掺杂选择性发射极电池及其制备方法 |
CN115020544A (zh) * | 2022-06-08 | 2022-09-06 | 中节能太阳能科技(镇江)有限公司 | 硼掺杂选择性发射极N型TOPCon电池的制造方法 |
CN115172523A (zh) * | 2022-07-13 | 2022-10-11 | 东方日升新能源股份有限公司 | 太阳能电池的制备方法 |
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Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011155199A1 (ja) | 2010-06-10 | 2011-12-15 | 株式会社アルバック | 太陽電池製造装置及び太陽電池製造方法 |
JP2012151265A (ja) | 2011-01-19 | 2012-08-09 | Sharp Corp | 太陽電池の製造方法および該方法に基づいて製造された太陽電池 |
US20150372183A1 (en) | 2011-09-07 | 2015-12-24 | Lg Electronics Inc. | Solar cell and manufacturing method thereof |
JP2013222961A (ja) | 2012-04-17 | 2013-10-28 | Lg Electronics Inc | 太陽電池及びその製造方法 |
JP2014229851A (ja) | 2013-05-27 | 2014-12-08 | 住友重機械工業株式会社 | 太陽電池セルの製造方法 |
WO2016080348A1 (ja) | 2014-11-21 | 2016-05-26 | 三菱電機株式会社 | 太陽電池の製造方法および太陽電池 |
CN113809201A (zh) | 2021-08-20 | 2021-12-17 | 泰州隆基乐叶光伏科技有限公司 | 一种硼扩散方法及太阳能电池 |
CN115642202A (zh) | 2022-10-13 | 2023-01-24 | 三一硅能(株洲)有限公司 | 背结太阳能电池及其制备方法 |
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