JP7450026B2 - ゲートインターフェース工学のための新規方法 - Google Patents
ゲートインターフェース工学のための新規方法 Download PDFInfo
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- JP7450026B2 JP7450026B2 JP2022520200A JP2022520200A JP7450026B2 JP 7450026 B2 JP7450026 B2 JP 7450026B2 JP 2022520200 A JP2022520200 A JP 2022520200A JP 2022520200 A JP2022520200 A JP 2022520200A JP 7450026 B2 JP7450026 B2 JP 7450026B2
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- 239000000758 substrate Substances 0.000 claims description 120
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- 238000012545 processing Methods 0.000 claims description 77
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- 239000003989 dielectric material Substances 0.000 claims description 36
- 239000004065 semiconductor Substances 0.000 claims description 36
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 33
- 239000001301 oxygen Substances 0.000 claims description 33
- 229910052760 oxygen Inorganic materials 0.000 claims description 33
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- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 17
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- 238000011065 in-situ storage Methods 0.000 claims description 6
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- 238000001311 chemical methods and process Methods 0.000 claims description 5
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- 239000010936 titanium Substances 0.000 claims description 3
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- OLBVUFHMDRJKTK-UHFFFAOYSA-N [N].[O] Chemical compound [N].[O] OLBVUFHMDRJKTK-UHFFFAOYSA-N 0.000 description 1
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- 239000000969 carrier Substances 0.000 description 1
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- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical group 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
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- 230000005012 migration Effects 0.000 description 1
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- 230000000877 morphologic effect Effects 0.000 description 1
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
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- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 150000002831 nitrogen free-radicals Chemical class 0.000 description 1
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
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- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
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- Formation Of Insulating Films (AREA)
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Description
本出願は、その内容全体があらゆる目的で参照することによって本明細書に組み込まれる、2019年10月4日出願の米国仮出願第62/910,974号の優先権の利益を主張する。
Claims (15)
- 半導体構造を形成する方法であって、
基板の表面から自然酸化物を除去すること、
前記基板に亜酸化窒素を供給し、前記表面を熱的にアニーリングして、酸化物含有インターフェースを形成すること、
前記基板に窒素含有前駆体又は酸素含有前駆体を供給すること、
前記窒素含有前駆体又は前記酸素含有前駆体を用いて、前記酸化物含有インターフェースに反応性配位子を導入することであって、500℃から600℃の間の温度において実施される、反応性配位子を導入すること、及び
前記酸化物含有インターフェースを覆う高誘電率誘電体材料を形成すること
を含む、方法。 - 前記除去することが、その場乾式化学プロセスを含み、ここで、前記除去が第1の処理チャンバで実施され、かつ前記方法が、前記高誘電率誘電体材料を形成する前に、前記基板を前記第1の処理チャンバから第2の処理チャンバへと移送することをさらに含む、請求項1に記載の半導体構造を形成する方法。
- 前記基板に亜酸化窒素を供給し、前記表面を熱的にアニーリングすることが、最大で5Åまでの厚さの酸化物含有インターフェースを形成する、請求項1に記載の半導体構造を形成する方法。
- 前記高誘電率誘電体材料を形成した後に、熱アニーリングを実施することをさらに含む、請求項1に記載の半導体構造を形成する方法。
- 前記高誘電率誘電体材料を形成することが、金属ハロゲン化物及び水を利用して原子層堆積プロセスを実施することを含む、請求項1に記載の半導体構造を形成する方法。
- 前記窒素含有前駆体がアンモニアを含み、前記アンモニアを供給する間、前記基板が300℃又はそれより高い温度で維持される、請求項1に記載の半導体構造を形成する方法。
- 前記高誘電率誘電体材料が、ハフニウム、ジルコニウム、ケイ素、ランタン、アルミニウム、チタン、及びストロンチウムからなる群より選択される少なくとも1つの元素を含む、請求項1に記載の半導体構造を形成する方法。
- 半導体構造を形成する方法であって、
第1の半導体処理チャンバ内に含まれる基板の表面から自然酸化物を除去すること、
真空条件を壊すことなく、前記基板を第2の半導体処理チャンバに移送すること、
前記基板に亜酸化窒素を供給し、前記表面を熱的にアニーリングして、前記第2の半導体処理チャンバ内で酸化物含有インターフェース層を形成すること、
前記酸化物含有インターフェース層の厚さを実質的に維持しつつ、かつ前記基板を500℃から600℃の間の温度で維持しつつ、前記基板を窒素含有前駆体又は酸素含有前駆体と接触させることによって、前記酸化物含有インターフェース層を前処理すること、
真空条件を壊すことなく、前記基板を第3の半導体処理チャンバに移送すること、
前記前処理された基板を収容する前記第3の半導体処理チャンバ内で、前記前処理された酸化物含有インターフェース層を覆う高誘電率誘電体材料を形成すること、
真空条件を壊すことなく、前記基板を第4の半導体処理チャンバに移送すること、及び
窒素処理を用いて前記高誘電率誘電体材料を後処理して、10%から20%の間の窒素を挿入すること
を含む、方法。 - 前記除去することが、その場乾式化学プロセスを含む、請求項8に記載の半導体構造を形成する方法。
- 前記自然酸化物を除去する前に熱アニーリングを実施することをさらに含む、請求項8に記載の半導体構造を形成する方法。
- 前記方法が、前記基板の前記表面を雰囲気に曝露することなく、1つ以上の処理チャンバ内で実施される、請求項8に記載の半導体構造を形成する方法。
- 前記後処理することが、前記基板及び高誘電率誘電体材料を窒素含有前駆体に曝露することを含む、請求項8に記載の半導体構造を形成する方法。
- 前記後処理の後に、前記高誘電率誘電体材料をアニーリングすることをさらに含む、請求項8に記載の半導体構造を形成する方法。
- 処理システムであって、
亜酸化窒素を基板の表面に供給し、前記表面を熱的にアニーリングして、酸化物含有インターフェースを形成するように構成された第1の処理チャンバ、
前記酸化物含有インターフェースを覆う高誘電率誘電体材料を形成するように構成された第2の処理チャンバ、
窒素含有前駆体を前記基板に供給するように構成された第3の処理チャンバ、及び
真空環境を壊すことなく、処理チャンバ間で前記基板を移送するように構成されたロボット
を含む、処理システム。 - プラズマ処理を実施して、前記基板の表面から自然酸化物を除去するように構成された第4の処理チャンバ、及び
窒素含有前駆体又は酸素含有前駆体を前記基板に供給するように構成された処理チャンバであって、前記窒素含有前駆体又は前記酸素含有前駆体を供給して、前記窒素含有前駆体又は前記酸素含有前駆体を用いて前記酸化物含有インターフェースに反応性配位子を導入する、処理チャンバ
をさらに含む、請求項14に記載の処理システム。
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