JP7445372B2 - 多軸磁気抵抗センサパッケージ - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/091—Constructional adaptation of the sensor to specific applications
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/06—Devices, other than using radiation, for detecting or locating foreign bodies ; determining position of probes within or on the body of the patient
- A61B5/061—Determining position of a probe within the body employing means separate from the probe, e.g. sensing internal probe position employing impedance electrodes on the surface of the body
- A61B5/062—Determining position of a probe within the body employing means separate from the probe, e.g. sensing internal probe position employing impedance electrodes on the surface of the body using magnetic field
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0005—Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0017—Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0047—Housings or packaging of magnetic sensors ; Holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0052—Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0094—Sensor arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/0206—Three-component magnetometers
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- Condensed Matter Physics & Semiconductors (AREA)
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- Life Sciences & Earth Sciences (AREA)
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- Medical Informatics (AREA)
- Animal Behavior & Ethology (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
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- Molecular Biology (AREA)
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- General Health & Medical Sciences (AREA)
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- Measuring Magnetic Variables (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
12 誘電体基板
14 第1の磁気抵抗センサチップ
16 第2の磁気抵抗センサチップ
18 リード線または相互接続
20 入力/出力(I/O)接続
22 接続パッド
24 磁気抵抗センサ回路
26 較正コイル
28 共通較正コイル
30 はんだバンプ
32 チップパッド
34 矢印
36 矢印
40 多軸磁気抵抗センサパッケージ
42 誘電体基板
44 第1の基板部分
46 第2の基板部分
48 第1の磁気抵抗センサチップ
50 第2の磁気抵抗センサチップ
52 第3の磁気抵抗センサチップ
54 矢印
56 共通較正コイル
58 共通較正コイル
100 医療装置
102 遠位端部または先端部
104 シャフト
106 ハンドルアセンブリ
108 ケーブル
110 オペレータコンソール
112 磁界送信器
Claims (8)
- 位置姿勢センサであって、
第1の平面に沿って配置された第1の基板部分(44)と、前記第1の平面に直交する第2の平面に沿って配置された第2の基板部分(46)と、を含む誘電体基板(12、42)と、
前記第1の基板部分(44)に取り付けられ、少なくとも1つの磁気抵抗センサ回路(24)を含む第1の磁気抵抗センサチップ(48)と、
前記第2の基板部分(46)に取り付けられ、かつ前記第1の磁気抵抗センサチップに隣接して配置され、少なくとも1つの磁気抵抗センサ回路(24)を含む第2の磁気抵抗センサチップ(50)とを含み、
前記第1の磁気抵抗センサチップの前記少なくとも1つの磁気抵抗センサ回路の軸は、前記第2の磁気抵抗センサチップの前記少なくとも1つの磁気抵抗センサ回路の軸とは異なる方向に向けられ、
前記誘電体基板は、前記第1の磁気抵抗センサチップ(48)と前記第2の磁気抵抗センサチップ(50)との間の位置で曲がり、これにより前記第1の基板部分(44)と前記第2の基板部分(46)が規定され、
前記誘電体基板は、その上に形成され、信号を受信および送信するために前記第1および前記第2の磁気抵抗センサチップに接続された複数の電気リード線(18)を含み、
前記第1および前記第2の磁気抵抗センサチップの各々は、前記少なくとも1つの磁気抵抗センサ回路から一定の距離に配置された較正コイル(26)をさらに含み、前記較正コイルは、前記それぞれの磁気抵抗センサチップの較正を提供する較正磁界を生成するように構成され、
前記第1の基板部分(44)および前記第2の基板部分(46)のそれぞれが共通較正コイル(56、58)を有する、
位置姿勢センサ。 - 請求項1に記載の位置姿勢センサであって、前記第1の磁気抵抗センサチップに隣接する前記第1の基板部分に取り付けられた第3の磁気抵抗センサチップ(52)をさらに含み、前記第3の磁気抵抗センサチップは、少なくとも1つの磁気抵抗センサ回路を含み、前記第3の磁気抵抗センサチップは、前記第1の基板部分(44)において前記第1の磁気抵抗センサチップに整列されている、位置姿勢センサ。
- 請求項1に記載の位置姿勢センサであって、前記第1および前記第2の磁気抵抗センサチップの各々の前記少なくとも1つの磁気抵抗センサ回路から一定の距離に配置された共通較正コイル(28)をさらに含み、前記共通較正コイルは、前記第1および前記第2の磁気抵抗センサチップの各々の較正を提供する較正磁界を生成するように構成される、位置姿勢センサ。
- 請求項1に記載の位置姿勢センサであって、前記誘電体基板は、その上に形成された複数の接続パッド(22)を含み、前記第1および前記第2の磁気抵抗センサチップの各々は、その上に形成された複数のチップパッド(32)を含み、
前記位置姿勢センサは、前記第1および前記第2の磁気抵抗センサチップのそれぞれのチップパッドを、フリップチップ接合により前記誘電体基板のそれぞれの接続パッドに接合するはんだをさらに含む、位置姿勢センサ。 - 請求項1に記載の位置姿勢センサであって、前記誘電体基板は、FR4、セラミック、またはポリイミド材料のうちの1つを含む、位置姿勢センサ。
- 位置姿勢センサを製造する方法であって、
第1の平面に沿って配置された第1の基板部分(44)と、前記第1の平面に直交する第2の平面に沿って配置された第2の基板部分(46)と、を含む誘電体基板を提供するステップと、
少なくとも1つの磁気抵抗センサ回路を含む第1の磁気抵抗センサチップを前記誘電体基板の前記第1の基板部分(44)に取り付けるステップと、
少なくとも1つの磁気抵抗センサ回路を含む第2の磁気抵抗センサチップを、前記第2の磁気抵抗センサチップが前記第1の磁気抵抗センサチップに隣接して配置されるように前記誘電体基板の前記第2の基板部分(46)に取り付けるステップと、を含み、
前記第1および前記第2の磁気抵抗センサチップを前記誘電体基板に取り付けるステップは、前記第1の磁気抵抗センサチップの前記少なくとも1つの磁気抵抗センサ回路の軸と前記第2の磁気抵抗センサチップの前記少なくとも1つの磁気抵抗センサ回路の軸が直交するように、前記第1および前記第2の磁気抵抗センサチップを前記誘電体基板に取り付けるステップと、
前記第1の基板部分(44)および前記第2の基板部分(46)のそれぞれに共通較正コイル(56、58)が設けられるステップと、
を含み、
前記誘電体基板は、前記第1の磁気抵抗センサチップ(48)と前記第2の磁気抵抗センサチップ(50)との間の位置で曲げられる柔軟な基板を備え、
前記誘電体基板は、その上に形成され、信号を受信および送信するために前記第1および前記第2の磁気抵抗センサチップに接続された複数の電気リード線(18)を含む、
前記第1および前記第2の磁気抵抗センサチップの各々は、前記少なくとも1つの磁気抵抗センサ回路から一定の距離に配置された較正コイル(26)を含み、前記較正コイルは、前記それぞれの磁気抵抗センサチップの較正を提供する較正磁界を生成するように構成されている、
方法。 - 請求項6に記載の方法であって、前記第1および前記第2の磁気抵抗センサチップを前記誘電体基板に取り付けるステップは、前記誘電体基板に対する前記第1および前記第2の磁気抵抗センサチップのフリップチップ接合を含み、リフローはんだにより、前記第1および前記第2の磁気抵抗センサチップのチップパッドと前記誘電体基板の接続パッドとの間の電気的接続を提供する、方法。
- 請求項6に記載の方法であって、第3の磁気抵抗センサチップを、前記第3の磁気抵抗センサチップが第1の基板部分(44)において前記第1の磁気抵抗センサチップと整列するように、前記第1の基板部分に取り付けるステップであって、前記第3の磁気抵抗センサチップは少なくとも1つの磁気抵抗センサ回路を含む、ステップをさらに含み、
前記第1、前記第2、および前記第3の磁気抵抗センサチップが3軸センサを形成する、方法。
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US14/842,578 | 2015-09-01 | ||
US14/842,578 US9995600B2 (en) | 2015-09-01 | 2015-09-01 | Multi-axis magneto-resistance sensor package |
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JP2017049240A JP2017049240A (ja) | 2017-03-09 |
JP7445372B2 true JP7445372B2 (ja) | 2024-03-07 |
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US (1) | US9995600B2 (ja) |
EP (1) | EP3139189B1 (ja) |
JP (1) | JP7445372B2 (ja) |
KR (1) | KR102556711B1 (ja) |
CN (1) | CN106482755B (ja) |
AU (1) | AU2016216599B2 (ja) |
CA (1) | CA2939710C (ja) |
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US9995600B2 (en) | 2018-06-12 |
AU2016216599B2 (en) | 2020-08-06 |
CN106482755B (zh) | 2021-03-09 |
EP3139189B1 (en) | 2020-10-14 |
AU2016216599A1 (en) | 2017-03-16 |
KR102556711B1 (ko) | 2023-07-17 |
US20170059361A1 (en) | 2017-03-02 |
CN106482755A (zh) | 2017-03-08 |
CA2939710A1 (en) | 2017-03-01 |
CA2939710C (en) | 2023-10-10 |
KR20170027285A (ko) | 2017-03-09 |
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JP2017049240A (ja) | 2017-03-09 |
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