JP7437090B1 - Film thickness adjustment device and method for manufacturing decorated containers - Google Patents
Film thickness adjustment device and method for manufacturing decorated containers Download PDFInfo
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- JP7437090B1 JP7437090B1 JP2023069936A JP2023069936A JP7437090B1 JP 7437090 B1 JP7437090 B1 JP 7437090B1 JP 2023069936 A JP2023069936 A JP 2023069936A JP 2023069936 A JP2023069936 A JP 2023069936A JP 7437090 B1 JP7437090 B1 JP 7437090B1
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims description 14
- 238000007740 vapor deposition Methods 0.000 claims abstract description 61
- 239000002245 particle Substances 0.000 claims abstract description 27
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 abstract description 7
- 239000003086 colorant Substances 0.000 abstract description 4
- 238000005034 decoration Methods 0.000 abstract description 3
- 238000003860 storage Methods 0.000 description 51
- 239000010408 film Substances 0.000 description 21
- 238000010438 heat treatment Methods 0.000 description 16
- 238000003780 insertion Methods 0.000 description 12
- 230000037431 insertion Effects 0.000 description 12
- 238000000151 deposition Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 9
- 230000001747 exhibiting effect Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000005083 Zinc sulfide Substances 0.000 description 3
- 229910052984 zinc sulfide Inorganic materials 0.000 description 3
- 210000000078 claw Anatomy 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 210000003813 thumb Anatomy 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
【課題】製造者が容易に、製品ごとに加飾の性状が異なり、複雑な模様や色彩を呈する加飾容器を製造できる装置等を提供することを目的とする。【解決手段】上記課題を解決する本願発明は、真空蒸着を行うための蒸着装置Ｘにおいて、蒸着粒子を放出する蒸着源１と、容器Ｂを支持する容器支持部２と、を備え、前記容器に不均一な蒸着を行うための膜厚調整装置Ｙであって、容器Ｂに対する蒸着源１の相対角度を調整可能な角度調整部を有する膜厚調整装置Ｙである。【選択図】図２An object of the present invention is to provide an apparatus or the like that allows a manufacturer to easily manufacture decorated containers that have different decoration properties for each product and exhibit complex patterns and colors. [Solution] The present invention for solving the above problems is a vapor deposition apparatus X for performing vacuum vapor deposition, which includes a vapor deposition source 1 for emitting vapor deposition particles, and a container support part 2 for supporting a container B. This is a film thickness adjusting device Y for performing non-uniform vapor deposition, and has an angle adjusting section that can adjust the relative angle of the vapor deposition source 1 with respect to the container B. [Selection diagram] Figure 2
Description
本発明は、真空蒸着を行うための装置に利用され、不均一な膜を生成するための装置に関する。 TECHNICAL FIELD The present invention relates to an apparatus for producing a non-uniform film, which is utilized in an apparatus for performing vacuum deposition.
真空蒸着装置とは、真空にした器具の中に、蒸着を行う対象である基板と、薄膜材料を中に入れた状態で加熱する蒸発源を入れ、蒸発させた薄膜材料を基板に付着させることによって基板上に薄膜を形成するための装置である。 A vacuum evaporation device is a vacuum device in which a substrate to be evaporated and a thin film material are placed inside and an evaporation source that heats the device, and the evaporated thin film material is attached to the substrate. This is an apparatus for forming a thin film on a substrate.
ここにおいて、基板として容器を用いることで意匠性を高めることができることは例えば特許文献１に記載されている。また、特許文献２に記載されているような手段を用いることによれば、所定位置の膜厚を調整して容器にグラデーションを作ることもできる。 Here, it is described in Patent Document 1, for example, that the design can be improved by using a container as the substrate. Further, by using the means described in Patent Document 2, it is also possible to create a gradation in the container by adjusting the film thickness at a predetermined position.
ところで、加飾容器の分野においては、ばらつきが少ない同一の製品よりも、容器ごとに色合いが異なる複雑な模様の製品の方が独自性のあるものとして好まれる場合も多い。
特許文献に記載の発明では、容器の所定の位置に所定の色合いが形成されるように、装置の工夫や金属種の選定を行うものであるため、同じ製造方法で同時に製造された製品は略同一の性状を示し、性状（蒸着膜の分布）の異なる製品を製作しようとした場合には、設計や装置の洗浄等の手間がかかる。
By the way, in the field of decorative containers, products with complex patterns that vary from container to container are often preferred as unique products over identical products with little variation.
In the inventions described in patent documents, devices are devised and metal types are selected so that a predetermined shade is formed in a predetermined position of the container, so products manufactured at the same time using the same manufacturing method are almost identical. If it is attempted to produce products that exhibit the same properties but have different properties (distribution of the deposited film), it will take time and effort to design and clean the equipment.
本発明は、上記の課題に鑑み、製造者が容易に、製品ごとに加飾の性状が異なり、複雑な模様や色彩を呈する加飾容器を製造できる装置、製造方法及びそれにより製造される容器を提供することを目的とする。 In view of the above-mentioned problems, the present invention provides an apparatus and a manufacturing method that allow manufacturers to easily manufacture decorated containers with different decoration properties for each product and exhibiting complex patterns and colors, and containers manufactured using the same. The purpose is to provide
上記課題を解決する本願発明は、真空蒸着を行うための蒸着装置において、蒸着粒子を放出する蒸着源と、容器を支持する容器支持部と、を備え、前記容器に不均一な蒸着を行うための膜厚調整装置であって、前記容器に対する前記蒸着源の相対角度を調整可能な角度調整部を有する膜厚調整装置である。
このような構成によって、蒸着粒子が容器に侵入する角度を簡単に調整することができるようになるため、種々の複雑な模様を呈する容器を容易に製造できるようになる。
The present invention for solving the above problems is a vapor deposition apparatus for performing vacuum vapor deposition, which includes a vapor deposition source that emits vapor deposition particles and a container support part that supports a container, and is capable of performing non-uniform vapor deposition on the container. The film thickness adjusting device includes an angle adjusting section that can adjust a relative angle of the vapor deposition source with respect to the container.
With such a configuration, it becomes possible to easily adjust the angle at which the deposited particles enter the container, and therefore it becomes possible to easily manufacture containers exhibiting various complex patterns.
本発明の好ましい形態では、前記蒸着源は、前記蒸着粒子を格納する格納部を有し、前記角度調整部は、前記格納部を回動可能に支持する格納支持部と、前記格納支持部を所定の位置で係止する格納係止部を含む。
このような構成によって、容器に対する蒸着粒子の飛行角度を調整することができるようになるため、より複雑な蒸着膜分布を有する容器を製造することができる。また、傾斜によって格納部内の蒸着粒子への熱の伝わり方が時々刻々と変化することで、同一ロットで異なる性状を示す容器を容易に製造することができる。
In a preferred embodiment of the present invention, the vapor deposition source includes a storage part that stores the vapor deposition particles, and the angle adjustment part includes a storage support part that rotatably supports the storage part, and a storage support part that rotatably supports the storage part. Includes a storage lock that locks in place.
With such a configuration, it becomes possible to adjust the flight angle of the vapor deposited particles with respect to the container, so it is possible to manufacture a container having a more complicated vapor deposited film distribution. Furthermore, since the way in which heat is transferred to the vapor deposited particles in the storage section changes from moment to moment due to the inclination, it is possible to easily manufacture containers exhibiting different properties in the same lot.
本発明の好ましい形態では、前記角度調整部は、前記容器支持部を回動可能に支持する容器支持部と、前記容器支持部を所定の位置で係止する容器係止部を含む。
このような構成によって、基盤である容器に対する蒸着粒子の侵入角度を容易に調整することができるようになるため、より簡単に同一ロットで異なる性状を示す容器を製造することができる。
In a preferred embodiment of the present invention, the angle adjustment section includes a container support section that rotatably supports the container support section, and a container locking section that locks the container support section at a predetermined position.
With such a configuration, it becomes possible to easily adjust the intrusion angle of the vapor deposited particles into the container serving as the base, so that containers exhibiting different properties can be manufactured more easily in the same lot.
本発明の好ましい形態では、前記蒸着源は、前記蒸着粒子を格納する格納部を有し、前記格納部は高さ方向に間隔を空けて複数設けられる請求項１に記載の膜厚調整装置。
このような構成によって、蒸着粒子が複数の場所から放出されるようになるため、同一ロットで異なる性状を示す容器を容易に製造することができる。
In a preferred form of the present invention, the film thickness adjusting device according to claim 1, wherein the vapor deposition source has a storage section that stores the vapor deposition particles, and a plurality of the storage sections are provided at intervals in the height direction.
With such a configuration, the vapor deposited particles are emitted from a plurality of locations, so containers exhibiting different properties can be easily manufactured in the same lot.
本発明の好ましい形態では、前記容器支持部は、高さ方向に伸びる幹部と、前記幹部から側方に伸びる枝部と、を有し、前記膜厚調整装置は、前記幹部を中心に回転させる支持回転機構をさらに有し、前記支持回転機構は、前記幹部を高速で回転させる高速回転部と、前記高速回転部と比較して前記幹部を低速で回転させる低速回転部と、を含む。
このような構成によって、容器支持部が高速回転する際には薄い膜が、低速回転する際には厚い膜が形成されるようになるため、同一ロットで異なる性状を示す容器を容易に製造することができる。
In a preferred embodiment of the present invention, the container support portion has a trunk extending in the height direction and a branch extending laterally from the trunk, and the film thickness adjusting device rotates around the trunk. The support rotation mechanism further includes a high-speed rotation section that rotates the trunk at a high speed, and a low-speed rotation section that rotates the trunk at a low speed compared to the high-speed rotation section.
With this configuration, a thin film is formed when the container support rotates at high speed, and a thick film is formed when it rotates at low speed, making it easy to manufacture containers with different properties in the same lot. be able to.
上記課題を解決する本願発明は、蒸着粒子を放出する蒸着源と、容器を支持する容器支持部とを備え、前記容器に不均一な蒸着を行うための膜厚調整装置によって、前記容器に真空蒸着を行う容器の製造方法であって、前記膜厚調整装置により、前記容器に不均一な蒸着を行うための膜厚調整工程を含み、前記膜厚調整工程は、膜厚調整装置が有する角度調整部によって前記容器に対する前記蒸着源の相対角度を蒸着前に調整する角度調整工程を含む容器の製造方法である。
このような構成によって、蒸着粒子が容器に侵入する角度を調整工程によって簡単に調整することができるようになるため、種々の複雑な模様を呈する容器を容易に製造できるようになる。
The present invention, which solves the above problems, includes a vapor deposition source that emits vapor deposition particles, a container support part that supports a container, and a film thickness adjustment device that performs nonuniform vapor deposition on the container. A method for manufacturing a container for vapor deposition, the method including a film thickness adjustment step for performing non-uniform vapor deposition on the container using the film thickness adjustment device, the film thickness adjustment step being performed using an angle that the film thickness adjustment device has. The method for manufacturing a container includes an angle adjusting step of adjusting a relative angle of the vapor deposition source with respect to the container by an adjusting section before vapor deposition.
With such a configuration, the angle at which the deposited particles enter the container can be easily adjusted through an adjustment step, so that containers exhibiting various complex patterns can be easily manufactured.
本発明の好ましい形態では、前記蒸着源は、蒸着粒子を格納する格納部と、前記格納部を加熱する加熱部と、前記加熱部を制御する制御部と、を有し、前記膜厚調整工程は、前記温度制御部により、前記加熱部の温度を高温にする状態と、低温にする状態と、を繰り返す温度変動工程を含む請求項６に記載の容器の製造方法である。
このような構成によって、高温時には膜厚が大きくなり、低温時には膜厚が小さくなるため、より簡単に同一ロットで異なる性状を示す容器を製造することができる。
In a preferred embodiment of the present invention, the vapor deposition source includes a storage section that stores vapor deposition particles, a heating section that heats the storage section, and a control section that controls the heating section, and the film thickness adjustment step 7. The method of manufacturing a container according to claim 6, further comprising a temperature varying step of repeatedly increasing the temperature of the heating section to a high temperature and decreasing the temperature to a low temperature by the temperature control section.
With such a configuration, the film thickness increases at high temperatures and decreases at low temperatures, making it easier to manufacture containers exhibiting different properties in the same lot.
本願発明は、上記製造装置によって製造される複数の加飾容器からなる容器ロットであって、複数の前記容器は、段階的に色彩が変化するグラデーション領域をそれぞれ有し、前記グラデーション領域の呈する色及び位置は、各前記容器ごとに異なる容器ロットであり、前記加飾容器の表面に硫化亜鉛の膜が形成され、容器底面の縁部に、段階的に色彩が変化するグラデーション領域を有する。
上記の製造方法により、異なる性状を示す独自性のある容器を容易に得られる。
The present invention is a container lot comprising a plurality of decorated containers manufactured by the above-mentioned manufacturing apparatus, wherein each of the plurality of containers has a gradation area whose color changes stepwise, and the color exhibited by the gradation area is and the position is a different container lot for each container, a zinc sulfide film is formed on the surface of the decorated container, and a gradation area in which the color changes stepwise is provided at the edge of the bottom of the container.
By the above manufacturing method, unique containers exhibiting different properties can be easily obtained.
上記課題を解決する本発明は、製造者が容易に、製品ごとに加飾の性状が異なり、複雑な模様や色彩を呈する加飾容器を製造できる装置、製造方法及びそれにより製造される容器を提供することができる。 The present invention, which solves the above problems, provides an apparatus, a manufacturing method, and a container manufactured by the method that allows a manufacturer to easily manufacture decorated containers with different decoration properties and complex patterns and colors for each product. can be provided.
以下、図面を用いて、本発明の各実施形態に係る蒸着装置Ｘについて説明する。説明は、実施形態の構成、実施の方法、他の実施例の順に詳述する。
なお、以下に示す各実施形態は本発明の一例であり、本発明を以下の各実施形態に限定するものではない。
EMBODIMENT OF THE INVENTION Hereinafter, the vapor deposition apparatus X based on each embodiment of this invention is demonstrated using drawings. The description will be detailed in the order of the configuration of the embodiment, the method of implementation, and other examples.
In addition, each embodiment shown below is an example of this invention, and this invention is not limited to each following embodiment.
蒸着装置Ｘは、図１に示すように、容器Ｂに蒸着粒子１Ａによる加飾を行うための、真空蒸着を行う筐体装置である。また、膜厚調整装置Ｙは、蒸着を行う際に膜厚を調整するために用いる装置の総称で、蒸着装置Ｘの内部に設けられ、蒸着粒子１Ａを放出する蒸着源１と、基板である容器Ｂを所定位置に支持する容器支持部２と、容器支持部２を所定の態様で回転させる支持回転機構３と、筐体内部を真空にするための真空装置４と、を備え、さらに容器Ｂに対する蒸着源１の相対角度を調整可能な角度調整部を有する。 As shown in FIG. 1, the vapor deposition apparatus X is a housing apparatus that performs vacuum vapor deposition in order to decorate the container B with vapor deposition particles 1A. The film thickness adjustment device Y is a general term for devices used to adjust the film thickness during vapor deposition, and is provided inside the vapor deposition device X, and includes a vapor deposition source 1 that emits vapor deposition particles 1A, and a substrate. It includes a container support part 2 that supports the container B in a predetermined position, a support rotation mechanism 3 that rotates the container support part 2 in a predetermined manner, and a vacuum device 4 that evacuates the inside of the casing. It has an angle adjustment section that can adjust the relative angle of the deposition source 1 with respect to B.
容器Ｂは、光透過プラスチックで形成された容器であって、容器端部に設けられる開口で蓋を取り付け可能な入れ口Ｂ１と、側面部Ｂ２と、底面部Ｂ３と、を有する。材質としては、アクリル、ポリカーボネート、ＡＢＳなどの樹脂が挙げられるがガラスであってもよい。 The container B is a container made of light-transmitting plastic, and has an opening provided at the end of the container to which a lid can be attached, an opening B1, a side surface B2, and a bottom surface B3. Examples of the material include resins such as acrylic, polycarbonate, and ABS, but glass may also be used.
蒸着粒子１Ａは、容器Ｂの表面を被覆することで、容器Ｂの表面に干渉を生じさせることでグラデーション領域Ｂ４を形成する。蒸着粒子１Ａとしては、蒸着装置Ｘの内部が低温であっても適切な蒸着を行える硫化亜鉛（ＺｎＳ）を用いることが好ましい。 The vapor deposited particles 1A form a gradation region B4 by coating the surface of the container B and causing interference with the surface of the container B. As the vapor deposition particles 1A, it is preferable to use zinc sulfide (ZnS), which can perform appropriate vapor deposition even when the inside of the vapor deposition apparatus X is at a low temperature.
蒸着源１は、底面から立設して電力供給を行う通電棒１１と、通電棒１１から側面方向に張り出す延設棒１２と、蒸着粒子１Ａを格納する容器を支持する格納支持部１３と、蒸着粒子１Ａを格納する格納部１４と、位置の固定に用いるネジ部１５と、加熱の制御を行う制御部１Ｂ（図示せず）を備えている。 The evaporation source 1 includes an energizing rod 11 that stands up from the bottom and supplies power, an extension rod 12 that protrudes from the energizing rod 11 in the side direction, and a storage support part 13 that supports a container that stores the evaporation particles 1A. , a storage part 14 for storing the deposited particles 1A, a screw part 15 used for fixing the position, and a control part 1B (not shown) for controlling heating.
通電棒１１は、蒸着装置の筐体内部において立設している導電性の柱体であり、好ましくは銅製である。図２に示すように所定の間隔で通電孔１１Ｈが設けられることによって、複数の格納部１４の位置調整を可能にしている。通電棒１１は間隔を空けて複数設けられており、隣接する通電棒１１には異なる電荷が蓄積されている。 The current-carrying rod 11 is a conductive column that stands upright inside the casing of the vapor deposition apparatus, and is preferably made of copper. As shown in FIG. 2, the energizing holes 11H are provided at predetermined intervals, thereby making it possible to adjust the positions of the plurality of storage sections 14. A plurality of energizing rods 11 are provided at intervals, and different charges are accumulated in adjacent energizing rods 11.
延設棒１２は、通電棒１１に対して直角に伸びている導電性の部材であって、延設棒本体１２１と、通電棒１１と延設棒本体１２１とを接続する延設取付部１２２と、格納支持部１３を挿入できる格納係止部１２３と、格納支持部１３を回転可能に支持する角度調整孔１２４と、を有する。 The extension rod 12 is a conductive member extending perpendicularly to the current carrying rod 11, and includes an extension rod main body 121 and an extension mounting portion 122 that connects the current carrying rod 11 and the extension rod main body 121. , a storage locking portion 123 into which the storage support portion 13 can be inserted, and an angle adjustment hole 124 that rotatably supports the storage support portion 13 .
延設棒本体１２１は、角柱型の部材であって、一端に延設取付部１２２をねじ込むことができる孔が設けられ、他端に格納係止部１２３が設けられる部材である。
実施形態においては、延設棒本体１２１として種々の長さのものが異なる高さに同時に支持されているが、伸縮できるように設けられていてもよい。
The extension rod main body 121 is a prismatic member having a hole provided at one end into which the extension attachment portion 122 can be screwed, and a storage locking portion 123 provided at the other end.
In the embodiment, extension rod bodies 121 of various lengths are simultaneously supported at different heights, but the extension rod bodies 121 may be provided so as to be expandable and retractable.
延設取付部１２２は、図３に示すように、通電孔１１Ｈの径よりも外径が小さい円柱部材であって、少なくとも端部及び軸部にネジ切り加工が施されている。延設取付部１２２の一端は通電孔１１Ｈに貫入し、通電棒１１を挟み込むようにして導電性のナットで固定される。 As shown in FIG. 3, the extended mounting portion 122 is a cylindrical member having an outer diameter smaller than the diameter of the current-carrying hole 11H, and is threaded at least on the end portion and the shaft portion. One end of the extended mounting portion 122 penetrates into the current-carrying hole 11H and is fixed with a conductive nut so as to sandwich the current-carrying rod 11 therebetween.
また、延設取付部１２２の一端は雄ネジとなっており、延設棒本体１２１に設けられる孔にねじ込まれることで、延設取付部１２２（ロール方向）を軸に回転できる角度調整部としての機能も有する。
この場合、通電棒１１が有するそれぞれの延設棒１２は、異なる高さにある通電孔１１Ｈに取り付けられることとなる。
Moreover, one end of the extension attachment part 122 is a male screw, and by being screwed into a hole provided in the extension rod main body 121, it can be used as an angle adjustment part that can rotate around the extension attachment part 122 (roll direction). It also has the functions of
In this case, the respective extension rods 12 of the current-carrying rod 11 are attached to the current-carrying holes 11H located at different heights.
格納係止部１２３は、角度調整部の一部として、延設棒本体１２１において二股に分かれて延在し対向して設けられる材であって、２つの材の間に格納支持部１３の一部を挟み込むことができるような空隙を形成している。 The storage locking part 123 is a member that is provided as part of the angle adjustment part and extends in two parts in the extension rod main body 121 to face each other. A gap is formed in which the parts can be sandwiched.
角度調整孔１２４は、角度調整部の一部として、格納係止部１２３を構成する２つの材を同時に貫通するように設けられている孔部であって、角度調整孔１２４を貫通するネジ部１５とナットによって格納係止部１２３の空隙の間隔を縮小できるようにしている。これによって、格納支持部１３を所定の角度で簡単に係止できる。好ましくは、角度調整孔１２４の軸は、格納係止部１２３の材の略中心で垂直に貫通している。 The angle adjustment hole 124 is a hole provided as a part of the angle adjustment portion so as to simultaneously penetrate the two materials that constitute the storage locking portion 123, and is a threaded portion that passes through the angle adjustment hole 124. 15 and the nut, the space between the storage locking portions 123 can be reduced. Thereby, the storage support part 13 can be easily locked at a predetermined angle. Preferably, the axis of the angle adjustment hole 124 vertically passes through the material of the storage locking portion 123 approximately at the center thereof.
格納支持部１３は、格納係止部の一部として、格納部１４を回動可能に支持するための導電性の部材であって、格納部１４を下面から支持する挟持台１３１と、格納係止部１２３に挿入できる挿入部１３２と、格納部１４を上面から支持する挟持板１３３と、を有する。 The storage support section 13 is a conductive member for rotatably supporting the storage section 14 as a part of the storage locking section, and includes a holding table 131 that supports the storage section 14 from below and a storage locking section. It has an insertion part 132 that can be inserted into the stop part 123, and a holding plate 133 that supports the storage part 14 from above.
挟持台１３１は、一部に格納部１４の一部を載置することができる平面を有する棒状の部材であって、当該面に垂直に貫通するネジ切りされた挟持孔１３Ｈを有する。 The clamping table 131 is a rod-shaped member having a flat surface on which a part of the storage section 14 can be placed, and has a threaded clamping hole 13H penetrating perpendicularly to the plane.
挿入部１３２は、挟持台１３１の端面から伸びる部材であって、その高さは格納係止部１２３の高さと略同一に設けられ、その幅は格納係止部１２３の空隙の幅と略同一か少し短く設けられる。その長さは格納係止部１２３の材の長さと略同一に設けられる。 The insertion portion 132 is a member extending from the end surface of the holding table 131, and its height is approximately the same as the height of the storage locking portion 123, and its width is approximately the same as the width of the gap of the storage locking portion 123. or slightly shorter. Its length is set to be approximately the same as the length of the material of the storage locking portion 123.
また、挿入部１３２には、角度調整孔１２４と略同一の大きさで、ネジ部１５で同時に貫入することができる孔が設けられている。この孔にネジ部１５が通った状態において、挿入部１３２の先端と延設棒本体１２１の間及び格納係止部１２３の先端と挟持台１３１の間に隙間が空くように設けられ、格納支持部１３が延設棒１２に対し角度変更できる。 In addition, the insertion portion 132 is provided with a hole that is approximately the same size as the angle adjustment hole 124 and into which the threaded portion 15 can penetrate at the same time. When the threaded part 15 passes through this hole, a gap is provided between the tip of the insertion part 132 and the extension rod main body 121 and between the tip of the storage locking part 123 and the clamping base 131, and the storage support is The angle of the portion 13 relative to the extension rod 12 can be changed.
さらに、挿入部１３２は、図４に示すように格納係止部１２３に対して少なくとも０°～９０°の回転が自在にできるように形成されており、延設棒１２と干渉しないように、挿入部１３２と干渉しうる部分には面取り、丸め加工がなされている。なお、所定の角度（蒸着源がこぼれる略直角以上）以上に回動させようとすると、挟持台１３１の干渉によって係止される。 Furthermore, as shown in FIG. 4, the insertion portion 132 is formed so as to be able to freely rotate at least 0° to 90° with respect to the storage locking portion 123, and is designed to prevent interference with the extension rod 12. A portion that may interfere with the insertion portion 132 is chamfered and rounded. In addition, if an attempt is made to rotate it beyond a predetermined angle (more than a substantially right angle at which the evaporation source spills), it will be stopped by the interference of the holding table 131.
挟持板１３３は、挟持台１３１と協働して格納部を挟持する板状部材であり、少なくとも一面に平面を有し、この面に垂直になるように挟持孔１３Ｈが設けられる。挟持台１３１及び挟持板１３３の挟持孔１３Ｈにネジ部１５が貫入固定されることで、一部の面同士が近接あるいは当接できるようにしてある。 The clamping plate 133 is a plate-like member that cooperates with the clamping table 131 to clamp the storage section, and has a flat surface on at least one surface, and a clamping hole 13H is provided perpendicular to this surface. The threaded portions 15 are inserted and fixed into the clamping holes 13H of the clamping table 131 and the clamping plate 133, so that some of the surfaces can come close to each other or come into contact with each other.
格納部１４は、蒸着粒子１Ａを格納する部分であって、実際に蒸着粒子１Ａを格納する格納容器１４１と、格納容器１４１を支持する被挟持部１４２と、を有する。 The storage unit 14 is a part that stores the deposition particles 1A, and includes a storage container 141 that actually stores the deposition particles 1A, and a sandwiched part 142 that supports the storage container 141.
格納容器１４１は縁を有する舟型の容器であり、伝熱性の高い部材により設けられる。格納容器１４１の底面には、制御部１Ｂによって温度操作がされる加熱部１４３が設けられている。 The containment vessel 141 is a boat-shaped vessel with edges, and is made of a material with high heat conductivity. A heating section 143 whose temperature is controlled by the control section 1B is provided on the bottom surface of the containment vessel 141.
被挟持部１４２は、格納容器１４１の対向する縁からそれぞれ延在して設けられる導電性の平板部材であって、挟持孔１３Ｈと同一形状の孔を有し、ネジ部１５によって両側が挟持台１３１と挟持板１３３に挟まれて支持される。
好ましくは、被挟持部１４２の長さは、挟持台１３１の載置する部分よりも長くなるように設けられ、さらに長孔が設けられていてもよい。これによって通電棒１１同士の幅や選択する通電孔の距離に制限されずに格納部１４を取り付け可能にする。
The clamped parts 142 are electrically conductive flat plate members extending from opposite edges of the containment vessel 141, and have a hole having the same shape as the clamping hole 13H, and have clamping bases on both sides by threaded parts 15. 131 and a holding plate 133.
Preferably, the length of the held portion 142 is longer than the portion on which the holding table 131 is placed, and may further include a long hole. This allows the storage portion 14 to be attached without being restricted by the width of the current-carrying rods 11 or the distance between the selected current-carrying holes.
加熱部１４３は導通することで熱が発生する抵抗であり、発生した熱によって蒸着粒子１Ａを蒸発させる。加熱部１４３は導電性の他の部材を介して通電棒１１と電気的に接続されており、流れた電圧の大きさにより発生する熱が変化する。 The heating unit 143 is a resistor that generates heat when electrically connected, and the generated heat evaporates the deposited particles 1A. The heating section 143 is electrically connected to the current-carrying rod 11 via another conductive member, and the heat generated changes depending on the magnitude of the voltage that flows therethrough.
ネジ部１５は、蒸着源１に設けられる各孔に対応して各部材を固定するための雄ネジであって、実施形態においては蝶ねじが設けられる。また、ナットと組み合わせて固定されていてもよい。 The threaded portion 15 is a male thread for fixing each member in correspondence with each hole provided in the vapor deposition source 1, and in the embodiment, a thumb screw is provided. Moreover, it may be fixed in combination with a nut.
制御部１Ｂは、通電棒１１にかかる電圧（又は電流）を制御することによって、加熱部１４３の加熱の度合を制御する。すなわち、加熱部１４３を高温にする状態と、加熱部１４３を低温にする状態と、を交互に切り替えることができるようにしてある。 The control unit 1B controls the degree of heating of the heating unit 143 by controlling the voltage (or current) applied to the current-carrying rod 11. That is, it is possible to alternately switch between a state in which the heating section 143 is set at a high temperature and a state where the heating section 143 is set at a low temperature.
容器支持部２は、底面から立設して設けられる幹部２１と、幹部から側面方向に伸びる枝部２２と、枝部２２に設けられて容器を支持する容器支持体２３と、を有する。 The container support section 2 has a trunk 21 that is provided upright from the bottom surface, a branch 22 that extends from the trunk in the side direction, and a container support 23 that is provided on the branch 22 and supports the container.
幹部２１は、下端が支持回転機構３に挿入されて立設している柱状の部材であって、所定間隔で側面を貫通する幹孔２１Ｈが設けられている。 The trunk 21 is a columnar member whose lower end is inserted into the support rotation mechanism 3 and stands upright, and is provided with trunk holes 21H passing through the side surface at predetermined intervals.
枝部２２は、図５に示すように幹部２１から水平に延在する部材であって、容器Ｂを幹部２１から離間した位置に支持する。枝部２２は、延設棒本体１２１と略同一の構造である枝部本体２２１と、延設取付部１２２と略同一の構造である枝取付部２２２と、格納係止部１２３と略同一の構造である容器係止部２２３と、を有し、容器係止部２２３は角度調整孔１２４と同様に孔を有する。 The branch portion 22 is a member extending horizontally from the trunk 21 as shown in FIG. 5, and supports the container B at a position spaced apart from the trunk 21. The branch portion 22 includes a branch main body 221 having substantially the same structure as the extension rod main body 121, a branch attachment portion 222 having substantially the same structure as the extension attachment portion 122, and a branch attachment portion 222 having approximately the same structure as the storage locking portion 123. The container locking portion 223 has a hole similar to the angle adjustment hole 124.
容器支持体２３は、容器係止部２２３に挿入できる枝挿入部２３１と、容器Ｂを支持可能な容器支持台２３２と、容器支持台２３２に設けられて容器を篏合して支持する篏合部２３３と、を有する。 The container support 23 includes a branch insertion part 231 that can be inserted into the container locking part 223, a container support stand 232 that can support the container B, and a fitting that is provided on the container support stand 232 and that fits and supports the container. 233.
枝挿入部２３１は、挿入部１３２と略同一の構造であり、角度調整部の一部として設けられる。すなわち、格納部の角度調整部と同様にして、枝挿入部２３１が容器係止部２２３を構成する２つの材の間に挿入され、図４に示すように容器支持台２３２が少なくとも０°～９０°の範囲で回転できるように設けられている。 The branch insertion section 231 has substantially the same structure as the insertion section 132, and is provided as a part of the angle adjustment section. That is, in the same way as the angle adjustment part of the storage part, the branch insertion part 231 is inserted between the two members forming the container locking part 223, and the container support base 232 is rotated at least 0° to 0° as shown in FIG. It is provided so that it can rotate within a range of 90 degrees.
容器支持台２３２は、容器係止部２２３によって係止される位置になるように回転可能であり、容器Ｂを支持する台であって、少なくとも入れ口Ｂ１を支持できる大きさの面を有する。また、篏合部２３３に連通する孔が設けられて圧力調整されていてもよい。 The container support stand 232 is rotatable to a position where it is locked by the container locking part 223, supports the container B, and has a surface large enough to support at least the opening B1. Further, a hole communicating with the mating portion 233 may be provided to adjust the pressure.
篏合部２３３は、入れ口Ｂ１をねじ込むことによって篏合できるように設けられている部分であって、好ましくは容器Ｂの蓋と略同一形状である。これにより、容器Ｂを安定して支持できるとともに、入れ口Ｂ１に蒸着粒子が付着することを防ぐ。
なお、篏合の方法はねじ込みに限られず、篏合部２３３に設けられた爪に引っ掛けて入れ口Ｂ１を係止する樹脂式篏合や、上記の爪にばねを用いるばね式篏合でもよい。
The fitting part 233 is a part provided so that it can be fitted by screwing in the opening B1, and preferably has substantially the same shape as the lid of the container B. Thereby, the container B can be stably supported, and deposition particles can be prevented from adhering to the inlet B1.
Note that the method of fitting is not limited to screwing, but may also be a resin type fitting in which the opening B1 is locked by hooking on a claw provided in the fitting part 233, or a spring type fitting in which a spring is used for the claw. .
支持回転機構３は、図６に示すように、容器支持部２を蒸着源１に対して公転させ、さらに容器支持部２を自転させるための機構であって、駆動する駆動部３１と、容器支持部２を公転させる台である回転台３２と、回転台３２の下方で固定される台である固定台３３と、容器支持部２を自転させる自転歯車３４と、を有する。
なお、図６（a）は歯車の配置を表した模式図であり、図６（ｂ）支持回転機構３の断面模式図であり、図６（ｃ）は自転歯車３４の説明図である。図面においては容器支持部２が１つだけ設けられることとしているが、複数設けられることが好ましい。
As shown in FIG. 6, the support rotation mechanism 3 is a mechanism for revolving the container support part 2 with respect to the vapor deposition source 1 and further rotating the container support part 2. It has a rotary table 32 which is a table on which the support part 2 revolves, a fixed table 33 which is a table fixed below the rotary table 32, and a rotation gear 34 which makes the container support part 2 rotate.
Note that FIG. 6(a) is a schematic diagram showing the arrangement of gears, FIG. 6(b) is a cross-sectional schematic diagram of the support rotation mechanism 3, and FIG. 6(c) is an explanatory diagram of the rotation gear 34. In the drawings, only one container support section 2 is provided, but it is preferable that a plurality of container support sections 2 are provided.
駆動部３１は、電動モータ等の回転を生じさせる固定されている駆動源であって、回転軸には駆動を伝達する駆動歯車３１１が設けられる。好ましくは、駆動部３１は、固定台３３の下方から回転軸が突出して設けられており、さらに好ましくは本体が筐体の外側に設けられていることで、蒸着装置Ｘの内部にゴミが発生しないようにしている。 The drive unit 31 is a fixed drive source that causes rotation of an electric motor or the like, and a drive gear 311 that transmits drive is provided on the rotating shaft. Preferably, the driving unit 31 is provided with a rotating shaft protruding from below the fixed base 33, and more preferably, the main body is provided outside the casing, so that dust is not generated inside the vapor deposition apparatus X. I try not to.
回転台３２は、中心がくり抜かれている回転する台であり、断面視でフランジ様の形状となるように設けられ、固定台３３の上にスペーサと軸受けによって回転可能に支持されている。くり抜かれている部分には通電棒１１が立設している。回転台本体３２１は、おり、回転台本体３２１の下方の外周面には、公転歯車３２２が設けられ、駆動部３１の動力によって回転できるようにしてある。 The rotary table 32 is a rotating table with a hollow center, provided so as to have a flange-like shape when viewed in cross section, and rotatably supported on the fixed table 33 by a spacer and a bearing. An energizing rod 11 is erected in the hollowed out portion. The rotary table main body 321 is a cage, and a revolving gear 322 is provided on the lower outer peripheral surface of the rotary table main body 321 so that it can be rotated by the power of the drive section 31.
固定台３３は、筐体内部の下面に固定されている台であって、通電棒１１や駆動部３１を貫通させるための孔部が設けられている。また、固定台３３の上に固定される、固定歯車３３１が設けられている。 The fixing base 33 is a base fixed to the lower surface inside the housing, and is provided with a hole through which the current-carrying rod 11 and the drive unit 31 pass. Further, a fixed gear 331 fixed on the fixed base 33 is provided.
自転歯車３４は、回転台３２の回転を、容器支持部２の自転に変換するための機構である。自転歯車３４は、回転台３２の回転から動力を生み出す公転伝達歯車３４１と、公転伝達歯車３４１を軸支する軸支部３４２と、公転伝達歯車３４１と協働して回転する軸支歯車３４３と、軸支歯車３４３の動力を受けて回転する不均等歯車３４４と、を有する。 The rotation gear 34 is a mechanism for converting the rotation of the rotating table 32 into rotation of the container support section 2 . The rotation gear 34 includes a revolution transmission gear 341 that generates power from the rotation of the rotary table 32, a shaft support 342 that pivotally supports the revolution transmission gear 341, and a shaft support gear 343 that rotates in cooperation with the revolution transmission gear 341. It has an uneven gear 344 that rotates by receiving the power of the shaft support gear 343.
公転伝達歯車３４１は、固定歯車３３１と同一の高さに設けられている歯車であって、中心軸で回転自由に支持されている。
軸支部３４２は、回転台３２に設けられている孔に篏合する部分であって、軸受けによって中心軸を回転自由に支持されている。
軸支歯車３４３は、公転伝達歯車３４１と協働して回転するように接続されている歯車であって、中心軸で回転自由に支持されている。
上記３つの部材は、中心軸に棒状の部材が貫通している。これにより、回転台３２が回転すると固定台３３に対する３つの部材の相対位置が変化（公転）し、公転伝達歯車３４１が固定歯車３３１によって回転する。該回転は軸支歯車３４３に伝達される。
The revolution transmission gear 341 is a gear provided at the same height as the fixed gear 331, and is rotatably supported by a central axis.
The shaft support 342 is a portion that fits into a hole provided in the rotary table 32, and supports the central shaft so as to be rotatable by a bearing.
The shaft support gear 343 is a gear connected to rotate in cooperation with the revolution transmission gear 341, and is rotatably supported by the central axis.
A rod-shaped member passes through the central axis of the above three members. As a result, when the rotary table 32 rotates, the relative positions of the three members with respect to the fixed table 33 change (revolution), and the revolution transmission gear 341 is rotated by the fixed gear 331. The rotation is transmitted to the shaft support gear 343.
不均等歯車３４４は、軸支歯車３４３によって伝達された回転によって、高速回転と低速回転を繰り返すように回転する。実施形態においては、軸支歯車３４３及び不均等歯車３４４はいずれも楕円形の歯車であり、長軸の歯と短軸の歯が噛み合うことによって等速でない回転を行うようにしている。図６（ｃ）のように、不均等歯車３４４において、長軸の延長線の近傍に設けられる歯は低速回転部３４５として機能し、短軸の延長線の近傍に設けられる歯は高速回転部３４６として機能する。
The uneven gear 344 rotates by the rotation transmitted by the shaft support gear 343 so as to repeat high-speed rotation and low-speed rotation. In the embodiment, the shaft support gear 343 and the uneven gear 344 are both elliptical gears, and the teeth on the long axis and the teeth on the short axis mesh with each other so that they rotate at a non-uniform speed. As shown in FIG. 6(c), in the uneven gear 344, the teeth provided near the extension line of the long axis function as a low-speed rotation part 345, and the teeth provided near the extension line of the short axis function as a high-speed rotation part 345. 346.
不均等歯車３４４の上には、容器支持部２を不均等歯車３４４の回転と協働して回転させる嵌め込み部３４７が設けられており、これによって容器支持部２が１の駆動部３１によって公転をしつつ等速でない自転をする。 A fitting part 347 is provided on the uneven gear 344 to rotate the container support part 2 in cooperation with the rotation of the uneven gear 344, so that the container support part 2 is rotated by the drive part 31 of 1. It rotates at a non-uniform speed while moving.
真空装置４は、蒸着装置Ｘの筐体が密閉している状態において真空引きを行う装置であって、装置の下部に設けられている。 The vacuum device 4 is a device that performs evacuation when the casing of the vapor deposition device X is hermetically sealed, and is provided at the bottom of the device.
以下、図を用いて、本発明の実施の方法について詳述する。本発明は、容器Ｂの蒸着を行う使用者によって実施される。また、以下に示す実施の方法は膜厚調整工程の一例であり、実施の方法はこれに限られず、順番は前後してもよい。 Hereinafter, a method for carrying out the present invention will be described in detail using figures. The invention is carried out by the user performing the deposition of vessel B. Further, the implementation method shown below is an example of a film thickness adjustment process, and the implementation method is not limited to this, and the order may be changed.
まず、使用者は容器Ｂを容器支持部２に取り付ける。すなわち、幹部２１に枝部２２を取り付け、容器の入れ口Ｂ１を篏合部２３３に嵌め込む。この際、角度調整工程として、それぞれの容器支持体２３を好みの角度に回転させ、容器係止部２２３によって係止することが好ましい。この際、調整工程として、使用者は枝取付部２２２によって、枝部本体２２１の軸を中心に回転させてもよい。 First, the user attaches the container B to the container support part 2. That is, the branch portion 22 is attached to the trunk 21, and the container opening B1 is fitted into the fitting portion 233. At this time, as the angle adjustment step, it is preferable to rotate each container support 23 to a desired angle and lock it with the container locking part 223. At this time, as an adjustment step, the user may rotate the branch body 221 around the axis using the branch attachment part 222.
次に、使用者は蒸着源１に蒸着粒子１Ａを配置する。すなわち、隣接する２つの通電棒１１に、延設棒１２をそれぞれ取り付け、格納部１４の被挟持部１４２の両端を格納支持部１３の挟持板１３３に挟持させる。その後、格納容器１４１の内部に蒸着粒子１Ａを格納する。この際、角度調整工程として、使用者はそれぞれの格納支持部１３を好みの角度に回転させ、格納係止部１２３によって係止する。 Next, the user places the deposition particles 1A in the deposition source 1. That is, the extension rods 12 are attached to two adjacent energizing rods 11, respectively, and both ends of the clamped portion 142 of the storage section 14 are held between the clamping plates 133 of the storage support section 13. Thereafter, the vapor deposition particles 1A are stored inside the storage container 141. At this time, as an angle adjustment step, the user rotates each storage support part 13 to a desired angle and locks it with the storage locking part 123.
次に、使用者は蒸着装置Ｘを密閉し、真空引きを行う。
十分に減圧がされたら、使用者は駆動部３１を起動させ、容器支持部２の自転及び回転を開始させる。駆動部３１は定速で運動させても自転の周期が変動するが、好ましくは間欠的に駆動させてもよく、また低速運転と高速回転を繰り返すようにしてもよい。
Next, the user seals the vapor deposition apparatus X and evacuates it.
When the pressure is sufficiently reduced, the user activates the drive section 31 to start the rotation and rotation of the container support section 2. Although the period of rotation of the drive unit 31 varies even if it is moved at a constant speed, it may preferably be driven intermittently, or may repeat low-speed operation and high-speed rotation.
次に、使用者は容器Ｂに蒸着を行う。すなわち、制御部１Ｂを用いて、加熱部１４３の温度制御を行う。
すなわち、使用者は加熱部１４３に接続している２本の通電棒１１のうち、一方を正極となるように、他方を負極となるように通電することで、加熱部１４３を起動させる。
このとき、使用者は、温度変動工程として、制御部１Ｂを用いて通電棒１１にかかる電圧を上下させることによって、前記加熱部の温度を高温にする状態と、低温にする状態とを繰り返す。
Next, the user performs vapor deposition on container B. That is, the temperature of the heating section 143 is controlled using the control section 1B.
That is, the user activates the heating section 143 by energizing one of the two energizing rods 11 connected to the heating section 143 so that it becomes a positive electrode and the other becomes a negative electrode.
At this time, the user repeats a state in which the temperature of the heating part is made high and a state in which it is made low by raising and lowering the voltage applied to the current-carrying rod 11 using the control part 1B as a temperature variation step.
所定の時間蒸着を行った後、通電棒１１への通電及び駆動部３１の動作を終了し、真空状態を解除して、蒸着装置Ｘを開放し、加飾された加飾容器Ｂ’を取り出す。 After performing vapor deposition for a predetermined time, energization of the current-carrying rod 11 and operation of the drive unit 31 are terminated, the vacuum state is released, the vapor deposition apparatus X is opened, and the decorated container B' is taken out. .
これによって、図７に示すように加飾容器Ｂ’の側面部Ｂ２と底面部Ｂ３とがまたがる領域にも段階的に色彩が変化するグラデーション領域Ｂ４を形成することができる。
さらに、同時に製造される複数の加飾容器Ｂ’からなる容器ロットＲにおいて、それぞれの加飾容器Ｂ’のグラデーション領域の色及び位置は、加飾容器Ｂ’毎に異なるように設けることができる。
すなわち、製造者が容易に、製品ごとに性状が異なる複雑な模様や色彩を呈する加飾容器を製造できる装置、また製造方法、製造される容器を提供することができる。
Thereby, as shown in FIG. 7, a gradation area B4 in which the color changes stepwise can also be formed in the area spanning the side surface B2 and the bottom surface B3 of the decorated container B'.
Furthermore, in a container lot R consisting of a plurality of decorated containers B' manufactured at the same time, the color and position of the gradation area of each decorated container B' can be provided to be different for each decorated container B'. .
That is, it is possible to provide an apparatus, a manufacturing method, and a manufactured container that allow a manufacturer to easily manufacture decorated containers exhibiting complex patterns and colors that vary in properties for each product.
なお、不均等歯車の例としては、楕円歯車以外の非円形の歯車であってよく、例えばらせん歯車やトコロイド歯車を用いてもよい。なお、低速回転部は、回転速度が０になる構成であってもよく、不均等歯車の構成要素に、一部の歯が欠けた歯車を使用してもよい。 Note that, as an example of the uneven gear, a non-circular gear other than an elliptical gear may be used, and for example, a helical gear or a tocoroid gear may be used. Note that the low-speed rotating section may have a configuration in which the rotational speed is 0, and a gear with some teeth missing may be used as a component of the uneven gear.
なお、幹部２１は、蒸着装置Xの内部であればどこに設けられていてもよく、蒸着装置Xの天面から吊り下げられていても、内周壁の側面から突出する構成でもよく、支持回転機構３の外側に取付られていてもよく、これらを組み合わせてもよい。幹部２１の支持を様々なところで行えるようにする構成により、複雑な模様の形成も容易になる。 Note that the trunk 21 may be provided anywhere inside the vapor deposition apparatus It may be attached to the outside of 3, or these may be combined. The configuration that allows the trunk 21 to be supported at various locations facilitates the formation of complex patterns.
Ｘ 蒸着装置
Ｙ 膜厚調整装置
１ 蒸着源
１１ 通電棒
１１Ｈ 通電孔
１２ 延設棒
１２１ 延設棒本体
１２２ 延設取付部
１２３ 格納係止部
１２４ 角度調整孔
１３ 格納支持部
１３１ 挟持台
１３２ 挿入部
１３３ 挟持板
１３Ｈ 挟持孔
１４ 格納部
１４１ 格納容器
１４２ 被挟持部
１４３ 加熱部
１５ ネジ部
１Ａ 蒸着粒子
１Ｂ 制御部
２ 容器支持部
２１ 幹部
２１Ｈ 幹孔
２２ 枝部
２２１ 枝部本体
２２２ 枝取付部
２２３ 容器係止部
２２Ｈ 支持孔
２３ 容器支持体
２３１ 枝挿入部
２３２ 容器支持台
２３３ 篏合部
３ 支持回転機構
３１ 駆動部
３１１ 駆動歯車
３２ 回転台
３２１ 回転台本体
３２２ 公転歯車
３３ 固定台
３３１ 固定歯車
３４ 自転歯車
３４１ 公転伝達歯車
３４２ 軸支部
３４３ 軸支歯車
３４４ 不均等歯車
３４５ 低速回転部
３４６ 高速回転部
３４７ 嵌め込み部
４ 真空装置
Ｂ 容器
Ｂ’ 加飾容器
Ｂ１ 入れ口
Ｂ２ 側面部
Ｂ３ 底面部
Ｂ４ グラデーション領域
X Vapor deposition device Y Film thickness adjustment device 1 Vapor deposition source 11 Current-carrying rod 11H Current-carrying hole 12 Extension rod 121 Extension rod main body 122 Extension mounting portion 123 Storage locking portion 124 Angle adjustment hole 13 Storage support portion 131 Holding base 132 Insertion portion 133 Clamping plate 13H Clamping hole 14 Storage part 141 Container 142 Clamped part 143 Heating part 15 Screw part 1A Vapor deposition particles 1B Control part 2 Container support part 21 Trunk 21H Trunk hole 22 Branch part 221 Branch main body 222 Branch attachment part 223 Container Locking part 22H Support hole 23 Container support 231 Branch insertion part 232 Container support stand 233 Engagement part 3 Support rotation mechanism 31 Drive part 311 Drive gear 32 Rotating table 321 Rotating table main body 322 Revolution gear 33 Fixed table 331 Fixed gear 34 Autorotation Gear 341 Revolution transmission gear 342 Axial support 343 Axial support gear 344 Uneven gear 345 Low speed rotation section 346 High speed rotation section 347 Fitting section 4 Vacuum device B Container B' Decorated container B1 Inlet B2 Side section B3 Bottom section B4 Gradation area
Claims (6)
蒸着粒子を放出する蒸着源と、蒸着される容器を支持する容器支持部と、前記容器支持部を回転させる支持回転機構と、を備える膜厚調整装置であって、
前記容器支持部は、高さ方向に伸びる幹部と、前記幹部から側方に伸びる枝部と、を有し、
前記支持回転機構は、回転駆動する駆動部と、前記駆動部から伝達された動力を受けて回転する軸支歯車と、前記軸支歯車の歯と噛み合って回転する非円形の不均等歯車と、を含み、
前記幹部は、前記不均等歯車と協働して回転するように接続され、
前記不均等歯車は、前記幹部を高速で回転させる歯である高速回転部と、前記高速回転部と比較して前記幹部を低速で回転させる歯である低速回転部と、を含み、
前記不均等歯車の回転中心から前記高速回転部までの距離は、前記不均等歯車の回転中心から前記低速回転部までの距離よりも短い膜厚調整装置。 In a vapor deposition apparatus for performing vacuum vapor deposition,
A film thickness adjustment device comprising: a vapor deposition source that emits vapor deposition particles; a container support that supports a container to be vapor deposited; and a support rotation mechanism that rotates the container support.
The container support portion has a trunk extending in the height direction and a branch extending laterally from the trunk ,
The support rotation mechanism includes a drive unit that rotates, a shaft gear that rotates in response to power transmitted from the drive unit, and a non-circular uneven gear that rotates while meshing with teeth of the shaft gear. including;
the trunk is connected for cooperative rotation with the uneven gear;
The uneven gear includes a high-speed rotation part that is teeth that rotate the trunk at a high speed, and a low-speed rotation part that is teeth that rotate the trunk at a low speed compared to the high-speed rotation part,
The distance from the rotation center of the uneven gear to the high speed rotation part is shorter than the distance from the rotation center of the uneven gear to the low speed rotation part.
前記高速回転部は、短軸の延長線の近傍に設けられ、
前記低速回転部は、長軸の延長線の近傍に設けられる請求項１に記載の膜厚調整装置。 The uneven gear is an elliptical gear,
The high-speed rotation part is provided near the extension line of the short axis ,
The film thickness adjusting device according to claim 1, wherein the low-speed rotating section is provided near an extension line of the long axis .
前記回転台の中心は、くり抜かれて設けられており、
前記中心には前記蒸着源が立設して設けられ、
前記幹部は、前記回転台の中心から離間する位置に、前記蒸着源の周囲を公転するように設けられている請求項１又は２に記載の膜厚調整装置。 The support rotation mechanism includes a rotation table and a drive unit that rotates the rotation table,
The center of the rotary table is hollowed out,
The vapor deposition source is provided upright in the center,
The film thickness adjusting device according to claim 1 or 2, wherein the trunk is provided at a position apart from the center of the rotary table so as to revolve around the vapor deposition source.
前記公転伝達歯車の回転を前記不均等歯車に伝達する軸支歯車と、を有する請求項４に記載の膜厚調整装置。 The support rotation mechanism includes a revolution transmission gear rotated by power generated by rotation of the rotary table;
The film thickness adjustment device according to claim 4, further comprising a shaft support gear that transmits the rotation of the revolution transmission gear to the uneven gear.
前記容器支持部は、高さ方向に伸びる幹部と、前記幹部から側方に伸びる枝部と、を有し、
前記支持回転機構は、回転駆動する駆動部と、前記駆動部から伝達された動力を受けて回転する軸支歯車と、前記軸支歯車の歯と噛み合って回転する非円形の不均等歯車と、を含み、
前記幹部は、前記非円形歯車と協働して回転するように接続され、
前記不均等歯車は、前記幹部を高速で回転させる歯である高速回転部と、前記高速回転部と比較して前記幹部を低速で回転させる歯である低速回転部と、を含み、
前記不均等歯車の回転中心から前記高速回転部までの距離は、前記不均等歯車の回転中心から前記低速回転部までの距離よりも短く設けられ、
前記駆動部を回転させる工程を含む容器の製造方法。 A film thickness adjustment device for performing vapor deposition on the container, comprising a vapor deposition source that emits vapor deposition particles, a container support part that supports a container to be vapor deposited, and a support rotation mechanism that rotates the container support part, A method for manufacturing a container in which vacuum evaporation is performed on the container, the method comprising:
The container support portion has a trunk extending in the height direction and a branch extending laterally from the trunk,
The support rotation mechanism includes a drive unit that rotates, a shaft gear that rotates in response to power transmitted from the drive unit, and a non-circular uneven gear that rotates while meshing with teeth of the shaft gear. including;
the trunk is connected for cooperative rotation with the non-circular gear;
The uneven gear includes a high-speed rotation part that is teeth that rotate the trunk at a high speed, and a low-speed rotation part that is teeth that rotate the trunk at a low speed compared to the high-speed rotation part,
The distance from the rotation center of the uneven gear to the high speed rotation part is set shorter than the distance from the rotation center of the uneven gear to the low speed rotation part,
A method for manufacturing a container, including a step of rotating the drive unit .
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012067359A (en) | 2010-09-24 | 2012-04-05 | Nissin Electric Co Ltd | Support apparatus of film-deposition-objective article, and film depositing apparatus |
| CN102534491A (en) | 2011-10-19 | 2012-07-04 | 深圳市三海光电技术有限公司 | Preparation device and preparation method for absorbing layer of high conversion efficiency CIGS (Copper Indium Gallium Selenium) thin film solar cell |
| CN109518153A (en) | 2018-12-07 | 2019-03-26 | 沈阳爱科斯科技有限公司 | Continuous vacuum coating device and coating system |
| KR102261207B1 (en) | 2021-03-04 | 2021-06-08 | 주식회사 한국피에스 | Method for aluminum deposition |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012067359A (en) | 2010-09-24 | 2012-04-05 | Nissin Electric Co Ltd | Support apparatus of film-deposition-objective article, and film depositing apparatus |
| CN102534491A (en) | 2011-10-19 | 2012-07-04 | 深圳市三海光电技术有限公司 | Preparation device and preparation method for absorbing layer of high conversion efficiency CIGS (Copper Indium Gallium Selenium) thin film solar cell |
| CN109518153A (en) | 2018-12-07 | 2019-03-26 | 沈阳爱科斯科技有限公司 | Continuous vacuum coating device and coating system |
| KR102261207B1 (en) | 2021-03-04 | 2021-06-08 | 주식회사 한국피에스 | Method for aluminum deposition |
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