JP7435784B2 - 分光装置、分光測定装置および分光方法 - Google Patents
分光装置、分光測定装置および分光方法 Download PDFInfo
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- JP7435784B2 JP7435784B2 JP2022536033A JP2022536033A JP7435784B2 JP 7435784 B2 JP7435784 B2 JP 7435784B2 JP 2022536033 A JP2022536033 A JP 2022536033A JP 2022536033 A JP2022536033 A JP 2022536033A JP 7435784 B2 JP7435784 B2 JP 7435784B2
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- 238000005259 measurement Methods 0.000 title claims description 33
- 238000004611 spectroscopical analysis Methods 0.000 title claims description 10
- 230000003287 optical effect Effects 0.000 claims description 104
- 230000000694 effects Effects 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 claims description 2
- 238000002189 fluorescence spectrum Methods 0.000 description 16
- 239000000126 substance Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 230000005374 Kerr effect Effects 0.000 description 3
- 230000005697 Pockels effect Effects 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- PQCCZSBUXOQGIU-UHFFFAOYSA-N [La].[Pb] Chemical compound [La].[Pb] PQCCZSBUXOQGIU-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0237—Adjustable, e.g. focussing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0278—Control or determination of height or angle information for sensors or receivers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
- G01J3/32—Investigating bands of a spectrum in sequence by a single detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1269—Electrooptic filter
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Spectrometry And Color Measurement (AREA)
Description
本発明の第1の実施の形態に係る分光装置および分光測定装置について図1~4を参照して説明する。
図1に、第1の実施の形態に係る分光測定装置10の構成を示す。分光測定装置10は、光源11と、分光装置101とを備える。分光装置101は、光学素子(以下、「第1の光学素子」という。)12と、光学素子(以下、「第2の光学素子」という。)13と、光偏向器14と、駆動電源15と、受光器16と、ピンホール17と演算部18とを備える。
図2に、本実施の形態に係る分光装置101における光偏向器14と受光器16との周囲の構成を示す。図3に、本実施の形態に係る分光方法のフローチャート図を示す。
本発明の第2の実施の形態に係る分光測定装置および分光装置について図5~図6を参照して説明する。
本発明の実施の形態に係る分光装置を用いる蛍光スペクトル計測の例を第1の実施例として説明する。
本発明の実施の形態に係る分光装置を用いる蛍光スペクトル計測の第2の実施例を説明する。
11 光源
12 第1の光学素子
13 第2の光学素子
14 光偏向器
15 駆動電源
16 受光器
17 ピンホール
18 演算部
19 記憶部
Claims (5)
- 光線を分光する分光装置であって、
前記光線を波長分散させる第1の光学素子と、
前記波長分散される光線を集光させる第2の光学素子と、
透過型であり、電気光学効果を有し、前記集光される光線の軌道を変化させる光偏向器と、
前記光偏向器に電圧を印加する駆動電源と、
前記軌道が変化した光線を所定の位置で検知する受光器と
前記電圧から前記検知された光線の波長を導出する演算部と
を備え、
前記第2の光学素子が、可変焦点レンズであって、前記集光される光線の前記光偏向器への入射角度を増加させ、波長分解能を向上させること
を特徴とする分光装置。 - 予め測定された前記波長の電圧依存性を記憶する記憶部を備え、
前記演算部が、前記電圧と、前記波長の電圧依存性とを照合して、前記検知された光線の波長を導出することを特徴とする請求項1に記載の分光装置。 - 前記光偏向器に、ニオブ酸タンタル酸カリウムを用いること
を特徴とする請求項1又は請求項2に記載の分光装置。 - 請求項1から請求項3のいずれか一項に記載の分光装置と、
光源と
を備える分光測定装置。 - 電気光学効果を有する透過型の光偏向器を用いて、光線を分光する分光方法であって、
前記光線を波長分散させるステップと、
前記波長分散される光線を集光させるステップと、
前記光偏向器に電圧を印加させて前記集光される光線の軌道を変化させるステップと、
前記軌道が変化した光線を所定の位置で検知するステップと、
前記電圧から前記検知される光線の波長を導出するステップと
を備え、
前記集光される光線の前記光偏向器への入射角度を増加させ、波長分解能を向上させること
を特徴とする分光方法。
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PCT/JP2020/027470 WO2022013963A1 (ja) | 2020-07-15 | 2020-07-15 | 分光装置、分光測定装置および分光方法 |
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JPWO2022013963A1 JPWO2022013963A1 (ja) | 2022-01-20 |
JP7435784B2 true JP7435784B2 (ja) | 2024-02-21 |
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US (1) | US20230266164A1 (ja) |
JP (1) | JP7435784B2 (ja) |
WO (1) | WO2022013963A1 (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003207394A (ja) | 2002-01-10 | 2003-07-25 | Yokogawa Electric Corp | 分光測定装置 |
US20080010019A1 (en) | 2006-07-06 | 2008-01-10 | Thomas Richard A | High speed spectrum analyzer |
JP2015104058A (ja) | 2013-11-27 | 2015-06-04 | 株式会社ニコン | 撮像装置 |
JP2016188841A (ja) | 2015-03-30 | 2016-11-04 | 株式会社東京精密 | 非接触形状測定装置及び走査レンズ収差補正方法 |
JP2016202613A (ja) | 2015-04-23 | 2016-12-08 | 国立大学法人埼玉大学 | 生体装着型小型顕微鏡および内視鏡 |
JP2017101997A (ja) | 2015-12-01 | 2017-06-08 | コニカミノルタ株式会社 | 2次元測色計、該方法および該プログラムならびに表示システム |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2402726B1 (en) * | 2007-07-31 | 2016-09-07 | Nippon Telegraph And Telephone Corporation | Spectroscope |
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2020
- 2020-07-15 US US18/005,265 patent/US20230266164A1/en active Pending
- 2020-07-15 WO PCT/JP2020/027470 patent/WO2022013963A1/ja active Application Filing
- 2020-07-15 JP JP2022536033A patent/JP7435784B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003207394A (ja) | 2002-01-10 | 2003-07-25 | Yokogawa Electric Corp | 分光測定装置 |
US20080010019A1 (en) | 2006-07-06 | 2008-01-10 | Thomas Richard A | High speed spectrum analyzer |
JP2015104058A (ja) | 2013-11-27 | 2015-06-04 | 株式会社ニコン | 撮像装置 |
JP2016188841A (ja) | 2015-03-30 | 2016-11-04 | 株式会社東京精密 | 非接触形状測定装置及び走査レンズ収差補正方法 |
JP2016202613A (ja) | 2015-04-23 | 2016-12-08 | 国立大学法人埼玉大学 | 生体装着型小型顕微鏡および内視鏡 |
JP2017101997A (ja) | 2015-12-01 | 2017-06-08 | コニカミノルタ株式会社 | 2次元測色計、該方法および該プログラムならびに表示システム |
Non-Patent Citations (1)
Title |
---|
Takashi SAKAMOTO et al.,"Reduction of beam-divergence fluctuation for KTN optical beam deflector",Applied Physics Express,2020年05月28日,Vol. 13,No. 6,062007 |
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Publication number | Publication date |
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WO2022013963A1 (ja) | 2022-01-20 |
US20230266164A1 (en) | 2023-08-24 |
JPWO2022013963A1 (ja) | 2022-01-20 |
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