JP7430812B2 - 光変調器及び関連機器 - Google Patents
光変調器及び関連機器 Download PDFInfo
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- JP7430812B2 JP7430812B2 JP2022551579A JP2022551579A JP7430812B2 JP 7430812 B2 JP7430812 B2 JP 7430812B2 JP 2022551579 A JP2022551579 A JP 2022551579A JP 2022551579 A JP2022551579 A JP 2022551579A JP 7430812 B2 JP7430812 B2 JP 7430812B2
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- 230000003287 optical effect Effects 0.000 title claims description 114
- 239000000463 material Substances 0.000 claims description 117
- 230000005693 optoelectronics Effects 0.000 claims description 45
- 239000010409 thin film Substances 0.000 claims description 18
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 11
- 239000013307 optical fiber Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 229920000620 organic polymer Polymers 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910021389 graphene Inorganic materials 0.000 claims description 4
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 3
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 3
- 229910002113 barium titanate Inorganic materials 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 17
- 238000000034 method Methods 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 239000003989 dielectric material Substances 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000004088 simulation Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
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- 238000010521 absorption reaction Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000013473 artificial intelligence Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229940119177 germanium dioxide Drugs 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0338—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect structurally associated with a photoconductive layer or having photo-refractive properties
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/501—Structural aspects
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/516—Details of coding or modulation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/20—LiNbO3, LiTaO3
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Description
本願は、参照により全体がここに組み込まれる、中国特許出願番号202010132612.1号、中国国家知識産権局に2020年2月29日に出願、名称「OPTICAL MODULATOR AND RELATED APPARATUS」の優先権を主張する。
本願は、光通信技術の分野に関し、特に、光変調器及び関連機器に関する。
前記光電材料層は、前記サブ波長導波路の表面に配置され、前記サブ波長導波路は、前記導波路層における光照射野を前記光電材料層へと拡散させるよう構成され、
前記電極は、前記光電材料層の表面に配置され、前記電極の間の結合線は、前記光電材料層が位置する平面と平行であるか、又は前記電極は、前記光電材料層の2つの側に配置され、前記電極の間の結合線は、前記光電材料層が位置する平面と交差し、
前記電極は、前記光電材料層に電気信号を印可するよう構成される。前記導波路層の材料は、シリコン、窒化シリコン、又はIII-V族材料を含む。前記光電材料層の材料は、有機高分子、タンタル酸リチウム薄膜、ニオブ酸リチウム薄膜、又はチタン酸バリウム薄膜を含む。前記電極の材料は、グラフェン、又は透明導電性酸化物を含む。
Claims (11)
- 光変調器であって、導波路層と光電材料層と電極とを含み、
前記導波路層はサブ波長導波路と非サブ波長導波路部分とを含み、前記サブ波長導波路の表面と前記非サブ波長導波路部分の表面は連続する平坦な面を形成し、
前記光電材料層は、前記サブ波長導波路の前記表面に配置され、前記サブ波長導波路は、前記非サブ波長導波路部分において前記導波路層の内部に位置する光照射野を、前記サブ波長導波路の外部に且つ前記光電材料層の内部に位置する領域へと拡散させるよう構成され、
前記電極は、前記光電材料層の表面に配置され、前記電極の間の結合線は、前記光電材料層が位置する平面と平行であるか、又は前記電極は、前記光電材料層の2つの側に配置され、前記電極の間の結合線は、前記光電材料層が位置する平面と交差し、
前記電極は、前記光電材料層に電気信号を印可するよう構成される、光変調器。 - 前記導波路層は、ビームスプリッタ及びビームコンバイナを含み、前記ビームスプリッタ及びビームコンバイナは、前記サブ波長導波路の2つの側に各々配置され、
前記サブ波長導波路は、前記ビームスプリッタにより出力される光照射野を前記光電材料層へと拡散させるよう構成され、
前記サブ波長導波路は、前記光電材料層における光照射野を前記ビームコンバイナへと拡散させるよう構成される、請求項1に記載の光変調器。 - 前記導波路層は単一の導波路であり、前記サブ波長導波路は、前記光電材料層における光照射野を前記導波路層へと拡散させるよう更に構成される、請求項1に記載の光変調器。
- 前記サブ波長導波路は、円形穴構造、ストリップ構造、又は多角形穴構造を有する、請求項1~3のいずれか一項に記載の光変調器。
- 前記サブ波長導波路は第1材料で満たされており、前記第1材料の屈折率は、前記導波路層の屈折率と異なる、請求項4に記載の光変調器。
- 前記第1材料は、空気又は二酸化シリコンである、請求項5に記載の光変調器。
- 前記導波路層の材料は、シリコン、窒化シリコン、又はIII-V族材料である、請求項1~6のいずれか一項に記載の光変調器。
- 前記光電材料層の材料は、有機高分子、タンタル酸リチウム薄膜、ニオブ酸リチウム薄膜、又はチタン酸バリウム薄膜を含む、請求項1~7のいずれか一項に記載の光変調器。
- 前記電極の材料は、グラフェン、又は透明導電性酸化物を含む、請求項1~8のいずれか一項に記載の光変調器。
- 光モジュールであって、光源と駆動機器と請求項1~9のいずれか一項に記載の光変調器とを含み、
前記光源は、入力光を生成し、前記入力光を光ファイバを通じて前記光変調器の導波路層へ送信するよう構成され、
前記駆動機器は、電気信号を生成し、前記電気信号を回路パスを通じて前記光変調器の電極へ送信するよう構成され、
前記光変調器は、前記電気信号に基づき前記入力光を変調するよう構成される、光モジュール。 - ネットワーク装置であって、波長分割多重化器/逆多重化器と主基板と請求項10に記載の光モジュールとを含み、前記光モジュールは前記主基板に配置され、
前記波長分割多重化器/逆多重化器は、前記主基板に配置され、前記波長分割多重化器/逆多重化器は、光ファイバを通じて前記光モジュールに結合され、前記波長分割多重化器/逆多重化器は、光信号の多重化/逆多重化を処理するよう構成される、ネットワーク装置。
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CN202010132612.1 | 2020-02-29 | ||
CN202010132612.1A CN113325613B (zh) | 2020-02-29 | 2020-02-29 | 一种光学调制器以及相关装置 |
PCT/CN2021/076985 WO2021169854A1 (zh) | 2020-02-29 | 2021-02-20 | 一种光学调制器以及相关装置 |
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JP2004054197A (ja) | 2002-07-23 | 2004-02-19 | Autocloning Technology:Kk | 可変特性フォトニック結晶導波路 |
JP2006178275A (ja) | 2004-12-24 | 2006-07-06 | Matsushita Electric Ind Co Ltd | 光導波路および光変調素子および通信システム |
US20100310208A1 (en) | 2009-06-08 | 2010-12-09 | Omega Optics, Inc. | Photonic crystal band-shifting device for dynamic control of light transmission |
CN110824732A (zh) | 2019-12-17 | 2020-02-21 | 华中科技大学 | 一种石墨烯电光调制器 |
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JP2792482B2 (ja) * | 1995-09-28 | 1998-09-03 | 日本電気株式会社 | 半導体マッハツェンダ変調器 |
CN100547456C (zh) * | 2008-07-29 | 2009-10-07 | 浙江大学 | 基于水平狭缝平板和光子晶体线缺陷波导的电光调制器 |
CN103064201A (zh) * | 2013-01-15 | 2013-04-24 | 泰州巨纳新能源有限公司 | 基于石墨烯的改进型Mach-Zehnder电光调制器 |
US10763290B2 (en) * | 2017-02-22 | 2020-09-01 | Elwha Llc | Lidar scanning system |
CN209117999U (zh) * | 2017-07-05 | 2019-07-16 | 浙江大学 | 一种大带宽电光调制器 |
CN109541822B (zh) * | 2018-11-26 | 2022-06-03 | 武汉邮电科学研究院有限公司 | 一种石墨烯电光调制器及其制备方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2004054197A (ja) | 2002-07-23 | 2004-02-19 | Autocloning Technology:Kk | 可変特性フォトニック結晶導波路 |
JP2006178275A (ja) | 2004-12-24 | 2006-07-06 | Matsushita Electric Ind Co Ltd | 光導波路および光変調素子および通信システム |
US20100310208A1 (en) | 2009-06-08 | 2010-12-09 | Omega Optics, Inc. | Photonic crystal band-shifting device for dynamic control of light transmission |
CN110824732A (zh) | 2019-12-17 | 2020-02-21 | 华中科技大学 | 一种石墨烯电光调制器 |
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WO2021169854A1 (zh) | 2021-09-02 |
CN113325613A (zh) | 2021-08-31 |
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