JP7383629B2 - 検査装置 - Google Patents
検査装置 Download PDFInfo
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- JP7383629B2 JP7383629B2 JP2020550951A JP2020550951A JP7383629B2 JP 7383629 B2 JP7383629 B2 JP 7383629B2 JP 2020550951 A JP2020550951 A JP 2020550951A JP 2020550951 A JP2020550951 A JP 2020550951A JP 7383629 B2 JP7383629 B2 JP 7383629B2
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- light
- transistor
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Description
図2A、図2Bは、検査装置の構成の一例を説明する図である。
図3A、図3Bは、画素アレイの一例を説明する図である。
図4A、図4Bは、画素アレイの一例を説明する図である。
図5Aは、検査装置の動作の一例を説明する図である。図5Bは、検査装置の構成の一例を説明する図である。
図6は、検査装置の構成の一例を説明する図である。
図7Aは、検査装置の一部を示す断面図である。図7Bは、検査装置の一部を示す断面図である。図7Cは、検査装置の一部の展開した様子を示す上面図である。
図8Aは、検査装置の一部を示す断面図である。図8Bは、検査装置の一部を示す断面図である。図8Cは、検査装置の一部の展開した様子を示す上面図である。
図9は、検査装置の構成の一例を説明する図である。
図10は、画素の一例を説明する図である。
図11A、図11B、図11Cは、検査装置の動作の一例を説明するタイミングチャートである。
図12は、検査装置の動作の一例を説明するフロー図である。
図13A、図13Bは、画素の一例を示す断面図である。
図14A、図14B、図14C、図14Dは、トランジスタの一例を示す断面図である。
図15は、市場イメージを説明する図である。
実施の形態では、本発明の一態様である検査装置について、図面を参照して説明する。
図10は、画素10の構成例を説明する回路図である。画素10は、光電変換素子11が設けられた撮像回路100と、発光素子12または発光素子13が設けられた表示回路130と、を有する。撮像回路は撮像装置と呼ばれる場合がある。表示回路は表示装置と呼ばれる場合がある。
撮像回路100は、光電変換素子11の他、トランジスタ101と、トランジスタ102と、トランジスタ103と、トランジスタ104と、容量素子105と、を有する。なお、容量素子105を設けない構成としてもよい。
表示回路130は、発光素子12または発光素子13の他、トランジスタ131と、トランジスタ132と、トランジスタ133と、容量素子134と、を有する。
図12は、検査装置80の動作例を説明するフローチャートである。
本実施の形態では、本発明の一態様の検査装置に適用可能な画素アレイが有する画素等について説明する。
図13Aには、画素10の断面図の一例を示す。画素10は、基板79と基板50との間に、トランジスタ101、トランジスタ132、光電変換素子11、発光素子12または発光素子13を有する。ここで、トランジスタ101及びトランジスタ132には、例えばチャネル形成領域に金属酸化物を用いたトランジスタ(以下、OSトランジスタ)を用いることができる。
図14Aに、トランジスタ101等に適用することができるOSトランジスタの詳細な構成例を示す。図14Aに示すOSトランジスタは、金属酸化物層及び導電層の積層上に絶縁層を設け、当該金属酸化物層に達する溝を当該絶縁層及び導電層に設けることでソース電極205及びドレイン電極206を形成する、セルフアライン型の構成である。
本実施の形態では、本発明の一態様の半導体装置を用いることができる市場イメージについて説明する。
まず、本発明の一態様の半導体装置を用いることができる市場イメージを図15に示す。図15において、領域701は、チャネル形成領域に酸化物半導体を有するトランジスタを適用したディスプレイ(Display)に応用可能な製品領域(OS Display)を表し、領域702は、チャネル形成領域に酸化物半導体を有するトランジスタを適用したLSI(Large Scale Integration)をアナログ(analog)に応用可能な製品領域(OS LSI analog)を表し、領域703は、チャネル形成領域に酸化物半導体を有するトランジスタを適用したLSIをデジタル(digital)に応用可能な製品領域(OS LSI digital)を表す。本発明の一態様の半導体装置は、図15に示す領域701、領域702、及び領域703の3つの領域、別言すると3つの大きな市場に好適に用いることができる。
Claims (2)
- 可撓性を有する基板上に、複数の第1の画素アレイと、複数の第2の画素アレイと、を有する検査装置であって、
前記複数の第1の画素アレイのそれぞれは、平面視において帯状の形状を有し、且つ第1の方向に長手方向を有し、
前記複数の第2の画素アレイのそれぞれは、平面視において帯状の形状を有し、且つ前記第1の方向に長手方向を有し、
平面視において、前記複数の第1の画素アレイと、前記複数の第2の画素アレイとは、前記複数の第1の画素アレイの一と前記複数の第1の画素アレイの別の一との間に、前記複数の第2の画素アレイの一が位置するように配置され、
前記複数の第1の画素アレイの各々は、光電変換素子を有し、
前記複数の第2の画素アレイの各々は、赤外光を放射する機能を有する第1の発光素子と、可視光を放射する機能を有する第2の発光素子と、を有し、
前記第1の発光素子から放射される前記赤外光と、前記第2の発光素子から放射される前記可視光と、は、青果物に照射され、
前記光電変換素子には、前記青果物に照射される前記赤外光の反射光と、前記青果物に照射される前記可視光の反射光と、が入射され、
前記光電変換素子により、第1の画像乃至第3の画像が撮像され、
前記第1の画像は、前記赤外光の前記反射光を含む光に基づく画像であり、
前記第2の画像及び前記第3の画像のそれぞれは、前記可視光の前記反射光を含む光に基づく画像であり、
前記可撓性を有する基板は、前記青果物の周囲を囲むように湾曲され、
前記基板の湾曲方向は、前記第1の方向と同じ方向である検査装置。 - 請求項1において、
前記第1の発光素子および前記第2の発光素子のそれぞれは、有機EL素子である検査装置。
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