JP7353863B2 - Substrate transfer device and substrate removal method using the same - Google Patents

Substrate transfer device and substrate removal method using the same Download PDF

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JP7353863B2
JP7353863B2 JP2019151044A JP2019151044A JP7353863B2 JP 7353863 B2 JP7353863 B2 JP 7353863B2 JP 2019151044 A JP2019151044 A JP 2019151044A JP 2019151044 A JP2019151044 A JP 2019151044A JP 7353863 B2 JP7353863 B2 JP 7353863B2
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substrate
arm
chuck
storage container
storage
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瑛一 井口
優哉 山岡
康右 内山
冠錫 朴
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Taiyo Nippon Sanso Corp
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Description

本発明は、基板搬送装置及びこれを用いた基板取り出し方法に関し、詳しくは、気相成長装置において基板を自動搬送するための基板搬送装置及びこれを用いた基板取り出し方法に関する。 The present invention relates to a substrate transport device and a method for taking out a substrate using the same, and more particularly, to a substrate transport device for automatically transporting a substrate in a vapor phase growth apparatus and a method for taking out a substrate using the same.

各種化合物半導体の薄膜を製造するための装置として、気相成長装置が知られている。薄膜の製造プロセスにおいては、気相成長装置内に、基板に対して処理を行うモジュールが複数設けられ、これらモジュール間をロボットアームと呼ばれる基板搬送装置を作動させて基板を順次搬送することにより、所定の処理が行われている。ロボットアームには、先端部に載置した基板を解放可能に保持するために、吸着機構や把持機構からなる保持手段を備えている。これにより、ロボットアームの動作を制御することで、収納カセットに収納された複数の基板を順次取り出すことが可能になっている（例えば、特許文献１参照。）。 A vapor phase growth apparatus is known as an apparatus for manufacturing thin films of various compound semiconductors. In the thin film manufacturing process, a plurality of modules are installed in a vapor phase growth apparatus to process substrates, and a substrate transfer device called a robot arm is operated to sequentially transfer the substrates between these modules. Predetermined processing is being performed. The robot arm is equipped with a holding means consisting of a suction mechanism and a gripping mechanism to releasably hold the substrate placed on the tip. This makes it possible to sequentially take out a plurality of substrates stored in a storage cassette by controlling the operation of the robot arm (see, for example, Patent Document 1).

特開２０１０－２０１５５６号公報Japanese Patent Application Publication No. 2010-201556

しかしながら、収納カセットは、一般に樹脂製であることから、基板が高密度で収納されている場合、そのうちの複数枚については、収納カセットの内壁と接触している基板端部において摩擦抵抗が大きくなることがある。このような状況においては、基板を収納カセットから取り出すのに相当の力が必要となる。そのため基板の取り出し自体が困難となり、基板を片持ちで取り出そうとすると、途中で保持位置から基板がずれたり、離脱したりする事態が生じ、基板を正確に搬送できないおそれがある。 However, since storage cassettes are generally made of resin, when boards are stored at a high density, frictional resistance increases at the ends of the boards that are in contact with the inner wall of the storage cassette. Sometimes. In such a situation, considerable force is required to remove the substrate from the storage cassette. Therefore, it becomes difficult to take out the substrate itself, and if you try to take out the substrate with a cantilever, the substrate may shift or come off from the holding position during the process, and there is a risk that the substrate cannot be conveyed accurately.

そこで本発明は、複雑な構造や動作を必要とすることなく、基板を収納容器から確実に取り出すことができる基板搬送装置及びこれを用いた基板取り出し方法を提供することを目的としている。 SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a substrate transport device that can reliably take out a substrate from a storage container without requiring complicated structure or operation, and a method for taking out a substrate using the same.

上記目的を達成するため、本発明の基板搬送装置は、収納容器に対して基板の取り出し又は収納動作を実行する基板搬送装置において、昇降動及び水平移動可能なアームと、該アーム上に円形の基板を保持する保持部とを備え、該保持部は、前記基板の中心を挟んで互いに対向する一対のチャック機構からなり、前記アームの先端部に設けられたチャック爪と、前記アームに対して水平方向に相対移動可能に配置され、前記基板を前記チャック爪との間で径方向に挟持するチャック本体とを有して形成されていることを特徴としている。 In order to achieve the above object, the substrate transfer device of the present invention includes an arm that can move up and down and move horizontally, and a circular shape on the arm. a holding part that holds the substrate; the holding part includes a pair of chuck mechanisms facing each other with the center of the substrate in between, and a chuck claw provided at the tip of the arm; The chuck body is arranged so as to be relatively movable in the horizontal direction and clamps the substrate in the radial direction between the chuck claws.

また、前記チャック爪及び前記チャック本体は、挟持動作の実行時に前記基板をガイドして該基板の位置決めが可能な円弧当接面をそれぞれ有して形成されていることを特徴としている。 Further, the chuck claws and the chuck body are each formed to have arcuate contact surfaces that can guide and position the substrate during a clamping operation.

さらに、本発明の基板取り出し方法は、前記基板搬送装置を用い、前記基板の円周に対応させて湾曲した一対の側壁を備え、該側壁の内面に上下一定間隔で凸条を設けることにより、該凸条間に前記基板を装填する溝を有し、前記凸条は、前記基板が手前側から奥側に向かって押し込まれている収納位置では、奥行き方向のテーパ面が前記基板の端部に押圧されて撓むことで弾性力を蓄え、押し込みが解除された取り出し位置では、蓄えられた前記弾性力が解放されて原形状に復帰するように形成された収納容器から前記基板を取り出す方法であって、設定位置に移動した前記アームを前進させることにより、前記チャック爪が前記収納容器の手前側から奥側に向かって前記収納位置にある前記基板の下面を通過する段階と、前記アームを上昇させることにより、該アームの上面が前記基板の下面に対して接近する段階と、前記アームを後退させることにより、前記チャック爪を前記基板の奥端部に係合させ、該係合状態を保って前記基板を前記収納位置から前記取り出し位置に移動する段階と、前記チャック機構を動作して前記チャック爪と前記チャック本体とにより前記基板を径方向に挟持する段階と、前記基板を前記チャック爪と前記チャック本体とで挟持した状態で、前記アームを後退させることにより、前記基板を前記収納容器から取り出す段階とを順に行うことを特徴としている。 Furthermore, the method for taking out a substrate of the present invention uses the substrate transport device, includes a pair of side walls curved to correspond to the circumference of the substrate, and provides protrusions on the inner surface of the side walls at regular intervals above and below. A groove for loading the substrate is provided between the protruding stripes, and the tapered surface in the depth direction of the protruding strip is formed at the end of the substrate in the storage position where the substrate is pushed from the front side toward the back side. A method for taking out the substrate from a storage container formed such that elastic force is accumulated by bending when pressed by the substrate, and when the pushing is released, the accumulated elastic force is released and the substrate returns to its original shape. the step of moving the arm that has been moved to the set position forward so that the chuck claw passes the lower surface of the substrate that is in the storage position from the front side to the back side of the storage container; by raising the upper surface of the arm to approach the lower surface of the substrate; and by retracting the arm, the chuck claw is engaged with the rear end of the substrate, and the engaged state is reached. moving the substrate from the storage position to the take-out position while maintaining the same; operating the chuck mechanism to radially clamp the substrate between the chuck claws and the chuck body; The present invention is characterized in that the steps of taking out the substrate from the storage container by retracting the arm while being held between the chuck claw and the chuck body are sequentially performed.

本発明によれば、基板搬送装置のアーム上に備えたチャック機構が、チャック爪とチャック本体との間に位置される基板を径方向に挟持するので、収納容器から基板を取り出す際に、アーム上において基板がずれたり、離脱したりする不具合を容易に防止することができる。しかも、基板の表面と周囲との接触を断ち、基板が汚染されるおそれはないので、高品質の製品を低コストで生産可能な基板搬送装置の構造及び基板取り出し方法が実現される。 According to the present invention, the chuck mechanism provided on the arm of the substrate transfer device radially clamps the substrate located between the chuck claw and the chuck body, so that when the substrate is taken out from the storage container, the chuck mechanism provided on the arm of the substrate transfer device Problems such as the substrate shifting or coming off can be easily prevented. Moreover, since the contact between the surface of the substrate and its surroundings is cut off and there is no risk of contamination of the substrate, a structure of a substrate transfer device and a method for taking out the substrate that can produce high-quality products at low cost are realized.

とりわけ、多段状に収納された基板を順次取り出す際には、偏りなく一定の力を付与すことが求められるが、本発明では、チャック機構による挟持前の段階において、収納位置に弾性的に固定されている基板にチャック爪を係合させ、この状態を保って基板を取り出し位置に移動するので、簡単な動作で収納容器の凸条に蓄えられた弾性力を解放し、これにより、基板と収納容器との摩擦抵抗をなくすことが可能となる。すなわち、一定の力を付与して基板を取り出すという求めに確実に応えることができ、その上、過剰な押し付けなどチャック機構の動作に起因する不具合をもなくすことができるので、基板搬送装置の安定化に寄与するものである。 In particular, when sequentially taking out substrates stored in multiple stages, it is required to apply a constant force without bias. By engaging the chuck claw with the substrate being held, and moving the substrate to the take-out position while maintaining this state, the elastic force stored in the protrusions of the storage container is released with a simple operation, thereby causing the substrate to It becomes possible to eliminate frictional resistance with the storage container. In other words, it is possible to reliably respond to the request to take out the substrate by applying a constant force, and in addition, it is possible to eliminate problems caused by the operation of the chuck mechanism, such as excessive pressing, which improves the stability of the substrate transfer device. This contributes to the

本発明の一形態例を示す基板搬送装置の平面図である。FIG. 1 is a plan view of a substrate transport device showing one embodiment of the present invention. 図１のＩＩ－ＩＩ断面図である。2 is a sectional view taken along line II-II in FIG. 1. FIG. 同じく正面図である。It is also a front view. 同じく設定位置に移動したアームを示す図である。It is a figure showing the arm which similarly moved to a setting position. 同じくアームを前進させてチャック爪が基板の下面を通過する段階を示す図である。FIG. 6 is a diagram showing a stage in which the arm is advanced and the chuck claws pass the lower surface of the substrate. 同じくチャック爪を収納容器の奥側に移動する段階を示す図である。FIG. 6 is a diagram showing a stage in which the chuck claws are similarly moved to the back side of the storage container. 同じくアームを上昇させて基板の下面に接近する段階を示す図である。FIG. 6 is a diagram showing the step of raising the arm to approach the lower surface of the substrate. 同じくアームを後退させて基板を収納位置から取り出し位置に移動する段階を示す図である。FIG. 6 is a diagram illustrating a step of moving the substrate from the storage position to the take-out position by retracting the arm. 同じくチャック機構を動作して基板を挟持する段階を示す図である。FIG. 7 is a diagram illustrating a step in which the chuck mechanism is operated to clamp the substrate. 同じくアームを後退させて基板を収納容器から取り出す段階を示す図である。FIG. 6 is a diagram illustrating the step of retracting the arm and taking out the substrate from the storage container.

図１乃至図１０は、本発明の基板搬送装置の一形態例を示すものである。基板搬送装置１１は、半導体薄膜を成膜する気相成長装置の一要素であって、搬送対象である基板を載置するサセプタと、基板を収納する収納容器（収納カセット）との間に介在され、図１乃至図３に示すように、駆動装置の駆動によって昇降動及び水平移動可能なアーム１２と、該アーム１２上に円形の基板１３を保持する保持部であるチャック機構１４とを備え、制御部からの動作指令を受けて、チャック機構１４の挟持動作や、収納容器に対して未処理の基板１３の取り出し又は成膜がなされた処理済の基板１３の収納動作を実行する。 FIGS. 1 to 10 show an example of a form of a substrate transfer device of the present invention. The substrate transfer device 11 is an element of a vapor phase growth device for forming a semiconductor thin film, and is interposed between a susceptor on which a substrate to be transferred is placed and a storage container (storage cassette) in which the substrate is stored. As shown in FIGS. 1 to 3, it includes an arm 12 that can be moved up and down and horizontally by driving a drive device, and a chuck mechanism 14 that is a holding section that holds a circular substrate 13 on the arm 12. In response to an operation command from the control unit, the chuck mechanism 14 performs a clamping operation, takes out an unprocessed substrate 13 from a storage container, or stores a processed substrate 13 on which a film has been formed.

チャック機構１４は、例えば、厚さ１．０ｍｍで直径が１５２．４ｍｍ（６インチ）の基板１３の中心を挟んで互いに対向する一対のチャック爪１５とチャック本体１６とからなり、機械的な作用で基板１３を固定又は解除可能になっている。チャック爪１５は、基板１３の円周に対応する円弧当接面１５ａを有した小片であって、アーム１２の先端上面に設けられている。一方、チャック本体１６は、三股のフォーク状に形成され、先端部に基板１３の円周に対応する円弧当接面１６ａを有しており、基端部に結合されたシリンダ（図示せず）の伸縮動作により、アーム１２に対して水平前後方向に相対移動可能に、つまり、チャック本体１６がチャック爪１５に対して接近又は離間可能に配置されている。これにより、チャック機構１４を動作してチャック爪１５及びチャック本体１６間で基板１３を径方向に挟持すると、基板１３がガイドされるとともに両円弧当接面１５ａ，１６ａが基板１３の両端部にそれぞれ密着し、アーム１２に対して基板１３の位置が安定的に確定した状態となる。 The chuck mechanism 14 consists of a pair of chuck claws 15 and a chuck body 16 that face each other across the center of the substrate 13 with a thickness of 1.0 mm and a diameter of 152.4 mm (6 inches), for example, and has a mechanical action. The board 13 can be fixed or released with the . The chuck claw 15 is a small piece having an arcuate contact surface 15a corresponding to the circumference of the substrate 13, and is provided on the top surface of the tip of the arm 12. On the other hand, the chuck main body 16 is formed in the shape of a three-pronged fork, and has an arcuate contact surface 16a corresponding to the circumference of the substrate 13 at the distal end, and a cylinder (not shown) coupled to the base end. The chuck main body 16 is disposed so as to be movable relative to the arm 12 in the horizontal back and forth direction by the expansion and contraction operations, that is, the chuck body 16 can be moved toward or away from the chuck claws 15. As a result, when the chuck mechanism 14 is operated to sandwich the substrate 13 in the radial direction between the chuck jaws 15 and the chuck body 16, the substrate 13 is guided and both arc contact surfaces 15a, 16a are attached to both ends of the substrate 13. They are in close contact with each other, and the position of the substrate 13 relative to the arm 12 is stably determined.

このように形成された基板搬送装置１１は、制御プログラムに基づいて収納容器から基板１３を取り出し、又は収納容器に基板１３を収納するための自動運転が行われる。 The substrate transport device 11 formed in this manner is automatically operated to take out the substrate 13 from the storage container or store the substrate 13 in the storage container based on a control program.

図４乃至図１０は、基板搬送装置１１を用いた基板取り出し方法の各工程を示している。収納容器１７は、工業的に製造された市販品であって、基板１３を振動や衝撃から保護する緩衝性を備えており、例えば、ポリプロピレン樹脂などの可撓性と保形剛性とを有する素材からなる。また、複数の基板１３を上下多段状に収納可能な程度の大きさで、高さ、幅及び奥行きの各寸法が設定され、幅方向の両側壁１７ａには基板１３の円周に対応して湾曲させることで、基板１３の出し入れ口のある手前側（図４において左側）の幅寸法に対し、奥側（図４において右側）の幅寸法が小さい平面視略ハ字状の収納空間が形成されている。 4 to 10 show each step of a method for taking out a substrate using the substrate transport device 11. The storage container 17 is an industrially manufactured commercial product that has cushioning properties to protect the substrate 13 from vibrations and shocks, and is made of a material having flexibility and shape-retaining rigidity, such as polypropylene resin. Consisting of Further, each dimension of height, width, and depth is set such that a plurality of substrates 13 can be stored in multiple stages above and below, and on both side walls 17a in the width direction, there are walls 17a corresponding to the circumference of the substrates 13. By curving, a substantially V-shaped storage space in plan view is formed, where the width on the back side (on the right side in FIG. 4) is smaller than the width on the front side (on the left side in FIG. 4) where the board 13 is inserted and taken out. has been done.

前記側壁１７ａの内面には、上下一定間隔で凸条１７ｂを設けることにより、該凸条１７ｂ間に基板１３を装填する溝１７ｃを有している。凸条１７ｂは、基板１３が収納容器１７の手前側から奥側に向かって押し込まれている収納位置（図４）では、奥行き方向のテーパ面１７ｄが、言い換えると、手前側から奥側に向かって狭まった溝１７ｃ部分の形成面が基板１３の端部に押圧されて撓むことで弾性力を蓄え、押し込みが解除された取り出し位置では、蓄えられた弾性力が解放されて原形状に復帰するように形成されている。 The inner surface of the side wall 17a has grooves 17c in which the substrate 13 is loaded between the protrusions 17b by providing protrusions 17b at regular intervals vertically. In the storage position (FIG. 4) where the board 13 is pushed from the front side toward the back side of the storage container 17, the protruding strip 17b has a tapered surface 17d in the depth direction, in other words, the tapered surface 17d in the depth direction extends from the front side toward the back side. The formed surface of the groove 17c, which is narrowed by the pressure, is pressed against the edge of the substrate 13 and bent, thereby accumulating elastic force, and at the removal position where the push is released, the accumulated elastic force is released and returns to the original shape. It is formed to do so.

基板１３を収納容器１７から取り出すときには、まず、図４に示すように、収納位置にある最下段の基板１３に対応した設定位置にアーム１２を移動させる。次いで、図５に示すように、アーム１２を水平方向に前進させることにより、チャック爪１５を収納容器１７の手前側から奥側に向かって基板１３の下面を通過させる。これにより、図６に示すように、チャック爪１５を基板１３の奥端部よりも奥側に位置させる。次いで、図７に示すように、アーム１２を垂直方向に上昇させることにより、該アーム１２の上面を基板１３の下面に接近させる。この接近状態では、チャック爪１５は、その上端の高さ位置が基板１３に対して有効な掛かり代を確保しつつ、基板１３の上面から飛び出さない低位置に保持されている。 When taking out the substrate 13 from the storage container 17, first, as shown in FIG. 4, the arm 12 is moved to a setting position corresponding to the lowest substrate 13 in the storage position. Next, as shown in FIG. 5, by moving the arm 12 forward in the horizontal direction, the chuck claw 15 is caused to pass through the lower surface of the substrate 13 from the front side to the back side of the storage container 17. Thereby, as shown in FIG. 6, the chuck claws 15 are positioned further back than the inner end of the substrate 13. Next, as shown in FIG. 7, the upper surface of the arm 12 is brought closer to the lower surface of the substrate 13 by raising the arm 12 in the vertical direction. In this approach state, the chuck claw 15 is held at a low position where the upper end of the chuck claw 15 does not protrude from the upper surface of the substrate 13 while ensuring an effective engagement with the substrate 13 .

次いで、図８に示すように、アーム１２を水平方向に後退させることにより、チャック爪１５の円弧当接面１５ａを基板１３の奥端部に係合させ、該係合状態を保って基板１３を収納位置から取り出し位置に移動させる。すなわち、凸条１７ｂ間に弾性的に固定された基板１３は、その端部がテーパ面１７ｄから離反することにより、弾性力から解放される位置まで溝１７ｃ内を奥側から手前側に、例えば、５ｍｍ移動される。次いで、図９に示すように、チャック機構１４のチャック本体１６を前進させてチャック爪１５及びチャック本体１６間で基板１３を径方向に挟持し、該基板１３を収納容器１７から取り出し可能な安定状態に保持する。ここで、アーム１２及び基板１３間の上下方向の隙間は、挟持動作後も変化することなく維持されている。最後に、図１０に示すように、基板１３をチャック爪１５とチャック本体１６とで挟持した状態で、アーム１２を水平方向に後退させることにより、基板１３が収納容器１７から取り出され、次工程に引き渡される。こうして、収納位置にある他の基板１３についても、下段から順に同様の手順で取り出し動作が行われる。 Next, as shown in FIG. 8, by retracting the arm 12 in the horizontal direction, the arcuate contact surface 15a of the chuck claw 15 is engaged with the back end of the substrate 13, and while maintaining this engaged state, the substrate 13 is from the storage position to the removal position. That is, the substrate 13 elastically fixed between the protrusions 17b moves in the groove 17c from the back side to the front side, for example, until the end part of the substrate 13 separates from the tapered surface 17d and is released from the elastic force. , is moved 5mm. Next, as shown in FIG. 9, the chuck body 16 of the chuck mechanism 14 is moved forward to sandwich the substrate 13 in the radial direction between the chuck claws 15 and the chuck body 16, so that the substrate 13 can be stably removed from the storage container 17. hold in state. Here, the vertical gap between the arm 12 and the substrate 13 is maintained without changing even after the clamping operation. Finally, as shown in FIG. 10, by retracting the arm 12 in the horizontal direction while holding the substrate 13 between the chuck claws 15 and the chuck body 16, the substrate 13 is taken out from the storage container 17, and the next process is carried out. handed over to. In this way, the removal operation is performed for the other boards 13 in the storage position in the same order starting from the lower stage.

このように、基板搬送装置１１のアーム１２上に備えたチャック機構１４が、チャック爪１５とチャック本体１６との間に位置される基板１３を径方向に挟持するので、収納容器１７から基板１３を取り出す際に、アーム１２上において基板１３がずれたり、離脱したりする不具合を容易に防止することができる。しかも、基板１３の表面と周囲との接触を断ち、基板１３が汚染されるおそれはないので、高品質の製品を低コストで生産可能な基板搬送装置１１の構造及び基板取り出し方法が実現される。 In this way, the chuck mechanism 14 provided on the arm 12 of the substrate transfer device 11 radially clamps the substrate 13 located between the chuck claws 15 and the chuck body 16, so that the substrate 13 is removed from the storage container 17. When the substrate 13 is taken out, problems such as the substrate 13 shifting or coming off the arm 12 can be easily prevented. Moreover, since contact between the surface of the substrate 13 and its surroundings is cut off, and there is no risk of contamination of the substrate 13, a structure of the substrate transfer device 11 and a method for taking out the substrate that can produce high-quality products at low cost are realized. .

とりわけ、多段状に収納された基板１３を順次取り出す際には、偏りなく一定の力を付与すことが求められるが、本発明では、チャック機構１４による挟持前の段階において、収納位置に弾性的に固定されている基板１３にチャック爪１５を係合させ、この状態を保って基板１３を取り出し位置に移動するので、簡単な動作で収納容器１７の凸条１７ｂに蓄えられた弾性力を解放し、これにより、基板１３と収納容器１７との摩擦抵抗をなくすことが可能となる。すなわち、一定の力を付与して基板１３を取り出すという求めに確実に応えることができ、その上、過剰な押し付けなどチャック機構１４の動作に起因する不具合をもなくすことができるので、基板搬送装置１１の安定化に寄与するものである。 In particular, when sequentially taking out the substrates 13 stored in multiple stages, it is required to apply a constant force without bias. Since the chuck claw 15 is engaged with the substrate 13 fixed to the substrate 13 and the substrate 13 is moved to the take-out position while maintaining this state, the elastic force stored in the protrusion 17b of the storage container 17 is released with a simple operation. However, this makes it possible to eliminate the frictional resistance between the substrate 13 and the storage container 17. In other words, it is possible to reliably meet the request to take out the substrate 13 by applying a constant force, and furthermore, it is possible to eliminate problems caused by the operation of the chuck mechanism 14, such as excessive pressing. This contributes to the stabilization of 11.

また、チャック爪１５及びチャック本体１６が円弧当接面１５ａ，１６ａを有して形成され、挟持動作の実行時に基板１３をガイドして基板１３の位置決めを行うので、基板搬送における位置精度の向上を図ることができる。さらに、基板１３を取り出し位置に移動する前段階において、チャック爪１５の上端の高さ位置が基板１３の上面から飛び出さない低位置に保持されるので、チャック爪１５がアーム１２の円滑な移動を妨げるといった不都合はなく、基板１３の取り出し動作をより安定した状態で、より短時間で行うことができる。 In addition, the chuck jaws 15 and the chuck body 16 are formed with arcuate contact surfaces 15a, 16a, and guide the substrate 13 to position the substrate 13 during the clamping operation, thereby improving positional accuracy during substrate transfer. can be achieved. Furthermore, before moving the substrate 13 to the take-out position, the height position of the upper end of the chuck claw 15 is held at a low position that does not protrude from the upper surface of the substrate 13, so that the chuck claw 15 can smoothly move the arm 12. There is no inconvenience such as interfering with the process, and the operation of taking out the substrate 13 can be performed in a more stable state and in a shorter time.

なお、本発明は、前記形態例に限定されるものではなく、基板搬送は、未処理の基板の取り出しのみならず、成膜がなされた処理済の基板の収納についても行うことができる。また、チャック機構は、基板を径方向に挟持可能な機能を備えていればよく、基板の大きさや厚みなどの条件に応じてチャック爪やチャック本体の形状を適宜に変更することができる。さらに、収納容器については、種々のものが採用でき、基板の収納枚数を増大して、搬送効率を向上させることができる。 Note that the present invention is not limited to the above-mentioned embodiment, and substrate transportation can be performed not only for taking out unprocessed substrates but also for storing processed substrates on which a film has been formed. Moreover, the chuck mechanism only needs to have a function of being able to clamp the substrate in the radial direction, and the shapes of the chuck claws and the chuck body can be changed as appropriate depending on conditions such as the size and thickness of the substrate. Furthermore, various types of storage containers can be used, and the number of substrates stored can be increased to improve transport efficiency.

１１…基板搬送装置、１２…アーム、１３…基板、１４…チャック機構、１５…チャック爪、１５ａ…円弧当接面、１６…チャック本体、１６ａ…円弧当接面、１７…収納容器、１７ａ…側壁、１７ｂ…凸条、１７ｃ…溝、１７ｄ…テーパ面 DESCRIPTION OF SYMBOLS 11...Substrate transfer device, 12...Arm, 13...Substrate, 14...Chuck mechanism, 15...Chuck claw, 15a...Circular contact surface, 16...Chuck body, 16a...Circular contact surface, 17...Storage container, 17a... Side wall, 17b...Protruding strip, 17c...Groove, 17d...Tapered surface

Claims (2)

収納容器に対して基板の取り出し又は収納動作を実行する基板搬送装置を用いて、前記収納容器から前記基板を取り出す方法において、
前記基板搬送装置は、昇降動及び水平移動可能なアームと、該アーム上に円形の基板を保持する保持部とを備え、該保持部は、前記基板の中心を挟んで互いに対向する一対のチャック機構からなり、前記アームの先端部に設けられたチャック爪と、前記アームに対して水平方向に相対移動可能に配置され、前記基板を前記チャック爪との間で径方向に挟持するチャック本体とを有して形成され、
前記収納容器は、前記基板の円周に対応させて湾曲した一対の側壁を備え、該側壁の内面に上下一定間隔で凸条を設けることにより、該凸条間に前記基板を装填する溝を有し、前記凸条は、前記基板が手前側から奥側に向かって押し込まれている収納位置では、奥行き方向のテーパ面が前記基板の端部に押圧されて撓むことで弾性力を蓄え、押し込みが解除された取り出し位置では、蓄えられた前記弾性力が解放されて原形状に復帰するように形成され、
設定位置に移動した前記アームを前進させることにより、前記チャック爪が前記収納容器の手前側から奥側に向かって前記収納位置にある前記基板の下面を通過する段階と、
前記アームを上昇させることにより、該アームの上面が前記基板の下面に対して接近する段階と、
前記アームを後退させることにより、前記チャック爪を前記基板の奥端部に係合させ、該係合状態を保って前記基板を前記収納位置から前記取り出し位置に移動する段階と、
前記チャック機構を動作して前記チャック爪と前記チャック本体とにより前記基板を径方向に挟持する段階と、
前記基板を前記チャック爪と前記チャック本体とで挟持した状態で、前記アームを後退させることにより、前記基板を前記収納容器から取り出す段階とを順に行うことを特徴とする基板取り出し方法。 A method for taking out the substrate from the storage container using a substrate transport device that performs a removal or storage operation of the substrate with respect to the storage container ,
The substrate transfer device includes an arm that can move vertically and horizontally, and a holding section that holds a circular substrate on the arm, and the holding section includes a pair of chucks facing each other with the center of the substrate in between. The chuck body includes a chuck claw provided at the tip of the arm, and a chuck body that is arranged to be movable relative to the arm in a horizontal direction and clamps the substrate in the radial direction between the chuck claw and the chuck claw. formed with
The storage container includes a pair of side walls curved to correspond to the circumference of the substrate, and by providing protrusions on the inner surface of the side walls at regular intervals above and below, a groove for loading the substrate is formed between the protrusions. In the storage position where the board is pushed from the front side toward the back side, the convex strip stores elastic force as the tapered surface in the depth direction is pressed against the end of the board and flexes. , at the take-out position where the push-in is released, the stored elastic force is released and it returns to its original shape;
moving the arm moved to the set position forward so that the chuck claw passes the lower surface of the substrate in the storage position from the front side to the back side of the storage container;
raising the arm so that the upper surface of the arm approaches the lower surface of the substrate;
retracting the arm to engage the chuck claw with the rear end of the substrate, and moving the substrate from the storage position to the take-out position while maintaining the engaged state;
operating the chuck mechanism to radially clamp the substrate between the chuck claws and the chuck body;
A method for taking out a substrate, comprising sequentially performing the step of taking out the substrate from the storage container by retracting the arm while holding the substrate between the chuck claw and the chuck body. 収納容器と、前記収納容器に対して基板の取り出し又は収納動作を実行する基板搬送装置とを備えた気相成長装置において、 A vapor phase growth apparatus comprising a storage container and a substrate transfer device that performs a substrate removal or storage operation with respect to the storage container,
前記基板搬送装置は、昇降動及び水平移動可能なアームと、該アーム上に円形の基板を保持する保持部とを備え、該保持部は、前記基板の中心を挟んで互いに対向する一対のチャック機構からなり、前記アームの先端部に設けられたチャック爪と、前記アームに対して水平方向に相対移動可能に配置され、前記基板を前記チャック爪との間で径方向に挟持するチャック本体とを有して形成され、 The substrate transfer device includes an arm that can move vertically and horizontally, and a holding section that holds a circular substrate on the arm, and the holding section includes a pair of chucks facing each other with the center of the substrate in between. The chuck body includes a chuck claw provided at the tip of the arm, and a chuck body that is arranged to be movable relative to the arm in a horizontal direction and clamps the substrate in the radial direction between the chuck claw and the chuck claw. formed with
前記収納容器は、前記基板の円周に対応させて湾曲した一対の側壁を備え、該側壁の内面に上下一定間隔で凸条を設けることにより、該凸条間に前記基板を装填する溝を有し、前記凸条は、前記基板が手前側から奥側に向かって押し込まれている収納位置では、奥行き方向のテーパ面が前記基板の端部に押圧されて撓むことで弾性力を蓄え、押し込みが解除された取り出し位置では、蓄えられた前記弾性力が解放されて原形状に復帰するように形成されていることを特徴とする気相成長装置。 The storage container includes a pair of side walls curved to correspond to the circumference of the substrate, and by providing protrusions on the inner surface of the side walls at regular intervals above and below, a groove for loading the substrate is formed between the protrusions. In the storage position where the board is pushed from the front side toward the back side, the convex strip stores elastic force as the tapered surface in the depth direction is pressed against the end of the board and flexes. . A vapor phase growth apparatus, characterized in that, at a take-out position where pushing is released, the stored elastic force is released and the device returns to its original shape.
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