JP7340010B2 - 基板搬送ロボット及び基板搬送方法 - Google Patents
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- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
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Description
次に、基板処理システム100の基板搬送ロボット10の動作例を説明する。
上記実施の形態においては、ウェハWが予め定める位置に位置するようにアライナ50がウェハWを移動させたがこれに限られるものではない。これに代えて、ウェハWに形成されたノッチの位置やオリフラの位置を位置検出部53が検出して、その検出結果をロボット制御部41に通知してもよい。そして、基板載置部12a上にウェハWが所定の回転位置及び水平方向の位置で載置されるように、ロボット制御部41が検出結果に基づいて保持部51上のウェハWを取り上げるときのハンド12の方向、及び水平方向の位置を調整し、ウェハWを取り上げてもよい。
L1 第1下方位置
L2 第1中間位置
L3 基板取上位置
L4 第1上方位置
10 基板搬送ロボット
11 ロボットアーム
12 ハンド
12a 基板載置部
20 ロボットアーム駆動機構
22 モータ
23 駆動力伝達部
31 基台
41 ロボット制御部
Claims (8)
- 基台と、
基板を載置する基板載置部を有するハンドと、
基端部が前記基台と連結され、先端部が前記ハンドと連結され、複数の関節を含む多関節構造のロボットアームと、
水平駆動機構と、上下駆動機構とを含むロボットアーム駆動機構であって、前記水平駆動機構は、第1駆動源と、前記第1駆動源の駆動力を前記ロボットアームの前記関節に伝達して該関節を変位させる第1駆動力伝達部とを含み、前記上下駆動機構は、第2駆動源と、前記第2駆動源の駆動力により前記ハンド及び前記ロボットアームを昇降させる第2駆動力伝達部と、を含むロボットアーム駆動機構と、
前記ハンドが目標位置において目標姿勢をとるように前記第1駆動源及び前記第2駆動源の動作を制御するロボット制御部と、を備え、
前記ロボット制御部は、前記ハンドが前記基板を取り上げる位置である第1目標位置の下方の第1下方位置から前記第1目標位置の上方の第1上方位置まで前記ハンドを上昇させる動作と、前記第1下方位置から該第1下方位置と前記第1目標位置との間の第1中間位置までの第1区間において複数の前記関節のうち少なくとも1の前記関節を一方向に変位させる動作とを並行して行わせる、基板搬送ロボット。 - 前記ロボット制御部は、前記第1区間において各前記関節を一方向に変位させる、請求項1に記載の基板搬送ロボット。
- 前記基板搬送ロボットは、アライナに保持された前記基板をステージに移送し、
前記第1目標位置は、前記アライナに保持された前記基板を取り上げる位置である、請求項1又は2に記載の基板搬送ロボット。 - 前記第1駆動力伝達部及び第2駆動力伝達部は、それぞれ前記駆動力を前記関節に伝達するギア、歯付ベルト及びチェーンの少なくとも何れかを含む、請求項1又は2に記載の基板搬送ロボット。
- 基台と、
基板を載置する基板載置部を有するハンドと、
基端部が前記基台と連結され、先端部が前記ハンドと連結され、複数の関節を含む多関節構造のロボットアームと、
水平駆動機構と、上下駆動機構とを含むロボットアーム駆動機構であって、前記水平駆動機構は、第1駆動源と、前記第1駆動源の駆動力を前記ロボットアームの前記関節に伝達して該関節を変位させる第1駆動力伝達部とを含み、前記上下駆動機構は、第2駆動源と、前記第2駆動源の駆動力により前記ハンド及び前記ロボットアームを昇降させる第2駆動力伝達部と、を含むロボットアーム駆動機構と、
前記ハンドが目標位置において目標姿勢をとるように前記第1駆動源及び前記第2駆動源の動作を制御するロボット制御部と、を備え、
前記ロボット制御部は、前記ハンドが前記基板をステージに置く位置である第2目標位置の上方の第2上方位置から前記第2目標位置の下方の第2下方位置まで前記ハンドを下降させる動作と、前記第2上方位置から該第2上方位置と前記第2目標位置との間の第2中間位置までの第2区間において複数の前記関節のうち少なくとも1の前記関節を一方向に変位させる動作とを並行して行わせる、基板搬送ロボット。 - 前記ロボット制御部は、前記第2区間において各前記関節を一方向に変位させる、請求項5に記載の基板搬送ロボット。
- 前記第1駆動力伝達部及び第2駆動力伝達部は、それぞれ前記駆動力を前記関節に伝達するギア、歯付ベルト及びチェーンの少なくとも何れかを含む、請求項5又は6に記載の基板搬送ロボット。
- 基台と、
基板を載置する基板載置部を有するハンドと、
基端部が前記基台と連結され、先端部が前記ハンドと連結され、複数の関節を含む多関節構造のロボットアームと、
水平駆動機構と、上下駆動機構とを含むロボットアーム駆動機構であって、前記水平駆動機構は、第1駆動源と、前記第1駆動源の駆動力を前記ロボットアームの前記関節に伝達して該関節を変位させる第1駆動力伝達部とを含み、前記上下駆動機構は、第2駆動源と、前記第2駆動源の駆動力により前記ハンド及び前記ロボットアームを昇降させる第2駆動力伝達部と、を含むロボットアーム駆動機構と、を備える基板搬送ロボットの基板搬送方法であって、
前記ハンドが前記基板を取り上げる位置である第1目標位置の下方の第1下方位置に前記ハンドを位置させ、
前記第1目標位置の上方の第1上方位置に向けて前記ハンドを上昇させる動作と、前記第1下方位置から該第1下方位置と前記第1目標位置との間の第1中間位置までの第1区間において複数の前記関節のうち少なくとも1の前記関節を一方向に変位させる動作とを並行して行わせる、基板搬送方法。
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US16/407,601 US11427412B2 (en) | 2019-05-09 | 2019-05-09 | Substrate conveying robot and substrate conveying method |
PCT/JP2020/016124 WO2020226024A1 (ja) | 2019-05-09 | 2020-04-10 | 基板搬送ロボット及び基板搬送方法 |
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US11654578B2 (en) * | 2020-09-17 | 2023-05-23 | Kawasaki Jukogyo Kabushiki Kaisha | Robot system and offset acquisition method |
JP2022102888A (ja) * | 2020-12-25 | 2022-07-07 | 川崎重工業株式会社 | 基板搬送ロボットの制御装置及び関節モータの制御方法 |
US12002695B2 (en) * | 2021-06-10 | 2024-06-04 | Kawasaki Jukogyo Kabushiki Kaisha | Transport system and determination method |
CN115648190A (zh) * | 2022-12-08 | 2023-01-31 | 沈阳新松机器人自动化股份有限公司 | 一种重载水平多关节机器人 |
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TWI782272B (zh) | 2022-11-01 |
TW202042988A (zh) | 2020-12-01 |
US20200354161A1 (en) | 2020-11-12 |
US11427412B2 (en) | 2022-08-30 |
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