JP7337910B2 - オルガノクロロシランの調製方法 - Google Patents
オルガノクロロシランの調製方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 48
- 150000001367 organochlorosilanes Chemical class 0.000 title claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 39
- 229910052710 silicon Inorganic materials 0.000 claims description 38
- 239000010703 silicon Substances 0.000 claims description 38
- 239000000203 mixture Substances 0.000 claims description 35
- 239000003054 catalyst Substances 0.000 claims description 32
- 239000002245 particle Substances 0.000 claims description 31
- 239000007789 gas Substances 0.000 claims description 24
- 238000006243 chemical reaction Methods 0.000 claims description 22
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 claims description 16
- 238000009826 distribution Methods 0.000 claims description 16
- 239000012530 fluid Substances 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000012495 reaction gas Substances 0.000 claims description 11
- 239000008187 granular material Substances 0.000 claims description 9
- 229940050176 methyl chloride Drugs 0.000 claims description 8
- 238000013461 design Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 238000011049 filling Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 229910021591 Copper(I) chloride Inorganic materials 0.000 claims description 3
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 241000282326 Felis catus Species 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 claims description 2
- 230000005484 gravity Effects 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 150000002736 metal compounds Chemical class 0.000 claims 1
- 229910001092 metal group alloy Inorganic materials 0.000 claims 1
- 238000005469 granulation Methods 0.000 description 12
- 230000003179 granulation Effects 0.000 description 12
- 238000005259 measurement Methods 0.000 description 11
- 239000000047 product Substances 0.000 description 11
- 239000006227 byproduct Substances 0.000 description 6
- -1 polysiloxane Polymers 0.000 description 6
- 229920001296 polysiloxane Polymers 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 5
- 229910052801 chlorine Inorganic materials 0.000 description 5
- YGZSVWMBUCGDCV-UHFFFAOYSA-N chloro(methyl)silane Chemical class C[SiH2]Cl YGZSVWMBUCGDCV-UHFFFAOYSA-N 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 241000196324 Embryophyta Species 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 238000004886 process control Methods 0.000 description 4
- 239000005046 Chlorosilane Substances 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011541 reaction mixture Substances 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910052720 vanadium Inorganic materials 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 229910052793 cadmium Inorganic materials 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 150000001805 chlorine compounds Chemical class 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 238000007873 sieving Methods 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 241000208140 Acer Species 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- 229910021592 Copper(II) chloride Inorganic materials 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 241001223864 Sphyraena barracuda Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001739 density measurement Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- VLXBWPOEOIIREY-UHFFFAOYSA-N dimethyl diselenide Natural products C[Se][Se]C VLXBWPOEOIIREY-UHFFFAOYSA-N 0.000 description 1
- WQOXQRCZOLPYPM-UHFFFAOYSA-N dimethyl disulfide Chemical compound CSSC WQOXQRCZOLPYPM-UHFFFAOYSA-N 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000013035 low temperature curing Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910001510 metal chloride Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/12—Organo silicon halides
- C07F7/16—Preparation thereof from silicon and halogenated hydrocarbons direct synthesis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/1809—Controlling processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/1818—Feeding of the fluidising gas
- B01J8/1827—Feeding of the fluidising gas the fluidising gas being a reactant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/24—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
- B01J8/32—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique with introduction into the fluidised bed of more than one kind of moving particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00539—Pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/0061—Controlling the level
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/02—Processes carried out in the presence of solid particles; Reactors therefor with stationary particles
- B01J2208/023—Details
- B01J2208/024—Particulate material
- B01J2208/025—Two or more types of catalyst
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00002—Chemical plants
- B01J2219/00004—Scale aspects
- B01J2219/00006—Large-scale industrial plants
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Silicon Compounds (AREA)
- Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
Description
(1) Si+CH3Cl -(触媒、任意選択的にプロモーター)->
(CH3)nHmSiCl4-n-m +副生成物(n=1~3,m=0,1)
Vreactor,eff=反応器内部の有効容積[m3]、
Atot,coled=反応器内の冷却された表面積の総和[m2]、及び
dhyd=反応器の水力直径[m]、
で記述する。
νF=流体(反応器内部の気体反応混合物)の動粘度[m2/s]、
ρF=流体密度[kg/m3]、
pdiff=流動床上の圧力損失[kg/m*s2]、及び
g=重力による加速度[m/s2]、
で記述する。
指数K1は、式1による反応器形状のパラメータ、すなわち、反応器内部の有効容積Vreactor,eff、反応器内部の冷却された表面積の総和Atot,cooled、及び水力直径dhyd,を、無次元の充填レベルφで表される流動床に関連付けるものである。
K2は、式4を介して、使用される粒子状接触塊の構成、特に造粒を記述する。
- チャンク状ケイ素の粉砕と破砕、その後の任意選択的なふるい分け(sieving)及び/又はふるい分け(sifting)(分級)、
- 廃棄物、特に、様々なタイプのケイ素(ウェハ、多結晶(polycrystalline)/多結晶(multicrystalline)/単結晶ケイ素、Simg)の処理(粉砕、破砕、鋸引き)で発生する粉塵の形態にあり;これらは、標的とする粒径の範囲外にある画分である、オーバーサイズ、及び/又はアンダーサイズの形態で分級することができる。
- 造粒されたSimg又はポリケイ素、及びそこから形成された共生成材料、特にケイ素粉塵(平均粒径<10μm。任意選択的に、例えば、ペレットの形態で処理(圧縮/凝集)された)を製造するための工程、
で製造することができる。
指数K3は、MRDSの最も重要なパラメータを、式7を介して相互に関連づけている。ここには、表層ガス速度uL、流動床上の圧力損失pdiff、流体の動粘度νF、及び流体密度ρFが含まれている。流体は、反応器内部のガス状反応混合物を意味するものと理解される。
Claims (14)
- 塩化メチル含有反応ガスと、ケイ素を含む粒子状接触塊及び触媒を反応させて、流動床反応器でオルガノクロロシランを製造する方法であって、前記オルガノクロロシランが、一般式(CH3)nHmSiCl4-n-mであり、nは1~3、mは0又は1であり、
- 反応器の設計を指数
φは、式3により計算され、
ρp=接触塊の粒子固形分密度[kg/m3]であり、
Vreactor,eff=反応器内部の有効容積[m3]、
Atot,cooled=反応器内の冷却された表面積の総和[m2]、
dhyd=反応器の水力直径[m]、
で記述し、
ここで、Vreactor,effは1.5~2400m3、及びdhydは0.1~1.5mであり、
- 接触塊の構成を指数
BAKは、式5に従って導出され、
d90[μm]は、全粒子の90%が言及された値よりも小さい径であり、
d32=粒子ザウター径[μm]、
RSi=ケイ素の純度、
δrel=接触塊中の触媒分布、
で記述し、
δrelは、式6に従って計算でき、
O spec、cat=触媒の平均比表面積[m2/kg]、
Ospec、SiG=ケイ素造粒物の平均比表面積[m2/kg]であり、
ここで、δrelは0.001~0.6、d32は5~350μm、BAKは10~1000μm、及びRSiは0.75~0.99999であり、
- 反応条件を指数
νF=流体の動粘度[m2/s]、
ρF=流体密度[kg/m3]、
pdiff=流動床上の圧力損失[kg/m×s2]、
g=重力による加速度[m/s2]、
で記述し、ここで、pdiffは10,000~200,000kg/m×s2、uLは0.002~0.4m/s、ρFは1~5kg/m3、及びνFは3×10-6~2.5×10-5m2/sであり、
ここで、K1は1~30の値を有し、K2は0.0005~2の値を有し、K3は0.2~3000の値を有し、
触媒が、金属、金属合金、金属化合物及び/又はこれらの混合物のうちの1種以上であり、当該金属が銅である、
ことを特徴とする、方法。 - K1が、1.2~25の値を有することを特徴とする、請求項1に記載の方法。
- K2が、0.001~1.75の値を有することを特徴とする、請求項1又は2に記載の方法。
- K3が、1~2800の値を有することを特徴とする、請求項1~3のいずれかに記載の方法。
- 前記反応器内部の有効容積Vreactor,effが、5~1200m3であることを特徴とする、請求項1~4のいずれかに記載の方法。
- 前記プラントの水力直径dhydが、0.15~1.3mであることを特徴とする、請求項1~5のいずれかに記載の方法。
- 流動床上の圧力損失pdiffが、20,000~150,000kg/m×s2であることを特徴とする、請求項1~6のいずれかに記載の方法。
- 前記粒子ザウター径d32が、10~300μmであることを特徴とする、請求項1~7のいずれかに記載の方法。
- 前記接触塊の粒度分布の幅BAKが、20~900μmであることを特徴とする、前記請求項1~8のいずれかに記載の方法。
- 前記接触塊中の触媒分布δrelが、0.015~0.5であることを特徴とする、請求項1~9のいずれかに記載の方法。
- 触媒が、CuCl、CuCl2、CuP、CuO及びそれらの混合物からなる群から選択されることを特徴とする、請求項1~10のいずれかに記載の方法。
- 前記接触塊が、少なくとも1つのプロモーターを含むことを特徴とする、請求項1~11のいずれかに記載の方法。
- 前記表面ガス速度uLが、0.005~0.36m/sであることを特徴とする、請求項1~12のいずれかに記載の方法。
- 反応ガスが、反応器に入る前に、塩化メチルを少なくとも50vol%含むことを特徴とする、請求項1~13のいずれかに記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/EP2019/056164 WO2020182299A1 (de) | 2019-03-12 | 2019-03-12 | Verfahren zur herstellung von organochlorsilanen |
Publications (2)
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JP2001122881A (ja) | 1999-10-27 | 2001-05-08 | Wacker Chemie Gmbh | メチルクロロシランの製造方法 |
JP2002301371A (ja) | 2001-04-10 | 2002-10-15 | Shin Etsu Chem Co Ltd | オルガノハロシラン合成用助触媒及びオルガノハロシランの製造方法 |
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US20170305939A1 (en) | 2014-12-10 | 2017-10-26 | Wacker Chemie Ag | Method for the direct synthesis of methyl chlorosilanes in fluidized-bed reactors |
WO2017178080A8 (de) | 2016-04-15 | 2018-11-15 | Wacker Chemie Ag | Verfahren zur organochlorsilanherstellung im wirbelbettverfahren |
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US4554370A (en) * | 1984-10-29 | 1985-11-19 | General Electric Company | Method for making alkylhalosilanes |
CA1320035C (en) * | 1986-08-20 | 1993-07-13 | William Terry Strange | Process for preparing halosilanes |
US5530151A (en) * | 1995-06-26 | 1996-06-25 | General Electric Company | Method of passivating organochlorosilane reactor fines and salvaging chlorosilane values therefrom |
DE19621306C1 (de) * | 1996-05-28 | 1997-11-13 | Bayer Ag | Verfahren zur Herstellung von Alkylhalogensilanen |
WO2016018650A1 (en) * | 2014-08-01 | 2016-02-04 | Scm Metal Products, Inc. | Method for making alkylhalosilanes |
US20220073357A1 (en) * | 2018-12-18 | 2022-03-10 | Wacker Chemie Ag | Process for preparing chlorsilanes |
WO2020125944A1 (de) * | 2018-12-18 | 2020-06-25 | Wacker Chemie Ag | Verfahren zur herstellung von chlorsilanen |
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JP2001122881A (ja) | 1999-10-27 | 2001-05-08 | Wacker Chemie Gmbh | メチルクロロシランの製造方法 |
JP2002301371A (ja) | 2001-04-10 | 2002-10-15 | Shin Etsu Chem Co Ltd | オルガノハロシラン合成用助触媒及びオルガノハロシランの製造方法 |
JP2014152176A (ja) | 2013-02-05 | 2014-08-25 | Wacker Chemie Ag | 管束反応器中でのオルガノクロロシランの加水分解 |
US20170305939A1 (en) | 2014-12-10 | 2017-10-26 | Wacker Chemie Ag | Method for the direct synthesis of methyl chlorosilanes in fluidized-bed reactors |
WO2017178080A8 (de) | 2016-04-15 | 2018-11-15 | Wacker Chemie Ag | Verfahren zur organochlorsilanherstellung im wirbelbettverfahren |
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US11767335B2 (en) | 2023-09-26 |
US20220242887A1 (en) | 2022-08-04 |
EP3938373A1 (de) | 2022-01-19 |
KR20210063373A (ko) | 2021-06-01 |
KR102617149B1 (ko) | 2023-12-21 |
JP2022517459A (ja) | 2022-03-09 |
CN113518781A (zh) | 2021-10-19 |
EP3938373B1 (de) | 2023-05-03 |
WO2020182299A1 (de) | 2020-09-17 |
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