JP7301530B2 - 光学装置および機器 - Google Patents
光学装置および機器 Download PDFInfo
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- JP7301530B2 JP7301530B2 JP2018225866A JP2018225866A JP7301530B2 JP 7301530 B2 JP7301530 B2 JP 7301530B2 JP 2018225866 A JP2018225866 A JP 2018225866A JP 2018225866 A JP2018225866 A JP 2018225866A JP 7301530 B2 JP7301530 B2 JP 7301530B2
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 74
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 43
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 43
- 239000001301 oxygen Substances 0.000 claims description 43
- 229910052760 oxygen Inorganic materials 0.000 claims description 43
- 229910052710 silicon Inorganic materials 0.000 claims description 43
- 239000010703 silicon Substances 0.000 claims description 43
- 239000000203 mixture Substances 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 39
- 229910052757 nitrogen Inorganic materials 0.000 claims description 37
- 239000004065 semiconductor Substances 0.000 claims description 37
- 238000012545 processing Methods 0.000 claims description 9
- 238000003860 storage Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 459
- 229910052581 Si3N4 Inorganic materials 0.000 description 231
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 231
- 239000010408 film Substances 0.000 description 117
- 125000004429 atom Chemical group 0.000 description 37
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 description 2
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- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
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- 150000003377 silicon compounds Chemical class 0.000 description 2
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- 238000004544 sputter deposition Methods 0.000 description 2
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- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 206010010071 Coma Diseases 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/14612—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
また、別の手段は、基体と、前記基体の上に配列された複数のレンズと、を備える光学装置であって、複数のレンズの各々のレンズの凸面または凹面を成す曲面は、少なくとも、珪素および窒素を含む第1層と、珪素および窒素を含む第2層と、で定義されており、前記第1層は前記第2層と前記基体との間に設けられており、前記第1層と前記第2層との間に、前記第1層および前記第2層とは組成が異なる第3層が設けられており、前記第3層の厚さは前記第1層の厚さおよび前記第2層の厚さよりも小さく、前記第3層における酸素濃度が、前記第1層における酸素濃度および前記第2層における酸素濃度よりも高く、前記第2層は前記複数のレンズの間で不連続である、ことを特徴とする。
201、202、202 レンズ
21 窒化シリコン層
22 窒化シリコン層
23 中間層
Claims (20)
- 基体と、
前記基体の上に配列された複数のレンズと、
を備える光学装置であって、
複数のレンズの各々のレンズの凸面または凹面を成す曲面は、少なくとも、珪素および窒素を含む第1層と、珪素および窒素を含む第2層と、で定義されており、
前記第1層は前記第2層と前記基体との間に設けられており、
前記第1層と前記第2層との間に、前記第1層および前記第2層とは組成が異なる第3層が設けられており、
前記第3層の厚さは前記第1層の厚さおよび前記第2層の厚さよりも小さく、
前記第3層の厚さは前記第1層の厚さの1/10以下であり、
前記第3層の厚さは前記第2層の厚さの1/10以下であり、
前記第2層は前記複数のレンズの間で不連続である、
ことを特徴とする光学装置。 - 基体と、
前記基体の上に配列された複数のレンズと、
を備える光学装置であって、
複数のレンズの各々のレンズの凸面または凹面を成す曲面は、少なくとも、珪素および窒素を含む第1層と、珪素および窒素を含む第2層と、で定義されており、
前記第1層は前記第2層と前記基体との間に設けられており、
前記第1層と前記第2層との間に、前記第1層および前記第2層とは組成が異なる第3層が設けられており、
前記第3層の厚さは前記第1層の厚さおよび前記第2層の厚さよりも小さく、
前記第3層における酸素濃度が、前記第1層における酸素濃度および前記第2層における酸素濃度よりも高く、
前記第2層は前記複数のレンズの間で不連続である、
ことを特徴とする光学装置。 - 前記第3層は珪素、窒素および酸素を含む、
請求項1または2に記載の光学装置。 - 前記第3層における酸素濃度が、前記第1層における酸素濃度および前記第2層における酸素濃度よりも高い、
請求項1乃至3のいずれか1項に記載の光学装置。 - 前記第3層の厚さは20nm未満である、
請求項1乃至4のいずれか1項に記載の光学装置。 - 前記第3層の厚さは前記第1層の厚さと前記第2層の厚さの和の1/100以下である、
請求項1乃至5のいずれか1項に記載の光学装置。 - 前記第1層の厚さおよび前記第2層の厚さの和は800nm以上であり、
前記第3層の厚さは5nm以下である、
請求項1乃至6のいずれか1項に記載の光学装置。 - 前記第1層と前記第3層との間の距離、および、前記第2層と前記第3層との間の距離は、前記第3層の厚さよりも小さい、
請求項1乃至7のいずれか1項に記載の光学装置。 - 前記複数のレンズの各々は、前記基体の側とは反対側に前記凸面を有し、
前記第1層が前記第2層と前記基体との間に位置し、
前記第2層の厚さが前記第1層の厚さよりも小さい、
請求項1乃至8のいずれか1項に記載の光学装置。 - 前記第3層の前記基体からの高低差が、前記第1層の厚さおよび前記第2層の厚さよりも小さい、
請求項1乃至9のいずれか1項に記載の光学装置。 - 前記複数のレンズの間に位置する部分と前記基体との間に前記第1層が延在する、
請求項1乃至10のいずれか1項に記載の光学装置。 - 前記第2層および前記第3層は前記複数のレンズの間で不連続である、
請求項1乃至11のいずれか1項に記載の光学装置。 - 前記複数のレンズの間に設けられた遮光壁を備える、
請求項1乃至12のいずれか1項に記載の光学装置。 - 前記凸面に沿って設けられた、珪素と窒素と酸素を含む第4層を備える、
請求項1乃至13のいずれか1項に記載の光学装置。 - 前記第4層の厚さが前記第3層の厚さよりも大きく、
前記第4層の厚さが前記第1層の厚さおよび前記第2層の厚さよりも小さい、
請求項14に記載の光学装置。 - 前記第4層の酸素濃度が前記第3層の酸素濃度よりも高い、
請求項14または15に記載の光学装置。 - 前記基体は、半導体層および配線構造と、を含み、
前記配線構造は前記半導体層に設けられた半導体素子に接続された配線層を含み、
前記配線構造と前記複数のレンズの間に前記半導体層が位置する、
請求項1乃至16のいずれか1項に記載の光学装置。 - 前記基体は、複数のフォトダイオードが設けられた半導体層を含み、
前記複数のフォトダイオードのうちの2つ以上のフォトダイオードが、前記複数のレンズのうちの1つのレンズに対応している、
請求項1乃至17のいずれか1項に記載の光学装置。 - 前記複数のレンズに対して前記基体の側とは反対側に設けられたレンズアレイを備える、
請求項1乃至18のいずれか1項に記載の光学装置。 - 請求項1乃至19のいずれか1項に記載の光学装置を備える機器であって、
前記光学装置は電子デバイスであって、
前記光学装置に対応付けられた光学系、
前記光学装置を制御する制御装置、
前記光学装置から出力された信号を処理する処理装置、
前記光学装置で得られた情報を表示する表示装置、
前記光学装置で得られた情報を記憶する記憶装置、および、
前記光学装置で得られた情報に基づいて前記光学装置を移動させる機械装置、
の少なくともいずれかを更に備えることを特徴とする機器。
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US20230268364A1 (en) * | 2022-02-24 | 2023-08-24 | Visera Technologies Company Limited | Solid-state image sensor |
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JP2005174967A (ja) | 2003-12-05 | 2005-06-30 | Sharp Corp | 半導体素子およびその製造方法 |
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