JP7290103B2 - Glass plate manufacturing apparatus and manufacturing method thereof - Google Patents

Glass plate manufacturing apparatus and manufacturing method thereof Download PDF

Info

Publication number
JP7290103B2
JP7290103B2 JP2019208663A JP2019208663A JP7290103B2 JP 7290103 B2 JP7290103 B2 JP 7290103B2 JP 2019208663 A JP2019208663 A JP 2019208663A JP 2019208663 A JP2019208663 A JP 2019208663A JP 7290103 B2 JP7290103 B2 JP 7290103B2
Authority
JP
Japan
Prior art keywords
glass plate
processing
air supply
supply port
base surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019208663A
Other languages
Japanese (ja)
Other versions
JP2021080129A (en
Inventor
弘樹 中塚
好晴 山本
靖義 森岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Electric Glass Co Ltd
Original Assignee
Nippon Electric Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co Ltd filed Critical Nippon Electric Glass Co Ltd
Priority to JP2019208663A priority Critical patent/JP7290103B2/en
Priority to PCT/JP2020/039458 priority patent/WO2021100392A1/en
Priority to TW109138190A priority patent/TW202120452A/en
Publication of JP2021080129A publication Critical patent/JP2021080129A/en
Application granted granted Critical
Publication of JP7290103B2 publication Critical patent/JP7290103B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)

Description

本発明は、給気口から処理空間に給気され且つ処理空間から排気口に排気される処理ガスを用いて、処理空間内でガラス板の処理面にエッチング処理を施すようにしたガラス板の製造装置及びその製造方法に関する。 The present invention relates to a glass plate in which the processing surface of the glass plate is etched in a processing space using a processing gas that is supplied to the processing space from an air supply port and exhausted from the processing space to an exhaust port. The present invention relates to a manufacturing apparatus and manufacturing method thereof.

周知のように、ガラス板は、液晶ディスプレイ、プラズマディスプレイ、有機ＥＬディスプレイ等のディスプレイ用のガラス基板や、スマートフォン、タブレット型ＰＣ等のモバイル機器用のガラス基板、さらには有機ＥＬ照明用のカバーガラスなどに代表されるように、各種分野に利用されている。この最終製品たるガラス板を作り出すための元になるガラス板の製造工程では、当該ガラス板の取り扱い時などに静電気の帯電に起因する問題が生じ得る。そこで、この種のガラス板の表面（処理面）にフッ化水素等の処理ガスを吹き付けてエッチング処理を施し、当該ガラス板の表面を粗化することによって、静電気の帯電を抑止することが行われている。 As is well known, glass plates include glass substrates for displays such as liquid crystal displays, plasma displays, and organic EL displays, glass substrates for mobile devices such as smartphones and tablet PCs, and cover glasses for organic EL lighting. It is used in various fields as typified by In the manufacturing process of the glass plate, which is the basis for producing the glass plate as the final product, problems caused by electrostatic charging may occur during handling of the glass plate. Therefore, the surface (processed surface) of this type of glass plate is subjected to an etching treatment by spraying a processing gas such as hydrogen fluoride to roughen the surface of the glass plate, thereby suppressing electrostatic charging. It is

このようにガラス板の表面にエッチング処理を施す装置の具体例として、特許文献１に開示された装置が挙げられる。同文献に開示の装置は、下部構成体の上面（基面）に給気口及び排気口を設け、この基面と上部構成体の下面との相互間に処理空間を形成したものである。そして、処理空間で、給気口から給気されて排気口に排気される処理ガスによって、連続して搬送されるガラス板の下面（処理面）にエッチング処理を施すものである。 As a specific example of an apparatus for etching the surface of a glass plate in this manner, the apparatus disclosed in Japanese Unexamined Patent Application Publication No. 2002-200310 can be cited. The apparatus disclosed in the document has an air supply port and an exhaust port provided on the upper surface (base surface) of the lower structure, and a processing space is formed between the base surface and the lower surface of the upper structure. In the processing space, the lower surface (processing surface) of the continuously conveyed glass plate is etched by processing gas supplied from the air supply port and exhausted from the exhaust port.

特開２０１７－５２６７９号公報JP 2017-52679 A

ところで、特許文献１に開示の装置は、基面が単一の平面であるため、以下に示すような弊害を招く。すなわち、処理ガスが処理空間を流れる際には、外気の影響等を受けて処理ガスの濃度が基面に近づくに連れて高くなる傾向がある。この場合、処理空間内で搬送されるガラス板の処理面は基面から離隔しているため、処理面の近傍では処理ガスの濃度が低くなる。そのため、当該処理面に十分なエッチング処理を施すことができず、ガラス板の粗化量を適正量にすることが困難になる。 By the way, the device disclosed in Patent Document 1 has a single plane as the base surface, and thus causes the following problems. That is, when the processing gas flows through the processing space, the concentration of the processing gas tends to increase as it approaches the base surface due to the influence of outside air and the like. In this case, since the processing surface of the glass plate conveyed in the processing space is separated from the base surface, the concentration of the processing gas is low in the vicinity of the processing surface. As a result, the processed surface cannot be sufficiently etched, and it becomes difficult to make the amount of roughening of the glass plate appropriate.

以上の観点から、本発明は、ガラス板の処理面の近傍での処理ガスの濃度低下を抑制して、当該処理面に十分なエッチング処理を施し、ガラス板の粗化量を適正量にすることを課題とする。 From the above viewpoints, the present invention suppresses the concentration decrease of the processing gas in the vicinity of the processing surface of the glass plate, performs a sufficient etching treatment on the processing surface, and makes the amount of roughening of the glass plate an appropriate amount. The challenge is to

上記課題を解決するために創案された本発明の第一の側面は、給気口及び排気口が配置された基面と該基面に対向する対向面との間に処理空間が形成され、前記給気口から前記処理空間に給気され且つ前記処理空間から前記排気口に排気される処理ガスを用いて、前記処理空間内でガラス板の処理面にエッチング処理を施す処理槽と、前記処理空間内で前記ガラス板の処理面と前記基面とが対向するように前記ガラス板を搬送する搬送手段と、を備えたガラス板の製造装置であって、前記給気口と前記排気口との相互間における前記給気口から前記排気口側に離隔した位置に、前記基面から前記対向面側に向かって突出する凸部を形成したことに特徴づけられる。 A first aspect of the present invention invented to solve the above problems is that a processing space is formed between a base surface on which an air supply port and an exhaust port are arranged and an opposing surface facing the base surface, a processing tank for etching a processing surface of a glass plate in the processing space using a processing gas supplied from the air supply port to the processing space and exhausted from the processing space to the exhaust port; a conveying means for conveying the glass sheet so that the processing surface of the glass sheet and the base surface face each other in a processing space, wherein the air supply port and the exhaust port. and a convex portion protruding from the base surface toward the opposing surface side is formed at a position separated from the air supply port toward the exhaust port side.

このような構成によれば、基面に配置された給気口から処理空間に給気された処理ガスは、基面に配置された排気口に排気されるが、この処理ガスの濃度は、本来的には外気の影響等を受けて基面に近づくに連れて高濃度になる傾向がある。ここでの構成では、基面の近傍を給気口側から排気口側に向かって流れる高濃度の処理ガスが、基面から対向面側に向かって突出する凸部に当たり、その流れ方向が基面側から対向面側に向かう方向に方向変換する。この場合、搬送手段によって処理空間内で搬送されるガラス板の処理面は、基面と対向しているため、方向変換した高濃度の処理ガスは、ガラス板の処理面に接触し易くなる。したがって、ガラス板の処理面に対しては、濃度が高められた処理ガスによって十分なエッチング処理を施すことが可能になり、ガラス板の粗化量を適正量にすることができる。 According to such a configuration, the processing gas supplied to the processing space from the air supply port arranged on the base surface is exhausted to the exhaust port arranged on the base surface, and the concentration of this processing gas is Inherently, there is a tendency for the density to increase as the surface approaches the base surface due to the influence of the outside air. In this configuration, the high-concentration process gas flowing near the base surface from the air supply port side toward the exhaust port side hits the convex portion projecting from the base surface toward the opposite surface side, and the flow direction is determined as the base surface. The direction is changed from the face side to the opposite face side. In this case, since the processing surface of the glass plate conveyed in the processing space by the conveying means faces the base surface, the direction-changed high-concentration processing gas easily comes into contact with the processing surface of the glass plate. Therefore, the processing surface of the glass plate can be sufficiently etched with the processing gas having an increased concentration, and the amount of roughening of the glass plate can be made appropriate.

この製造装置において、前記凸部は、前記ガラス板の搬送方向と交差する方向に延びると共に、前記ガラス板及び前記凸部の前記搬送方向と交差する方向の長さは、前記ガラス板よりも前記凸部の方が長いことが好ましい。 In this manufacturing apparatus, the convex portion extends in a direction intersecting with the conveying direction of the glass plate, and the length of the glass plate and the convex portion in the direction intersecting with the conveying direction is longer than that of the glass plate. It is preferable that the convex portion is longer.

このようにすれば、凸部に当たることで基面側から対向面側に向かう高濃度の処理ガスは、ガラス板の処理面における搬送方向と交差する方向の全長に亘って接触し易くなる。これにより、処理空間で搬送されるガラス板の処理面の全域に十分なエッチング処理を施すことが可能になり、ガラス板の全域に亘って粗化量の適正化を図ることができる。 In this way, the high-concentration processing gas flowing from the base surface side to the opposing surface side by hitting the convex portion is likely to come into contact with the entire length of the processing surface of the glass plate in the direction intersecting with the conveying direction. As a result, it is possible to perform sufficient etching on the entire processing surface of the glass plate conveyed in the processing space, and to optimize the amount of roughening over the entire glass plate.

以上の製造装置において、前記搬送手段は、前記ガラス板を支持する搬送ローラを、前記給気口と前記排気口との相互間における前記ガラス板の搬送方向の複数箇所に備えると共に、これら搬送ローラの前記搬送方向の相互間に前記凸部が配列されていることが好ましい。 In the manufacturing apparatus described above, the conveying means includes conveying rollers for supporting the glass sheet at a plurality of positions in the conveying direction of the glass sheet between the air supply port and the exhaust port, and these conveying rollers It is preferable that the convex portions are arranged between each other in the conveying direction.

このようにすれば、ガラス板が搬送方向の複数個所で搬送ローラによって支持されるため、ガラス板を安定して搬送することができる。しかも、それら搬送ローラの搬送方向の相互間に凸部が配列されているため、それら搬送ローラとの干渉を回避しつつ、凸部を適切に配列することができ、レイアウト面で好ましくなる。これにより、ガラス板の搬送形態の適正化と、凸部のレイアウトの適正化とを、効率良く両立させることができる。 With this configuration, the glass plate is supported by the conveying rollers at a plurality of locations in the conveying direction, so that the glass plate can be stably conveyed. Moreover, since the convex portions are arranged between the conveying rollers in the conveying direction, the convex portions can be appropriately arranged while avoiding interference with the conveying rollers, which is preferable in terms of layout. As a result, it is possible to efficiently achieve both optimization of the transportation form of the glass plate and optimization of the layout of the convex portions.

以上の製造装置において、前記凸部は、前記ガラス板の搬送方向に複数配列されていることが好ましい。 In the manufacturing apparatus described above, it is preferable that a plurality of the convex portions be arranged in the conveying direction of the glass plate.

このようにすれば、給気口から処理空間に給気されて基面の近傍を排気口に向かって流れる高濃度の処理ガスを、搬送方向の複数個所で凸部により方向変換して、ガラス板の処理面に向かわせることができる。これにより、ガラス板の粗化量のさらなる適正化が図られる。 With this configuration, the high-concentration processing gas, which is supplied from the air supply port to the processing space and flows near the base surface toward the exhaust port, is changed in direction by the projections at a plurality of locations in the conveying direction, and the glass is It can be directed towards the treated side of the plate. Thereby, the further optimization of the amount of roughening of a glass plate is achieved.

以上の製造装置において、前記給気口は、前記基面から前記対向面側に向かって突出する突出部に形成されていることが好ましい。 In the manufacturing apparatus described above, it is preferable that the air supply port is formed in a projecting portion projecting from the base surface toward the facing surface.

このようにすれば、給気口から処理空間に給気される処理ガスは、突出部が対向面側に向かって突出している分だけ、ガラス板の処理面に近い位置に給気される。これにより、ガラス板の処理面の近傍に存する処理ガスをより一層高濃度に維持し易くなり、ガラス板の粗化量のさらなる適正化を図ることが可能となる。 With this configuration, the processing gas supplied to the processing space from the air supply port is supplied to a position close to the processing surface of the glass plate by the amount of the projecting portion projecting toward the opposing surface side. As a result, the concentration of the processing gas existing in the vicinity of the processing surface of the glass plate can be more easily maintained, and the amount of roughening of the glass plate can be further optimized.

上記課題を解決するために創案された本発明の第二の側面は、給気口及び排気口が配置された基面と該基面に対向する対向面との間に処理空間が形成された処理槽で、前記給気口から前記処理空間に給気され且つ前記処理空間から前記排気口に排気される処理ガスを用いて、前記処理空間内に存するガラス板の処理面にエッチング処理を施すエッチング工程と、搬送手段を用いて、前記処理空間内で前記ガラス板の処理面と前記基面とが対向するように前記ガラス板を搬送する搬送工程と、を備えたガラス板の製造方法であって、前記エッチング工程では、前記給気口と前記排気口との相互間における前記給気口から前記排気口側に離隔した位置に形成され且つ前記基面から前記対向面側に向かって突出する凸部に、前記給気口側から前記排気口側に向かって流れる前記処理ガスを当てることに特徴づけられる。 A second aspect of the present invention, which has been devised to solve the above problems, is a processing space formed between a base surface on which an air supply port and an exhaust port are arranged and an opposing surface facing the base surface. In a processing bath, etching is performed on the processing surface of the glass plate existing in the processing space using a processing gas supplied from the air supply port to the processing space and exhausted from the processing space to the exhaust port. A method for manufacturing a glass plate, comprising: an etching step; and a conveying step of conveying the glass plate using a conveying means so that the processing surface of the glass plate faces the substrate surface within the processing space. wherein, in the etching step, it is formed at a position between the air supply port and the exhaust port and is spaced from the air supply port toward the exhaust port and protrudes from the base surface toward the opposing surface side. It is characterized in that the processing gas flowing from the air supply port side toward the exhaust port side is applied to the projecting portion.

このような製造方法によれば、既述の製造装置と同様に、給気口から処理空間に給気されて基面の近傍を排気口に向かって流れる高濃度の処理ガスが、基面から対向面側に向かって突出する凸部に当たり、その流れ方向が基面側から対向面側に向かう方向に方向変換する。したがって、この製造方法によっても、ガラス板の処理面に対して、濃度が高められた処理ガスによって十分なエッチング処理を施すことが可能になり、ガラス板の粗化量の適正化を図ることができる。 According to this manufacturing method, similarly to the above-described manufacturing apparatus, the high-concentration processing gas supplied from the air supply port to the processing space and flowing in the vicinity of the base surface toward the exhaust port is discharged from the base surface. The flow direction changes from the base surface side to the opposite surface side when it hits the convex portion protruding toward the opposing surface side. Therefore, according to this manufacturing method as well, it is possible to sufficiently etch the treated surface of the glass plate with a treatment gas having an increased concentration, and to optimize the amount of roughening of the glass plate. can.

本発明によれば、ガラス板の処理面の近傍での処理ガスの濃度低下が抑制されて、当該処理面に十分なエッチング処理を施し得ることになり、ガラス板の粗化量を適正量にすることが可能になる。 According to the present invention, the reduction in the concentration of the processing gas in the vicinity of the processing surface of the glass plate is suppressed, the processing surface can be sufficiently etched, and the amount of roughening of the glass plate is controlled to an appropriate amount. it becomes possible to

本発明の第一実施形態に係るガラス板の製造装置（その主要部をなすエッチング処理用の処理槽）の要部を示す概略縦断正面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic vertical front view which shows the principal part of the manufacturing apparatus of the glass plate which concerns on 1st embodiment of this invention (processing tank for the etching process which makes the main part). 図１のＸ－Ｘ線に従って切断した横断平面図である。FIG. 2 is a cross-sectional plan view taken along line XX of FIG. 1; 本発明の第一実施形態に係るガラス板の製造装置の構成要素である搬送ローラの周辺構造の一例を示す要部拡大縦断側面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a principal part enlarged longitudinal side view which shows an example of the peripheral structure of the conveyance roller which is a component of the manufacturing apparatus of the glass plate which concerns on 1st embodiment of this invention. 本発明の第一実施形態に係るガラス板の製造装置の構成要素である搬送ローラの周辺構造の他の例を示す要部拡大縦断側面図である。FIG. 4 is an enlarged vertical cross-sectional side view of a main part showing another example of the peripheral structure of the conveying roller, which is a component of the glass plate manufacturing apparatus according to the first embodiment of the present invention. 本発明の第一実施形態に係るガラス板の製造装置の構成要素である凸部の周辺構造を示す要部拡大縦断正面図である。FIG. 2 is an enlarged vertical cross-sectional front view of a main part showing a peripheral structure of a convex portion which is a component of the glass plate manufacturing apparatus according to the first embodiment of the present invention. 本発明の第二実施形態に係るガラス板の製造装置（その主要部をなすエッチング処理用の処理槽）の要部を示す概略縦断正面図である。FIG. 2 is a schematic vertical cross-sectional front view showing a main part of a glass plate manufacturing apparatus (a treatment tank for etching treatment, which is a main part of the apparatus) according to a second embodiment of the present invention. 図６のＹ－Ｙ線に従って切断した横断平面図である。FIG. 7 is a cross-sectional plan view cut along line YY of FIG. 6;

以下、本発明の実施形態に係るガラス板の製造装置及びその製造方法について添付図面を参照して説明する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS A glass sheet manufacturing apparatus and a manufacturing method thereof according to embodiments of the present invention will be described below with reference to the accompanying drawings.

＜第一実施形態＞
図１は、本発明の第一実施形態に係るガラス板の製造装置（その主要部をなすエッチング処理用の処理槽１）の要部を示す概略縦断正面図である。同図に示すように、処理槽１は、上側に配置された上部構成体２と、下側に配置された下部構成体３と、この両構成体２、３の奥行方向（紙面と直交する方向）の両端にそれぞれ固定された端壁４（図２参照）とを備える。下部構成体３の上面（基面）５と、基面５に対向する上部構成体２の下面（対向面）６との間には、ガラス板Ｇの下面（処理面）Ｇａに対してエッチング処理を施すための処理空間７が形成されている。 <First embodiment>
FIG. 1 is a schematic vertical cross-sectional front view showing the essential parts of a glass plate manufacturing apparatus (a treatment tank 1 for etching treatment, which forms the main part of the apparatus) according to the first embodiment of the present invention. As shown in the figure, the processing tank 1 has an upper structure 2 arranged on the upper side, a lower structure 3 arranged on the lower side, and the depth direction of these two structures 2 and 3 (perpendicular to the plane of the paper). direction) and end walls 4 (see FIG. 2) fixed at both ends. Between the upper surface (base surface) 5 of the lower structure 3 and the lower surface (facing surface) 6 of the upper structure 2 facing the base surface 5, etching is performed on the lower surface (process surface) Ga of the glass plate G. A processing space 7 is formed for processing.

図１に示す矢印Ａ方向は、ガラス板Ｇの搬送方向であって、以下の説明では、矢印Ａに沿う方向を単に搬送方向という。また、同図における左側を搬送方向前側といい、同図における右側を搬送方向後側という。さらに、両構成体２、３の奥行方向を単に奥行方向という。ここで、図例では、ガラス板Ｇの搬送方向は、横方向のうちの水平方向であるが、これ以外の横方向すなわち水平方向に対して搬送方向前側が３０°以内の範囲で下降傾斜または上昇傾斜する方向であってもよい。なお、ガラス板Ｇの厚みは、特に限定されないが、例えば１ｍｍ以下、７００μｍ以下、または５００μｍ以下とされる。ガラス板Ｇのサイズも、特に限定されないが、例えば２００×３００ｍｍ～３１００×３５００ｍｍとされる。 The direction of arrow A shown in FIG. 1 is the direction in which the glass sheet G is conveyed, and in the following description, the direction along arrow A is simply referred to as the direction of conveyance. Further, the left side in the figure is referred to as the front side in the conveying direction, and the right side in the same figure is referred to as the rear side in the conveying direction. Furthermore, the depth direction of the two structures 2 and 3 is simply referred to as the depth direction. Here, in the example of the figure, the conveying direction of the glass sheet G is the horizontal direction of the lateral directions, but the forward side of the conveying direction is inclined downward or downward within a range of 30° or less with respect to the other lateral directions, i.e., the horizontal direction. It may be in a direction of upward inclination. The thickness of the glass plate G is not particularly limited, but is, for example, 1 mm or less, 700 μm or less, or 500 μm or less. The size of the glass plate G is also not particularly limited, but is, for example, 200×300 mm to 3100×3500 mm.

基面５には、処理空間７に処理ガス（例えばフッ化水素）を給気する給気口８と、処理空間７から処理ガスを排気する排気口９とが配置されている。この実施形態では、給気口８及び排気口９は何れも、基面５に開口している。給気口８は、基面５の搬送方向中央部から搬送方向後側に離隔した位置に開口し、排気口９は、基面５の搬送方向中央部から搬送方向前側に離隔した位置に開口している。給気口８及び排気口９は何れも、図２に示すように、奥行方向に延びるスリット状に形成されている。この実施形態では、給気口８及び排気口９の奥行方向の長さは何れも、ガラス板Ｇの奥行方向の長さよりも長尺とされている。 The base surface 5 is provided with an air supply port 8 for supplying a processing gas (for example, hydrogen fluoride) to the processing space 7 and an exhaust port 9 for exhausting the processing gas from the processing space 7 . In this embodiment, both the air inlet 8 and the air outlet 9 open into the base surface 5 . The air supply port 8 opens at a position spaced rearward in the transport direction from the center portion of the base surface 5 in the transport direction, and the exhaust port 9 opens at a position spaced forward in the transport direction from the center portion in the transport direction of the base surface 5 . are doing. Both the air supply port 8 and the air exhaust port 9 are formed in a slit shape extending in the depth direction, as shown in FIG. In this embodiment, the lengths of the air supply port 8 and the air discharge port 9 in the depth direction are both longer than the length of the glass plate G in the depth direction.

図１に示すように、下部構成体３は、上面が単一の平面からなる既述の基面５とされた基台板１０と、基台板１０の搬送方向後側の部位に垂下固定された給気構体１１と、基台板１０の搬送方向前側の部位に垂下固定された排気構体１２とを備える。基台板１０の搬送方向後側の部位には、給気口８に通じる給気孔１３が形成され、給気孔１３は、給気構体１１に形成された給気路１４に連通している。基台板１０の搬送方向前側の部位には、排気口９に通じる排気孔１５が形成され、排気孔１５は、排気構体１２に形成された排気路１６に連通している。給気路１４の上流側の端部（図例の下方側の端部）は、処理ガス供給源（図示略）に通じ、排気路１６の下流側の端部（図例の下方側の端部）は、処理ガス回収部（図示略）に通じている。なお、この実施形態では、下部構成体３は、処理ガスに対する耐食性に優れたポリ塩化ビニル等の樹脂で形成されている。また、給気構体１１及び排気構体１２にはそれぞれ、処理ガスによる結露の発生を防止するためのヒータ（図示略）が内蔵されている。 As shown in FIG. 1, the lower structure 3 includes a base plate 10 whose upper surface is the above-described base surface 5 consisting of a single plane, and a portion on the rear side of the base plate 10 in the conveying direction. and an exhaust structure 12 suspended and fixed to a portion of the base plate 10 on the front side in the conveying direction. An air supply hole 13 communicating with the air supply port 8 is formed in a portion of the base plate 10 on the rear side in the transport direction, and the air supply hole 13 communicates with an air supply path 14 formed in the air supply structure 11 . An exhaust hole 15 communicating with the exhaust port 9 is formed in a portion of the base plate 10 on the front side in the transport direction, and the exhaust hole 15 communicates with an exhaust path 16 formed in the exhaust structure 12 . The upstream end of the air supply passage 14 (the lower end in the figure) communicates with a processing gas supply source (not shown), and the downstream end of the exhaust passage 16 (the lower end in the figure). section) communicates with a processing gas recovery section (not shown). In this embodiment, the lower structure 3 is made of resin such as polyvinyl chloride, which has excellent corrosion resistance to the processing gas. Further, the air supply structure 11 and the exhaust structure 12 each incorporate a heater (not shown) for preventing dew condensation due to the processing gas.

基台板１０の上部には、給気口８から排気口９に至るまでの部位における搬送方向の複数個所（図例では３箇所）に、ガラス板Ｇを下方から支持するディスク状の搬送ローラ１７が組み付けられている。これらの搬送ローラ１７は、図２に示すように、基台板１０の上部の奥行方向についても複数個所（図例では４箇所）に組み付けられている。また、基台板１０の上部には、給気口８よりも搬送方向後側の部位及び排気口９よりも搬送方向前側の部位にも、同様の搬送ローラ１８が組み付けられ、これらの搬送ローラ１８も奥行方向の複数箇所に同様にして組み付けられている。 On the upper part of the base plate 10, disc-shaped transport rollers for supporting the glass plate G from below are provided at a plurality of positions (three positions in the figure) in the transport direction from the air supply port 8 to the exhaust port 9. 17 is installed. As shown in FIG. 2, these conveying rollers 17 are assembled at a plurality of locations (four locations in the figure) on the top of the base plate 10 in the depth direction as well. Further, on the upper part of the base plate 10, similar conveying rollers 18 are assembled at a portion rearward of the air supply port 8 in the conveying direction and a portion forward of the air outlet 9 in the conveying direction. 18 are also assembled at a plurality of locations in the depth direction in the same manner.

これら全ての搬送ローラ１７、１８は、それぞれが独立したフリーローラであって、回転駆動力が付与されず、図３に示すように、基台板１０の上部に形成された凹部１９に回転自在に保持されている。各凹部１９は、搬送方向及び奥行方向の何れについても所定間隔を置いて形成されている。詳述すると、各搬送ローラ１７（１８）は、各凹部１９に遊びをもって挿入され、各ローラ１７（１８）の上部のみが基面５から上方に突出している。各ローラ１７（１８）のローラ軸１７ａ（１８ａ）は、各凹部１９の高さ方向中間部から奥行き方向の両側に延びる支持面２０上に回転自在に支持されている。この例では、各ローラ軸１７ａ（１８ａ）の上方が開放されている。これに代えて、図４に示すように、各ローラ軸１７ａ（１８ａ）の上方が、基面５を上端に有する覆壁部２１で覆われるようにしてもよい。 All of these conveying rollers 17 and 18 are free rollers independent from each other and are not provided with a rotational driving force. As shown in FIG. is held in The recesses 19 are formed at predetermined intervals in both the transport direction and the depth direction. More specifically, each conveying roller 17 (18) is inserted into each recess 19 with play, and only the upper portion of each roller 17 (18) protrudes upward from the base surface 5. As shown in FIG. A roller shaft 17a (18a) of each roller 17 (18) is rotatably supported on a support surface 20 extending from the middle portion of each recess 19 in the height direction to both sides in the depth direction. In this example, the upper side of each roller shaft 17a (18a) is open. Alternatively, as shown in FIG. 4, the top of each roller shaft 17a (18a) may be covered with a cover wall portion 21 having the base surface 5 at its upper end.

処理槽１の搬送方向後側及び処理槽１の搬送方向前側にはそれぞれ、処理空間７にガラス板Ｇを搬入し且つ処理空間７からガラス板Ｇを搬出するための複数の駆動搬送ローラ（図示略）が搬送方向に沿って配置されている。したがって、処理空間７内でガラス板Ｇの処理面Ｇａと基面５とが対向するようにガラス板Ｇを搬送する搬送手段２２は、ガラス板Ｇの送りを案内する既述の複数の搬送ローラ１７（１８）と、ガラス板Ｇに送り力を付与する既述の複数の駆動搬送ローラとから構成される。この実施形態では、搬送手段２２は、複数枚のガラス板Ｇを処理空間７内に順次連続して搬送するように構成される。なお、搬送ローラ１７、１８は、回転駆動力が付与されるローラとし、ガラス板Ｇに送り力を付与してもよい。 A plurality of driving conveying rollers (illustrated) for carrying the glass sheet G into the processing space 7 and carrying out the glass sheet G from the processing space 7 are provided on the rear side of the processing tank 1 in the conveying direction and the front side of the processing tank 1 in the conveying direction, respectively. ) are arranged along the conveying direction. Therefore, the conveying means 22 for conveying the glass sheet G so that the processing surface Ga of the glass sheet G and the substrate surface 5 are opposed to each other in the processing space 7 include the above-described plurality of conveying rollers for guiding the feeding of the glass sheet G. 17 (18) and a plurality of driving conveying rollers for applying a feeding force to the glass sheet G as described above. In this embodiment, the conveying means 22 is configured to sequentially convey a plurality of glass sheets G into the processing space 7 in succession. In addition, the conveying rollers 17 and 18 may be rollers to which a rotational driving force is applied, and the feeding force may be applied to the glass plate G.

図１に示すように、基面５上には、給気口８と排気口９との相互間における搬送方向の複数箇所（図例では３箇所）に、基面５から対向面６側に向かって突出する凸部２３が形成されている。これらの凸部２３のうち、最も搬送方向後側に存する凸部２３は、給気口８から搬送方向前側に離隔しており、最も搬送方向前側に存する凸部２３は、排気口９から搬送方向後側に離隔している。また、これらの凸部２３のうち、搬送方向中央周辺部に存する凸部２３（図例では２個の凸部２３）は、複数の搬送ローラ１７（図例では３個の搬送ローラ１７）の相互間にそれぞれ配置されている。なお、最も搬送方向前側に存する凸部２３は、排気口９から搬送方向後側に離隔せずに排気口９に隙間なく連接していてもよい。 As shown in FIG. 1 , on the base surface 5 , there are a plurality of locations (three locations in the figure) in the conveying direction between the air supply port 8 and the exhaust port 9 , and from the base surface 5 to the opposing surface 6 side. A convex portion 23 is formed to protrude toward. Among these convex portions 23 , the convex portion 23 located on the rearmost side in the conveying direction is separated from the air supply port 8 on the forward side in the conveying direction, and the convex portion 23 located on the most forward side in the conveying direction is conveyed from the exhaust port 9 . It is spaced backward in the direction. Further, among these convex portions 23, the convex portions 23 (two convex portions 23 in the example shown in the figure) existing in the peripheral portion of the center in the conveying direction are the plural conveying rollers 17 (three conveying rollers 17 in the example shown in the drawing). are arranged between each other. In addition, the convex portion 23 that is most forward in the transport direction may be connected to the exhaust port 9 without a gap without being separated from the exhaust port 9 to the rear side in the transport direction.

図２に示すように、複数の凸部２３は、搬送方向と交差する方向（図例では搬送方向と直交する方向（奥行方向））に延びている。これら複数の凸部２３の奥行方向の長さは、ガラス板Ｇの奥行方向の長さよりも長尺とされ、この実施形態では、給気口８及び排気口９の奥行方向の長さよりも長尺とされている。また、この実施形態では、各凸部２３は、断面が矩形の細長状の板状体または柱状体であるが、断面が台形、その他の多角形、円形、もしくは半円形等の細長状の板状体または柱状体であってもよい。なお、図例では、各凸部２３の奥行方向の両端が端壁４から僅かに離隔しているが、端壁４に到達していてもよい。 As shown in FIG. 2, the plurality of protrusions 23 extend in a direction intersecting the conveying direction (a direction orthogonal to the conveying direction (depth direction) in the illustrated example). The length in the depth direction of the plurality of protrusions 23 is longer than the length in the depth direction of the glass plate G, and in this embodiment, it is longer than the length in the depth direction of the air supply port 8 and the exhaust port 9 . It is considered a scale. In this embodiment, each projection 23 is an elongated plate or column having a rectangular cross section. It may be a body or a columnar body. In the illustrated example, both ends of each protrusion 23 in the depth direction are slightly separated from the end wall 4 , but they may reach the end wall 4 .

図５に示すように、各凸部２３の基面５からの突出寸法Ｌ１は、基面５からガラス板Ｇの処理面Ｇａまでの離隔寸法Ｌ２の１／５～４／５、好ましくは２／５～３／５である。具体的数値として、寸法Ｌ１は、１～５ｍｍ、好ましくは２～３ｍｍであり、寸法Ｌ２は、２～１０ｍｍ、好ましくは３～６ｍｍである。ここで、各凸部２３の材質は、処理ガスに対する耐食性に優れたポリ塩化ビニル等の樹脂である。 As shown in FIG. 5, the projection dimension L1 of each convex portion 23 from the base surface 5 is 1/5 to 4/5, preferably 2/5 of the separation dimension L2 from the base surface 5 to the processing surface Ga of the glass plate G. /5 to 3/5. As specific numerical values, the dimension L1 is 1 to 5 mm, preferably 2 to 3 mm, and the dimension L2 is 2 to 10 mm, preferably 3 to 6 mm. Here, the material of each projection 23 is a resin such as polyvinyl chloride, which has excellent corrosion resistance to the process gas.

上部構成体２は、図１に示すように、搬送方向前側の天板２４と搬送方向後側の天板２５とが連設固定して構成され、この両天板２４、２５の下面は、面一状態で連なる単一の平面をなす既述の対向面６である。この対向面６は、基面５と平行であると共に、対向面６及び基面５は、処理空間７に搬送されてくるガラス板Ｇの処理面Ｇａ及び上面Ｇｂと平行である。 As shown in FIG. 1, the upper structure 2 is configured by connecting and fixing a top plate 24 on the front side in the conveying direction and a top plate 25 on the rear side in the conveying direction. It is the above-mentioned opposing surface 6 which forms a single plane that continues in a flush state. The facing surface 6 is parallel to the base surface 5 , and the facing surface 6 and the base surface 5 are parallel to the processing surface Ga and the upper surface Gb of the glass plate G conveyed to the processing space 7 .

上部構成体２は、処理ガスに対する耐食性に優れたポリ塩化ビニル等の樹脂で形成されている。また、搬送方向前側の天板２４及び搬送方向後側の天板２５にはそれぞれ、処理ガスによる結露の発生を防止するためのヒータ（図示略）が内蔵されている。 The upper structure 2 is made of resin such as polyvinyl chloride, which has excellent corrosion resistance to the processing gas. Further, the top plate 24 on the forward side in the transfer direction and the top plate 25 on the rear side in the transfer direction each incorporate a heater (not shown) for preventing dew condensation from occurring due to the processing gas.

以上の構成からなる製造装置（処理槽１）を用いたガラス板の製造方法は、図１を参酌して、処理槽１で、給気口８から処理空間７に給気され且つ処理空間７から排気口９に排気される処理ガスを用いて、処理空間７内に存するガラス板Ｇの処理面Ｇａにエッチング処理を施すエッチング工程を備える。さらに、当該製造方法は、搬送手段２２を用いて、処理空間７内でガラス板Ｇの処理面Ｇａと基面５とが対向するようにガラス板Ｇを搬送する搬送工程を備える。そして、エッチング工程では、基面５上に形成された凸部２３に、給気口８側から排気口９側に向かって流れる処理ガスを当てる。 Referring to FIG. 1, in the method of manufacturing a glass plate using the manufacturing apparatus (processing tank 1) having the above configuration, in the processing tank 1, air is supplied from the air supply port 8 to the processing space 7, and air is supplied to the processing space 7. An etching step is provided in which the processing surface Ga of the glass plate G existing in the processing space 7 is etched using the processing gas exhausted from the gas outlet 9 . Further, the manufacturing method includes a transporting step of transporting the glass plate G using the transport means 22 so that the processing surface Ga of the glass plate G faces the substrate surface 5 within the processing space 7 . Then, in the etching process, the processing gas flowing from the air supply port 8 side toward the exhaust port 9 side is applied to the projections 23 formed on the base surface 5 .

次に、上記第一実施形態に係るガラス板の製造装置及びその製造方法の作用効果を説明する。 Next, the effects of the glass plate manufacturing apparatus and the manufacturing method thereof according to the first embodiment will be described.

給気口８から処理空間７に給気された処理ガスは、処理空間７から排気口９に排気されるが、この処理ガスの濃度は、本来的には外気の影響等を受けて基面５に近づくに連れて高濃度になる傾向がある。ここで本実施形態に係る構成によれば、給気口８から基面５の近傍を排気口９に向かって流れる高濃度の処理ガスは、図１に示すように、凸部２３に当たることで、その流れ方向が矢印Ｗで示すように基面５側から対向面６側に向かう方向に方向変換する。このとき、同図に鎖線で示すように、処理空間７に搬送されてきたガラス板Ｇの処理面Ｇａは、基面５と対向しているため、方向変換した高濃度の処理ガスは、ガラス板Ｇの処理面Ｇａに接触し易くなる。したがって、ガラス板Ｇの処理面Ｇａに対しては、濃度が高められた処理ガスによって十分なエッチング処理を施すことが可能になり、ガラス板Ｇの粗化量を適正量にすることができる。 The processing gas supplied from the air supply port 8 to the processing space 7 is exhausted from the processing space 7 to the exhaust port 9. The closer to 5, the higher the concentration tends to be. Here, according to the configuration according to the present embodiment, the high-concentration processing gas flowing from the air supply port 8 near the base surface 5 toward the exhaust port 9 hits the convex portion 23 as shown in FIG. , the flow direction changes from the base surface 5 side to the opposite surface 6 side as indicated by an arrow W. At this time, as indicated by a chain line in the figure, the processing surface Ga of the glass plate G transported to the processing space 7 faces the base surface 5, so the direction-changed high-concentration processing gas reaches the glass surface. Contact with the processing surface Ga of the plate G becomes easier. Therefore, the processing surface Ga of the glass plate G can be sufficiently etched with the processing gas having an increased concentration, and the amount of roughening of the glass plate G can be made appropriate.

しかも、凸部２３の奥行方向の長さは、ガラス板Ｇの奥行方向の長さよりも長尺であるため、凸部２３に当たることによって矢印Ｗで示すように方向変換した高濃度の処理ガスは、ガラス板Ｇの奥行方向の全長に亘って処理面Ｇａと接触し易くなる。したがって、処理空間７内を通過するガラス板Ｇの処理面Ｇａの全域に対して、濃度が高められた処理ガスを接触させることができる。これにより、処理空間７内で搬送されるガラス板Ｇの処理面Ｇａの全域に十分なエッチング処理を施すことが可能になり、ガラス板Ｇの全域に亘って粗化量の適正化が図られる。 Moreover, since the length of the convex portion 23 in the depth direction is longer than the length of the glass plate G in the depth direction, the high-concentration processing gas that has changed direction as indicated by the arrow W by hitting the convex portion 23 is , the entire length of the glass plate G in the depth direction is easily brought into contact with the processing surface Ga. Therefore, the processing gas having an increased concentration can be brought into contact with the entire processing surface Ga of the glass plate G passing through the processing space 7 . As a result, it becomes possible to perform a sufficient etching process on the entire processing surface Ga of the glass plate G conveyed in the processing space 7, and to optimize the amount of roughening over the entire glass plate G. .

また、凸部２３の奥行方向の長さは、給気口８及び排気口９の奥行方向の長さよりも長尺であるため、給気口８側から排気口９側に向かう高濃度の処理ガスをできるだけ多く方向変換させることができ、ガラス板Ｇの処理面Ｇａの全域に対して、より一層十分なエッチング処理を施すことが可能になる。 In addition, since the length of the convex portion 23 in the depth direction is longer than the length of the air supply port 8 and the air exhaust port 9 in the depth direction, the high-concentration processing from the air supply port 8 side to the exhaust port 9 side is performed. The direction of the gas can be changed as much as possible, and the entire processing surface Ga of the glass plate G can be subjected to a more sufficient etching process.

さらに、ガラス板Ｇの処理空間７内での搬送時には、ガラス板Ｇが搬送方向及び奥行方向の複数個所でディスク状の搬送ローラ１７によって支持されるため、ガラス板Ｇを安定して搬送することができる。しかも、それら搬送ローラ１７の搬送方向の相互間に凸部２３が配列されているため、それら搬送ローラ１７との干渉を回避しつつ、凸部２３を適切に配列することができ、レイアウト面で好ましくなる。これにより、ガラス板Ｇの搬送形態の適正化と、凸部２３のレイアウトの適正化とを、効率良く両立させることができる。 Furthermore, when the glass plate G is transported within the processing space 7, the glass plate G is supported by the disc-shaped transport rollers 17 at a plurality of points in the transport direction and the depth direction, so that the glass plate G can be stably transported. can be done. Moreover, since the convex portions 23 are arranged between the conveying rollers 17 in the conveying direction, the convex portions 23 can be appropriately arranged while avoiding interference with the conveying rollers 17, thereby improving the layout. become favorable. Thereby, optimization of the conveyance form of the glass plate G and optimization of the layout of the convex part 23 can be made compatible efficiently.

また、凸部２３が搬送方向の複数箇所に配列されているため、給気口８側から排気口９側に向かう高濃度の処理ガスを、搬送方向の複数個所で方向変換することができ、ガラス板Ｇの粗化量のさらなる適正化を図ることが可能になる。 Further, since the convex portions 23 are arranged at a plurality of locations in the transport direction, the direction of the high-concentration processing gas flowing from the air supply port 8 side to the exhaust port 9 side can be changed at a plurality of locations in the transport direction. It is possible to further optimize the amount of roughening of the glass plate G.

＜第二実施形態＞
図６及び図７は、本発明の第二実施形態に係るガラス板の製造装置（処理槽１）を例示している。これら両図に示すように、この第二実施形態に係る処理槽１が、上述の第一実施形態に係る処理槽１と相違しているところは、給気口８が、基面５から対向面６側に向かって突出する突出部２７に形成されている点である。詳しくは、給気口８は、突出部２７の突端（上端）に開口している。また、突出部２７は、図７に示す平面視で、奥行方向に長尺な細長状の額縁形状をなしている。ここで、突出部２７の材質は、処理ガスに対する耐食性に優れたポリ塩化ビニル等の樹脂である。その他の構成要素は、上述の第一実施形態と同一であるので、両実施形態に共通する構成要素については、図６及び図７に同一符号を付し、その説明を省略する。 <Second embodiment>
6 and 7 illustrate a glass plate manufacturing apparatus (treatment tank 1) according to a second embodiment of the present invention. As shown in these figures, the processing tank 1 according to the second embodiment differs from the processing tank 1 according to the above-described first embodiment in that the air supply port 8 faces the base surface 5. The difference is that it is formed in the protruding portion 27 that protrudes toward the surface 6 side. Specifically, the air supply port 8 opens at the tip (upper end) of the projecting portion 27 . The projecting portion 27 has an elongated picture frame shape elongated in the depth direction in plan view shown in FIG. 7 . Here, the material of the protruding portion 27 is a resin such as polyvinyl chloride having excellent corrosion resistance to the processing gas. Other constituent elements are the same as those of the above-described first embodiment, so constituent elements common to both embodiments are denoted by the same reference numerals in FIGS. 6 and 7, and descriptions thereof are omitted.

この第二実施形態に係る製造装置（処理槽１）によれば、給気口８から処理空間７に給気される処理ガスは、突出部２７が対向面６側に向かって突出している分だけ、ガラス板Ｇの処理面Ｇａに近い位置に給気される。これにより、ガラス板Ｇの処理面Ｇａの近傍に存する処理ガスをより一層高濃度に維持し易くなり、ガラス板Ｇの粗化量のさらなる適正化を図ることができる。 According to the manufacturing apparatus (processing tank 1) according to the second embodiment, the processing gas supplied from the air supply port 8 to the processing space 7 is so large that the protruding portion 27 protrudes toward the facing surface 6 side. is supplied to a position near the processing surface Ga of the glass plate G. As a result, the processing gas existing in the vicinity of the processing surface Ga of the glass plate G can be easily maintained at a higher concentration, and the amount of roughening of the glass plate G can be further optimized.

以上の第一及び第二実施形態では、基台板１０の基面５上に、凸部２３を別体として形成したが、凸部２３を基台板１０と一体形成するようにしてもよい。この場合には、基台板１０の上面のうちの凸部２３を除く領域が基面５となる。 In the first and second embodiments described above, the protrusions 23 are separately formed on the base surface 5 of the base plate 10, but the protrusions 23 may be formed integrally with the base plate 10. . In this case, the area of the upper surface of the base plate 10 excluding the protrusions 23 serves as the base surface 5 .

また、同様に、突出部２７も、基台板１０の基面５上に別体として形成したが、基台板１０と一体形成するようにしてもよく、この場合にも、基台板１０の上面のうちの突出部２７を除く領域が基面５となる。 Similarly, the projecting portion 27 is also formed separately on the base surface 5 of the base plate 10, but it may be formed integrally with the base plate 10. The area of the upper surface of the , excluding the protruding portion 27, is the base surface 5. As shown in FIG.

以上の第一及び第二実施形態では、一つの凸部２３を、一つの板状体または柱状体が奥行方向に延びるようにして形成したが、これに代えて、一つの凸部２３を、複数の板状体または柱状体が奥行方向に延びるように配列させて形成してもよい。この場合、複数の板状体または柱状体の奥行方向の相互間に隙間を設けてもよい。但し、その隙間の大きさは、基面５の近傍を給気口８側から排気口９側に向かって流れる処理ガスを凸部２３によって十分に方向変換させることが可能となるような大きさにする必要がある。 In the first and second embodiments described above, one convex portion 23 is formed by extending one plate-like body or columnar body in the depth direction. A plurality of plate-like bodies or columnar bodies may be arranged so as to extend in the depth direction. In this case, gaps may be provided between the plurality of plate-like bodies or columnar bodies in the depth direction. However, the size of the gap is such that the processing gas flowing in the vicinity of the base surface 5 from the side of the air supply port 8 toward the side of the exhaust port 9 can be sufficiently changed in direction by the convex portion 23. need to be

以上の第一及び第二実施形態では、搬送ローラ１７がディスク状をなすものであるが、ディスク状よりも軸方向に長尺な円筒形状であってもよく、また奥行方向に配列される搬送ローラ１７の個数も一列につき１個であってもよい。但し、そのようにする場合には、搬送ローラ１７が邪魔にならずに基面５の近傍を給気口８側から排気口９側に向かって十分な量の処理ガスを流すことができるようにし、且つ、ガラス板Ｇの撓みの問題が生じないようにする必要がある。 In the first and second embodiments described above, the transport roller 17 has a disc shape, but it may have a cylindrical shape that is longer in the axial direction than the disc shape. The number of rollers 17 may also be one per row. However, in such a case, a sufficient amount of processing gas can flow in the vicinity of the base surface 5 from the air supply port 8 side toward the exhaust port 9 side without the conveying roller 17 becoming an obstacle. In addition, it is necessary to prevent the problem of bending of the glass plate G from occurring.

以上の第一及び第二実施形態では、基台板１０の上面を基面５とし、該基面５に、給気口８、排気口９及び凸部２３を配置したが、これに代えて、天板２４、２５の下面を基面とし、該基面に、給気口、排気口及び凸部を配置してもよい。この場合には、基台板１０の上面（基面５）が対向面となり、且つ、ガラス板Ｇの上面Ｇｂが処理面となる。 In the first and second embodiments described above, the upper surface of the base plate 10 is used as the base surface 5, and the air supply port 8, the exhaust port 9, and the convex portion 23 are arranged on the base surface 5. , the lower surfaces of the top plates 24 and 25 may be used as the base surface, and the air supply port, the exhaust port and the projection may be arranged on the base surface. In this case, the upper surface (base surface 5) of the base plate 10 is the opposing surface, and the upper surface Gb of the glass plate G is the processing surface.

１ 処理槽
５ 基面
６ 対向面
６ａ 対向面
６ｂ 対向面
７ 処理空間
７ａ 処理空間
７ｂ 処理空間
８ 給気口
９ 排気口
１７ 搬送ローラ
２２ 搬送手段
２３ 凸部
２７ 突出部
Ｇ ガラス板
Ｇａ ガラス板の処理面 1 Processing tank 5 Base surface 6 Opposing surface 6a Opposing surface 6b Opposing surface 7 Processing space 7a Processing space 7b Processing space 8 Air supply port 9 Exhaust port 17 Conveying roller 22 Conveying means 23 Convex portion 27 Protruding portion G Glass plate Ga Glass plate Treated surface

Claims (6)

給気口及び排気口が配置された基面と該基面に対向する対向面との間に処理空間が形成され、前記給気口から前記処理空間に給気され且つ前記処理空間から前記排気口に排気される処理ガスを用いて、前記処理空間内でガラス板の処理面にエッチング処理を施す処理槽と、
前記処理空間内で前記ガラス板の処理面と前記基面とが対向するように前記ガラス板を搬送する搬送手段と、
を備えたガラス板の製造装置であって、
前記給気口と前記排気口との相互間における前記給気口から前記排気口側に離隔した位置に、前記基面から前記対向面側に向かって突出する凸部を形成したことを特徴とするガラス板の製造装置。 A processing space is formed between a base surface on which an air supply port and an exhaust port are arranged and an opposing surface facing the base surface, and air is supplied to the processing space from the air supply port and exhausted from the processing space. a processing tank for etching the processing surface of the glass plate in the processing space using the processing gas exhausted to the port;
a transport means for transporting the glass plate so that the processing surface of the glass plate and the base surface face each other in the processing space;
A glass plate manufacturing apparatus comprising
A protrusion projecting from the base surface toward the opposing surface is formed at a position between the air supply port and the exhaust port and separated from the air supply port toward the exhaust port. glass plate manufacturing equipment. 前記凸部は、前記ガラス板の搬送方向と交差する方向に延びると共に、前記ガラス板及び前記凸部の前記搬送方向と交差する方向の長さは、前記ガラス板よりも前記凸部の方が長いことを特徴とする請求項１に記載のガラス板の製造装置。 The convex portion extends in a direction intersecting with the conveying direction of the glass plate, and the length of the glass plate and the convex portion in the direction intersecting with the conveying direction is longer in the convex portion than in the glass plate. 2. The apparatus for manufacturing a glass plate according to claim 1, wherein the length is long. 前記搬送手段は、前記ガラス板を支持する搬送ローラを、前記給気口と前記排気口との相互間における前記ガラス板の搬送方向の複数箇所に備えると共に、これら搬送ローラの前記搬送方向の相互間に前記凸部が配列されていることを特徴とする請求項１または２に記載のガラス板の製造装置。 The conveying means includes conveying rollers for supporting the glass plate provided at a plurality of locations in the conveying direction of the glass plate between the air supply port and the exhaust port, 3. The apparatus for manufacturing a glass plate according to claim 1, wherein the projections are arranged between them. 前記凸部は、前記ガラス板の搬送方向に複数配列されていることを特徴とする請求項１～３の何れかに記載のガラス板の製造装置。 4. The apparatus for manufacturing a glass sheet according to claim 1, wherein a plurality of said projections are arranged in the conveying direction of said glass sheet. 前記給気口は、前記基面から前記対向面側に向かって突出する突出部に形成されていることを特徴とする請求項１～４の何れかに記載のガラス板の製造装置。 5. The apparatus for manufacturing a glass sheet according to claim 1, wherein the air supply port is formed in a projecting portion projecting from the base surface toward the facing surface. 給気口及び排気口が配置された基面と該基面に対向する対向面との間に処理空間が形成された処理槽で、前記給気口から前記処理空間に給気され且つ前記処理空間から前記排気口に排気される処理ガスを用いて、前記処理空間内に存するガラス板の処理面にエッチング処理を施すエッチング工程と、
搬送手段を用いて、前記処理空間内で前記ガラス板の処理面と前記基面とが対向するように前記ガラス板を搬送する搬送工程と、
を備えたガラス板の製造方法であって、
前記エッチング工程では、前記給気口と前記排気口との相互間における前記給気口から前記排気口側に離隔した位置に形成され且つ前記基面から前記対向面側に向かって突出する凸部に、前記給気口側から前記排気口側に向かって流れる前記処理ガスを当てることを特徴とするガラス板の製造方法。 A processing tank in which a processing space is formed between a base surface on which an air supply port and an exhaust port are arranged and a surface facing the base surface, wherein air is supplied from the air supply port to the processing space and the processing is performed. an etching step of etching a processing surface of a glass plate existing in the processing space using a processing gas exhausted from the space to the exhaust port;
a conveying step of conveying the glass plate using a conveying means so that the processing surface of the glass plate and the base surface face each other in the processing space;
A method for manufacturing a glass plate comprising
In the etching step, a convex portion is formed at a position between the air supply port and the exhaust port and is spaced from the air supply port toward the exhaust port and protrudes from the base surface toward the opposing surface. and applying the processing gas flowing from the air supply port side to the exhaust port side.
JP2019208663A 2019-11-19 2019-11-19 Glass plate manufacturing apparatus and manufacturing method thereof Active JP7290103B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019208663A JP7290103B2 (en) 2019-11-19 2019-11-19 Glass plate manufacturing apparatus and manufacturing method thereof
PCT/JP2020/039458 WO2021100392A1 (en) 2019-11-19 2020-10-20 Apparatus for manufacturing glass plate and method for manufacturing same
TW109138190A TW202120452A (en) 2019-11-19 2020-11-03 Apparatus for manufacturing glass plate and method for manufacturing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019208663A JP7290103B2 (en) 2019-11-19 2019-11-19 Glass plate manufacturing apparatus and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JP2021080129A JP2021080129A (en) 2021-05-27
JP7290103B2 true JP7290103B2 (en) 2023-06-13

Family

ID=75964070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019208663A Active JP7290103B2 (en) 2019-11-19 2019-11-19 Glass plate manufacturing apparatus and manufacturing method thereof

Country Status (3)

Country Link
JP (1) JP7290103B2 (en)
TW (1) TW202120452A (en)
WO (1) WO2021100392A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012126584A (en) 2010-12-13 2012-07-05 Sekisui Chem Co Ltd End treating method and apparatus for glass plate
JP2017052678A (en) 2015-09-11 2017-03-16 日本電気硝子株式会社 Method and apparatus for producing glass plate
JP2017052679A (en) 2015-09-11 2017-03-16 日本電気硝子株式会社 Method and apparatus for producing glass plate
WO2018092556A1 (en) 2016-11-16 2018-05-24 日本電気硝子株式会社 Method for manufacturing glass substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012126584A (en) 2010-12-13 2012-07-05 Sekisui Chem Co Ltd End treating method and apparatus for glass plate
JP2017052678A (en) 2015-09-11 2017-03-16 日本電気硝子株式会社 Method and apparatus for producing glass plate
JP2017052679A (en) 2015-09-11 2017-03-16 日本電気硝子株式会社 Method and apparatus for producing glass plate
WO2018092556A1 (en) 2016-11-16 2018-05-24 日本電気硝子株式会社 Method for manufacturing glass substrate

Also Published As

Publication number Publication date
WO2021100392A1 (en) 2021-05-27
JP2021080129A (en) 2021-05-27
TW202120452A (en) 2021-06-01

Similar Documents

Publication Publication Date Title
JP4494269B2 (en) Substrate processing equipment
JP2006222209A (en) Air floating unit, transfer method, and air floating transfer apparatus
CN108249159B (en) Floating transfer device and substrate processing device
JP4530825B2 (en) In-line type plasma processing equipment
JP7290103B2 (en) Glass plate manufacturing apparatus and manufacturing method thereof
JP2008130892A (en) Air float carrying apparatus and air carrying method
KR102588108B1 (en) Glass plate manufacturing method and manufacturing device
JP5668472B2 (en) Wiring board manufacturing method
JP6641663B2 (en) Method for manufacturing glass plate and apparatus for manufacturing the same
KR20190084031A (en) Manufacturing method of glass substrate
KR101965297B1 (en) The nozzle and Apparatus for treating substrate with the nozzle
JP2005206304A (en) Pneumatic floating conveyer
JP6905672B2 (en) Glass substrate manufacturing method
TWI603421B (en) Wet chemistry process apparatus
KR102497947B1 (en) Manufacturing method of glass plate and manufacturing apparatus therefor
JP6667797B2 (en) Manufacturing method of glass substrate
KR101990219B1 (en) Floating conveying device and substrate processing apparatus
JP2009076770A (en) Substrate-treating equipment
JP2011086871A (en) Substrate processing apparatus
KR20140099061A (en) Substrate floating unit and substrate treating apparatus
KR20140071040A (en) Substrate treating apparatus
JP2009295806A (en) Surface processing apparatus
JPH11297598A (en) Substrate treatment apparatus
JP2008088510A (en) Treatment liquid supply apparatus
JP2006228659A (en) Plasma treatment apparatus

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220712

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230213

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230220

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230502

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230515

R150 Certificate of patent or registration of utility model

Ref document number: 7290103

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150