JP7267799B2 - Load sensor with tuning fork oscillator - Google Patents

Load sensor with tuning fork oscillator Download PDF

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JP7267799B2
JP7267799B2 JP2019057493A JP2019057493A JP7267799B2 JP 7267799 B2 JP7267799 B2 JP 7267799B2 JP 2019057493 A JP2019057493 A JP 2019057493A JP 2019057493 A JP2019057493 A JP 2019057493A JP 7267799 B2 JP7267799 B2 JP 7267799B2
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load
load sensor
tuning fork
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fork vibrator
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武史 木村
政史 石田
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Shinko Denshi Co Ltd
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Description

本発明は、音叉振動子を備える荷重センサに関し、音叉振動子破損防止用のストッパの小型化を図るものである。 The present invention relates to a load sensor having a tuning fork vibrator, and is intended to reduce the size of a stopper for preventing damage to the tuning fork vibrator.

音叉振動子を備える荷重センサ（音叉振動子付き荷重センサ）は、例えば、下記特許文献１に記載されている。
この荷重センサは、図７に示すように、センサ基板１と、センサ基板１に支点５を介して接続する梃子部４と、梃子部４の一端とセンサ基板１との間に接続する音叉振動子２と、梃子部４の他端に接続して被検体の荷重を伝える荷重作用部３とを備えており、金属板をワイヤーカットで図示の形状に切り抜いて形成されている。
この荷重センサでは、荷重により荷重作用部３に下方向の力が作用すると、梃子部４を通じて音叉振動子２を上方に引っ張る力が音叉振動子２に加わる。そのため、音叉振動子２の発振周波数が変化し、その変化を検出することで荷重作用部３に作用した荷重が計測される。 A load sensor equipped with a tuning fork vibrator (a load sensor with a tuning fork vibrator) is described, for example, in Patent Document 1 below.
As shown in FIG. 7, this load sensor includes a sensor substrate 1, a lever portion 4 connected to the sensor substrate 1 via a fulcrum 5, and a tuning fork vibration sensor connected between one end of the lever portion 4 and the sensor substrate 1. It is provided with an element 2 and a load applying part 3 connected to the other end of the lever part 4 to transfer the load of the object, and is formed by cutting out a metal plate into the shape shown in the figure by wire cutting.
In this load sensor, when a downward force acts on the load applying portion 3 due to the load, a force that pulls the tuning fork vibrator 2 upward is applied to the tuning fork vibrator 2 through the lever portion 4 . Therefore, the oscillation frequency of the tuning fork vibrator 2 changes, and the load applied to the load applying portion 3 is measured by detecting the change.

しかし、荷重作用部３に何かが当たるなどして、荷重方向とは逆の力（突き上げ力）が荷重作用部３に作用すると、梃子部４を通じて音叉振動子２を圧縮する方向の力が音叉振動子２に加わり、その力が大きい場合には、音叉振動子２が破損（座屈）する。
従来の音叉振動子付き荷重センサでは、突き上げ力により荷重作用部３が約１００μｍ以上突き上げられると、音叉振動子２が破損する恐れがある。 However, if the load acting portion 3 is hit by something and a force (push-up force) opposite to the load direction acts on the load acting portion 3, the force in the direction that compresses the tuning fork vibrator 2 through the lever portion 4 is applied. When the force applied to the tuning fork vibrator 2 is large, the tuning fork vibrator 2 is damaged (buckled).
In the conventional load sensor with a tuning fork vibrator, the tuning fork vibrator 2 may be damaged if the load applying portion 3 is pushed up by about 100 μm or more due to the pushing force.

こうした事態を防ぐため、音叉振動子付き荷重センサでは、荷重作用部３に対する突き上げ量を抑制するためのストッパ（突上げストッパ）が荷重作用部３の直上に設けられている。 In order to prevent such a situation, the load sensor with the tuning fork vibrator is provided with a stopper (thrust-up stopper) directly above the load-applying portion 3 for suppressing the amount of push-up to the load-applying portion 3 .

図８は、従来の音叉振動子付き荷重センサ１０の突上げストッパ３１を示している。この荷重センサでは、ワイヤーカットでセンサ基板１１に切り込みを入れて点線で示す形状３０を形成し、これを荷重作用部１３の当接部１３１の真上の位置まで折り曲げて突上げストッパ３１としている。 FIG. 8 shows the push-up stopper 31 of the conventional load sensor 10 with a tuning fork vibrator. In this load sensor, the sensor substrate 11 is cut by wire cutting to form a shape 30 indicated by a dotted line, and this is bent to a position just above the contact portion 131 of the load acting portion 13 to form a push-up stopper 31 . .

突上げストッパは、計量中に荷重作用部１３と触れないように、荷重作用部３との間に隙間を設ける必要があるが、この隙間が大き過ぎると、突き上げ時に音叉振動子２の破損が防止できない。そのため、この隙間は、数１０μｍ～１００μｍ程度でなければならない。
しかし、量産性を考慮すると、数１０μｍの隙間を細いワイヤで直接ワイヤーカット加工することは現実的でない。 It is necessary to provide a gap between the push-up stopper and the load acting part 13 so that it does not come into contact with the load acting part 13 during weighing. cannot be prevented. Therefore, this gap must be about several tens of μm to 100 μm.
However, in consideration of mass productivity, it is not realistic to directly wire-cut a gap of several tens of μm with a fine wire.

そこで、図８の荷重センサ１０では、突上げストッパとなる点線形状３０をワイヤーカットで形成し、その後、点線形状３０を曲げ加工して、荷重作用部１３の当接部１３１との間隔が数１０μｍの突上げストッパ３１を形成している。 Therefore, in the load sensor 10 of FIG. 8 , the dotted line shape 30 that serves as a push-up stopper is formed by wire cutting, and then the dotted line shape 30 is bent so that the distance between the load applying portion 13 and the contact portion 131 is increased by several. A push-up stopper 31 of 10 μm is formed.

特開２００３－２２７７４３号公報Japanese Patent Application Laid-Open No. 2003-227743

しかし、曲げ加工で形成した突上げストッパ３１は、荷重センサの多くのスペースを占有してしまうため、より小型な音叉振動子付き荷重センサを設計する際の障害となっていた。
本発明は、こうした事情を考慮して創案したものであり、小型の突上げストッパを備える音叉振動子付き荷重センサを提供することを目的としている。 However, the push-up stopper 31 formed by bending occupies a large space of the load sensor, which is an obstacle in designing a smaller load sensor with a tuning fork vibrator.
SUMMARY OF THE INVENTION The present invention has been devised in consideration of such circumstances, and an object of the present invention is to provide a tuning fork vibrator-equipped load sensor having a small push-up stopper.

本発明は、音叉振動子を備える荷重センサであって、荷重センサ基部と、荷重センサ基部に支点を介して接続する梃子部と、梃子部に接続された、被検体の荷重が作用する荷重作用部と、梃子部に、支点を間にして、荷重作用部とは反対の側に直接又は介在部材を介して接続された音叉振動子と、音叉振動子に対して圧縮力を加える方向の荷重作用部の動きを制限するストッパ部と、を備えている。そして、ストッパ部は、ピンと、ピンの周縁の一部を除く部分周縁に接触してピンを保持するピン受入部と、を有し、ピン受入部は、荷重センサ基部の縁部から切り込まれた切欠きを備え、この切欠きの凹部形状が、ピンの部分周縁の形状に対応しており、ピン受入部と接触しないピンの一部の周縁が、所定距離隔てて荷重作用部に対向するように構成されている。
このストッパ部は多くの占有面積を必要としないため、音叉振動子付き荷重センサを小型に構成できる。 The present invention is a load sensor equipped with a tuning fork vibrator, comprising a load sensor base, a lever connected to the load sensor base via a fulcrum, and a load acting on which the load of a subject is applied, connected to the lever. A tuning fork vibrator connected directly or via an intervening member to the lever part on the side opposite to the load acting part with the fulcrum in between, and a load in the direction of applying a compressive force to the tuning fork vibrator. and a stopper portion that restricts movement of the action portion. The stopper portion has a pin and a pin receiving portion that holds the pin by contacting a partial peripheral edge of the pin excluding a part of the peripheral edge of the pin, and the pin receiving portion is cut from the edge of the load sensor base. The recessed shape of the notch corresponds to the shape of the partial peripheral edge of the pin, and the partial peripheral edge of the pin that does not contact the pin receiving portion faces the load applying portion at a predetermined distance. is configured as
Since this stopper does not require a large area, the load sensor with the tuning fork vibrator can be made compact.

また、本発明の音叉振動子付き荷重センサでは、ピンを、ピン受入部に圧入して固定している。 Further, in the load sensor with tuning fork vibrator of the present invention, the pin is press-fitted into the pin receiving portion and fixed.

また、本発明の音叉振動子付き荷重センサでは、切欠きの一部を画成する荷重センサ基部の部分が弾性を備えることが望ましい。
そうすることで、ピンのピン受入部への圧入が容易になり、また、圧入されたピンが弾性力により確実に保持される。 Further, in the load sensor with tuning fork vibrator of the present invention, it is desirable that the portion of the load sensor base defining a part of the notch has elasticity.
By doing so, the pin can be easily press-fitted into the pin-receiving portion, and the press-fitted pin can be reliably held by the elastic force.

また、本発明の音叉振動子付き荷重センサでは、ピンを、円柱の平行ピンにすることが望ましい。
ピンが円柱であれば、ピンの軸回りの回転によってピンと荷重作用部との距離が変化する恐れがない。 In addition, in the load sensor with tuning fork vibrator of the present invention, it is desirable that the pin is a cylindrical parallel pin.
If the pin is cylindrical, there is no possibility that the distance between the pin and the load application portion will change due to rotation of the pin about its axis.

また、本発明の音叉振動子付き荷重センサでは、被検体の荷重が荷重作用部の下方に作用する場合は、ストッパ部を荷重作用部の直上に配置して荷重作用部の上方への動きを制限する。また、被検体の荷重が荷重作用部の上方に作用する場合は、ストッパ部を荷重作用部の直下に配置して荷重作用部の下方への動きを制限する。 In addition, in the load sensor with tuning fork vibrator of the present invention, when the load of the subject acts on the lower portion of the load acting portion, the stopper portion is arranged directly above the load acting portion to prevent the upward movement of the load acting portion. Restrict. Further, when the load of the subject acts on the load acting portion above, the stopper portion is arranged directly below the load acting portion to limit the downward movement of the load acting portion.

本発明の音叉振動子付き荷重センサは、ストッパ部が多くの占有面積を必要としないため、小型に構成できる。 The load sensor with a tuning fork vibrator according to the present invention can be made compact because the stopper portion does not require a large area to be occupied.

本発明の実施形態に係る音叉振動子付き荷重センサを示す斜視図1 is a perspective view showing a load sensor with a tuning fork vibrator according to an embodiment of the present invention; FIG. 図１の音叉振動子付き荷重センサの平面図Plan view of load sensor with tuning fork vibrator in Fig. 1 ストッパ部にピンを固定する前の音叉振動子付き荷重センサを示す図Diagram showing the load sensor with tuning fork vibrator before fixing the pin to the stopper 図３のピン受入部周辺の拡大図Enlarged view around the pin receiving part in Fig. 3 ストッパ部にピンを固定したときのピン受入部の形状を示す拡大図Enlarged view showing the shape of the pin receiving portion when the pin is fixed to the stopper portion ピンが固定されたピン受入部周辺の拡大図Enlarged view around the pin receiving part where the pin is fixed 音叉振動子付き荷重センサを示す図Diagram showing load sensor with tuning fork vibrator 従来のストッパを備える音叉振動子付き荷重センサを示す図Diagram showing a load sensor with tuning fork vibrator with a conventional stopper

図１の斜視図は、本発明の実施形態に係る音叉振動子付き荷重センサ１０を示している。図２は、その平面図である。
この荷重センサは、荷重センサ基部１１に支点１５を介して接続する梃子部１４と、被検体の荷重が下向きに作用する荷重作用部１３と、支点１５を間にして荷重作用部１３とは反対側で梃子部１４に接続する音叉振動子１２と、荷重作用部１３の突き上げ量を制限するストッパ部２０とを備えている。 A perspective view of FIG. 1 shows a load sensor 10 with a tuning fork vibrator according to an embodiment of the present invention. FIG. 2 is a plan view thereof.
This load sensor has a lever portion 14 connected to the load sensor base portion 11 via a fulcrum 15, a load acting portion 13 on which the load of the subject acts downward, and a load acting portion 13 opposite to the load acting portion 13 with the fulcrum 15 therebetween. A tuning fork vibrator 12 connected to the lever portion 14 on the side thereof, and a stopper portion 20 for limiting the thrust amount of the load applying portion 13 are provided.

ストッパ部２０は、図１及び図２に示す円柱状の平行ピン２１を、図３に示すピン受入部２２に圧入して構成されている。
ピン受入部２２は、図４に拡大して示すように、荷重センサ基部１１の縁部からワイヤーカットで切り込まれて形成された切欠きであり、その切欠きの奥部には、平行ピン２１の円周の凡そ３／４の長さの周縁（特許請求の範囲で言う“部分周縁”）の形状に対応する弧状部分２２１が形成されている。 The stopper portion 20 is configured by press-fitting a cylindrical parallel pin 21 shown in FIGS. 1 and 2 into a pin receiving portion 22 shown in FIG.
The pin receiving portion 22 is a notch formed by wire-cutting from the edge of the load sensor base 11, as shown in an enlarged view in FIG. An arcuate portion 221 corresponding to the shape of a peripheral edge (a "partial peripheral edge" in the claims) of approximately 3/4 length of the circumference of 21 is formed.

また、弧状部分２２１への導入部を形成する荷重センサ基部１１の部分２２２は、弧状部分２２１への導入口を狭める方向の弾性を有している。
そのため、平行ピン２１をピン受入部２２に圧入するとき、平行ピン２１によって荷重センサ基部１１の部分２２２が押し広げられ、この部分２２２の弾性で平行ピン２１が確実にピン受入部２２で保持される。図５は、平行ピン２１を圧入したときのピン受入部２２の形状を、平行ピン２１を除いた状態で示している。 Also, the portion 222 of the load sensor base 11 forming the lead-in portion to the arc-shaped portion 221 has elasticity in the direction of narrowing the lead-in port to the arc-shaped portion 221 .
Therefore, when the parallel pin 21 is press-fitted into the pin receiving portion 22 , the portion 222 of the load sensor base portion 11 is expanded by the parallel pin 21 , and the parallel pin 21 is securely held by the pin receiving portion 22 due to the elasticity of this portion 222 . be. FIG. 5 shows the shape of the pin receiving portion 22 when the parallel pin 21 is press-fitted, with the parallel pin 21 removed.

また、図６は、平行ピン２１が圧入されたピン受入部２２の状態を示している。このとき、平行ピン２１の円周の一部は、ピン受入部２２の弧状部分２２１から露出しており、この露出した部分が荷重作用部１３の当接部１３１と５０μｍの間隔で対向している。
そのため、荷重作用部１３に突き上げ力が作用しても、荷重作用部１３が５０μｍ上昇すると、平行ピン２１により上昇が抑えられ、その結果、音叉振動子１２の座屈が防止できる。 6 shows the state of the pin receiving portion 22 in which the parallel pin 21 is press-fitted. At this time, a part of the circumference of the parallel pin 21 is exposed from the arcuate portion 221 of the pin receiving portion 22, and this exposed portion faces the contact portion 131 of the load applying portion 13 at a distance of 50 μm. there is
Therefore, even if a thrusting force acts on the load applying portion 13, if the load applying portion 13 rises by 50 μm, the rise is suppressed by the parallel pin 21, and as a result, the tuning fork vibrator 12 can be prevented from buckling.

このストッパ部２０は、図８に示すストッパ３１に比べて極めて小さくできる。
また、平行ピン２１と荷重作用部１３の当接部１３１との間隔のばらつきが小さい。ワイヤーカットの加工誤差が２～３μm以下であり、ピンの公差が３μｍ以下であるから、それらを加算しても、誤差は６μｍ以下である。
また、ピン受入部２２の形状は単純であるため、短時間でのワイヤーカット加工で製作することができる。 This stopper portion 20 can be made extremely smaller than the stopper 31 shown in FIG.
In addition, variations in the distance between the parallel pin 21 and the contact portion 131 of the load applying portion 13 are small. Since the wire cut processing error is 2 to 3 μm or less and the pin tolerance is 3 μm or less, even if these are added, the error is 6 μm or less.
Further, since the shape of the pin receiving portion 22 is simple, it can be manufactured by wire cutting in a short time.

なお、ストッパ部２０で用いるピンは、円柱形以外の形状であっても良い。しかし、円柱形の場合は、荷重作用部１３の当接部１３１との間隔がピンの軸回りの回転角度に依存しないため、有利である。
また、これまで音叉振動子１２が梃子部１４に直接接続する場合について説明したが、音叉振動子１２は、二段目の梃子等の介在部材を介して梃子部１４に接続する構造であっても良い。
また、ここでは、荷重作用部１３の上方への突き上げ力が音叉振動子１２の座屈をもたらす場合の構造について説明したが、荷重により荷重作用部に上方への力が加わり、この力が音叉振動子に引っ張り力として作用するように構成された荷重センサでは、荷重作用部１３の下方への力が音叉振動子１２の座屈をもたらすから、この場合は、ストッパ部２０を荷重作用部１３の真下に配置する必要がある。 The pin used in the stopper portion 20 may have a shape other than the cylindrical shape. However, the cylindrical shape is advantageous because the distance between the load acting portion 13 and the contact portion 131 does not depend on the rotation angle of the pin about its axis.
Also, the case where the tuning fork vibrator 12 is directly connected to the lever portion 14 has been described so far, but the tuning fork vibrator 12 is structured to be connected to the lever portion 14 via an intermediate member such as a second stage lever. Also good.
Also, here, the structure in which the upward pushing force of the load applying portion 13 causes buckling of the tuning fork vibrator 12 has been described. In the load sensor configured to act as a tensile force on the vibrator, the downward force of the load applying portion 13 causes the tuning fork vibrator 12 to buckle. should be placed underneath the

本発明の音叉振動子付き荷重センサは、小型に構成できるため、種々の計量器に組み込むことが可能であり、広い分野で利用することができる。 INDUSTRIAL APPLICABILITY The load sensor with a tuning fork vibrator of the present invention can be constructed in a small size, so that it can be incorporated in various weighing instruments and can be used in a wide range of fields.

１０ 音叉振動子付き荷重センサ
１１ センサ基板
１２ 音叉振動子
１３ 荷重作用部
１４ 梃子部
１５ 支点
２０ ストッパ部
２１ 平行ピン
２２ ピン受入部
３０ 突上げストッパの曲げ加工前の形状
３１ 突上げストッパ
１３１ 当接部
２２１ 弧状部分
２２２ 弾性部 REFERENCE SIGNS LIST 10 load sensor with tuning fork vibrator 11 sensor substrate 12 tuning fork vibrator 13 load acting portion 14 lever portion 15 fulcrum 20 stopper portion 21 parallel pin 22 pin receiving portion 30 shape of push-up stopper before bending 31 push-up stopper 131 abutment Part 221 Arc-shaped part 222 Elastic part

Claims (6)

音叉振動子を備える荷重センサであって、
荷重センサ基部と、
前記荷重センサ基部に支点を介して接続する梃子部と、
前記梃子部に接続された、被検体の荷重が作用する荷重作用部と、
前記梃子部に、前記支点を間にして、前記荷重作用部とは反対の側に直接又は介在部材を介して接続された前記音叉振動子と、
前記音叉振動子に対して圧縮力を加える方向の前記荷重作用部の動きを制限するストッパ部と、
を備え、
前記ストッパ部は、ピンと、前記ピンの周縁の一部を除く部分周縁に接触して前記ピンを保持するピン受入部と、を有し、
前記ピン受入部は、前記荷重センサ基部の縁部から切り込まれた切欠きを備え、前記切欠きの凹部形状が、前記ピンの前記部分周縁の形状に対応しており、
前記ピン受入部と接触しない前記ピンの一部の周縁が、所定距離隔てて前記荷重作用部に対向している、
荷重センサ。 A load sensor comprising a tuning fork vibrator,
a load sensor base;
a lever portion connected to the load sensor base via a fulcrum;
a load applying section on which the load of the subject acts, connected to the lever section;
the tuning fork vibrator connected directly or via an intervening member to the lever portion on the side opposite to the load acting portion with the fulcrum therebetween;
a stopper portion that restricts movement of the load applying portion in a direction of applying a compressive force to the tuning fork vibrator;
with
The stopper portion has a pin and a pin receiving portion that holds the pin in contact with a partial peripheral edge of the pin except for a part of the peripheral edge of the pin,
The pin receiving portion has a notch cut from the edge of the load sensor base, and the concave shape of the notch corresponds to the shape of the partial peripheral edge of the pin,
A peripheral edge of a portion of the pin that does not contact the pin receiving portion faces the load applying portion at a predetermined distance.
load sensor. 請求項１に記載の音叉振動子を備える荷重センサであって、
前記ピンが、前記ピン受入部に圧入されて固定される、荷重センサ。 A load sensor comprising the tuning fork vibrator according to claim 1,
A load sensor, wherein the pin is press-fitted and fixed in the pin receiving portion. 請求項１又は２に記載の音叉振動子を備える荷重センサであって、
前記切欠きの一部を画成する前記荷重センサ基部の部分が弾性を備える、荷重センサ。 A load sensor comprising the tuning fork vibrator according to claim 1 or 2 ,
A load sensor, wherein a portion of the load sensor base defining a portion of the notch is resilient. 請求項１から３のいずれか１項に記載の音叉振動子を備える荷重センサであって、
前記ピンが、円柱の平行ピンである、荷重センサ。 A load sensor comprising the tuning fork vibrator according to any one of claims 1 to 3 ,
The load sensor, wherein the pins are cylindrical parallel pins. 請求項１から４のいずれか１項に記載の音叉振動子を備える荷重センサであって、
前記ストッパ部が、前記荷重作用部の直上にあって、前記荷重作用部の上方への動きを制限する、荷重センサ。 A load sensor comprising the tuning fork vibrator according to any one of claims 1 to 4 ,
The load sensor, wherein the stopper portion is located directly above the load applying portion and restricts upward movement of the load applying portion. 請求項１から４のいずれか１項に記載の音叉振動子を備える荷重センサであって、
前記ストッパ部が、前記荷重作用部の直下にあって、前記荷重作用部の下方への動きを制限する、荷重センサ。 A load sensor comprising the tuning fork vibrator according to any one of claims 1 to 4 ,
The load sensor, wherein the stopper portion is located directly below the load applying portion and restricts downward movement of the load applying portion.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050284670A1 (en) 2004-06-24 2005-12-29 Shinko Denshi Co., Ltd. Weighing apparatus with roberval mechanism
JP2009121950A (en) 2007-11-15 2009-06-04 Shinko Denshi Kk Tuning-fork vibration type load sensor
JP2010249731A (en) 2009-04-17 2010-11-04 Yamato Scale Co Ltd Load cell equipped with overload prevention mechanism
JP2018128438A (en) 2017-02-11 2018-08-16 新光電子株式会社 Load detection sensor including tuning-fork vibrator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050284670A1 (en) 2004-06-24 2005-12-29 Shinko Denshi Co., Ltd. Weighing apparatus with roberval mechanism
JP2009121950A (en) 2007-11-15 2009-06-04 Shinko Denshi Kk Tuning-fork vibration type load sensor
JP2010249731A (en) 2009-04-17 2010-11-04 Yamato Scale Co Ltd Load cell equipped with overload prevention mechanism
JP2018128438A (en) 2017-02-11 2018-08-16 新光電子株式会社 Load detection sensor including tuning-fork vibrator

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