JP7228413B2 - プラズマ処理方法、及び、プラズマ処理装置 - Google Patents
プラズマ処理方法、及び、プラズマ処理装置 Download PDFInfo
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- 238000012545 processing Methods 0.000 title claims description 84
- 238000003672 processing method Methods 0.000 title claims description 24
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- 238000005530 etching Methods 0.000 claims description 160
- 238000000034 method Methods 0.000 claims description 50
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- 239000000463 material Substances 0.000 claims description 23
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 18
- 125000001153 fluoro group Chemical group F* 0.000 claims description 14
- 125000004432 carbon atom Chemical group C* 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 7
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 6
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 claims description 5
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical group [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 238000009832 plasma treatment Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 4
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- 239000002826 coolant Substances 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
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- 101100328843 Dictyostelium discoideum cofB gene Proteins 0.000 description 1
- JNCMHMUGTWEVOZ-UHFFFAOYSA-N F[CH]F Chemical compound F[CH]F JNCMHMUGTWEVOZ-UHFFFAOYSA-N 0.000 description 1
- 108010081348 HRT1 protein Hairy Proteins 0.000 description 1
- 102100021881 Hairy/enhancer-of-split related with YRPW motif protein 1 Human genes 0.000 description 1
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- 230000002159 abnormal effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
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- IYRWEQXVUNLMAY-UHFFFAOYSA-N carbonyl fluoride Chemical compound FC(F)=O IYRWEQXVUNLMAY-UHFFFAOYSA-N 0.000 description 1
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- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Description
Claims (11)
- 被加工物を処理するプラズマ処理方法であって、
前記被加工物は、第1の層と第2の層とを備え、
前記第2の層は、複数の開口を備え、前記第1の層の上面に設けられ、
前記開口は、前記上面を露出し、
前記第1の層は、複数のエッチングストップ層を備え、
前記第1の層内において複数の前記エッチングストップ層の各々から前記上面までの長さは、互いに異なり、
前記第1の層の材料は、シリコン酸化物であり、
前記第2の層の材料は、炭素を含み、
当該方法は、前記被加工物が収容されたプラズマ処理装置のチャンバ内において処理シーケンスを繰り返し実行し、
前記処理シーケンスは、
第1のガスのプラズマを生成して、前記被加工物に対し、前記第2の層をマスクとして前記開口を介した第1のエッチングを行い、
前記第1のガスのプラズマによる前記第1のエッチングの後に、前記被加工物に対し、第2のガスのプラズマを生成して第2のエッチングを行い、前記第1のエッチングにより前記開口の側面に付着したポリマーを除去し、前記第1のエッチングによって露出された前記エッチングストップ層上に保護膜を形成し、
前記第1のガスは、炭素原子及びフッ素原子からなるガスを含み、
前記第2のガスは、炭素原子、フッ素原子及び水素原子からなるガスを含み、
前記第1のガスのプラズマを生成して行う前記第1のエッチングにおいて、該第1のガスのプラズマによって高次のフルオロカーボンが生成され、
前記第2のガスのプラズマを生成して行う前記第2のエッチングにおいて、該第2のガスのプラズマによって低次のフルオロカーボン又は低次のハイドロフルオロカーボンが生成される、
プラズマ処理方法。 - 前記第1のガスは、C4F6ガス、C4F8ガスのうち、少なくとも一のガスを含む、
請求項1に記載のプラズマ処理方法。 - 前記第2のガスは、CHF3ガス、CH2F2ガス、CH3Fガスのうち、少なくとも一のガスを含む、
請求項1又は2に記載のプラズマ処理方法。 - 前記第2のガスは、COガス、CO2ガス、O2ガス、N2ガス、H2ガスのうち、少なくとも一のガスを更に含む、
請求項1~3の何れか一項に記載のプラズマ処理方法。 - 前記エッチングストップ層の材料は、タングステンである、
請求項1~4の何れか一項に記載のプラズマ処理方法。 - 前記第1のガスのプラズマを生成して行う前記第1のエッチングにおいて、主に前記第2の層上に、前記高次のフルオロカーボンが付着し、
前記第2のガスのプラズマを生成して行う前記第2のエッチングにおいて、前記処理シーケンスの実行によって形成されるホールを介して前記エッチングストップ層が露出されている場合に、該ホールを介して、前記エッチングストップ層上に、前記低次のフルオロカーボン又は前記低次のハイドロフルオロカーボンが付着する、
請求項1~5の何れか一項に記載のプラズマ処理方法。 - チャンバと、
前記チャンバ内に設けられた載置台と、
前記チャンバ内に、第1のガス、第2のガスを供給するように設けられたガス供給系と、
前記第1のガス、前記第2のガスを励起させるために高周波電力を供給するように設けられた高周波電源と、
前記ガス供給系及び前記高周波電源を制御するように設けられた制御部と、
を備え、
前記制御部は、
前記第1のガスのプラズマ及び前記第2のガスのプラズマを生成して前記載置台上に載置され第1の層及び第2の層を備える被加工物をエッチングするために、処理シーケンスを繰り返し実行するように前記ガス供給系及び前記高周波電源を制御し、
前記第2の層は、複数の開口を備え、前記第1の層の上面に設けられ、
前記開口は、前記上面を露出し、
前記第1の層は、複数のエッチングストップ層を備え、
前記第1の層内において複数の前記エッチングストップ層の各々から前記上面までの長さは、互いに異なり、
前記第1の層の材料は、シリコン酸化物であり、
前記第2の層の材料は、炭素を含み、
前記処理シーケンスは、
第1のガスのプラズマを生成して、前記被加工物に対し、前記第2の層をマスクとして前記開口を介した第1のエッチングを行い、
前記第1のガスのプラズマによる前記第1のエッチングの後に、前記被加工物に対し、第2のガスのプラズマを生成して第2のエッチングを行い、前記第1のエッチングにより前記開口の側面に付着したポリマーを除去し、前記第1のエッチングによって露出された前記エッチングストップ層上に保護膜を形成し、
前記第1のガスは、炭素原子及びフッ素原子からなるガスを含み、
前記第2のガスは、炭素原子、フッ素原子及び水素原子からなるガスを含み、
前記第1のガスのプラズマを生成して行う前記第1のエッチングにおいて、該第1のガスのプラズマによって高次のフルオロカーボンが生成され、
前記第2のガスのプラズマを生成して行う前記第2のエッチングにおいて、該第2のガスのプラズマによって低次のフルオロカーボン又は低次のハイドロフルオロカーボンが生成される、
プラズマ処理装置。 - 前記第1のガスは、C4F6ガス、C4F8ガスのうち、少なくとも一のガスを含む、
請求項7に記載のプラズマ処理装置。 - 前記第2のガスは、CHF3ガス、CH2F2ガス、CH3Fガスのうち、少なくとも一のガスを含む、
請求項7又は8に記載のプラズマ処理装置。 - 前記第2のガスは、COガス、CO2ガス、O2ガス、N2ガス、H2ガスのうち、少なくとも一のガスを更に含む、
請求項7~9の何れか一項に記載のプラズマ処理装置。 - 前記第1のガスのプラズマを生成して行う前記第1のエッチングにおいて、主に前記第2の層上に、前記高次のフルオロカーボンが付着し、
前記第2のガスのプラズマを生成して行う前記第2のエッチングにおいて、前記処理シーケンスの実行によって形成されるホールを介して前記エッチングストップ層が露出されている場合に、該ホールを介して、前記エッチングストップ層上に、前記低次のフルオロカーボン又は前記低次のハイドロフルオロカーボンが付着する、
請求項7~10の何れか一項に記載のプラズマ処理装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2019043693A JP7228413B2 (ja) | 2019-03-11 | 2019-03-11 | プラズマ処理方法、及び、プラズマ処理装置 |
CN202010143971.7A CN111681956B (zh) | 2019-03-11 | 2020-03-04 | 等离子体处理方法和等离子体处理装置 |
US16/809,726 US20200294773A1 (en) | 2019-03-11 | 2020-03-05 | Plasma processing method and plasma processing apparatus |
KR1020200029094A KR20200108787A (ko) | 2019-03-11 | 2020-03-09 | 플라즈마 처리 방법 및 플라즈마 처리 장치 |
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JP7228413B2 true JP7228413B2 (ja) | 2023-02-24 |
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JP2000150648A (ja) | 1998-11-12 | 2000-05-30 | Vanguard Internatl Semiconductor Corp | コンタクトホール形成方法 |
JP2013012624A (ja) | 2011-06-30 | 2013-01-17 | Hitachi High-Technologies Corp | プラズマ処理方法 |
WO2014046083A1 (ja) | 2012-09-18 | 2014-03-27 | 東京エレクトロン株式会社 | プラズマエッチング方法及びプラズマエッチング装置 |
JP2014090022A (ja) | 2012-10-29 | 2014-05-15 | Tokyo Electron Ltd | プラズマ処理方法及びプラズマ処理装置 |
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US6074952A (en) * | 1998-05-07 | 2000-06-13 | Vanguard International Semiconductor Corporation | Method for forming multi-level contacts |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000150648A (ja) | 1998-11-12 | 2000-05-30 | Vanguard Internatl Semiconductor Corp | コンタクトホール形成方法 |
JP2013012624A (ja) | 2011-06-30 | 2013-01-17 | Hitachi High-Technologies Corp | プラズマ処理方法 |
WO2014046083A1 (ja) | 2012-09-18 | 2014-03-27 | 東京エレクトロン株式会社 | プラズマエッチング方法及びプラズマエッチング装置 |
JP2014090022A (ja) | 2012-10-29 | 2014-05-15 | Tokyo Electron Ltd | プラズマ処理方法及びプラズマ処理装置 |
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JP2020150005A (ja) | 2020-09-17 |
KR20200108787A (ko) | 2020-09-21 |
CN111681956A (zh) | 2020-09-18 |
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