JP7223964B2 - ソーワイヤー及び切断装置 - Google Patents
ソーワイヤー及び切断装置 Download PDFInfo
- Publication number
- JP7223964B2 JP7223964B2 JP2017094230A JP2017094230A JP7223964B2 JP 7223964 B2 JP7223964 B2 JP 7223964B2 JP 2017094230 A JP2017094230 A JP 2017094230A JP 2017094230 A JP2017094230 A JP 2017094230A JP 7223964 B2 JP7223964 B2 JP 7223964B2
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- JP
- Japan
- Prior art keywords
- wire
- saw
- tungsten
- metal wire
- ingot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
- B23D61/185—Saw wires; Saw cables; Twisted saw strips
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
- B21C1/00—Manufacture of metal sheets, metal wire, metal rods, metal tubes by drawing
- B21C1/003—Drawing materials of special alloys so far as the composition of the alloy requires or permits special drawing methods or sequences
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
- B21C3/00—Profiling tools for metal drawing; Combinations of dies and mandrels
- B21C3/02—Dies; Selection of material therefor; Cleaning thereof
- B21C3/025—Dies; Selection of material therefor; Cleaning thereof comprising diamond parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
- B21C9/00—Cooling, heating or lubricating drawing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D65/00—Making tools for sawing machines or sawing devices for use in cutting any kind of material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Description
[切断装置]
まず、本実施の形態に係るソーワイヤーを備える切断装置の概要について、図1を用いて説明する。図1は、本実施の形態に係る切断装置1の斜視図である。
図3は、本実施の形態に係るソーワイヤー10の断面図である。具体的には、図3は、ソーワイヤー10の延在方向に直交する断面を拡大した図である。
以下では、上記特徴を有するソーワイヤー10の製造方法について説明する。ソーワイヤー10の製造方法は、細線化された金属線100を作製する工程と、金属線100に複数の砥粒130を固着させる工程とを含んでいる。
以上のように、本実施の形態に係るソーワイヤー10は、タングステンからなる金属線100を備え、金属線100の表面粗さRaは、0.15μm以下であり、金属線100の線径は、60μm以下である。
ここで、上記の実施の形態の変形例について説明する。
以上、本発明に係るソーワイヤー及び切断装置について、上記の実施の形態及びその変形例に基づいて説明したが、本発明は、上記の実施の形態に限定されるものではない。
10 ソーワイヤー
100 金属線
110 ニッケルめっき層
130 砥粒
Claims (5)
- タングステン又はタングステン合金からなる金属線と、
前記金属線の表面に設けられたニッケルめっき層と、
前記金属線の表面に電着された複数の砥粒とを備え、
前記金属線の表面粗さRaは、0.10μmより大きく、0.15μm以下であり、
前記金属線の線径は、10μm以上60μm以下である
ソーワイヤー。 - 前記タングステン合金は、レニウムとタングステンとの合金であり、
前記タングステン合金におけるレニウムの含有率は、0.1wt%以上10wt%以下である
請求項1に記載のソーワイヤー。 - 前記タングステンからなる前記金属線には、カリウムがドープされており、
前記金属線のカリウムの含有率は、0.005wt%以上0.010wt%以下である
請求項1に記載のソーワイヤー。 - 請求項1~3のいずれか1項に記載のソーワイヤーを備える切断装置。
- さらに、前記ソーワイヤーにかかる張力を緩和する張力緩和装置を備える
請求項4に記載の切断装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017094230A JP7223964B2 (ja) | 2017-05-10 | 2017-05-10 | ソーワイヤー及び切断装置 |
CN201810161009.9A CN108858838A (zh) | 2017-05-10 | 2018-02-27 | 锯线及切断装置 |
CN201820278102.3U CN208826836U (zh) | 2017-05-10 | 2018-02-27 | 锯线及切断装置 |
US15/975,140 US20180326518A1 (en) | 2017-05-10 | 2018-05-09 | Saw wire and cutting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017094230A JP7223964B2 (ja) | 2017-05-10 | 2017-05-10 | ソーワイヤー及び切断装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018187739A JP2018187739A (ja) | 2018-11-29 |
JP7223964B2 true JP7223964B2 (ja) | 2023-02-17 |
Family
ID=64097005
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017094230A Active JP7223964B2 (ja) | 2017-05-10 | 2017-05-10 | ソーワイヤー及び切断装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20180326518A1 (ja) |
JP (1) | JP7223964B2 (ja) |
CN (2) | CN108858838A (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019124276A1 (en) | 2017-12-19 | 2019-06-27 | Ricoh Company, Ltd. | Electrode and fabrication method, electrode element and nonaqueous electrolytic storage element |
JP6751900B2 (ja) | 2018-01-29 | 2020-09-09 | パナソニックIpマネジメント株式会社 | 金属線及びソーワイヤー |
JP7482411B2 (ja) * | 2019-12-13 | 2024-05-14 | パナソニックIpマネジメント株式会社 | 金属線 |
CN115023511A (zh) * | 2020-01-30 | 2022-09-06 | 联合材料公司 | 含钨的线 |
CN112934993B (zh) * | 2021-01-28 | 2022-09-20 | 宁波卡倍亿电气技术股份有限公司 | 一种多头拉线机 |
JP2022189632A (ja) | 2021-06-11 | 2022-12-22 | パナソニックIpマネジメント株式会社 | ソーワイヤ用電着線及び金属線、並びに、ソーワイヤ用電着線の製造方法 |
WO2023153089A1 (ja) * | 2022-02-10 | 2023-08-17 | パナソニックIpマネジメント株式会社 | タングステン線及び金属メッシュ |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001312952A (ja) | 2000-05-01 | 2001-11-09 | Toshiba Corp | タングステン線およびその製造方法 |
US20020145373A1 (en) | 2001-03-19 | 2002-10-10 | General Electric Company | Tungsten-rhenium filament and method for producing same |
JP2007203393A (ja) | 2006-01-31 | 2007-08-16 | Nippon Seisen Co Ltd | ソーワイヤー及びその製造方法 |
JP4263098B2 (ja) | 2001-10-09 | 2009-05-13 | 株式会社東芝 | タングステン線およびカソードヒータ並びに耐振電球用フィラメント |
US20110009039A1 (en) | 2009-06-05 | 2011-01-13 | Applied Materials, Inc. | Method and apparatus for manufacturing an abrasive wire |
JP2011137213A (ja) | 2009-12-25 | 2011-07-14 | Nippon Seisen Co Ltd | ソーワイヤー及びその製造方法 |
JP2014188655A (ja) | 2013-03-28 | 2014-10-06 | Furukawa Electric Co Ltd:The | 多結晶シリコン切削用ワイヤ工具、および、多結晶シリコンの切断方法 |
JP2015155119A (ja) | 2014-02-20 | 2015-08-27 | 株式会社タカトリ | ワイヤソー及び切断加工方法 |
JP6063076B1 (ja) | 2016-03-02 | 2017-01-18 | ジャパンファインスチール株式会社 | レジンボンドソーワイヤおよびその製造方法 |
JP6273624B1 (ja) | 2016-11-15 | 2018-02-07 | パナソニックIpマネジメント株式会社 | 金属繊維 |
Family Cites Families (7)
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US4055700A (en) * | 1974-09-03 | 1977-10-25 | Lumalampan Ab | Thin composite wire saw with surface cutting crystals |
JPS5923929B2 (ja) * | 1974-09-13 | 1984-06-06 | ルマランパン.Ab | のこ引き用金属ワイヤ |
CN88211393U (zh) * | 1988-01-30 | 1988-10-19 | 凌寿荣 | 钨丝切割刀 |
JPH07308919A (ja) * | 1994-05-16 | 1995-11-28 | Tokyo Seimitsu Co Ltd | ワイヤーソーのワイヤー洗浄装置 |
JP4930974B2 (ja) * | 2006-02-02 | 2012-05-16 | 国立大学法人 長崎大学 | ソーワイヤ、ソーワイヤの製造方法、半導体インゴットの切断方法及びワイヤソー |
CN101083202A (zh) * | 2006-06-01 | 2007-12-05 | 厦门虹鹭钨钼工业有限公司 | 一种卤素灯丝及制造方法 |
JP2014136270A (ja) * | 2013-01-16 | 2014-07-28 | Furukawa Electric Co Ltd:The | ワイヤソー、ワイヤソーの製造方法 |
-
2017
- 2017-05-10 JP JP2017094230A patent/JP7223964B2/ja active Active
-
2018
- 2018-02-27 CN CN201810161009.9A patent/CN108858838A/zh active Pending
- 2018-02-27 CN CN201820278102.3U patent/CN208826836U/zh active Active
- 2018-05-09 US US15/975,140 patent/US20180326518A1/en not_active Abandoned
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2001312952A (ja) | 2000-05-01 | 2001-11-09 | Toshiba Corp | タングステン線およびその製造方法 |
US20020145373A1 (en) | 2001-03-19 | 2002-10-10 | General Electric Company | Tungsten-rhenium filament and method for producing same |
JP4263098B2 (ja) | 2001-10-09 | 2009-05-13 | 株式会社東芝 | タングステン線およびカソードヒータ並びに耐振電球用フィラメント |
JP2007203393A (ja) | 2006-01-31 | 2007-08-16 | Nippon Seisen Co Ltd | ソーワイヤー及びその製造方法 |
US20110009039A1 (en) | 2009-06-05 | 2011-01-13 | Applied Materials, Inc. | Method and apparatus for manufacturing an abrasive wire |
JP2011137213A (ja) | 2009-12-25 | 2011-07-14 | Nippon Seisen Co Ltd | ソーワイヤー及びその製造方法 |
JP2014188655A (ja) | 2013-03-28 | 2014-10-06 | Furukawa Electric Co Ltd:The | 多結晶シリコン切削用ワイヤ工具、および、多結晶シリコンの切断方法 |
JP2015155119A (ja) | 2014-02-20 | 2015-08-27 | 株式会社タカトリ | ワイヤソー及び切断加工方法 |
JP6063076B1 (ja) | 2016-03-02 | 2017-01-18 | ジャパンファインスチール株式会社 | レジンボンドソーワイヤおよびその製造方法 |
JP6273624B1 (ja) | 2016-11-15 | 2018-02-07 | パナソニックIpマネジメント株式会社 | 金属繊維 |
Also Published As
Publication number | Publication date |
---|---|
JP2018187739A (ja) | 2018-11-29 |
CN108858838A (zh) | 2018-11-23 |
CN208826836U (zh) | 2019-05-07 |
US20180326518A1 (en) | 2018-11-15 |
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