JP7212988B2 - 相決定用の光センサ - Google Patents
相決定用の光センサ Download PDFInfo
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Description
本開示は、参照によりその全体を本明細書に援用する、2017年8月21日に出願された米国仮特許出願第62/548,382号明細書の利益を主張する。
n1 sin(θ1)=n2 sin(θ2)
Claims (20)
- インサイチュー相決定のための機器であって、
物質を保持するように構成される測定チャンバと、
前記測定チャンバの一側に取り付けられ、外側境界面及び内側境界面を有する入口窓と、
前記測定チャンバの反対側に取り付けられ、外側境界面及び内側境界面を有する出口窓であって、前記入口窓の前記外側境界面及び前記内側境界面と前記出口窓の前記外側境界面及び前記内側境界面とは互いに平行である、出口窓と、
入射光ビームを生成するように構成される光源であって、前記入射光ビームは前記入口窓の前記外側境界面の法線に対してゼロでない入射角で前記入口窓に向けられ、前記入口窓、前記測定チャンバ、及び前記出口窓を通過して出力光ビームを形成する、光源と、
前記出口窓の外側に配置される検出器であって、前記出口窓を通過する前記出力光ビームを集め、測定データを生成するように構成される、検出器と
を含む、機器。 - 前記物質が二酸化炭素を含み、前記二酸化炭素が気体状態、液体状態、又は超臨界状態にある、請求項1に記載の機器。
- 前記入口窓及び前記出口窓がホウケイ酸ガラスで作られる、請求項1に記載の機器。
- 前記入口窓及び前記出口窓が異なる屈折率を有する、請求項1に記載の機器。
- 前記光源が、前記入射光ビームを生成するように構成されるレーザダイオード、光損失を減らすために前記入射光ビームを集束するように構成される集束レンズ、及び前記入射光ビームの形状を変調するように構成されるビーム成形光学素子を含む、請求項1に記載の機器。
- 前記光源が、ガウスプロファイルを有する入射シートビーム、フラットトッププロファイルを有する入射シートビーム、狭い円錐又は円筒形の入射ペンシルビーム、又は入射ガウスビームを生成する、請求項5に記載の機器。
- 前記光源が、複数のペンシルビーム、複数のガウスビーム、ダークスポットを有する照明プロファイル、複数の平行ライン、交差ラインによって形成されるパターン、又は同心円によって形成されるパターンを生成するための構造化された照明器を更に含む、請求項5に記載の機器。
- 迷光を最小限に抑え、検出器感度を最大化するために前記検出器の面上に導入される保護ガラス、フィルタ、又は集束光学素子を更に含む、請求項1に記載の機器。
- 前記検出器が、二次元(2D)撮像マルチピクセル(CMOS又はCCD)センサ、一次元(1D)ライン(ラインスキャン)センサ、又は単一ピクセル位置敏感型センサを含む、請求項1に記載の機器。
- 前記入射光ビームが、前記入口窓の前記法線に対して0度より大きく90度より小さい前記入射角を有する、請求項1に記載の機器。
- インサイチュー相決定のための機器であって、
物質を保持するように構成される測定チャンバと、
前記測定チャンバの一側に取り付けられる入口窓と、
前記測定チャンバの反対側に取り付けられる出口窓であって、前記入口窓と平行である、出口窓と、
入射光ビームを生成するように構成される光源であって、前記入射光ビームは前記入口窓の法線に対してゼロでない入射角で前記入口窓に向けられ、前記入口窓、前記測定チャンバを通過し、前記出口窓に反射して反射光ビームを形成し、前記反射光ビームは前記測定チャンバ及び前記入口窓を通過する、光源と、
前記入口窓上に取り付けられる検出器であって、前記入口窓を通過する前記反射光ビームを受光し、測定データを生成するように構成される、検出器と
を含む、機器。 - 前記光源が、特定の波長を有する光を選択的に透過するように構成される光学フィルタを更に含む、請求項11に記載の機器。
- 前記入口窓及び前記出口窓がホウケイ酸ガラスで作られる、請求項11に記載の機器。
- 迷光を最小限に抑え、検出器感度を最大化するために前記検出器の面上に導入される保護ガラス、フィルタ、又は集束光学素子を更に含む、請求項11に記載の機器。
- インサイチュー相決定のための方法であって、
外側境界面及び内側境界面を有する入口窓の前記外側境界面の法線に対してゼロでない入射角で測定チャンバの前記入口窓に入射光ビームを向けるステップであって、前記入口窓は前記測定チャンバの一側に取り付けられ、前記測定チャンバは物質を保持する、向けるステップと、
検出器によって出力光ビームを集めるステップであって、前記入射光ビームは前記入口窓、前記測定チャンバ、及び出口窓を通過して前記出力光ビームを形成し、前記出口窓は、外側境界面及び内側境界面を有し、前記測定チャンバの反対側且つ前記入口窓の前記外側境界面及び前記内側境界面と前記出口窓の前記外側境界面及び前記内側境界面とは互いに平行になるように取り付けられ、前記検出器は前記出口窓の外に配置される、集めるステップと、
前記出力光ビームのビーム重心位置を合わせる測定データを処理回路によって生成するステップと、
前記測定チャンバ内に保持される前記物質の特性を前記測定データに基づいて決定するステップと、
前記決定した特性に基づいて製造プロセスを制御するステップと
を含む、方法。 - 反射光ビームのビーム重心位置を合わせるために前記検出器によって前記反射光ビームを集めるステップであって、前記入射光ビームは前記入口窓、前記測定チャンバを通過し、出口窓に反射して前記反射光ビームを形成し、前記出口窓は前記測定チャンバの反対側且つ前記入口窓と平行に取り付けられ、前記反射光ビームは前記測定チャンバ及び前記入口窓を通過して前記検出器に到達し、前記検出器は前記入口窓の上に配置される、集めるステップ
を更に含む、請求項15に記載の方法。 - 前記測定データが、
前記測定チャンバ内の前記物質にわたる光学的屈折率の平均値、
前記測定チャンバ内の前記物質にわたる光学的屈折率の値の分布プロファイル、
前記検出器に到達する前記出力光ビームの強度に基づく前記測定チャンバ内の前記物質の透過係数の平均値及び吸収係数の平均値、
前記検出器に到達する前記出力光ビームの前記強度に基づく前記測定チャンバ内の前記物質の透過係数の値の分布プロファイル及び吸収係数の値の分布プロファイル、並びに
前記検出器に到達する反射光ビームの強度に基づく前記物質と前記出口窓との間の境界面における反射率値
のうちの少なくとも1つを含む、請求項15に記載の方法。 - 前記測定チャンバ内に保持される前記物質の特性を前記測定データに基づいて決定する前記ステップが、
前記ビーム重心位置と様々な状態にある前記物質の屈折率との関係を確立するために較正を行うステップと、
前記ビーム重心位置と前記様々な状態にある前記物質の前記屈折率との関係に基づいて前記測定チャンバ内の前記物質のインサイチューの屈折率を光センサによって得るステップと、
前記得られたインサイチューの屈折率に基づいて前記物質の状態を決定するステップと
を更に含む、請求項15に記載の方法。 - 較正データを得るステップを更に含み、前記較正データは前記測定チャンバ内に導入される単一のサンプルに基づく1点較正データ、前記測定チャンバ内に導入される2つの異なるサンプルに基づく2点較正データ、及び前記測定チャンバ内に導入される3つの異なるサンプルに基づく3点較正データのうちの少なくとも1つを含む、請求項18に記載の方法。
- 前記入口窓の前記法線に対して前記ゼロでない入射角で前記測定チャンバの前記入口窓に前記入射光ビームを向けるステップの前に、特定の波長を有する光を選択的に透過する光学フィルタに前記入射光ビームを向けるステップを更に含む、請求項15に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762548382P | 2017-08-21 | 2017-08-21 | |
US62/548,382 | 2017-08-21 | ||
PCT/IB2018/056325 WO2019038679A1 (en) | 2017-08-21 | 2018-08-21 | OPTICAL SENSOR FOR PHASE DETERMINATION |
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US9625378B2 (en) * | 2014-03-31 | 2017-04-18 | Redshift Bioanalytics, Inc. | Fluid analyzer with modulation for liquids and gases |
US11664283B2 (en) | 2021-08-20 | 2023-05-30 | Tokyo Electron Limited | Raman sensor for supercritical fluids metrology |
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US20190056320A1 (en) | 2019-02-21 |
WO2019038679A1 (en) | 2019-02-28 |
KR102491750B1 (ko) | 2023-01-26 |
EP3673255A4 (en) | 2021-05-26 |
CN110998292B (zh) | 2023-12-15 |
EP3673255A1 (en) | 2020-07-01 |
TW201923328A (zh) | 2019-06-16 |
US10837902B2 (en) | 2020-11-17 |
JP2020531822A (ja) | 2020-11-05 |
TWI775924B (zh) | 2022-09-01 |
KR20200035157A (ko) | 2020-04-01 |
CN110998292A (zh) | 2020-04-10 |
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