JP7181211B2 - 厚膜及び高アスペクト比構造の計測方法及びシステム - Google Patents
厚膜及び高アスペクト比構造の計測方法及びシステム Download PDFInfo
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Description
本特許出願は、2017年2月17日付米国仮特許出願第62/460668号に基づき米国特許法第119条の規定による優先権を主張する出願であるので、この参照を以てその主題の全容を本願に繰り入れることにする。
Claims (31)
- 分光計量システムであって、
2μm未満の波長を含む第1量の照明光を生成するよう構成された第1照明源、並びに2μm超の波長を含む第2量の照明光を生成するよう構成された第2照明源、を有する複合照明源と、
第1及び第2量の照明光の光路に1つまたは複数の光学要素を含む照明光学系サブシステムと、を備え、
上記第1及び第2量の照明光が、上記複合照明源から、計測下試料の表面上の計測スポットに、一通り又は複数通りの入射角、一通り又は複数通りのアジマス角又はその組合せで上記1つまたは複数の光学要素によって方向づけられ、
上記試料の表面上の上記計測スポットからのある量の集光光の光路に1つまたは複数の光学要素を含む、集光光学系サブシステムと、
入射光に対し感応的で平坦な二次元表面を有する少なくとも1個の検出器であり、当該少なくとも1個の検出器がそれぞれ異なる光感度を呈する2個以上の相異なる表面エリアを有し、当該2個以上の相異なる表面エリアが当該少なくとも1個の検出器の表面を横断する波長分散の方向と整列しており、上記入射光を検出し検出した入射光を示す出力を生成するよう構成されている少なくとも1個の検出器と、
上記少なくとも1個の検出器の出力についての分析を踏まえ上記計測下試料の注目パラメタの推定値を生成する1つまたは複数のプロセッサを含む情報処理システムと、
を備え、
上記第1照明源がレーザ維持プラズマ(LSP)光源又はアークランプ光源であり、上記第2量の照明光のうち少なくとも一部分が上記LSP光源又は上記アークランプ光源のプラズマを通じ伝達される分光計量システム。 - 請求項1に記載の分光計量システムであって、上記第1照明源がレーザ維持プラズマ(LSP)照明源であり、上記第2照明源が超連続体レーザ照明源である分光計量システム。
- 請求項1に記載の分光計量システムであって、上記少なくとも1個の検出器が、縦続配列をなすよう構成された2個以上の検出器を含み、それら2個以上の検出器それぞれが、上記ある量の集光光のうち相異なるスペクトル域に亘る部分を検出する分光計量システム。
- 請求項1に記載の分光計量システムであって、更に、
動作中に上記少なくとも1個の検出器を一定温度に保つ除熱システムを備える分光計量システム。 - 請求項1に記載の分光計量システムであって、上記LSP光源又は上記アークランプ光源により生成されたプラズマがプラズマバルブ内に入っており、そのプラズマバルブが少なくとも部分的にフッ化カルシウム又はフッ化マグネシウムで作成されている分光計量システム。
- 請求項1に記載の分光計量システムであって、上記第1量の照明光と上記第2量の照明光が上記試料に同時供給される分光計量システム。
- 請求項1に記載の分光計量システムであって、上記第1量の照明光と上記第2量の照明光が上記試料に相異なる時点で供給される分光計量システム。
- 請求項1に記載の分光計量システムであって、上記少なくとも1個の検出器がアンチモン化インジウム製検出器を含む分光計量システム。
- 請求項1に記載の分光計量システムであって、上記計測下試料が三次元NAND構造又はダイナミックランダムアクセスメモリ構造を有する分光計量システム。
- 2μm未満の波長を含む第1量の広帯域照明光及び2μm超の波長を含む第2量の広帯域照明光を複合照明源から計測下試料の表面上の計測スポットへと差し向けるステップであり、その複合照明源が、上記第1量の広帯域照明光を生成する第1照明源及び上記第2量の広帯域照明光を生成する第2照明源を有するステップと、
上記第1量及び第2量の照明光に応じ上記試料の表面上の上記計測スポットからある量の集光光を集め、当該ある量の集光光を1個又は複数個の検出器へと差し向けるステップと、
入射光に対し感応的で平坦な二次元表面を有する少なくとも1個の検出器で以て、上記ある量の集光光に係る計測スペクトルを検出するステップと、
を有し、
上記第1照明源がレーザ維持プラズマ(LSP)光源又はアークランプ光源であり、上記第2量の照明光のうち少なくとも一部分が上記LSP光源又は上記アークランプ光源のプラズマを通じ伝達される方法。 - 請求項10に記載の方法であって、上記第1照明源がレーザ維持プラズマ(LSP)照明源であり、上記第2照明源が超連続体レーザ照明源である方法。
- 請求項10に記載の方法であって、上記少なくとも1個の検出器にが、縦続配列をなすよう構成された2個以上の検出器を含み、それら2個以上の検出器それぞれが、上記ある量の集光光のうち相異なるスペクトル域に亘る部分を検出する方法。
- 請求項10に記載の方法であって、上記少なくとも1個の検出器が、それぞれ異なる光感度を呈する2個以上の表面エリアを有し、当該相異なる2個以上の表面エリアが、当該少なくとも1個の検出器の表面を横断する波長分散の方向と整列している方法。
- 請求項10に記載の方法であって、更に、
動作中に上記少なくとも1個の検出器を一定温度に保つステップを有する方法。 - 請求項10に記載の方法であって、上記第1量の照明光と上記第2量の照明光が試料に同時供給される方法。
- 請求項10に記載の方法であって、上記第1量の照明光と上記第2量の照明光が試料に相異なる時点で供給される方法。
- 計量システムであって、
2μm未満の波長を含む第1量の照明光を生成するよう構成された第1照明源、並びに2μm超の波長を含む第2量の照明光を生成するよう構成された第2照明源、を有する複合照明源を備え、
上記第1及び第2量の照明光が、上記複合照明源から計測下試料の表面上の計測スポットへと方向づけられ、
前記第1量及び第2量の照明光に応じて、上記計測スポットからある量の集光光を検出し、該検出した量の光を示す出力を生成するように構成された少なくとも1つの検出器と、
上記少なくとも1個の検出器の出力についての分析を踏まえ上記計測下試料の注目パラメタの推定値を生成する1つまたは複数のプロセッサを含む情報処理システムと、
を備え、
上記第1照明源がレーザ維持プラズマ(LSP)光源又はアークランプ光源であり、上記第2量の照明光のうち少なくとも一部分が上記LSP光源又は上記アークランプ光源のプラズマを通じ伝達される計量システム。 - 請求項17に記載の計量システムであって、上記少なくとも1つの検出器が入射光に対して感応的な表面を含み、該表面がそれぞれ異なる光感度を有する2個以上の相異なる表面エリアを有する、計量システム。
- 請求項18に記載の計量システムであって、上記2個以上の相異なる表面エリアが、上記少なくとも1個の検出器の上記表面を横断する波長分散の方向と整列している、計量システム。
- 請求項17に記載の計量システムであって、上記少なくとも1個の検出器に、縦続配列をなすよう構成された2個以上の検出器が含まれていて、それら2個以上の検出器それぞれが、上記計測スポットからの上記ある量の集光光のうち相異なるスペクトル域に亘る部分を検出する計量システム。
- 請求項17に記載の計量システムであって、上記第1照明源がレーザ維持プラズマ(LSP)照明源であり、上記第2照明源が超連続体レーザ照明源である計量システム。
- 請求項17に記載の計量システムであって、上記第1量の照明光と上記第2量の照明光が試料に同時供給される計量システム。
- 請求項17に記載の計量システムであって、上記第1量の照明光と上記第2量の照明光が試料に相異なる時点で供給される計量システム。
- 請求項17に記載の計量システムであって、上記少なくとも1個の検出器にアンチモン化インジウム製検出器が含まれる計量システム。
- 請求項17に記載の計量システムであって、上記計測下試料が三次元NAND構造又はダイナミックランダムアクセスメモリ構造を有する計量システム。
- 2μm未満の波長を含む第1量の広帯域照明光をプラズマ式照明源から提供するステップと、
2μm超の波長を含む第2量の広帯域照明光を第2照明源から提供するステップと、を有し、
上記第2量の照明光の少なくとも一部が、上記プラズマ式照明源のプラズマを通じて伝達される方法。 - 請求項26に記載の方法であって、上記プラズマ式照明源がレーザ維持プラズマ(LSP)照明源であり、上記第2照明源が超連続体レーザ照明源である方法。
- 請求項26に記載の方法であって、上記プラズマ式照明源がレーザ維持プラズマ(LSP)光源又はアークランプ光源である方法。
- 請求項28に記載の方法であって、上記LSP光源又は上記アークランプ光源により生成された上記プラズマがプラズマバルブ内に入っており、そのプラズマバルブが少なくとも部分的にフッ化カルシウム又はフッ化マグネシウムで作成されている、方法。
- 請求項26に記載の方法であって、上記第1量の照明光と上記第2量の照明光が試料に同時供給される方法。
- 請求項26に記載の方法であって、上記第1量の照明光と上記第2量の照明光が試料に相異なる時点で供給される方法。
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