JP7154391B2 - 光反射装置、導光装置、及び光走査装置 - Google Patents
光反射装置、導光装置、及び光走査装置 Download PDFInfo
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- JP7154391B2 JP7154391B2 JP2021512144A JP2021512144A JP7154391B2 JP 7154391 B2 JP7154391 B2 JP 7154391B2 JP 2021512144 A JP2021512144 A JP 2021512144A JP 2021512144 A JP2021512144 A JP 2021512144A JP 7154391 B2 JP7154391 B2 JP 7154391B2
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- 230000004048 modification Effects 0.000 description 4
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/108—Scanning systems having one or more prisms as scanning elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/121—Mechanical drive devices for polygonal mirrors
- G02B26/122—Control of the scanning speed of the polygonal mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/129—Systems in which the scanning light beam is repeatedly reflected from the polygonal mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Remote Sensing (AREA)
- Radar, Positioning & Navigation (AREA)
- Computer Networks & Wireless Communication (AREA)
- Electromagnetism (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Laser Beam Processing (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Description
13 導光装置
20 反射ユニット(光反射装置)
31 走査領域
42 反射部材
53 走査用レンズ
61 第1回転軸(支持プレートの回転軸)
62 第2回転軸(反射部材の回転軸)
81 第1反射部(反射部)
82 第2反射部(反射部)
85 第1反射面
86 第2反射面
200 ワーク(被照射物)
201 走査線
202 被照射点
250 回転ミラー(反射部材)
251 第1正多角錐
252 第2正多角錐
257 光反射面
260 軸(回転軸)
261 第1底面
262 第2底面
α,β 底角
Claims (10)
- 入射光を反射させる平面状の反射面を有し、公転及び自転を同時に行う反射部材を備え、
前記反射部材の公転の方向と自転の方向が同一であり、
前記反射部材の公転角速度が自転角速度の2倍に等しいことを特徴とする光反射装置。 - 請求項1に記載の光反射装置であって、
前記反射面は、前記反射部材の自転軸を挟んで対をなすように配置されていることを特徴とする光反射装置。 - 請求項1又は2に記載の光反射装置であって、
前記反射部材を複数備え、
複数の前記反射部材の公転軸は一致しており、
複数の前記反射部材は、公転軸を中心とした円を等角度間隔で分割するように配置されていることを特徴とする光反射装置。 - 請求項1から3までの何れか一項に記載の光反射装置であって、
前記反射部材の公転及び自転を行わせる遊星歯車列を備えることを特徴とする光反射装置。 - 請求項1から4までの何れか一項に記載の光反射装置であって、
前記反射部材は、自転軸と垂直な平面に沿って偏向するように光を反射させ、
前記平面は、前記反射部材に対する入射光に対して、前記自転軸の方向にオフセットしていることを特徴とする光反射装置。 - 請求項5に記載の光反射装置であって、
前記反射面は、
前記自転軸に垂直な平面に対して傾斜した平面状に形成された第1反射面と、
前記自転軸に垂直な平面に対して傾斜した平面状に形成された第2反射面と、
を含み、
前記自転軸に垂直な平面に対して前記第1反射面が傾斜する向きと、前記自転軸に垂直な平面に対して前記第2反射面が傾斜する向きと、が逆であり、
前記入射光は、前記第1反射面で反射した後、前記第2反射面で反射し、
前記第1反射面及び前記第2反射面は、対称面に関して互いに対称となるように形成され、
前記対称面の前記第1反射面に関する鏡像、及び、前記対称面の前記第2反射面に関する鏡像は、互いに同一の平面であり、
前記自転軸が前記鏡像の平面に含まれることを特徴とする光反射装置。 - 請求項6に記載の光反射装置であって、
前記自転軸に垂直な平面に対して前記第1反射面が傾斜する角度は45°であり、
前記自転軸に垂直な平面に対して前記第2反射面が傾斜する角度は45°であることを特徴とする光反射装置。 - 請求項1から7までの何れか一項に記載の光反射装置を備え、
前記入射光は、前記光反射装置で偏向されることにより被照射物を走査することを特徴とする導光装置。 - 請求項8に記載の導光装置であって、
走査用レンズを備え、
前記走査用レンズは、前記反射部材から前記被照射物までの光路に配置されることを特徴とする導光装置。 - 請求項8又は9に記載の導光装置を複数備え、
それぞれの前記導光装置において、前記光反射装置の前記反射部材が公転及び自転を同時に行うことにより、前記入射光が前記反射面に当たって反射する反射状態と、前記入射光が前記反射面に当たらずに通過する通過状態と、の間で切り換わり、
前記反射状態になるタイミングが複数の前記導光装置の間で異なり、
複数の前記導光装置に対応する走査領域の集合によって、1本の直線状の走査線が構成されることを特徴とする光走査装置。
Applications Claiming Priority (3)
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JP2019069626 | 2019-04-01 | ||
JP2019069626 | 2019-04-01 | ||
PCT/JP2020/014750 WO2020204020A1 (ja) | 2019-04-01 | 2020-03-31 | 光反射装置、導光装置、及び光走査装置 |
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JPWO2020204020A1 JPWO2020204020A1 (ja) | 2020-10-08 |
JP7154391B2 true JP7154391B2 (ja) | 2022-10-17 |
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US (1) | US11921235B2 (ja) |
EP (2) | EP4295987A3 (ja) |
JP (1) | JP7154391B2 (ja) |
KR (1) | KR102658463B1 (ja) |
CN (2) | CN113711102B (ja) |
IL (1) | IL286840A (ja) |
TW (2) | TWI736200B (ja) |
WO (1) | WO2020204020A1 (ja) |
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CN112596196B (zh) * | 2020-12-16 | 2023-07-21 | 中国科学院上海光学精密机械研究所 | 大口径连续可调空心角锥反射镜装置和调整方法 |
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JP2018105903A (ja) | 2016-12-22 | 2018-07-05 | 川崎重工業株式会社 | ミラー旋回装置 |
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JPH0429214A (ja) * | 1990-05-25 | 1992-01-31 | Hitachi Ltd | 光ビーム走査装置 |
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JP2001117042A (ja) * | 1999-10-20 | 2001-04-27 | Canon Inc | 光偏向走査装置 |
JP2001264671A (ja) * | 2000-03-15 | 2001-09-26 | Sumitomo Heavy Ind Ltd | 光線束スキャニング装置 |
KR100462358B1 (ko) * | 2004-03-31 | 2004-12-17 | 주식회사 이오테크닉스 | 폴리곤 미러를 이용한 레이저 가공장치 |
JP2005338730A (ja) * | 2004-05-31 | 2005-12-08 | Konica Minolta Medical & Graphic Inc | 回転多面鏡及び光走査装置 |
KR100776745B1 (ko) * | 2006-06-16 | 2007-11-19 | 에스엘 주식회사 | 주광 조사 방향 및 추가광 측면 조사 방향을 자동 조절하는램프 어셈블리 |
TW201400864A (zh) * | 2012-06-27 | 2014-01-01 | Metal Ind Res & Dev Ct | 光學掃描裝置 |
EP3364229B1 (en) * | 2015-10-16 | 2024-02-14 | Konica Minolta, Inc. | Optical-scanning-type object detection device |
JP2017138298A (ja) * | 2016-02-03 | 2017-08-10 | コニカミノルタ株式会社 | 光走査型の対象物検知装置 |
JPWO2018008393A1 (ja) * | 2016-07-07 | 2019-04-25 | コニカミノルタ株式会社 | レーザーレーダー装置 |
CN108121146B (zh) * | 2016-11-30 | 2024-02-09 | 北京弘益鼎视科技发展有限公司 | 全景扫描装置 |
JP6785636B2 (ja) * | 2016-12-09 | 2020-11-18 | 川崎重工業株式会社 | ポリゴンミラー回転装置 |
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- 2020-03-31 CN CN202080026865.9A patent/CN113711102B/zh active Active
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- 2020-03-31 US US17/594,042 patent/US11921235B2/en active Active
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EP4295987A2 (en) | 2023-12-27 |
JPWO2020204020A1 (ja) | 2020-10-08 |
IL286840A (en) | 2021-12-01 |
TWI747769B (zh) | 2021-11-21 |
TWI736200B (zh) | 2021-08-11 |
US11921235B2 (en) | 2024-03-05 |
WO2020204020A1 (ja) | 2020-10-08 |
KR20210143292A (ko) | 2021-11-26 |
EP3951475A4 (en) | 2023-05-03 |
EP3951475A1 (en) | 2022-02-09 |
TW202103829A (zh) | 2021-02-01 |
CN117850023A (zh) | 2024-04-09 |
CN113711102B (zh) | 2024-06-18 |
US20220155423A1 (en) | 2022-05-19 |
KR102658463B1 (ko) | 2024-04-18 |
CN113711102A (zh) | 2021-11-26 |
TW202124081A (zh) | 2021-07-01 |
EP4295987A3 (en) | 2024-03-20 |
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