JP7142736B2 - 電磁干渉の存在下での高精度かつ高安定性の磁気変位センサ - Google Patents
電磁干渉の存在下での高精度かつ高安定性の磁気変位センサ Download PDFInfo
- Publication number
- JP7142736B2 JP7142736B2 JP2021012240A JP2021012240A JP7142736B2 JP 7142736 B2 JP7142736 B2 JP 7142736B2 JP 2021012240 A JP2021012240 A JP 2021012240A JP 2021012240 A JP2021012240 A JP 2021012240A JP 7142736 B2 JP7142736 B2 JP 7142736B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- magnetic
- web
- distance
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/107—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring objects while moving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/2033—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils controlling the saturation of a magnetic circuit by means of a movable element, e.g. a magnet
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/40—Caliper-like sensors
- G01B2210/44—Caliper-like sensors with detectors on both sides of the object to be measured
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/40—Caliper-like sensors
- G01B2210/46—Caliper-like sensors with one or more detectors on a single side of the object to be measured and with a transmitter on the other side
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
Claims (4)
- 材料シートの特性を監視するためのシステム(2)であって、前記材料シートが、第1の側及び第2の側を有し、
前記材料シートの前記第1の側に隣接して配置された第1の部材(4)であって、磁場(18、24)を生成するためのコイルを有する、第1の部材(4)と、
前記材料シートの前記第2の側に隣接して配置された第2の部材(6)であって、前記磁場を検出し、かつ第1の電気信号を生成する、第1の磁気センサ(20)と、前記磁場を検出し、かつ第2の電気信号を生成する、第2の磁気センサ(22)と、を有する、第2の部材(6)と、
前記第1及び第2の部材間の距離の変化を判定するために、前記第1の電気信号及び前記第2の電気信号を分析する手段と、を備え、
前記第1の磁気センサ及び前記第2の磁気センサが、タンデムに配置される第1及び第2のフラックスゲート磁気センサからなり、前記第1及び第2のフラックスゲート磁気センサと前記コイルが同軸上に位置される、システム。 - 前記第1の部材(4)が、第1の装着ヘッドを有し、前記第2の部材(6)が、第2の装着ヘッドを有し、前記2つの装着ヘッドが、前記材料シートが位置付けられるギャップ(54)を画定し、前記第1の電気信号及び前記第2の電気信号(40)を分析するための前記手段が、前記ギャップ(54)の前記距離を判定する、請求項1に記載のシステム(2)。
- 前記第1の電気信号及び前記第2の電気信号を分析する手段が、前記第1及び前記第2の部材間の距離を導き出すために、前記第1及び前記第2の電気信号の比又は差を分析する、請求項1又は2に記載のシステム。
- 第1の側及び第2の側を有するウェブの厚さを測定する方法であって、
前記ウェブ(8)の前記第1の側に第1の距離センサ(10)を提供することと、
前記第1の距離センサ(10)を有する前記ウェブ(8)の前記第1の側に対する前記第1の距離センサ(10)の位置を判定することと、
前記ウェブ(8)の前記第2の側に第2の距離センサ(14)を提供することと、
前記第2の距離センサ(14)を有する前記ウェブ(8)の前記第2の側に対する前記第2の距離センサ(14)の位置を判定することと、
前記ウェブ(8)の前記第1の側で前記第1の距離センサ(10)に対して固定された場所でコイルにより磁場を生成することと、
前記ウェブ(8)の前記第2の側で前記第2の距離センサ(14)に対してそれぞれの固定された第1及び第2の場所に第1及び第2の磁気センサ(20、22)を位置付けることと、
前記第1及び第2の磁気センサ(20、22)で前記磁場を測定することと、
前記第1及び第2の磁気センサ(20、22)による前記磁場の測定値から前記ウェブ(8)の前記厚さを判定することと、を含み
前記第1及び第2の磁気センサが、タンデムに配置される第1及び第2のフラックスゲート磁気センサからなり、前記第1及び第2のフラックスゲート磁気センサと前記コイルが同軸上に位置される、方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/801,821 US11519710B2 (en) | 2020-02-26 | 2020-02-26 | High accuracy and high stability magnetic displacement sensor in the presence of electromagnetic interferences |
US16/801,821 | 2020-02-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021135288A JP2021135288A (ja) | 2021-09-13 |
JP7142736B2 true JP7142736B2 (ja) | 2022-09-27 |
Family
ID=74591766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021012240A Active JP7142736B2 (ja) | 2020-02-26 | 2021-01-28 | 電磁干渉の存在下での高精度かつ高安定性の磁気変位センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US11519710B2 (ja) |
EP (1) | EP3872443A1 (ja) |
JP (1) | JP7142736B2 (ja) |
CN (1) | CN113310393A (ja) |
CA (1) | CA3108577A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20230065547A1 (en) * | 2021-08-30 | 2023-03-02 | The Goodyear Tire & Rubber Company | Method and apparatus for tread measurement system |
US20230253542A1 (en) | 2022-02-07 | 2023-08-10 | Honeywell International Inc. | Traceability of Battery Electrodes with Fiducial Markers |
US20230391571A1 (en) | 2022-06-06 | 2023-12-07 | Honeywell International Inc. | Machine Direction Position Profile Measurement in Sheet Manufacturing Systems |
US20240159685A1 (en) | 2022-11-11 | 2024-05-16 | Honeywell International Inc. | Compact-Cross Direction C-Frame Scanner |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002533661A (ja) | 1998-12-21 | 2002-10-08 | ハネウエル・メジヤレツクス コーポレーシヨン | ウエブカリパー測定システム |
US20050157314A1 (en) | 2003-12-22 | 2005-07-21 | Pekka Typpoe | Measuring device |
US20160123773A1 (en) | 2014-11-03 | 2016-05-05 | Honeywell Asca Inc. | Gap and displacement magnetic sensor system for scanner heads in paper machines or other systems |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3370181D1 (en) * | 1982-05-17 | 1987-04-16 | Measurex Corp | Gauge for measuring a sheet of material |
US5099125A (en) * | 1991-02-15 | 1992-03-24 | Abb Process Automation Inc. | Sheet material sensor compensation |
GB9221108D0 (en) * | 1992-10-07 | 1992-11-18 | Hirst Magnetic Instr Ltd | Characterisation of magnetic materials |
US5539675A (en) * | 1993-12-30 | 1996-07-23 | General Electric Company | Automated thickness measuring device |
IT1269734B (it) * | 1994-05-10 | 1997-04-15 | Aeonic Syst Italia Srl | Dispositivo per la misura in linea dello spessore di un foglio industriale continuo,basato su due testine tastatrici contrapposte senza contatto diretto per mezzo di cuscini d'aria,azionate da una spinta invariante di tipo gravimetrico |
US5714763A (en) | 1996-03-25 | 1998-02-03 | Measurex Corporation | Method and apparatus for optical alignment of a measuring head in an X-Y plane |
US5754294A (en) | 1996-05-03 | 1998-05-19 | Virginia Semiconductor, Inc. | Optical micrometer for measuring thickness of transparent wafers |
US6265867B1 (en) | 1999-05-19 | 2001-07-24 | Arthur D. Little, Inc. | Position encoder utilizing fluxgate sensors |
US6586930B1 (en) * | 2000-04-28 | 2003-07-01 | Quantum Magnetics, Inc. | Material thickness measurement using magnetic information |
US6967726B2 (en) | 2003-10-03 | 2005-11-22 | Honeywell International Inc. | Means for in-place automated calibration of optically-based thickness sensor |
US7298492B2 (en) | 2004-12-29 | 2007-11-20 | Honeywell International Inc. | Method and system for on-line measurement of thickness and birefringence of thin plastic films |
JP4374060B1 (ja) | 2008-08-01 | 2009-12-02 | 株式会社アクチュエーターデザイン | 磁気利用の位置検出方法及び位置検出センサ |
CN101788259B (zh) * | 2010-03-04 | 2012-09-05 | 上海雷尼威尔测量技术有限公司 | 双丝差动型磁致伸缩位移传感器 |
DE102010027017A1 (de) * | 2010-07-08 | 2012-01-12 | Siemens Aktiengesellschaft | Induktive Sensoreinrichtung sowie induktiver Näherungssensor mit einer induktiven Sensoreinrichtung |
US8527212B2 (en) | 2011-02-14 | 2013-09-03 | Honeywell Asca Inc. | Increased absorption-measurement accuracy through windowing of photon-transit times to account for scattering in continuous webs and powders |
US9063190B2 (en) * | 2011-09-02 | 2015-06-23 | Ivan GARSHELIS | Magnetostatic measurement method and sensor for assessing local hysteresis properties in ferromagnetic materials |
US8760669B2 (en) | 2011-09-30 | 2014-06-24 | Honeywell Asca Inc. | Method of measuring the thickness of a moving web |
US8564851B2 (en) | 2011-10-25 | 2013-10-22 | Honeywell Asca Inc. | Scanner belt load and stretch compensation control system |
US9182360B2 (en) | 2013-07-22 | 2015-11-10 | Honeywell Asca Inc. | Multi-frequency microwave sensor for temperature independent measurement of moisture |
DE102014200157A1 (de) | 2013-10-28 | 2015-05-21 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Verfahren zur Dickenmessung an Messobjekten und Vorrichtung zur Anwendung des Verfahrens |
US9612213B2 (en) | 2014-05-08 | 2017-04-04 | Honeywell Asca Inc. | Automatic z-correction for basis weight sensors |
US9891164B2 (en) | 2015-08-27 | 2018-02-13 | Honeywell Limited | Holmium oxide glasses as calibration standards for near infrared moisture sensors |
DE102016118384B4 (de) * | 2016-09-28 | 2023-10-26 | Infineon Technologies Ag | Magnetische Winkelsensorvorrichtung und Betriebsverfahren |
US10281318B1 (en) | 2017-03-31 | 2019-05-07 | SolveTech, lnc. | In line web process measurement apparatus and method |
US10935368B2 (en) | 2018-03-14 | 2021-03-02 | Honeywell Limited | Scanning caliper and basis weight sensor for sheet products using terahertz |
US11143495B2 (en) | 2018-09-24 | 2021-10-12 | Honeywell International Inc. | Thickness measurement with inductive and optical displacement sensors |
-
2020
- 2020-02-26 US US16/801,821 patent/US11519710B2/en active Active
-
2021
- 2021-01-25 CN CN202110109507.0A patent/CN113310393A/zh active Pending
- 2021-01-28 JP JP2021012240A patent/JP7142736B2/ja active Active
- 2021-02-10 EP EP21156408.3A patent/EP3872443A1/en active Pending
- 2021-02-11 CA CA3108577A patent/CA3108577A1/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002533661A (ja) | 1998-12-21 | 2002-10-08 | ハネウエル・メジヤレツクス コーポレーシヨン | ウエブカリパー測定システム |
US20050157314A1 (en) | 2003-12-22 | 2005-07-21 | Pekka Typpoe | Measuring device |
US20160123773A1 (en) | 2014-11-03 | 2016-05-05 | Honeywell Asca Inc. | Gap and displacement magnetic sensor system for scanner heads in paper machines or other systems |
Also Published As
Publication number | Publication date |
---|---|
US11519710B2 (en) | 2022-12-06 |
CA3108577A1 (en) | 2021-08-26 |
EP3872443A1 (en) | 2021-09-01 |
US20210262776A1 (en) | 2021-08-26 |
JP2021135288A (ja) | 2021-09-13 |
CN113310393A (zh) | 2021-08-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7142736B2 (ja) | 電磁干渉の存在下での高精度かつ高安定性の磁気変位センサ | |
JP7203961B2 (ja) | 誘導及び光学変位センサを用いた厚さ測定 | |
US4593244A (en) | Determination of the thickness of a coating on a highly elongated article | |
TWI289195B (en) | Method and apparatus for measuring object thickness | |
US20020149360A1 (en) | Eddy current test method and appratus for selecting calibration standard to measure thickness of micro thin film metal coating on wafer products by using noncontact technique | |
JP2911828B2 (ja) | パラメータ補償付き複数パラメータうず電流計測システム | |
JPS61102504A (ja) | 導電性素地上に析出した金属薄層の厚さを測定する方法および装置 | |
JP2000515625A (ja) | X―y平面における測定ヘッドの光学的アライメントのための方法および装置 | |
US7576532B2 (en) | Motion transducer for motion related to the direction of the axis of an eddy-current displacement sensor | |
US12000697B2 (en) | Surface profile measuring instrument and method | |
CN113390956B (zh) | 双磁敏元件探头及基于探头的漏磁检测缺陷定量评价方法 | |
KR100511624B1 (ko) | 비접촉 방식의 시트저항 측정기 | |
KR20190067716A (ko) | 자화 가능한 기재상의 비자성 층의 두께를 측정하는 방법 및 장치 | |
EP1211477A1 (en) | Measurement of the unbalancing of a ferromagnetic metal core in a nonconductive and nonferroelectric ribbon | |
JP4617677B2 (ja) | 層厚測定方法、システム及び層厚測定方法のプログラム | |
JP2005024295A (ja) | 漏洩磁束探傷法 | |
Moulder et al. | Calibration methods for eddy current measurement systems | |
WO1999044012A1 (en) | Method and apparatus for measuring caliper of moving web | |
Carli et al. | Low-cost accurate inductive system for thickness measurement of industrial ferromagnetic plates | |
JP2002039997A (ja) | 磁性測定装置及び方法 | |
CA2779226C (en) | Pulsed eddy current sensor for precision lift-off measurement | |
CN115824028A (zh) | 一种精密金属薄片间隙的快速检测方法及其检测装置 | |
KR100415922B1 (ko) | 자기유도센서를이용한비자성물질코팅층두께검량방법 | |
JPS60135703A (ja) | 鋼心入複合金属線の偏肉測定方法および装置 | |
JPH0219706A (ja) | 表面測定方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210128 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20210205 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20210210 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220112 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220114 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220413 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220817 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220913 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7142736 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |