JP7129944B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP7129944B2 JP7129944B2 JP2019088056A JP2019088056A JP7129944B2 JP 7129944 B2 JP7129944 B2 JP 7129944B2 JP 2019088056 A JP2019088056 A JP 2019088056A JP 2019088056 A JP2019088056 A JP 2019088056A JP 7129944 B2 JP7129944 B2 JP 7129944B2
- Authority
- JP
- Japan
- Prior art keywords
- component
- semiconductor device
- mounting
- recognition mark
- components
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 105
- 239000000470 constituent Substances 0.000 claims description 80
- 239000000463 material Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 description 18
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000000758 substrate Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007648 laser printing Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
- H01L21/4882—Assembly of heatsink parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54413—Marks applied to semiconductor devices or parts comprising digital information, e.g. bar codes, data matrix
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54433—Marks applied to semiconductor devices or parts containing identification or tracking information
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8338—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/83385—Shape, e.g. interlocking features
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/071—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next and on each other, i.e. mixed assemblies
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Supply And Installment Of Electrical Components (AREA)
Description
1.1 半導体装置
図1は、実施の形態1の半導体装置を模式的に図示する分解斜視図である。図2は、実施の形態1の半導体装置を模式的に図示する断面図である。
半導体装置1は、プロセス装置により組み立てられる。プロセス装置は、実装機等である。プロセス装置は、半導体装置1を含む半導体装置の複数の品種を組み立てることができる。
図3は、実施の形態1の半導体装置の組み立ての手順を示すフローチャートである。
実施の形態1の発明によれば、第1の構成部材A1の認識マークAM及び第1の構成部材B1の認識マークBMからそれぞれ第2の構成部材A2及び第2の構成部材B2についての情報を得ることができる。このため、レシピを作成することなく、複数の構成部材110を構成部材101上に自動搭載することができる。
図4は、実施の形態2の半導体装置を模式的に図示する分解斜視図である。図5は、実施の形態2の半導体装置を模式的に図示する断面図である。
図6は、実施の形態3の半導体装置を模式的に図示する分解斜視図である。図7は、実施の形態3の半導体装置を模式的に図示する断面図である。
図8は、実施の形態4の半導体装置、及びその製造の途上で使用される冶具を模式的に図示する分解斜視図である。図9は、実施の形態4の半導体装置、及びその製造の途上で使用される冶具を模式的に図示する断面図である。
実施の形態5の半導体装置は、図1及び図2に図示される実施の形態1の半導体装置1、図4及び図5に図示される実施の形態2の半導体装置2、図6及び図7に図示される実施の形態3の半導体装置3、又は図8及び図9に図示される実施の形態4の半導体装置4と下述する点で相違する。下述されない点については、実施の形態1の半導体装置1、実施の形態2の半導体装置2、実施の形態3の半導体装置3又は実施の形態4の半導体装置4において採用される構成と同様の構成が実施の形態5の半導体装置においても採用される。
Claims (7)
- 構成部材と、
前記構成部材上に搭載され、積層される複数の構成部材と、
を備え、
前記構成部材及び前記複数の構成部材は、
第1の構成部材と、
前記第1の構成部材上に搭載される第2の構成部材と、
を含み、
前記第1の構成部材は、前記第2の構成部材についての情報を示す認識マークを有し、
前記認識マークは、前記第1の構成部材上に前記第2の構成部材が搭載される際に前記第1の構成部材上に配置される冶具についての情報をさらに示す
半導体装置。 - 前記第2の構成部材は、積層される2個以上の構成部材を備える
請求項1の半導体装置。 - 前記2個以上の構成部材は、接合材、及び前記接合材により前記第1の構成部材に接合される被接合部材を備える
請求項2の半導体装置。 - 前記構成部材及び前記複数の構成部材は、前記第1の構成部材上に搭載される複数の第2の構成部材を含み、
前記第1の構成部材は、前記複数の第2の構成部材についての情報をそれぞれ示す複数の認識マークを有する
請求項1から3までのいずれかの半導体装置。 - 前記認識マークは、バーコード又は2次元コードである
請求項1から4までのいずれかの半導体装置。 - 前記情報は、前記第2の構成部材の品種、搭載位置、搭載角度及び搭載条件からなる群より選択される少なくとも1種を含む
請求項1から5までのいずれかの半導体装置。 - 前記第2の構成部材は、前記認識マーク上に搭載される
請求項1から6までのいずれかの半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019088056A JP7129944B2 (ja) | 2019-05-08 | 2019-05-08 | 半導体装置 |
DE102020111065.0A DE102020111065A1 (de) | 2019-05-08 | 2020-04-23 | Halbleitervorrichtung |
CN202010363022.XA CN111916426A (zh) | 2019-05-08 | 2020-04-30 | 半导体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019088056A JP7129944B2 (ja) | 2019-05-08 | 2019-05-08 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020184572A JP2020184572A (ja) | 2020-11-12 |
JP7129944B2 true JP7129944B2 (ja) | 2022-09-02 |
Family
ID=72943393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019088056A Active JP7129944B2 (ja) | 2019-05-08 | 2019-05-08 | 半導体装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7129944B2 (ja) |
CN (1) | CN111916426A (ja) |
DE (1) | DE102020111065A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000228489A (ja) | 1999-02-08 | 2000-08-15 | Rohm Co Ltd | チップオンチップの半導体チップおよび半導体装置 |
JP2006332507A (ja) | 2005-05-30 | 2006-12-07 | Kyocera Corp | 電子部品収納用パッケージ、電子部品搭載用基板および電子装置 |
JP2007088329A (ja) | 2005-09-26 | 2007-04-05 | Toshiba Corp | マルチチップパッケージ型半導体装置 |
WO2016181434A1 (ja) | 2015-05-08 | 2016-11-17 | 富士機械製造株式会社 | 確認方法 |
JP2019050324A (ja) | 2017-09-12 | 2019-03-28 | 富士電機株式会社 | 半導体装置、半導体装置の積層体、及び、半導体装置の積層体の搬送方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02226786A (ja) * | 1989-02-28 | 1990-09-10 | Nec Corp | プリント配線基板 |
JP2012119511A (ja) * | 2010-12-01 | 2012-06-21 | Hitachi High-Tech Instruments Co Ltd | 電子部品装着装置、電子部品装着装置システム、および、電子部品装着方法 |
-
2019
- 2019-05-08 JP JP2019088056A patent/JP7129944B2/ja active Active
-
2020
- 2020-04-23 DE DE102020111065.0A patent/DE102020111065A1/de active Pending
- 2020-04-30 CN CN202010363022.XA patent/CN111916426A/zh not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000228489A (ja) | 1999-02-08 | 2000-08-15 | Rohm Co Ltd | チップオンチップの半導体チップおよび半導体装置 |
JP2006332507A (ja) | 2005-05-30 | 2006-12-07 | Kyocera Corp | 電子部品収納用パッケージ、電子部品搭載用基板および電子装置 |
JP2007088329A (ja) | 2005-09-26 | 2007-04-05 | Toshiba Corp | マルチチップパッケージ型半導体装置 |
WO2016181434A1 (ja) | 2015-05-08 | 2016-11-17 | 富士機械製造株式会社 | 確認方法 |
JP2019050324A (ja) | 2017-09-12 | 2019-03-28 | 富士電機株式会社 | 半導体装置、半導体装置の積層体、及び、半導体装置の積層体の搬送方法 |
Also Published As
Publication number | Publication date |
---|---|
CN111916426A (zh) | 2020-11-10 |
JP2020184572A (ja) | 2020-11-12 |
DE102020111065A1 (de) | 2020-11-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8991681B2 (en) | Die bonder and bonding method | |
CN107210206B (zh) | 切断装置以及通过切断被切断物而制造多个产品的方法 | |
JP4801558B2 (ja) | 実装機およびその部品撮像方法 | |
JP2009094283A (ja) | 実装基板の生産方法、表面実装機及び実装基板生産管理装置 | |
JP2004087582A (ja) | 回路基板管理方法,タグチップの装着方法および電子回路生産システム | |
JP7129944B2 (ja) | 半導体装置 | |
JPH09307288A (ja) | 電子部品実装装置 | |
JP4122170B2 (ja) | 部品実装方法及び部品実装装置 | |
KR100447310B1 (ko) | 실장기 및 그 부품 장착 방법 | |
JP4781945B2 (ja) | 基板処理方法および部品実装システム | |
JP4664550B2 (ja) | 電気回路製造装置および電気回路製造方法 | |
WO2015166543A1 (ja) | 位置出し穴付き基板の製造方法および製造装置ならびに複数の位置出し穴付き基板 | |
JP3900166B2 (ja) | 部品実装基板の製造装置および製造方法 | |
JP5510299B2 (ja) | 露光装置および露光方法 | |
JP4938380B2 (ja) | 部品実装装置 | |
US6315185B2 (en) | Ball mount apparatus | |
JP6607740B2 (ja) | 電子部品実装機および電子部品実装方法 | |
JP7181027B2 (ja) | 認識装置、表面実装機および認識対象の位置認識方法 | |
JP5953068B2 (ja) | 電子部品の載置テーブルと同テーブルを備えたダイボンダ | |
CN112331582A (zh) | 芯片贴装装置以及半导体器件的制造方法 | |
JP4989349B2 (ja) | 部品実装装置 | |
JP7473684B2 (ja) | 部品確認装置および部品確認方法 | |
JP6413650B2 (ja) | 押付装置及び配置装置並びに基板装置の製造方法 | |
EP3920677B1 (en) | Work machine | |
JP4969977B2 (ja) | 部品実装装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210519 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220330 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220405 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220517 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220726 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220823 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7129944 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |