JP7127613B2 - heat transfer sensor - Google Patents

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JP7127613B2
JP7127613B2 JP2019101187A JP2019101187A JP7127613B2 JP 7127613 B2 JP7127613 B2 JP 7127613B2 JP 2019101187 A JP2019101187 A JP 2019101187A JP 2019101187 A JP2019101187 A JP 2019101187A JP 7127613 B2 JP7127613 B2 JP 7127613B2
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transfer coefficient
electromotive force
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JP2020193932A (en
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昌尚 片山
星児 笹田
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Denso Corp
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本発明は、第１媒体と第２媒体との間の熱伝達率を測定する熱伝達率センサに関する。 The present invention relates to a heat transfer coefficient sensor that measures the heat transfer coefficient between a first medium and a second medium.

例えば、自動車等における、排ガス等の流体が流れる環境についての熱解析等のシミュレーションを行う際には、流体と固体壁面との間の熱伝達率の値が必要となる。そのため、熱伝達率センサ、熱流センサ等を用いて熱伝達率が測定される。熱流センサ等は、被測定物の表面に取り付けられ、被測定物における単位面積当たりの熱エネルギーの通過量を測定している。 For example, when performing a simulation such as thermal analysis of an environment in which a fluid such as exhaust gas flows in an automobile or the like, the value of the heat transfer coefficient between the fluid and the solid wall surface is required. Therefore, the heat transfer coefficient is measured using a heat transfer coefficient sensor, a heat flow sensor, or the like. A heat flow sensor or the like is attached to the surface of the object to be measured, and measures the amount of heat energy passing through the object per unit area.

例えば、特許文献１の熱流束センサにおいては、センサ基板の厚み方向に熱流束が発生する際に、センサ基板の表面と裏面との温度差に起因して生じる、ゼーベック効果による起電力を検出している。この熱流束センサは、厚み方向の熱抵抗が互いに異なる２つの検出部を用い、２つの検出部の検出信号から演算をして、センサ基板による熱抵抗分をキャンセルした検出信号を出力するよう構成されている。そして、この熱流束センサによれば、センサ基板による熱抵抗がないとした場合の真の熱流束が検出信号として得られる。 For example, in the heat flux sensor of Patent Document 1, when the heat flux is generated in the thickness direction of the sensor substrate, the electromotive force due to the Seebeck effect generated due to the temperature difference between the front surface and the rear surface of the sensor substrate is detected. ing. This heat flux sensor is configured to use two detection units having different thermal resistances in the thickness direction, perform calculations from the detection signals of the two detection units, and output a detection signal in which the thermal resistance due to the sensor substrate is canceled. It is According to this heat flux sensor, a true heat flux is obtained as a detection signal assuming that there is no thermal resistance due to the sensor substrate.

特開２０１６－１６６８３２号公報JP 2016-166832 A

特許文献１の熱流束センサは、センサ基板の熱抵抗が熱流束に与える影響をなくして、熱流束を正確に検出するようにしたものである。しかし、この熱流束センサは、熱伝達率を測定するものではない。一方、多数の熱電対を用いて測定した温度分布から熱伝達率を求める熱伝達率センサも知られている。しかし、この熱伝達率センサは、広範囲の温度を計測することになり、熱伝達率を局所的に精度よく測定することが難しい。従って、熱伝達率を局所的に精度よく測定することができる、新たな測定原理による熱伝達率センサの開発が望まれる。 The heat flux sensor of Patent Literature 1 eliminates the influence of the thermal resistance of the sensor substrate on the heat flux and accurately detects the heat flux. However, this heat flux sensor does not measure heat transfer coefficient. On the other hand, there is also known a heat transfer coefficient sensor that obtains the heat transfer coefficient from the temperature distribution measured using a large number of thermocouples. However, this heat transfer coefficient sensor measures temperatures over a wide range, and it is difficult to measure the heat transfer coefficient locally with high accuracy. Therefore, it is desired to develop a heat transfer coefficient sensor based on a new measurement principle that can locally measure the heat transfer coefficient with high accuracy.

本発明は、かかる課題に鑑みてなされたもので、新たな測定原理に基づき、第１媒体と第２媒体との間の熱伝達率を局所的に精度よく測定することができる熱伝達率センサを提供しようとして得られたものである。 The present invention has been made in view of such problems, and based on a new measurement principle, a heat transfer coefficient sensor capable of locally and accurately measuring the heat transfer coefficient between a first medium and a second medium. was obtained by trying to provide

本発明の一態様は、固体としての第１媒体（Ｂ１）と、流体又は固体としての第２媒体（Ｂ２）との間の熱伝達率（ｈ）を測定する熱伝達率センサ（１）であって、
前記第１媒体の側に位置する第１表面（２０１）と、前記第１表面の反対側に位置して前記第２媒体の側に位置する第２表面（２０２）とにそれぞれ計測点（Ｐ）が設けられた第１測温体（２）、及び前記第１測温体の前記計測点によって生じる第１起電力（Ｖ１）を検出する第１検出回路（２４）を有する第１検出部（１２）と、
前記第１媒体の側に位置する第１表面（３０１）と、前記第１表面の反対側に位置して前記第２媒体の側に位置する第２表面（３０２）とにそれぞれ計測点（Ｐ）が設けられ、前記第１表面と前記第２表面とが対向する厚み方向（Ｔ）に熱が通過するときの熱抵抗（Ｒ１，Ｒ２）が前記第１測温体と異なる第２測温体（３）、及び前記第２測温体の前記計測点によって生じる第２起電力（Ｖ２）を検出する第２検出回路（３４）を有する第２検出部（１３）と、
前記第１起電力と前記第２起電力との比を利用して、前記第１媒体と前記第２媒体との間の熱伝達率を算出する算出部（４）と、を備える熱伝達率センサにある。 One aspect of the present invention is a heat transfer coefficient sensor (1) for measuring the heat transfer coefficient (h) between a first medium (B1) as a solid and a second medium (B2) as a fluid or solid There is
Measurement points (P ), and a first detection circuit (24) that detects a first electromotive force (V1) generated by the measurement point of the first temperature detector. (12) and
Measurement points (P ) is provided, and the thermal resistance (R1, R2) when heat passes in the thickness direction (T) in which the first surface and the second surface are opposed to each other is different from that of the first temperature measuring element. a second detection unit (13) having a second detection circuit (34) for detecting a second electromotive force (V2) generated by the body (3) and the measurement point of the second thermometer;
a heat transfer coefficient calculator (4) that calculates the heat transfer coefficient between the first medium and the second medium using the ratio between the first electromotive force and the second electromotive force. in the sensor.

前記一態様の熱伝達率センサは、熱流センサ、熱流束センサ等の名称で知られる２つの測温体を利用して熱伝達率を算出する際に、新たな測定原理を導入したものである。具体的には、第１検出部によって第１測温体における第１起電力を検出するとともに、第２検出部によって第２測温体における第２起電力を検出する。そして、算出部によって、第１起電力と第２起電力との比を利用して、第１媒体と第２媒体との間の熱伝達率を算出する。 The heat transfer coefficient sensor of the above aspect introduces a new measurement principle when calculating the heat transfer coefficient using two thermometers known as heat flow sensors, heat flux sensors, and the like. . Specifically, the first detector detects the first electromotive force in the first temperature detector, and the second detector detects the second electromotive force in the second temperature detector. Then, the calculator calculates the heat transfer coefficient between the first medium and the second medium using the ratio between the first electromotive force and the second electromotive force.

前記一態様の熱伝達率センサにおいては、第１媒体と第２媒体との間に第１測温体が配置されている場合と、第１媒体と第２媒体との間に第２測温体が配置されている場合とについて、第１測温体の厚み方向の第１熱抵抗と第２測温体の厚み方向の第２熱抵抗とが異なることに基づいて、第１媒体と第２媒体との間を通過する熱流束に違いが生じることに着目する。なお、第１測温体及び第２測温体における第１表面と第２表面との温度差は同じであるとする。 In the heat transfer coefficient sensor of the aspect, the first temperature measuring element is arranged between the first medium and the second medium, and the second temperature measuring element is arranged between the first medium and the second medium. Based on the difference between the first thermal resistance in the thickness direction of the first temperature sensing element and the second thermal resistance in the thickness direction of the second temperature sensing element, the first medium and the first Note that there is a difference in heat flux passing between the two media. It is assumed that the temperature difference between the first surface and the second surface of the first temperature sensing element and the second temperature sensing element is the same.

そして、算出部は、第１媒体と第２媒体との間の熱伝達率を、第１起電力と第２起電力との比との関係によって表されることに基づいて算出する。この熱伝達率の求め方は、従来の熱流センサ、熱流束センサ等にはない新たな測定原理に基づくものである。また、第１測温体及び第２測温体はコンパクトに形成することができ、第１媒体と第２媒体との間の局所的な位置に配置することができる。 Then, the calculation unit calculates the heat transfer coefficient between the first medium and the second medium based on the relationship between the ratio of the first electromotive force and the second electromotive force. This method of determining the heat transfer coefficient is based on a new measurement principle not found in conventional heat flow sensors, heat flux sensors, and the like. In addition, the first temperature sensing element and the second temperature sensing element can be formed compactly and can be arranged at a local position between the first medium and the second medium.

それ故、前記一態様の熱伝達率センサによれば、新たな測定原理に基づき、第１媒体と第２媒体との間の熱伝達率を局所的に精度よく測定することができる。 Therefore, according to the heat transfer coefficient sensor of the one aspect, the heat transfer coefficient between the first medium and the second medium can be locally measured with high accuracy based on the new measurement principle.

なお、本発明の一態様において示す各構成要素のカッコ書きの符号は、実施形態における図中の符号との対応関係を示すが、各構成要素を実施形態の内容のみに限定するものではない。 In addition, although the symbols in parentheses of each component shown in one aspect of the present invention indicate the correspondence with the symbols in the drawings in the embodiment, each component is not limited only to the contents of the embodiment.

実施形態にかかる、第１検出部、第２検出部及び算出部を有する熱伝達率センサを示す説明図。FIG. 4 is an explanatory diagram showing a heat transfer coefficient sensor having a first detection section, a second detection section, and a calculation section according to the embodiment; 実施形態にかかる、第１媒体と第２媒体との配置環境を示す説明図。FIG. 4 is an explanatory diagram showing an arrangement environment of a first medium and a second medium according to the embodiment; 実施形態にかかる、熱伝達率センサが配置された第１媒体と第２媒体との配置環境を示す説明図。FIG. 4 is an explanatory diagram showing an arrangement environment of a first medium and a second medium on which heat transfer coefficient sensors are arranged according to the embodiment; 実施形態にかかる、第１測温体又は第２測温体の断面を示す説明図。Explanatory drawing which shows the cross section of the 1st temperature sensing element or the 2nd temperature sensing element concerning embodiment. 実施形態にかかる、第１測温体及び第２測温体の配置状態を示す説明図。FIG. 4 is an explanatory diagram showing the arrangement state of the first temperature sensing element and the second temperature sensing element according to the embodiment; 実施形態にかかる、第１測温体及び第２測温体の他の配置状態を示す説明図。FIG. 4 is an explanatory diagram showing another arrangement state of the first temperature sensing element and the second temperature sensing element according to the embodiment; 実施形態にかかる、熱伝達率が変化したときの、熱抵抗と熱通過率との関係を示すグラフ。5 is a graph showing the relationship between thermal resistance and heat transfer rate when the heat transfer rate changes according to the embodiment; 実施形態にかかる、熱伝達率と出力電圧比との関係マップを示すグラフ。4 is a graph showing a relationship map between heat transfer coefficient and output voltage ratio according to the embodiment;

前述した熱伝達率センサにかかる好ましい実施形態について、図面を参照して説明する。
＜実施形態＞
本形態の熱伝達率センサ１は、図１～図３に示すように、固体としての第１媒体Ｂ１と、流体としての第２媒体Ｂ２との間の熱伝達率ｈを測定するものである。ここで、図１は、熱伝達率センサ１の構成を示し、図２は、第１媒体Ｂ１と第２媒体Ｂ２との配置環境を示し、図３は、熱伝達率センサ１が配置された第１媒体Ｂ１と第２媒体Ｂ２との配置環境を示す。 A preferred embodiment of the heat transfer coefficient sensor described above will be described with reference to the drawings.
<Embodiment>
As shown in FIGS. 1 to 3, the heat transfer coefficient sensor 1 of this embodiment measures the heat transfer coefficient h between a first medium B1 as a solid and a second medium B2 as a fluid. . Here, FIG. 1 shows the configuration of the heat transfer coefficient sensor 1, FIG. 2 shows the arrangement environment of the first medium B1 and the second medium B2, and FIG. 3 shows the arrangement of the heat transfer coefficient sensor 1. The arrangement environment of the first medium B1 and the second medium B2 is shown.

熱伝達率センサ１は、第１測温体２及び第１検出回路２４を有する第１検出部１２と、第２測温体３及び第２検出回路３４を備える第２検出部１３と、算出部４とを備える。第１測温体２は、第１媒体Ｂ１の側に位置する第１表面２０１と、第１表面２０１の反対側であって第２媒体Ｂ２の側に位置する第２表面２０２とにそれぞれ計測点Ｐを有する。第１検出回路２４は、第１測温体２の計測点Ｐによって生じる第１起電力（第１出力電圧）Ｖ１を検出するよう構成されている。 The heat transfer coefficient sensor 1 includes a first detection section 12 having a first temperature sensing element 2 and a first detection circuit 24, a second detection section 13 having a second temperature sensing element 3 and a second detection circuit 34, a calculation a part 4; The first temperature sensing element 2 measures on a first surface 201 located on the side of the first medium B1 and on a second surface 202 located on the side of the second medium B2 opposite to the first surface 201. has a point P. The first detection circuit 24 is configured to detect a first electromotive force (first output voltage) V1 generated by the measurement point P of the first temperature sensing element 2 .

第２測温体３は、第１媒体Ｂ１の側に位置する第１表面３０１と、第１表面３０１の反対側であって第２媒体Ｂ２の側に位置する第２表面３０２とにそれぞれ計測点Ｐを有する。第１表面３０１と第２表面３０２とが対向する厚み方向Ｔに熱が通過するときの第２測温体３の第２熱抵抗Ｒ２は、第１表面２０１と第２表面２０２とが対向する厚み方向Ｔに熱が通過するときの第１測温体２の第１熱抵抗Ｒ１と異なる。第２検出回路３４は、第２測温体３の計測点Ｐによって生じる第２起電力（第２出力電圧）Ｖ２を検出するよう構成されている。算出部４は、第１起電力Ｖ１と第２起電力Ｖ２との比を利用して、第１媒体Ｂ１と第２媒体Ｂ２との間の熱伝達率ｈを算出するよう構成されている。 The second temperature sensing element 3 measures on a first surface 301 located on the side of the first medium B1 and on a second surface 302 located on the side of the second medium B2 opposite to the first surface 301, respectively. has a point P. The second thermal resistance R2 of the second temperature sensing element 3 when heat passes in the thickness direction T in which the first surface 301 and the second surface 302 face each other is It differs from the first thermal resistance R1 of the first temperature sensing element 2 when heat passes in the thickness direction T. The second detection circuit 34 is configured to detect a second electromotive force (second output voltage) V2 generated by the measurement point P of the second temperature sensing element 3 . The calculator 4 is configured to calculate the heat transfer coefficient h between the first medium B1 and the second medium B2 using the ratio between the first electromotive force V1 and the second electromotive force V2.

以下に、本形態の熱伝達率センサ１について詳説する。
（熱伝達率センサ１）
図２に示すように、熱伝達率センサ１は、固体と気体、固体と液体、固体と固体との間において熱伝達が生じる環境下において、熱伝達率ｈを測定するために用いられる。熱伝達率ｈは、熱解析等のシミュレーションを行う際に、シミュレーションを行う環境下における種々の媒体Ｂ１，Ｂ２間の熱伝達率ｈとして入力するために、熱伝達率センサ１によって測定することができる。熱伝達率センサ１によって媒体Ｂ１，Ｂ２間の熱伝達率ｈを実際に測定し、この実際に測定された熱伝達率ｈの値を用いることにより、熱解析等のシミュレーションの精度を向上させることができる。 The heat transfer coefficient sensor 1 of this embodiment will be described in detail below.
(Heat transfer coefficient sensor 1)
As shown in FIG. 2, the heat transfer coefficient sensor 1 is used to measure the heat transfer coefficient h in an environment where heat transfer occurs between solid and gas, solid and liquid, and solid and solid. The heat transfer coefficient h can be measured by the heat transfer coefficient sensor 1 to be input as the heat transfer coefficient h between various media B1 and B2 under the environment where the simulation is performed when performing a simulation such as thermal analysis. can. The heat transfer coefficient h between the media B1 and B2 is actually measured by the heat transfer coefficient sensor 1, and the actually measured value of the heat transfer coefficient h is used to improve the accuracy of simulation such as thermal analysis. can be done.

熱伝達率センサ１は、機械的構成要素と電気的構成要素との組み合わせによって構成されている。第１測温体２及び第２測温体３は、測定対象物としての固体の壁面Ｂ１１に取り付けられる機械的構成要素を構成する。第１検出回路２４、第２検出回路３４及び算出部４は、電子部品、コンピュータ等を用いた電気的構成要素を構成する。 The heat transfer coefficient sensor 1 is composed of a combination of mechanical components and electrical components. The first temperature sensing element 2 and the second temperature sensing element 3 constitute mechanical components attached to the solid wall surface B11 as the object to be measured. The first detection circuit 24, the second detection circuit 34, and the calculator 4 constitute electrical components using electronic components, computers, and the like.

（第１媒体Ｂ１，第２媒体Ｂ２）
熱伝達率センサ１によって熱伝達率ｈを測定する対象は、種々の流体が流れる配管、機器等とすることができる。熱伝達率ｈの測定対象は、例えば、冷媒が流れる種々の機器とすることができる。この場合には、第１媒体Ｂ１は、固体としての金属部材とし、第２媒体Ｂ２は、流体としての冷媒とすることができる。 (First medium B1, second medium B2)
An object for which the heat transfer coefficient h is measured by the heat transfer coefficient sensor 1 can be a pipe, a device, or the like through which various fluids flow. The measurement object of the heat transfer coefficient h can be, for example, various devices through which a refrigerant flows. In this case, the first medium B1 can be a metal member as a solid, and the second medium B2 can be a refrigerant as a fluid.

（第１測温体２，第２測温体３）
図１及び図４に示すように、第１測温体２及び第２測温体３は、導通部２１，３１と導通部２１，３１を絶縁する絶縁部２２，３２とによって構成されている。導通部２１，３１は、Ｐ型半導体２１１，３１１とＮ型半導体２１２，３１２とが、第１表面２０１，３０１の側の端部と第２表面２０２，３０２の側の端部とにおいて、計測点Ｐを形成するとともに、導体２１３，３１３を介して交互に複数個のＰ型半導体２１１，３１１及びＮ型半導体２１２，３１２が直列に電気接続されたものである。Ｐ型半導体２１１，３１１及びＮ型半導体２１２，３１２は、熱を電力に変換する熱電変換素子を構成するものである。Ｐ型半導体２１１，３１１及びＮ型半導体２１２，３１２には、例えば、ビスマス・テルル系（Ｂｉ－Ｔｅ系）の材料を用いることができる。 (First temperature sensing element 2, second temperature sensing element 3)
As shown in FIGS. 1 and 4, the first temperature sensing element 2 and the second temperature sensing element 3 are composed of conductive portions 21 and 31 and insulating portions 22 and 32 that insulate the conductive portions 21 and 31. . The conductive portions 21 and 31 are measured at the ends of the P-type semiconductors 211 and 311 and the N-type semiconductors 212 and 312 on the side of the first surfaces 201 and 301 and the ends on the side of the second surfaces 202 and 302. A point P is formed, and a plurality of P-type semiconductors 211, 311 and N-type semiconductors 212, 312 are electrically connected in series via conductors 213, 313 alternately. The P-type semiconductors 211, 311 and the N-type semiconductors 212, 312 constitute thermoelectric conversion elements that convert heat into electric power. For the P-type semiconductors 211 and 311 and the N-type semiconductors 212 and 312, for example, a bismuth-tellurium-based (Bi—Te-based) material can be used.

第１測温体２及び第２測温体３において、Ｐ型半導体２１１，３１１及びＮ型半導体２１２，３１２は、両端面が導体２１３，３１３に接触する状態で絶縁部２２，３２内に埋設されている。絶縁部２２，３２は、熱可塑性樹脂等である絶縁性材料によって構成されている。また、導体２１３，３１３の表面及び絶縁部２２，３２の表面には、絶縁性の保護シート２２１，３２１が設けられている。第１測温体２の各表面２０１，２０２、及び第２測温体３の各表面３０１，３０２は、保護シート２２１，３２１の表面となる。第１測温体２の計測点Ｐ及び第２測温体３の計測点Ｐは、Ｐ型半導体２１１，３１１の端面とＮ型半導体２１２，３１２の端面とが接続された複数の導体２１３，３１３の位置に形成される。 In the first temperature sensing element 2 and the second temperature sensing element 3, the P-type semiconductors 211, 311 and the N-type semiconductors 212, 312 are embedded in the insulating portions 22, 32 with both end surfaces in contact with the conductors 213, 313. It is The insulating portions 22 and 32 are made of an insulating material such as thermoplastic resin. Insulating protective sheets 221 and 321 are provided on the surfaces of the conductors 213 and 313 and the surfaces of the insulating portions 22 and 32, respectively. Surfaces 201 and 202 of the first temperature sensing element 2 and surfaces 301 and 302 of the second temperature sensing element 3 are surfaces of protective sheets 221 and 321 . The measurement point P of the first temperature sensing element 2 and the measurement point P of the second temperature sensing element 3 are a plurality of conductors 213 and 213, to which the end surfaces of the P-type semiconductors 211 and 311 and the end surfaces of the N-type semiconductors 212 and 312 are connected. 313 is formed.

第１測温体２と第２測温体３とは、互いに隣接している関係にあれば、種々の形状に形成することができる。例えば、図５に示すように、第１測温体２及び第２測温体３のいずれか一方を中心部に配置し、他方を外周部に配置することができる。また、図６に示すように、第１測温体２と第２測温体３とは、互いに隣接して横に並ぶ状態で配置することもできる。 The first temperature sensing element 2 and the second temperature sensing element 3 can be formed in various shapes as long as they are adjacent to each other. For example, as shown in FIG. 5, either one of the first temperature sensing element 2 and the second temperature sensing element 3 can be arranged in the central part, and the other can be arranged in the outer peripheral part. Also, as shown in FIG. 6, the first temperature sensing element 2 and the second temperature sensing element 3 can be arranged side by side adjacent to each other.

（第１検出回路２４，第２検出回路３４）
図１に示すように、第１検出回路２４は、第１測温体２の導通部２１の両端部に生じる第１起電力Ｖ１を検出するよう構成されている。第１起電力Ｖ１は、第１媒体Ｂ１の温度と第２媒体Ｂ２の温度との違いによって、第１測温体２の導通部２１における複数のＰ型半導体２１１及びＮ型半導体２１２に生じる電圧である。第２検出回路３４は、第２測温体３の導通部３１の両端部に生じる第２起電力Ｖ２を検出するよう構成されている。第２起電力Ｖ２は、第１媒体Ｂ１の温度と第２媒体Ｂ２の温度との違いによって、第２測温体３の導通部３１における複数のＰ型半導体３１１及びＮ型半導体３１２に生じる電圧である。 (First detection circuit 24, second detection circuit 34)
As shown in FIG. 1 , the first detection circuit 24 is configured to detect a first electromotive force V1 generated at both ends of the conducting portion 21 of the first temperature sensing element 2 . The first electromotive force V1 is a voltage generated in the plurality of P-type semiconductors 211 and N-type semiconductors 212 in the conducting portion 21 of the first temperature sensing element 2 due to the difference between the temperature of the first medium B1 and the temperature of the second medium B2. is. The second detection circuit 34 is configured to detect the second electromotive force V2 generated at both ends of the conductive portion 31 of the second temperature sensing element 3 . The second electromotive force V2 is a voltage generated in the plurality of P-type semiconductors 311 and N-type semiconductors 312 in the conductive portion 31 of the second temperature sensing element 3 due to the difference between the temperature of the first medium B1 and the temperature of the second medium B2. is.

（貼付層２３，３３）
図１に示すように、本形態の第１測温体２と第２測温体３とは、同形状に形成されている。第１測温体２の第１表面２０１には、第１測温体２を第１媒体Ｂ１の壁面Ｂ１１に貼り付けるための貼付層２３が設けられている。第２測温体３の第１表面３０１には、第２測温体３を第１媒体Ｂ１の壁面Ｂ１１に貼り付けるための貼付層３３が設けられている。第１測温体２と第２測温体３とは、互いに隣接する状態で第１媒体Ｂ１の壁面Ｂ１１に貼り付けられる。 (Affixing layers 23, 33)
As shown in FIG. 1, the first temperature sensing element 2 and the second temperature sensing element 3 of this embodiment are formed in the same shape. The first surface 201 of the first temperature sensing element 2 is provided with an attachment layer 23 for attaching the first temperature sensing element 2 to the wall surface B11 of the first medium B1. A first surface 301 of the second temperature sensing element 3 is provided with an attachment layer 33 for attaching the second temperature sensing element 3 to the wall surface B11 of the first medium B1. The first temperature sensing element 2 and the second temperature sensing element 3 are attached to the wall surface B11 of the first medium B1 while being adjacent to each other.

貼付層２３，３３は、接着剤による接着層、粘着剤による粘着層等とすることができる。貼付層２３，３３には、第１媒体Ｂ１の壁面Ｂ１１に保持することができる種々の材料を用いることができる。 The sticking layers 23 and 33 can be an adhesive layer made of an adhesive, an adhesive layer made of an adhesive, or the like. Various materials that can be held on the wall surface B11 of the first medium B1 can be used for the attachment layers 23 and 33 .

同図に示すように、本形態において、第１測温体２における貼付層２３の厚み方向Ｔの厚みｔ１と、第２測温体３における貼付層３３の厚み方向Ｔの厚みｔ２とは互いに異なっている。これに伴い、貼付層２３の厚み方向Ｔの厚みｔ１を含む、第１測温体２の厚み方向Ｔの厚みｕ１と、貼付層３３の厚み方向Ｔの厚みｔ２を含む、第２測温体３の厚み方向Ｔの厚みｕ２とが互いに異なっている。貼付層２３を含む第１測温体２を構成する各部位の材質と、貼付層３３を含む第２測温体３を構成する各部位の材質とは同じである。そして、第１測温体２の厚み方向Ｔの熱抵抗である第１熱抵抗Ｒ１と、第２測温体３の厚み方向Ｔの熱抵抗である第２熱抵抗Ｒ２とは、各貼付層２３，３３の厚みが異なることによって互いに異なっている。 As shown in the figure, in this embodiment, the thickness t1 in the thickness direction T of the adhesive layer 23 in the first temperature sensing element 2 and the thickness t2 in the thickness direction T of the adhesive layer 33 in the second temperature sensing element 3 are different from each other. different. Along with this, the thickness u1 in the thickness direction T of the first temperature sensing element 2 including the thickness t1 in the thickness direction T of the adhesive layer 23, and the second temperature sensing element including the thickness t2 in the thickness direction T of the attaching layer 33 The thickness u2 in the thickness direction T of 3 is different from each other. The material of each portion of the first temperature sensing element 2 including the adhesive layer 23 is the same as the material of each portion of the second temperature sensing element 3 including the adhesive layer 33 . A first thermal resistance R1, which is the thermal resistance in the thickness direction T of the first temperature sensing element 2, and a second thermal resistance R2, which is the thermal resistance in the thickness direction T of the second temperature sensing element 3, are formed in each adhesion layer. They differ from each other by the different thicknesses of 23,33.

第１熱抵抗Ｒ１は、第１測温体２の厚み方向Ｔに熱が通過するときの、熱の伝わりにくさを示し、第２熱抵抗Ｒ２は、第２測温体３の厚み方向Ｔに熱が通過するときの、熱の伝わりにくさを示す。第１熱抵抗Ｒ１は、貼付層２３の外表面２３１から第１測温体２の第２表面２０２まで熱が通過するときの値として示される。第２熱抵抗Ｒ２は、貼付層３３の外表面３３１から第２測温体３の第２表面３０２まで熱が通過するときの値として示される。 The first thermal resistance R1 indicates the difficulty of heat conduction when heat passes through the thickness direction T of the first temperature sensing element 2, and the second thermal resistance R2 indicates the thickness direction T of the second temperature sensing element 3. Indicates the difficulty of heat transfer when heat passes through. The first thermal resistance R1 is indicated as a value when heat passes from the outer surface 231 of the adhesive layer 23 to the second surface 202 of the first temperature sensing element 2. FIG. The second thermal resistance R2 is indicated as a value when heat passes from the outer surface 331 of the sticking layer 33 to the second surface 302 of the second temperature sensing element 3 .

本形態においては、熱伝達率センサ１の試作品について、実際に熱伝達率ｈを測定したときの第１起電力Ｖ１及び第２起電力Ｖ２の値を記憶する。そして、製品としての熱伝達率センサ１においては、後述するように、第１起電力Ｖ１及び第２起電力Ｖ２の比と熱伝達率ｈとの関係が求められた関係マップＭを用いる。そのため、第１測温体２の第１熱抵抗Ｒ１の値及び第２測温体３の第２熱抵抗Ｒ２の値が実際にどれだけであるかを実測することなく、熱伝達率センサ１によって熱伝達率ｈを測定することができる。 In this embodiment, the values of the first electromotive force V1 and the second electromotive force V2 when the heat transfer coefficient h is actually measured for the prototype of the heat transfer coefficient sensor 1 are stored. As will be described later, the heat transfer coefficient sensor 1 as a product uses a relationship map M obtained by obtaining the relationship between the ratio of the first electromotive force V1 and the second electromotive force V2 and the heat transfer coefficient h. Therefore, the heat transfer coefficient sensor 1 can be measured without actually measuring the values of the first thermal resistance R1 of the first temperature sensing element 2 and the second thermal resistance R2 of the second temperature sensing element 3. The heat transfer coefficient h can be measured by

第１熱抵抗Ｒ１と第２熱抵抗Ｒ２とは、第１測温体２の絶縁部２２の材質と第２測温体３の絶縁部３２の材質とを異ならせることによって互いに異ならせることもできる。また、第１熱抵抗Ｒ１と第２熱抵抗Ｒ２とは、第１測温体２の厚み方向Ｔの厚みと第２測温体３の厚み方向Ｔの厚みとを異ならせることによって互いに異ならせることもできる。 The first thermal resistance R1 and the second thermal resistance R2 can be made different from each other by making the material of the insulating portion 22 of the first temperature sensing element 2 and the material of the insulating portion 32 of the second temperature sensing element 3 different. can. The first thermal resistance R1 and the second thermal resistance R2 are made different from each other by making the thickness of the first temperature sensing element 2 in the thickness direction T different from the thickness of the second temperature sensing element 3 in the thickness direction T. can also

第１検出回路２４によって検出される第１起電力Ｖ１と、第２検出回路３４によって検出される第２起電力Ｖ２との差は、第１測温体２の第１熱抵抗Ｒ１と第２測温体３の第２熱抵抗Ｒ２との差が大きくなるほど大きくなる。第１起電力Ｖ１と第２起電力Ｖ２との差が大きいほど、熱伝達率ｈを求める際の分解能（精度）が高くなる。そのため、貼付層２３を含めた第１測温体２の厚み等と、貼付層３３を含めた第２測温体３の厚み等とは、できるだけ大きく異なっていた方が好ましい。 The difference between the first electromotive force V1 detected by the first detection circuit 24 and the second electromotive force V2 detected by the second detection circuit 34 is the first thermal resistance R1 of the first temperature sensing element 2 and the second It increases as the difference from the second thermal resistance R2 of the temperature measuring element 3 increases. The larger the difference between the first electromotive force V1 and the second electromotive force V2, the higher the resolution (accuracy) when obtaining the heat transfer coefficient h. Therefore, it is preferable that the thickness of the first temperature detector 2 including the adhesive layer 23 and the thickness of the second temperature detector 3 including the adhesive layer 33 are different as much as possible.

（熱伝達率ｈの理論式）
図２に示すように、固体としての第１媒体Ｂ１の壁面Ｂ１１に測温体２，３が配置されていない状態において、第１媒体Ｂ１と、流体としての第２媒体Ｂ２との間の熱流束ｑ［Ｗ／ｍ2］は、第１媒体Ｂ１と第２媒体Ｂ２との間の温度差ΔＴ［Ｋ］、及び第１媒体Ｂ１と第２媒体Ｂ２との間の熱抵抗Ｒ［Ｋ・ｍ2／Ｗ］を用いて、ｑ＝ΔＴ／Ｒの式によって表される。また、熱伝達率ｈ［Ｗ／（ｍ2・Ｋ）］は、熱抵抗Ｒ［Ｋ・ｍ2／Ｗ］の逆数として、ｈ＝１／Ｒとして表される。 (Theoretical formula for heat transfer coefficient h)
As shown in FIG. 2, in a state where the temperature sensors 2 and 3 are not arranged on the wall surface B11 of the first medium B1 as a solid, the heat flow between the first medium B1 and the second medium B2 as a fluid is The flux q [W/m 2 ] is determined by the temperature difference ΔT [K] between the first medium B1 and the second medium B2 and the thermal resistance R [K· m 2 /W] and q=ΔT/R. Also, the heat transfer coefficient h [W/(m 2 ·K)] is expressed as h=1/R as the reciprocal of the thermal resistance R [K·m 2 /W].

［Ｗ］（ワット）は、［Ｊ／ｓ］（ジュール／秒）とも表され、熱流束ｑ［Ｗ／ｍ2］は、ｑ［Ｊ／（ｍ2・ｓ）］によって表される。また、熱流束ｑは、一般的には、単位面積を単位時間に横切る熱量として捉えられ、第１媒体Ｂ１の壁面Ｂ１１に測温体２，３が配置されていない場合においては、第１媒体Ｂ１と第２媒体Ｂ２との界面における単位面積を、単位時間に移動する熱量として捉えられる。第１媒体Ｂ１と第２媒体Ｂ２との間の熱抵抗Ｒは、第１媒体Ｂ１と第２媒体Ｂ２との界面を熱が通過するときの、熱の通過のしにくさを表す。 [W] (Watt) is also expressed as [J/s] (Joule/second), and heat flux q [W/m 2 ] is expressed by q [J/(m 2 ·s)]. Moreover, the heat flux q is generally understood as the amount of heat that traverses a unit area per unit time. A unit area at the interface between B1 and the second medium B2 can be regarded as the amount of heat transferred per unit time. The thermal resistance R between the first medium B1 and the second medium B2 represents how difficult it is for heat to pass through the interface between the first medium B1 and the second medium B2.

一方、図３に示すように、第１媒体Ｂ１の壁面Ｂ１１に測温体２，３が配置された状態において、第１媒体Ｂ１と第２媒体Ｂ２との間の熱流束ｑｘ［Ｗ／ｍ2］は、第１媒体Ｂ１と第２媒体Ｂ２との間の温度差ΔＴ［Ｋ］、測温体２，３の厚み方向Ｔの熱抵抗Ｒｘ［Ｋ・ｍ2／Ｗ］、及び測温体２，３と第２媒体Ｂ２との間の熱抵抗Ｒ［Ｋ・ｍ2／Ｗ］を用いて、ｑｘ＝ΔＴ／（Ｒ＋Ｒｘ）の式によって表される。ここで、第１媒体Ｂ１と第２媒体Ｂ２との間の熱抵抗Ｒと、測温体２，３と第２媒体Ｂ２との間の熱抵抗Ｒとは、いずれも同じ熱抵抗Ｒによって示す。 On the other hand, as shown in FIG. 3, in a state where the temperature sensors 2 and 3 are arranged on the wall surface B11 of the first medium B1, the heat flux qx [W/m 2 ] are the temperature difference ΔT [K] between the first medium B1 and the second medium B2, the thermal resistance Rx [K·m 2 /W] in the thickness direction T of the temperature sensors 2 and 3, and the temperature sensor Using the thermal resistance R [K·m 2 /W] between the bodies 2, 3 and the second medium B2, qx=ΔT/(R+Rx). Here, the thermal resistance R between the first medium B1 and the second medium B2 and the thermal resistance R between the temperature detectors 2 and 3 and the second medium B2 are both indicated by the same thermal resistance R. .

第１媒体Ｂ１の壁面Ｂ１１に測温体２，３が配置された場合においては、熱流束ｑｘは、第１媒体Ｂ１の壁面Ｂ１１に配置された測温体２，３における単位面積、及び測温体２，３と第２媒体Ｂ２との界面における単位面積を、単位時間に移動する熱量として捉えられる。測温体２，３の厚み方向Ｔの熱抵抗Ｒｘは、測温体２，３の厚み方向Ｔに熱が通過するときの、熱の通過のしにくさを表す。 When the temperature detectors 2 and 3 are arranged on the wall surface B11 of the first medium B1, the heat flux qx is the unit area of the temperature detectors 2 and 3 arranged on the wall surface B11 of the first medium B1, and A unit area of the interface between the warm bodies 2, 3 and the second medium B2 can be regarded as the amount of heat transferred per unit time. The thermal resistance Rx in the thickness direction T of the temperature detectors 2 and 3 represents the difficulty of heat passing through the temperature detectors 2 and 3 in the thickness direction T. FIG.

第１媒体Ｂ１の壁面Ｂ１１に第１測温体２が配置された場合の熱流束ｑ１［Ｗ／ｍ2］は、第１測温体２の厚み方向Ｔの第１熱抵抗Ｒ１［Ｋ・ｍ2／Ｗ］を用いて、ｑ１＝ΔＴ／（Ｒ＋Ｒ１）の式によって表される。また、第１媒体Ｂ１の壁面Ｂ１１に第２測温体３が配置された場合の熱流束ｑ２［Ｗ／ｍ2］は、第２測温体３の厚み方向Ｔの第２熱抵抗Ｒ２［Ｋ・ｍ2／Ｗ］を用いて、ｑ２＝ΔＴ／（Ｒ＋Ｒ２）の式によって表される。 The heat flux q1 [W/m 2 ] when the first temperature sensing element 2 is arranged on the wall surface B11 of the first medium B1 is the first thermal resistance R1 [K· m 2 /W] and expressed by the formula q1=ΔT/(R+R1). The heat flux q2 [W/m 2 ] when the second temperature sensing element 3 is arranged on the wall surface B11 of the first medium B1 is the second thermal resistance R2 [W/m 2 ] in the thickness direction T of the second temperature sensing element 3 [ K·m 2 /W], q2=ΔT/(R+R2).

第１媒体Ｂ１の壁面Ｂ１１に測温体２，３が配置されていない場合の熱流束ｑと、第１媒体Ｂ１の壁面Ｂ１１に第１測温体２が配置された場合の熱流束ｑ１との関係ｑ１／ｑは、ｑ１／ｑ＝Ｒ／（Ｒ＋Ｒ１）＝１／（１＋Ｒ１／Ｒ）として表される。ここで、熱抵抗Ｒは、熱伝達率ｈの逆数であり、ｑ１／ｑ＝１／（１＋Ｒ１・ｈ）として表される。 A heat flux q when the temperature sensors 2 and 3 are not arranged on the wall surface B11 of the first medium B1, and a heat flux q1 when the first temperature sensor 2 is arranged on the wall surface B11 of the first medium B1. is expressed as q1/q=R/(R+R1)=1/(1+R1/R). Here, the thermal resistance R is the reciprocal of the heat transfer coefficient h and is expressed as q1/q=1/(1+R1·h).

同様に、第１媒体Ｂ１の壁面Ｂ１１に測温体２，３が配置されていない場合の熱流束ｑと、第１媒体Ｂ１の壁面Ｂ１１に第２測温体３が配置された場合の熱流束ｑ２との関係ｑ２／ｑは、ｑ２／ｑ＝Ｒ／（Ｒ＋Ｒ２）＝１／（１＋Ｒ２／Ｒ）として表される。ここで、熱抵抗Ｒは、熱伝達率ｈの逆数であり、ｑ２／ｑ＝１／（１＋Ｒ２・ｈ）として表される。 Similarly, the heat flux q when the temperature detectors 2 and 3 are not arranged on the wall surface B11 of the first medium B1 and the heat flow when the second temperature detector 3 is arranged on the wall surface B11 of the first medium B1 The relation q2/q with bundle q2 is expressed as q2/q=R/(R+R2)=1/(1+R2/R). Here, the thermal resistance R is the reciprocal of the heat transfer coefficient h and is expressed as q2/q=1/(1+R2·h).

ｑ１／ｑ＝１／（１＋Ｒ１・ｈ）の式と、ｑ２／ｑ＝１／（１＋Ｒ２・ｈ）の式とを用いて、ｑを消去すると、ｑ１＋ｑ１・Ｒ１・ｈ＝ｑ２＋ｑ２・Ｒ２・ｈとなる。さらに、ｈについての式に変形すると、熱伝達率ｈは、ｈ＝（ｑ１－ｑ２）／（ｑ２・Ｒ２－ｑ１・Ｒ１）となる。 Using the formula q1/q=1/(1+R1·h) and the formula q2/q=1/(1+R2·h) and eliminating q, q1+q1·R1·h=q2+q2·R2·h Become. Furthermore, when transformed into an equation for h, the heat transfer coefficient h is h=(q1-q2)/(q2.R2-q1.R1).

熱伝達率センサ１においては、第１測温体２を介する場合の熱流束ｑ１は、出力電圧としての第１起電力Ｖ１及び感度係数ｋを用いて、ｑ１＝Ｖ１／ｋによって表される。また、第２測温体３を介する場合の熱流束ｑ２は、出力電圧としての第２起電力Ｖ２及び感度係数ｋを用いて、ｑ２＝Ｖ２／ｋによって表される。感度係数ｋは定数として扱われるため、ここでは式を簡略化して、ｑ１＝Ｖ１とし、またｑ２＝Ｖ２とすると、熱伝達率ｈは、ｈ＝（Ｖ１－Ｖ２）／（Ｖ２・Ｒ２－Ｖ１・Ｒ１）として表される。 In the heat transfer coefficient sensor 1, the heat flux q1 through the first temperature sensing element 2 is expressed by q1=V1/k using the first electromotive force V1 as the output voltage and the sensitivity coefficient k. Also, the heat flux q2 through the second temperature sensing element 3 is expressed by q2=V2/k using the second electromotive force V2 as the output voltage and the sensitivity coefficient k. Since the sensitivity coefficient k is treated as a constant, the equation is simplified here to q1=V1 and q2=V2. • R1).

熱伝達率センサ１においては、第１起電力Ｖ１と第２起電力Ｖ２との比を利用するため、熱伝達率ｈの式を変更して、ｈ＝（Ｖ１／Ｖ２－１）／（Ｒ２－（Ｖ１／Ｖ２）・Ｒ１）として表される。また、熱伝達率ｈの式は、Ｖ１とＶ２の分子・分母を入れ替えて、ｈ＝（１－Ｖ２／Ｖ１）／（（Ｖ２／Ｖ１）・Ｒ２－Ｒ１）として表すこともできる。この熱伝達率ｈの式から分かるように、熱伝達率ｈは、第１熱抵抗Ｒ１及び第２熱抵抗Ｒ２が一定値であるとして、第１起電力Ｖ１及び第２起電力Ｖ２の関数として求められることが分かる。 In the heat transfer coefficient sensor 1, in order to use the ratio between the first electromotive force V1 and the second electromotive force V2, the formula for the heat transfer coefficient h is changed to h=(V1/V2-1)/(R2 −(V1/V2)·R1). The formula for heat transfer coefficient h can also be expressed as h=(1-V2/V1)/((V2/V1)R2-R1) by interchanging the numerator and denominator of V1 and V2. As can be seen from the equation for the heat transfer coefficient h, the heat transfer coefficient h is a function of the first electromotive force V1 and the second electromotive force V2, assuming that the first thermal resistance R1 and the second thermal resistance R2 are constant values. know that it is required.

（熱抵抗Ｒ１，Ｒ２と熱通過率ｑｘ／ｑとの関係）
測温体２，３が配置された場合の第１媒体Ｂ１と第２媒体Ｂ２との間の熱流束ｑｘと、測温体２，３が配置されていない場合の第１媒体Ｂ１と第２媒体Ｂ２との間の熱流束ｑとの比は、熱通過率ｑｘ／ｑとして表される。そして、前述した熱流束ｑのｑ＝ΔＴ／Ｒの式と、熱流束ｑｘのｑｘ＝ΔＴ／（Ｒ＋Ｒｘ）の式とを用いて、熱通過率ｑｘ／ｑは、ｑｘ／ｑ＝１／（１＋Ｒｘ／Ｒ）＝１／（１＋Ｒｘ・ｈ）によって表される。 (Relationship between thermal resistances R1, R2 and heat transfer rate qx/q)
The heat flux qx between the first medium B1 and the second medium B2 when the temperature detectors 2 and 3 are arranged, and the first medium B1 and the second medium B1 when the temperature detectors 2 and 3 are not arranged. The ratio of the heat flux q to the medium B2 is expressed as the heat transfer coefficient qx/q. Then, using the equation q=ΔT/R for the heat flux q described above and the equation qx=ΔT/(R+Rx) for the heat flux qx, the heat transfer coefficient qx/q is obtained by qx/q=1/( 1+Rx/R)=1/(1+Rx·h).

図７には、横軸に熱抵抗Ｒｘ［Ｋ・ｍ2／Ｗ］をとり、縦軸に熱通過率ｑｘ／ｑ［－］をとって、熱通過率ｑｘ／ｑの式において、熱抵抗Ｒｘには、０．０００１～０．１の値を代入し、熱伝達率ｈには、１００～１０００の値を代入したときの、ｑｘ／ｑの値をプロットした関係グラフを示す。同図の横軸の熱抵抗Ｒｘは、対数目盛によって示す。同図に示すように、熱通過率ｑｘ／ｑのラインは、熱伝達率ｈの違いによって上下に並ぶ複数の曲線となる。熱通過率ｑｘ／ｑのラインは、熱抵抗Ｒｘが大きくなるほど熱通過率ｑｘ／ｑが小さくなる関係として示されるとともに、熱伝達率ｈが大きくなるほど熱通過率ｑｘ／ｑが小さくなる関係として示される。 In FIG. 7, the horizontal axis represents thermal resistance Rx [K·m 2 /W] and the vertical axis represents heat transfer rate qx/q [−]. A relational graph plotting the values of qx/q is shown when a value of 0.0001 to 0.1 is substituted for Rx and a value of 100 to 1000 is substituted for the heat transfer coefficient h. The thermal resistance Rx on the horizontal axis of the figure is indicated by a logarithmic scale. As shown in the figure, the line of the heat transfer coefficient qx/q becomes a plurality of curves arranged vertically depending on the difference in the heat transfer coefficient h. The line of the heat transfer rate qx/q shows the relationship that the heat transfer rate qx/q decreases as the thermal resistance Rx increases, and the heat transfer rate qx/q decreases as the heat transfer rate h increases. be

同図において、熱抵抗Ｒｘは、測温体２，３に固有の値であり、第１測温体２についての第１熱抵抗Ｒ１の値及び第２測温体３についての第２熱抵抗Ｒ２の値は、一定値として固定される。同図においては、第１測温体２の第１熱抵抗Ｒ１が０．００３付近にあり、第２測温体３の第２熱抵抗Ｒ２が０．０４付近にある。 In the figure, the thermal resistance Rx is a value specific to the temperature detectors 2 and 3, the value of the first thermal resistance R1 for the first temperature detector 2 and the second thermal resistance The value of R2 is fixed as a constant value. In the figure, the first thermal resistance R1 of the first temperature sensing element 2 is around 0.003, and the second thermal resistance R2 of the second temperature sensing element 3 is around 0.04.

そして、熱伝達率ｈが特定の値をとる場合に、一定の第１熱抵抗Ｒ１を有する第１測温体２についての熱通過率ｑ１／ｑと、一定の第２熱抵抗Ｒ２を有する第２測温体３についての熱通過率ｑ２／ｑとを読み取ることができる。第１測温体２についての熱通過率ｑ１／ｑは、ｑ１＝Ｖ１／ｋの関係より、第１起電力（第１出力電圧）Ｖ１に比例した値となり、第２測温体３についての熱通過率ｑ２／ｑは、ｑ２＝Ｖ２／ｋの関係より、第２起電力（第２出力電圧）Ｖ２に比例した値となる。本形態の算出部４においては、熱伝達率ｈと、第１起電力Ｖ１と第２起電力Ｖ２との比である出力電圧比との相関関係を利用する。この相関関係は、図７のグラフから知ることができる。 Then, when the heat transfer coefficient h takes a specific value, the heat transfer coefficient q1/q for the first temperature sensing element 2 having a constant first thermal resistance R1 and the heat transfer coefficient q1/q for the first temperature sensing element 2 having a constant second thermal resistance R2 2 The heat transfer rate q2/q for the temperature detector 3 can be read. The heat transfer rate q1/q for the first temperature sensing element 2 is proportional to the first electromotive force (first output voltage) V1 from the relationship q1=V1/k. The heat transfer rate q2/q becomes a value proportional to the second electromotive force (second output voltage) V2 from the relationship q2=V2/k. The calculator 4 of this embodiment uses the correlation between the heat transfer coefficient h and the output voltage ratio, which is the ratio between the first electromotive force V1 and the second electromotive force V2. This correlation can be seen from the graph in FIG.

（算出部４）
図８に示すように、算出部４は、熱伝達率センサ１の使用前であるマップ作成時に作成されて、第１起電力（第１出力電圧）Ｖ１と第２起電力（第２出力電圧）Ｖ２との比と、熱伝達率ｈとの関係が求められた関係マップＭを有する。関係マップＭは、熱伝達率センサ１の試作品について求められたものが、熱伝達率センサ１の製品の算出部４において記憶される。関係マップＭは、マップ作成時において、第１起電力Ｖ１と第２起電力Ｖ２との比と、熱伝達率ｈとの関係として求められる。本形態においては、第１起電力Ｖ１と第２起電力Ｖ２との比は、第１起電力Ｖ１を第２起電力Ｖ２によって除算した値Ｖ１／Ｖ２とし、これを出力電圧比Ｖ１／Ｖ２として表す。 (calculation unit 4)
As shown in FIG. 8, the calculation unit 4 is created when the map is created before the heat transfer coefficient sensor 1 is used, and the first electromotive force (first output voltage) V1 and the second electromotive force (second output voltage) ) has a relationship map M in which the relationship between the ratio to V2 and the heat transfer coefficient h is obtained. The relationship map M obtained for the prototype of the heat transfer coefficient sensor 1 is stored in the calculation unit 4 of the product of the heat transfer coefficient sensor 1 . The relationship map M is obtained as a relationship between the ratio between the first electromotive force V1 and the second electromotive force V2 and the heat transfer coefficient h at the time of map creation. In this embodiment, the ratio between the first electromotive force V1 and the second electromotive force V2 is the value V1/V2 obtained by dividing the first electromotive force V1 by the second electromotive force V2, and this is defined as the output voltage ratio V1/V2. show.

関係マップＭは、実際に製造された熱伝達率センサ１を試験的に使用するときに、第１起電力Ｖ１と第２起電力Ｖ２との比と、熱伝達率ｈとの関係を測定して作成する。より具体的には、関係マップＭは、熱伝達率センサ１の第１測温体２及び第２測温体３を第１媒体Ｂ１の壁面Ｂ１１に配置し、第１媒体Ｂ１の温度、第２媒体Ｂ２の温度等を変化させて熱伝達率ｈを変化させたときに、第１起電力Ｖ１及び第２起電力Ｖ２を測定し、出力電圧比Ｖ１／Ｖ２を算出して作成したものである。図８における出力電圧比Ｖ１／Ｖ２は、感度係数ｋを１として示す。感度係数ｋは、熱伝達率センサ１の特性等によって決まる係数（定数）として示される。 The relationship map M measures the relationship between the ratio between the first electromotive force V1 and the second electromotive force V2 and the heat transfer coefficient h when the actually manufactured heat transfer coefficient sensor 1 is used experimentally. to create. More specifically, the relationship map M arranges the first temperature sensing element 2 and the second temperature sensing element 3 of the heat transfer coefficient sensor 1 on the wall surface B11 of the first medium B1, the temperature of the first medium B1, the 2. The first electromotive force V1 and the second electromotive force V2 are measured when the heat transfer coefficient h is changed by changing the temperature of the medium B2, etc., and the output voltage ratio V1/V2 is calculated. be. The output voltage ratio V1/V2 in FIG. 8 is shown with a sensitivity coefficient k of 1. The sensitivity coefficient k is indicated as a coefficient (constant) determined by the characteristics of the heat transfer coefficient sensor 1 and the like.

また、マップ作成時においては、第１起電力Ｖ１及び第２起電力Ｖ２を測定するとともに、外部の測定装置を用いて第１媒体Ｂ１及び第２媒体Ｂ２の各温度を測定して、真の熱伝達率ｈを測定する。そして、熱伝達率ｈが異なる複数の場合について測定された出力電圧比Ｖ１／Ｖ２及び熱伝達率ｈに基づいて、関係マップＭが作成される。 Further, when creating the map, the first electromotive force V1 and the second electromotive force V2 are measured, and the respective temperatures of the first medium B1 and the second medium B2 are measured using an external measuring device to obtain a true Measure the heat transfer coefficient h. Then, a relationship map M is created based on the output voltage ratio V1/V2 and the heat transfer coefficient h measured for a plurality of cases where the heat transfer coefficient h is different.

より具体的には、測定装置は、第１媒体Ｂ１に埋め込まれる熱電対等の複数の温度測定器、及び第２媒体Ｂ２に配置される熱電対等の温度測定器を有する。そして、関係マップＭにおける真の熱伝達率ｈは、第１媒体Ｂ１と第２媒体Ｂ２との温度差ΔＴ、第１媒体Ｂ１から第２媒体Ｂ２へ通過する熱流束ｑ、第１媒体Ｂ１に固有の熱伝導率λ、及び第１媒体Ｂ１における、熱流束ｑの通過方向の温度勾配ｄＴ／ｄｘを用いて、ｈ＝ｑ／ΔＴ，ｑ＝λ（ｄＴ／ｄｘ）の式に基づいて求められる。 More specifically, the measuring device has a plurality of temperature measuring devices such as thermocouples embedded in the first medium B1 and temperature measuring devices such as thermocouples arranged in the second medium B2. The true heat transfer coefficient h in the relationship map M is the temperature difference ΔT between the first medium B1 and the second medium B2, the heat flux q passing from the first medium B1 to the second medium B2, and the heat flux q passing through the first medium B1. Using the inherent thermal conductivity λ and the temperature gradient dT/dx in the passing direction of the heat flux q in the first medium B1, it is obtained based on the formula h = q / ΔT, q = λ (dT / dx) be done.

図８に示すように、算出部４は、熱伝達率センサ１の使用時であるセンサ使用時において、第１検出回路２４によって検出される第１起電力Ｖ１と、第２検出回路３４によって検出される第２起電力Ｖ２との比である出力電圧比Ｖ１／Ｖ２を関係マップＭに照合して、第１媒体Ｂ１と第２媒体Ｂ２との間の熱伝達率ｈを算出するよう構成されている。算出部４は、関係マップＭ及び演算回路等が形成されたセンサアンプに構築されている。センサアンプは、コンピュータによって構成されている。 As shown in FIG. 8, when the heat transfer coefficient sensor 1 is used, the calculation unit 4 calculates the first electromotive force V1 detected by the first detection circuit 24 and the The heat transfer coefficient h between the first medium B1 and the second medium B2 is calculated by comparing the output voltage ratio V1/V2, which is the ratio of the second electromotive force V2 applied to the ing. The calculation unit 4 is constructed in a sensor amplifier in which the relationship map M, an arithmetic circuit, and the like are formed. A sensor amplifier is configured by a computer.

また、算出部４においては、第１起電力Ｖ１と第２起電力Ｖ２との比を用いる代わりに、図８に示すように、第１熱抵抗Ｒ１と第２熱抵抗Ｒ２との差Ｒ１－Ｒ２と、第１熱抵抗Ｒ１と第２熱抵抗Ｒ２との間における熱通過率の差ｑ１／ｑ－ｑ２／ｑとによって求められる傾きθを用いることもできる。また、算出部４においては、第１起電力Ｖ１と第２起電力Ｖ２との比を用いる代わりに、第２起電力Ｖ２を第１起電力Ｖ１によって除算した値Ｖ２／Ｖ１を用いることもできる。 Further, in the calculator 4, instead of using the ratio between the first electromotive force V1 and the second electromotive force V2, as shown in FIG. 8, the difference R1− It is also possible to use the slope θ determined by R2 and the difference q1/q−q2/q in the heat transfer rate between the first thermal resistance R1 and the second thermal resistance R2. Further, in the calculation unit 4, instead of using the ratio between the first electromotive force V1 and the second electromotive force V2, a value V2/V1 obtained by dividing the second electromotive force V2 by the first electromotive force V1 can be used. .

（熱伝達率センサ１の制御方法（センサ使用時））
マップ作成時において、熱伝達率センサ１の試作品について、熱伝達率ｈの測定試験が行われ、熱伝達率ｈと出力電圧比Ｖ１／Ｖ２との関係マップＭが作成され、この関係マップＭが算出部４に記憶される。次いで、センサ使用時において、熱伝達率センサ１の第１測温体２及び第２測温体３が第１媒体Ｂ１の壁面Ｂ１１に貼り付けられる。そして、第１検出回路２４によって第１測温体２の導通部２１に生じる第１起電力Ｖ１が検出されるとともに、第２検出回路３４によって第２測温体３の導通部３１に生じる第２起電力Ｖ２が検出される。 (Control method of heat transfer coefficient sensor 1 (when sensor is used))
At the time of map creation, a heat transfer coefficient h measurement test is performed on a prototype of the heat transfer coefficient sensor 1, and a relationship map M between the heat transfer coefficient h and the output voltage ratio V1/V2 is created. is stored in the calculation unit 4. Next, when the sensor is used, the first temperature sensing element 2 and the second temperature sensing element 3 of the heat transfer coefficient sensor 1 are attached to the wall surface B11 of the first medium B1. The first detection circuit 24 detects the first electromotive force V1 generated in the conductive portion 21 of the first temperature sensing element 2, and the second detection circuit 34 detects the first electromotive force V1 generated in the conductive portion 31 of the second temperature sensing element 3. 2 electromotive force V2 is detected.

次いで、算出部４において、第１起電力Ｖ１と第２起電力Ｖ２との比である出力電圧比Ｖ１／Ｖ２が算出され、この出力電圧比Ｖ１／Ｖ２が関係マップＭに照合されることによって、関係マップＭから出力電圧比Ｖ１／Ｖ２に対応した熱伝達率ｈが求められる。こうして、熱伝達率センサ１によって、第１媒体Ｂ１と第２媒体Ｂ２との間の熱伝達率ｈを測定することができる。 Next, the calculator 4 calculates the output voltage ratio V1/V2, which is the ratio between the first electromotive force V1 and the second electromotive force V2, and compares the output voltage ratio V1/V2 with the relationship map M. , the heat transfer coefficient h corresponding to the output voltage ratio V1/V2 is obtained from the relationship map M. Thus, the heat transfer coefficient sensor 1 can measure the heat transfer coefficient h between the first medium B1 and the second medium B2.

（作用効果）
本形態の熱伝達率センサ１は、熱流センサ、熱流束センサ等の名称で知られる２つの測温体２，３を利用して熱伝達率ｈを算出する際に、新たな測定原理を導入したものである。具体的には、第１検出部１２によって第１測温体２の導通部２１の両端に生じる第１起電力Ｖ１を検出するとともに、第２検出部１３によって第２測温体３の導通部３１の両端に生じる第２起電力Ｖ２を検出する。そして、算出部４によって、第１起電力Ｖ１と第２起電力Ｖ２との比である出力電圧比Ｖ１／Ｖ２を、出力電圧比Ｖ１／Ｖ２と熱伝達率ｈとの関係マップＭに照合して、第１媒体Ｂ１と第２媒体Ｂ２との間の熱伝達率ｈを算出する。 (Effect)
The heat transfer coefficient sensor 1 of this embodiment introduces a new measurement principle when calculating the heat transfer coefficient h using two temperature sensors 2 and 3 known as heat flow sensors, heat flux sensors, and the like. It is what I did. Specifically, the first detector 12 detects the first electromotive force V1 generated at both ends of the conducting portion 21 of the first temperature sensing element 2, and the second detecting portion 13 detects the conducting portion of the second temperature sensing element 3. A second electromotive force V2 generated at both ends of 31 is detected. Then, the calculation unit 4 compares the output voltage ratio V1/V2, which is the ratio between the first electromotive force V1 and the second electromotive force V2, against the relationship map M between the output voltage ratio V1/V2 and the heat transfer coefficient h. Then, the heat transfer coefficient h between the first medium B1 and the second medium B2 is calculated.

本形態の熱伝達率センサ１においては、第１媒体Ｂ１と第２媒体Ｂ２との間に第１測温体２が配置されている場合と、第１媒体Ｂ１と第２媒体Ｂ２との間に第２測温体３が配置されている場合とについて、第１測温体２の厚み方向Ｔの第１熱抵抗Ｒ１と第２測温体３の厚み方向Ｔの第２熱抵抗Ｒ２とが異なることに基づいて、第１媒体Ｂ１と第２媒体Ｂ２との間を通過する熱流束ｑ１，ｑ２に違いが生じることに着目する。なお、第１測温体２の貼付層２３の外表面２３１と第１測温体２の第２表面２０２との間の温度差と、第２測温体３の貼付層３３の外表面３３１と第２測温体３の第２表面３０２との間の温度差とは、同じであるとする。 In the heat transfer coefficient sensor 1 of this embodiment, the case where the first temperature sensing element 2 is arranged between the first medium B1 and the second medium B2, and the case where the first medium B1 and the second medium B2 , the first thermal resistance R1 in the thickness direction T of the first temperature sensing element 2 and the second thermal resistance R2 in the thickness direction T of the second temperature sensing element 3 Note that the heat fluxes q1 and q2 passing between the first medium B1 and the second medium B2 are different due to the difference in . The temperature difference between the outer surface 231 of the adhesive layer 23 of the first temperature detector 2 and the second surface 202 of the first temperature detector 2 and the outer surface 331 of the adhesive layer 33 of the second temperature detector 3 and the second surface 302 of the second temperature sensing element 3 are assumed to be the same.

そして、算出部４は、第１媒体Ｂ１と第２媒体Ｂ２との間の熱伝達率ｈを、出力電圧比Ｖ１／Ｖ２との関係によって表されることに基づいて算出する。この熱伝達率ｈの求め方は、従来の熱流センサ、熱流束センサ等にはない新たな測定原理に基づくものである。第１測温体２及び第２測温体３はコンパクトに形成することができ、第１媒体Ｂ１と第２媒体Ｂ２との間の局所的な位置に配置することができる。 Then, the calculation unit 4 calculates the heat transfer coefficient h between the first medium B1 and the second medium B2 based on the relationship between the first medium B1 and the second medium B2 and the output voltage ratio V1/V2. The method of determining the heat transfer coefficient h is based on a new measurement principle not found in conventional heat flow sensors, heat flux sensors, and the like. The first temperature sensing element 2 and the second temperature sensing element 3 can be made compact and arranged at a local position between the first medium B1 and the second medium B2.

また、熱伝達率ｈを測定するために、１つの測温体を用いて、この測温体に生じる起電力を測定する場合も考えられる。しかし、この場合には、起電力を測定するとともに、第１媒体Ｂ１と第２媒体との間の温度差として、第１媒体Ｂ１の表面の温度と測温体の表面の温度との差（熱交換界面の温度差）を測定する必要が生じる。しかし、この温度差の測定は容易ではなく、温度差の測定が必要な部位とは異なる部位の温度差を測定する場合もある。また、測温体が有する熱抵抗が、誤差として熱伝達率の値に影響を与えるおそれがある。 Also, in order to measure the heat transfer coefficient h, it is conceivable to use one temperature sensing element and measure the electromotive force generated in this temperature sensing element. However, in this case, the electromotive force is measured, and the temperature difference between the first medium B1 and the second medium is the difference between the surface temperature of the first medium B1 and the surface temperature of the thermometer ( It becomes necessary to measure the temperature difference at the heat exchange interface). However, it is not easy to measure this temperature difference, and there are cases where the temperature difference is measured at a site different from the site where the temperature difference needs to be measured. Also, the thermal resistance of the temperature measuring element may affect the value of the heat transfer coefficient as an error.

一方、本形態の熱伝達率センサ１においては、２つの測温体２，３を用いることにより、第１媒体Ｂ１と第２媒体Ｂ２との間の温度差を測定する必要がなくなる。また、２つの測温体２，３の各熱抵抗Ｒ１，Ｒ２が考慮されて熱伝達率ｈが求められることになり、熱伝達率ｈの測定精度を向上させることができる。 On the other hand, in the heat transfer coefficient sensor 1 of this embodiment, the use of the two temperature sensors 2 and 3 eliminates the need to measure the temperature difference between the first medium B1 and the second medium B2. In addition, the heat transfer coefficient h is obtained by considering the thermal resistances R1 and R2 of the two temperature detectors 2 and 3, so that the measurement accuracy of the heat transfer coefficient h can be improved.

それ故、本形態の熱伝達率センサ１によれば、新たな測定原理に基づき、第１媒体Ｂ１と第２媒体Ｂ２との間の熱伝達率ｈを局所的に精度よく測定することができる。 Therefore, according to the heat transfer coefficient sensor 1 of the present embodiment, the heat transfer coefficient h between the first medium B1 and the second medium B2 can be locally measured with high accuracy based on a new measurement principle. .

本発明は、実施形態のみに限定されるものではなく、その要旨を逸脱しない範囲においてさらに異なる実施形態を構成することが可能である。また、本発明は、様々な変形例、均等範囲内の変形例等を含む。さらに、本発明から想定される様々な構成要素の組み合わせ、形態等も本発明の技術思想に含まれる。 The present invention is not limited to only the embodiments, and further different embodiments can be configured without departing from the scope of the invention. In addition, the present invention includes various modifications, modifications within the equivalent range, and the like. Further, the technical idea of the present invention also includes combinations, forms, and the like of various constituent elements assumed from the present invention.

１ 熱伝達率センサ
１２ 第１検出部
１３ 第２検出部
２ 第１測温体
２４ 第１検出回路
３ 第２測温体
３４ 第２検出回路
４ 算出部 Reference Signs List 1 heat transfer coefficient sensor 12 first detector 13 second detector 2 first temperature detector 24 first detector circuit 3 second temperature detector 34 second detector circuit 4 calculator

Claims (4)

固体としての第１媒体（Ｂ１）と、流体又は固体としての第２媒体（Ｂ２）との間の熱伝達率（ｈ）を測定する熱伝達率センサ（１）であって、
前記第１媒体の側に位置する第１表面（２０１）と、前記第１表面の反対側であって前記第２媒体の側に位置する第２表面（２０２）とにそれぞれ計測点（Ｐ）が設けられた第１測温体（２）、及び前記第１測温体の前記計測点によって生じる第１起電力（Ｖ１）を検出する第１検出回路（２４）を有する第１検出部（１２）と、
前記第１媒体の側に位置する第１表面（３０１）と、前記第１表面の反対側であって前記第２媒体の側に位置する第２表面（３０２）とにそれぞれ計測点（Ｐ）が設けられ、前記第１表面と前記第２表面とが対向する厚み方向（Ｔ）に熱が通過するときの熱抵抗（Ｒ１，Ｒ２）が前記第１測温体と異なる第２測温体（３）、及び前記第２測温体の前記計測点によって生じる第２起電力（Ｖ２）を検出する第２検出回路（３４）を有する第２検出部（１３）と、
前記第１起電力と前記第２起電力との比を利用して、前記第１媒体と前記第２媒体との間の熱伝達率を算出する算出部（４）と、を備える熱伝達率センサ。 A heat transfer coefficient sensor (1) for measuring the heat transfer coefficient (h) between a first medium (B1) as a solid and a second medium (B2) as a fluid or solid,
measurement points (P) on a first surface (201) positioned on the side of the first medium and a second surface (202) on the side opposite to the first surface and positioned on the side of the second medium; and a first detection circuit (24) that detects a first electromotive force (V1) generated by the measurement point of the first temperature sensing element (2) provided with the first detection section ( 12) and
Measuring points (P) on a first surface (301) located on the side of the first medium and a second surface (302) located on the side of the second medium opposite to the first surface (301). is provided, and the thermal resistance (R1, R2) when heat passes in the thickness direction (T) in which the first surface and the second surface are opposed to each other is different from the first temperature detector. (3), and a second detection unit (13) having a second detection circuit (34) that detects a second electromotive force (V2) generated by the measurement point of the second thermometer;
a heat transfer coefficient calculator (4) that calculates the heat transfer coefficient between the first medium and the second medium using the ratio between the first electromotive force and the second electromotive force. sensor. 前記算出部は、
前記熱伝達率センサの使用前であるマップ作成時に作成され、前記第１起電力と前記第２起電力との比と、前記熱伝達率との関係が求められた関係マップ（Ｍ）を有しており、
かつ、前記熱伝達率センサの使用時であるセンサ使用時においては、前記第１検出回路によって検出される第１起電力と、前記第２検出回路によって検出される第２起電力との比を前記関係マップに照合して前記熱伝達率を算出するよう構成されている、請求項１に記載の熱伝達率センサ。 The calculation unit
Having a relationship map (M) that is created at the time of map creation before use of the heat transfer coefficient sensor and obtains the relationship between the ratio of the first electromotive force and the second electromotive force and the heat transfer coefficient and
Further, when the heat transfer coefficient sensor is used, the ratio between the first electromotive force detected by the first detection circuit and the second electromotive force detected by the second detection circuit is 2. The heat transfer coefficient sensor of claim 1, configured to calculate the heat transfer coefficient against the relationship map. 前記第１測温体は、Ｐ型半導体（２１１）とＮ型半導体（２１２）とが、前記第１表面の側の端部と前記第２表面の側の端部とにおいて、前記計測点を形成するとともに、導体（２１３）を介して交互に複数個が直列に電気接続された導通部（２１）と、絶縁性材料によって構成されて前記導通部を囲む絶縁部（２２）とを有し、
前記第１検出回路は、前記第１測温体の前記導通部の両端部に生じる起電力を前記第１起電力として検出するよう構成され、
前記第２測温体は、Ｐ型半導体（３１１）とＮ型半導体（３１２）とが、前記第１表面の側の端部と前記第２表面の側の端部とにおいて、前記計測点を形成するとともに、導体（３１３）を介して交互に複数個が直列に電気接続された導通部（３１）と、絶縁性材料によって構成されて前記導通部を囲む絶縁部（３２）とを有し、
前記第２検出回路は、前記第２測温体の前記導通部の両端部に生じる起電力を前記第２起電力として検出するよう構成されている、請求項１又は２に記載の熱伝達率センサ。 In the first temperature sensing element, the P-type semiconductor (211) and the N-type semiconductor (212) are positioned at the end on the first surface side and the end on the second surface side, and the measuring point is It has conductive portions (21) in which a plurality of conductive portions are alternately connected in series via conductors (213), and an insulating portion (22) made of an insulating material and surrounding the conductive portions. ,
The first detection circuit is configured to detect, as the first electromotive force, an electromotive force generated at both ends of the conductive portion of the first thermometer,
In the second temperature sensing element, the P-type semiconductor (311) and the N-type semiconductor (312) are arranged such that the measuring point is positioned at the end on the first surface side and the end on the second surface side. It has a conductive portion (31) in which a plurality of pieces are electrically connected in series alternately via conductors (313), and an insulating portion (32) made of an insulating material and surrounding the conductive portion (32). ,
3. The heat transfer coefficient according to claim 1, wherein said second detection circuit is configured to detect, as said second electromotive force, an electromotive force generated at both ends of said conductive portion of said second thermometer. sensor. 前記第１測温体の熱抵抗（Ｒ１）と前記第２測温体の熱抵抗（Ｒ２）とは、
前記第１測温体を構成する各部位の材質と前記第２測温体を構成する各部位の材質、
前記第１測温体の前記厚み方向の厚み（ｕ１）と前記第２測温体の前記厚み方向の厚み（ｕ２）、
及び前記第１測温体を前記第１媒体に貼り付けるための貼付層（２３）の、材質もしくは前記厚み方向の厚み（ｔ１）と、前記第２測温体を前記第１媒体に貼り付けるための貼付層（３３）の、材質もしくは前記厚み方向の厚み（ｔ２）とのうちの少なくとも一つが異なることによって異なっている、請求項１～３のいずれか１項に記載の熱伝達率センサ。 The thermal resistance (R1) of the first temperature detector and the thermal resistance (R2) of the second temperature detector are
a material of each portion constituting the first temperature sensing element and a material of each portion constituting the second temperature sensing element;
The thickness (u1) in the thickness direction of the first temperature detector and the thickness (u2) in the thickness direction of the second temperature detector,
and the material or thickness (t1) in the thickness direction of the sticking layer (23) for sticking the first temperature sensing element to the first medium, and sticking the second temperature sensing element to the first medium The heat transfer coefficient sensor according to any one of claims 1 to 3, wherein at least one of the material and the thickness (t2) in the thickness direction of the adhesive layer (33) for the .
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