JP7127141B2 - 基準センサを有する誘導センサ装置 - Google Patents
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- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
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- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
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- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
- G01D5/225—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils
- G01D5/2275—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils by a movable non-ferromagnetic conductive element
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/243—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the phase or frequency of ac
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- G01V3/00—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
- G01V3/08—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices
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Description
Claims (18)
- 位置センサ装置であって、
移動可能なターゲットの動きを検知する稼働センサヘッドであり、センサコイルと、該センサコイルに動作的に結合された可変電気素子とを含む稼働センサヘッドと、
固定された基準ターゲットに動作的に結合された基準センサヘッドであり、基準センサコイルと、該基準センサコイルに動作的に結合された可変基準電気素子とを含む基準センサヘッドと、
を有し、
当該位置センサ装置は、前記基準センサヘッドからの一貫した出力を維持するように前記可変基準電気素子のキャパシタンス又はインダクタンスを調節し、前記可変基準電気素子の前記調節に基づいて、前記稼働センサヘッドの前記可変電気素子のキャパシタンス又はインダクタンスを調節するように構成されている、
位置センサ装置。 - 前記可変電気素子は、可変キャパシタである、請求項1に記載の位置センサ装置。
- 前記可変基準電気素子は可変基準キャパシタであり、
前記可変基準キャパシタのキャパシタンスが、前記基準センサヘッドの共振周波数を維持するように調節される、
請求項2に記載の位置センサ装置。 - 前記可変基準キャパシタは、前記可変基準キャパシタの前記キャパシタンスに対する変更が前記稼働センサヘッドの前記可変キャパシタに対しても為されるように、前記稼働センサヘッドの前記可変キャパシタに動作的に結合される、請求項3に記載の位置センサ装置。
- 前記基準センサヘッドは、前記基準センサヘッドの前記共振周波数を維持するように前記可変基準キャパシタの前記キャパシタンスを調節するフィードバックループの一部である、請求項3又は4に記載の位置センサ装置。
- 前記フィードバックループは、
前記基準センサヘッドからの出力信号を受信する位相計算モジュールと、
前記位相計算モジュールからの出力を、前記可変基準キャパシタに送られるアナログ信号へと変換するデジタル-アナログ変換器と、
を含む、請求項5に記載の位置センサ装置。 - 前記稼働センサヘッドはまた、前記センサコイル及び前記可変キャパシタに動作的に結合された固定キャパシタを含む、請求項2乃至6のいずれかに記載の位置センサ装置。
- 前記稼働センサヘッドは、1つ以上のキャパシタを含み、
前記稼働センサヘッドの前記センサコイル及び前記1つ以上のキャパシタは基板上にある、
請求項1乃至7のいずれかに記載の位置センサ装置。 - 当該位置センサ装置は更に電子モジュールを有し、該電子モジュールは、
前記稼働センサヘッドの増幅器と、
前記稼働センサヘッドに結合されたアナログ-デジタル変換器であり、前記増幅器からの出力信号をデジタル化してデジタル出力信号を生成するアナログ-デジタル変換器と、
前記デジタル出力信号を復調する、前記稼働センサヘッドの復調器と、
を含み、
前記稼働センサヘッドは、
前記電子モジュールの外側にあって、前記稼働センサヘッドの前記センサコイルに対して前記電子モジュールよりも近い1つ以上のキャパシタ、
を含む、
請求項1乃至8のいずれかに記載の位置センサ装置。 - 前記センサコイルと前記電子モジュールとの間に4線式の接続が存在し、前記電子モジュールから前記センサコイルに駆動信号を提供することと、前記センサコイルから前記電子モジュールに出力信号を提供することとに、別々の線が用いられる、請求項9に記載の位置センサ装置。
- 固定位置のターゲットに動作的に結合されたセンサ装置を動作させる方法であって、
前記センサ装置の基準センサヘッドを、該基準センサヘッドからの一貫した出力を維持するように調節することと、
前記基準センサヘッドの前記調節からの結果を用いて、前記センサ装置の稼働センサヘッドを調節することと、
を有し、
前記稼働センサヘッドは、移動可能なターゲットの位置を決定するために使用され、
前記基準センサヘッドの調節は、前記基準センサヘッドの可変基準電気素子のキャパシタンス又はインダクタンスを調節することを含み、
前記稼働センサヘッドの調節は、前記基準センサヘッドの前記可変基準電気素子の前記調節に基づいて、前記稼働センサヘッドの可変電気素子のキャパシタンス又はインダクタンスを調節することを含む、
方法。 - 前記基準センサヘッドの調節は、閉ループフィードバックプロセスの一部である、請求項11に記載の方法。
- 前記基準センサヘッドの調節は、前記基準センサヘッドの基準センサコイルからの出力信号の位相を維持する、請求項11又は12に記載の方法。
- 前記基準センサヘッドの調節及び前記稼働センサヘッドの調節は、温度変化に起因する前記センサ装置の特性の変化を補償する、請求項11乃至13のいずれかに記載の方法。
- 前記基準センサヘッドは、前記固定位置のターゲットと誘導的に相互作用する基準センサコイルを有し、
前記稼働センサヘッドは、前記移動可能なターゲットと誘導的に相互作用するセンサコイルを有する、
請求項11乃至14のいずれかに記載の方法。 - 固定された基準ターゲットに動作的に結合された基準センサヘッドであり、当該基準センサヘッドからの一貫した出力を維持するように調節されるように構成された基準センサヘッドであり、当該基準センサヘッドの調節は、当該基準センサヘッドの可変基準電気素子のキャパシタンス又はインダクタンスを調節することを含む、基準センサヘッドと、
移動可能なターゲットの動きを誘導的に検知する稼働センサヘッドであり、当該稼働センサヘッドは、前記基準センサヘッドの前記調節からの結果を用いて調節されるように構成され、当該稼働センサヘッドの調節は、当該稼働センサヘッドの可変電気素子のキャパシタンス又はインダクタンスを調節することを含む、稼働センサヘッドと、
を有し、
前記稼働センサヘッドは、センサコイルと、該センサコイルに動作的に結合されたキャパシタとを含み、
前記センサコイル及び前記キャパシタは、前記稼働センサヘッドの一部である基板上にある、
位置センサ装置。 - 当該位置センサ装置は更に電子モジュールを有し、該電子モジュールは、
前記稼働センサヘッドの増幅器と、
前記稼働センサヘッドに結合されたアナログ-デジタル変換器であり、前記増幅器からの出力信号をデジタル化してデジタル出力信号を生成するアナログ-デジタル変換器と、
前記デジタル出力信号を復調する、前記稼働センサヘッドの復調器と、
を含み、
前記キャパシタは、前記電子モジュールの外側にあり、且つ、前記センサコイルに対して前記電子モジュールよりも近い、
請求項16に記載の位置センサ装置。 - 前記センサコイルと前記電子モジュールとの間に4線式の接続が存在し、前記電子モジュールから前記センサコイルに駆動信号を提供することと、前記センサコイルから前記電子モジュールに出力信号を提供することとに、別々の線が用いられる、請求項17に記載の位置センサ装置。
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US15/914,037 US11054395B2 (en) | 2018-03-07 | 2018-03-07 | Inductive sensor device with reference sensor |
US15/914,037 | 2018-03-07 | ||
PCT/US2018/060618 WO2019172967A1 (en) | 2018-03-07 | 2018-11-13 | Inductive sensor device with reference sensor |
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JP2021515230A (ja) | 2021-06-17 |
EP3762685A1 (en) | 2021-01-13 |
IL276870B (en) | 2022-02-01 |
US11054395B2 (en) | 2021-07-06 |
WO2019172967A1 (en) | 2019-09-12 |
KR102466607B1 (ko) | 2022-11-14 |
EP3762685B1 (en) | 2022-08-10 |
IL276870A (en) | 2020-10-29 |
KR20200087219A (ko) | 2020-07-20 |
CA3093232A1 (en) | 2019-09-12 |
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