JP7116691B2 - Water treatment method and water treatment equipment - Google Patents

Water treatment method and water treatment equipment Download PDF

Info

Publication number
JP7116691B2
JP7116691B2 JP2019015087A JP2019015087A JP7116691B2 JP 7116691 B2 JP7116691 B2 JP 7116691B2 JP 2019015087 A JP2019015087 A JP 2019015087A JP 2019015087 A JP2019015087 A JP 2019015087A JP 7116691 B2 JP7116691 B2 JP 7116691B2
Authority
JP
Japan
Prior art keywords
water
ions
reverse osmosis
osmosis membrane
permeated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019015087A
Other languages
Japanese (ja)
Other versions
JP2020121278A (en
Inventor
雄大 鈴木
勇規 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organo Corp
Original Assignee
Organo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=71993326&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP7116691(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Organo Corp filed Critical Organo Corp
Priority to JP2019015087A priority Critical patent/JP7116691B2/en
Publication of JP2020121278A publication Critical patent/JP2020121278A/en
Application granted granted Critical
Publication of JP7116691B2 publication Critical patent/JP7116691B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)

Description

本発明は、逆浸透膜を用いる水処理方法および水処理装置に関する。 TECHNICAL FIELD The present invention relates to a water treatment method and a water treatment apparatus using a reverse osmosis membrane.

近年、純水製造や水回収等において、逆浸透膜が用いられる機会が増加している。水中の不溶解成分等が逆浸透膜の膜面、配管および装置等に付着、堆積するスケーリングは、逆浸透膜の運転管理の中でも重要な項目の一つである。スケールの要因となることが多く注目されるものとしては、炭酸カルシウムを始めとした硬度系スケール、またはシリカ系のスケールが挙げられる。そのようなスケールには、例えばポリアクリル酸、ポリマレイン酸、ホスホン酸等の分散剤を添加して対策している。そのような対策をしてもスケーリングが避けられない場合には、回収率を下げる、または薬品洗浄を実施する等の対応が必要となる。 BACKGROUND ART In recent years, there are increasing opportunities for using reverse osmosis membranes in pure water production, water recovery, and the like. Scaling, which is the adhesion and deposition of insoluble components in water on the surface of the reverse osmosis membrane, piping, equipment, etc., is one of the important items in the operation management of the reverse osmosis membrane. Hard scale such as calcium carbonate and silica scale are attracting attention as they often cause scale. Such scales are dealt with by adding dispersants such as polyacrylic acid, polymaleic acid and phosphonic acid. If scaling cannot be avoided even with such countermeasures, it is necessary to reduce the recovery rate or perform chemical cleaning.

例えば半導体工場の排水等のFイオン(フッ化物イオン)、Alイオン(アルミニウムイオン)、Naイオン(ナトリウムイオン)を含む排水を逆浸透膜処理するときにスケーリングが発生する場合があり、対策が求められている。 For example, scaling may occur when treating wastewater containing F ions (fluoride ions), Al ions (aluminum ions), and Na ions (sodium ions) such as wastewater from a semiconductor factory with a reverse osmosis membrane. It is

特許第4496795号公報Japanese Patent No. 4496795 特開2017-209654号公報JP 2017-209654 A

本発明の目的は、Fイオン、Alイオン、Naイオンを含む被処理水を逆浸透膜処理するときに発生するスケールを簡易な方法で除去することができる水処理方法および水処理装置を提供することにある。 SUMMARY OF THE INVENTION An object of the present invention is to provide a water treatment method and a water treatment apparatus capable of removing scale generated when water containing F ions, Al ions and Na ions is treated with a reverse osmosis membrane by a simple method. That's what it is.

本発明は、Fイオン、Alイオン、Naイオンを含む被処理水を逆浸透膜に通水して濃縮水と透過水とを得る逆浸透膜処理工程を含み、前記濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度がそれぞれ0.1mg/L以上かつ、前記イオン濃度の総量が418mg/L以上であり、前記逆浸透膜処理工程における流量(m/d)、圧力(MPa)、水温(℃)の値から算出される標準化透過水量(m/d/MPa at 25℃)と、予め設定された初期標準化透過水量(m/d/MPa at 25℃)との比率が規定値となったときに、前記被処理水の通水を、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L未満である洗浄水の通水に切り替える、水処理方法である。 The present invention includes a reverse osmosis membrane treatment step in which water to be treated containing F ions, Al ions, and Na ions is passed through a reverse osmosis membrane to obtain concentrated water and permeated water. The ion concentrations of ions and Na ions are each 0.1 mg/L or more, and the total amount of the ion concentrations is 418 mg/L or more, and the flow rate (m 3 /d), pressure (MPa), The ratio between the standardized permeation water amount (m / d / MPa at 25 ° C) calculated from the value of the water temperature (° C.) and the preset initial standardized permeation water volume (m / d / MPa at 25 ° C) is the specified value. a water treatment method, wherein when the .

前記水処理方法において、前記比率の規定値として、50%から90%の範囲の値を設定することが好ましい。 In the water treatment method, it is preferable to set a value in the range of 50% to 90% as the specified value of the ratio.

前記水処理方法において、前記洗浄水として電気伝導率20μS/cm以下の水を用いることが好ましい。 In the water treatment method, it is preferable to use water having an electric conductivity of 20 μS/cm or less as the washing water.

前記水処理方法において、前記逆浸透膜処理工程の前段に前段逆浸透膜処理工程を含み、前記被処理水が、前記前段逆浸透膜処理工程で得られる濃縮水であることが好ましい。 In the water treatment method, it is preferable that a pre-stage reverse osmosis membrane treatment step is included before the reverse osmosis membrane treatment step, and the water to be treated is concentrated water obtained in the pre-stage reverse osmosis membrane treatment step.

前記水処理方法において、前記洗浄水として前記前段逆浸透膜処理工程で得られる透過水を用いることが好ましい。 In the water treatment method, it is preferable to use permeated water obtained in the preceding reverse osmosis membrane treatment step as the washing water.

また、本発明は、Fイオン、Alイオン、Naイオンを含む被処理水を逆浸透膜に通水して濃縮水と透過水とを得る逆浸透膜処理手段を備え、前記濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度がそれぞれ0.1mg/L以上かつ、前記イオン濃度の総量が418mg/L以上であり、前記逆浸透膜処理手段における流量(m/d)、圧力(MPa)、水温(℃)の値から算出される標準化透過水量(m/d/MPa at 25℃)と、予め設定された初期標準化透過水量(m/d/MPa at 25℃)との比率が規定値となったときに、前記被処理水の通水を、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L未満である洗浄水の通水に切り替える、水処理装置である。 Further, the present invention comprises reverse osmosis membrane treatment means for obtaining concentrated water and permeated water by passing water to be treated containing F ions, Al ions, and Na ions through a reverse osmosis membrane, wherein F ions in the concentrated water are , Al ions, and Na ions have ion concentrations of 0.1 mg/L or more, respectively, and the total amount of the ion concentrations is 418 mg/L or more, and the flow rate (m 3 /d) and pressure (MPa) in the reverse osmosis membrane treatment means ), the ratio between the standardized permeation water amount (m / d / MPa at 25 ° C) calculated from the value of the water temperature (° C.) and the preset initial standardized permeation water volume (m / d / MPa at 25 ° C) is specified When the value of is.

前記水処理装置において、前記比率の規定値として、50%から90%の範囲の値を設定することが好ましい。 In the water treatment device, it is preferable to set a value in the range of 50% to 90% as the specified value of the ratio.

前記水処理装置において、前記洗浄水として電気伝導率20μS/cm以下の水を用いることが好ましい。 In the water treatment device, it is preferable to use water having an electric conductivity of 20 μS/cm or less as the washing water.

前記水処理装置において、前記逆浸透膜処理手段の前段に前段逆浸透膜処理手段を備え、前記被処理水が、前記前段逆浸透膜処理手段で得られる濃縮水であることが好ましい。 In the water treatment apparatus, it is preferable that a pre-stage reverse osmosis membrane treatment means is provided upstream of the reverse osmosis membrane treatment means, and the water to be treated is concentrated water obtained by the pre-stage reverse osmosis membrane treatment means.

前記水処理装置において、前記洗浄水として前記前段逆浸透膜処理手段で得られる透過水を用いることが好ましい。 In the water treatment apparatus, it is preferable to use permeated water obtained by the upstream reverse osmosis membrane treatment means as the washing water.

本発明により、Fイオン、Alイオン、Naイオンを含む被処理水を逆浸透膜処理するときに発生するスケールを簡易な方法で除去することができる水処理方法および水処理装置が提供される。 INDUSTRIAL APPLICABILITY According to the present invention, a water treatment method and a water treatment apparatus are provided that can easily remove scale generated when water containing F ions, Al ions, and Na ions is treated with a reverse osmosis membrane.

本発明の実施形態に係る水処理装置の一例を示す概略構成図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic block diagram which shows an example of the water treatment apparatus which concerns on embodiment of this invention. 本発明の実施形態に係る水処理装置の他の例を示す概略構成図である。It is a schematic block diagram which shows the other example of the water treatment apparatus which concerns on embodiment of this invention. 実施例1,2および比較例における、透過水量保持率(%)の経時変化を示すグラフである。4 is a graph showing changes over time in permeate water retention rate (%) in Examples 1 and 2 and Comparative Example.

本発明の実施の形態について以下説明する。本実施形態は本発明を実施する一例であって、本発明は本実施形態に限定されるものではない。 An embodiment of the present invention will be described below. This embodiment is an example of implementing the present invention, and the present invention is not limited to this embodiment.

本発明の実施形態に係る水処理装置の一例の概略を図1に示し、その構成について説明する。 An outline of an example of a water treatment apparatus according to an embodiment of the present invention is shown in FIG. 1, and its configuration will be described.

図1の水処理装置1は、Fイオン(すなわち、フッ化物イオン)、Alイオン(すなわち、アルミニウムイオン)、Naイオン(すなわち、ナトリウムイオン)を含む被処理水を逆浸透膜に通水して濃縮水と透過水とを得る逆浸透膜処理手段として逆浸透膜処理装置10を備える。 The water treatment apparatus 1 of FIG. 1 passes water to be treated containing F ions (that is, fluoride ions), Al ions (that is, aluminum ions), and Na ions (that is, sodium ions) through a reverse osmosis membrane. A reverse osmosis membrane treatment apparatus 10 is provided as reverse osmosis membrane treatment means for obtaining concentrated water and permeated water.

図1の水処理装置1において、逆浸透膜処理装置10の入口には、被処理水配管12がバルブ20を介して接続され、被処理水配管12におけるバルブ20の下流側には、洗浄水配管14がバルブ22を介して接続されている。逆浸透膜処理装置10の濃縮水出口には、濃縮水配管16が接続され、逆浸透膜処理装置10の透過水出口には、透過水配管18が接続されている。濃縮水配管16には、濃縮水中のFイオン、Alイオン、Naイオン等のイオン濃度を測定するイオン濃度測定手段として、イオン濃度測定装置が設置されてもよい。透過水配管18には、透過水の流量を測定する流量測定手段として流量計と、透過水の圧力を測定する圧力測定手段として圧力計と、透過水の温度を測定する水温測定手段として水温計と、が設置されてもよい。 In the water treatment apparatus 1 of FIG. 1, the inlet of the reverse osmosis membrane treatment apparatus 10 is connected to the water pipe 12 to be treated through the valve 20, and the water to be treated pipe 12 is connected downstream of the valve 20 with washing water. A pipe 14 is connected through a valve 22 . A concentrated water pipe 16 is connected to a concentrated water outlet of the reverse osmosis membrane treatment device 10 , and a permeated water pipe 18 is connected to a permeated water outlet of the reverse osmosis membrane treatment device 10 . An ion concentration measuring device may be installed in the concentrated water pipe 16 as ion concentration measuring means for measuring the concentration of ions such as F ions, Al ions, and Na ions in the concentrated water. The permeated water pipe 18 is provided with a flow meter as a flow rate measuring means for measuring the flow rate of the permeated water, a pressure gauge as a pressure measuring means for measuring the pressure of the permeated water, and a water temperature gauge as a water temperature measuring means for measuring the temperature of the permeated water. and may be placed.

本実施形態に係る水処理方法および水処理装置1の動作について説明する。 The operation of the water treatment method and the water treatment apparatus 1 according to this embodiment will be described.

図1の水処理装置1において、バルブ20が開状態、バルブ22が閉状態とされ、Fイオン、Alイオン、Naイオンを含む被処理水は、被処理水配管12を通して逆浸透膜処理装置10へ送液され、逆浸透膜処理装置10において逆浸透膜に通水されて濃縮水と透過水とが得られる(逆浸透膜処理工程)。逆浸透膜処理で得られた濃縮水は、濃縮水配管16を通して排出され、透過水は、透過水配管18を通して排出される。 In the water treatment apparatus 1 of FIG. 1, the valve 20 is opened and the valve 22 is closed, and the water to be treated containing F ions, Al ions, and Na ions passes through the water pipe 12 to the reverse osmosis membrane treatment apparatus 10. and is passed through the reverse osmosis membrane in the reverse osmosis membrane treatment apparatus 10 to obtain concentrated water and permeated water (reverse osmosis membrane treatment step). The concentrated water obtained by the reverse osmosis membrane treatment is discharged through the concentrated water pipe 16 and the permeated water is discharged through the permeated water pipe 18 .

ここで、イオン濃度測定装置により測定された、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度がそれぞれ0.1mg/L以上であり、かつ、Fイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L以上となり、例えば流量計により測定された透過水の流量(m/d)、圧力計により測定された透過水の圧力(MPa)、水温計により測定された透過水の水温(℃)の値から算出される標準化透過水量(m/d/MPa at 25℃)と、予め設定された初期標準化透過水量(m/d/MPa at 25℃)との比率が規定値となったときに、バルブ20が閉状態、バルブ22が開状態とされ、被処理水の通水を、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L未満である洗浄水の通水に切り替え、逆浸透膜処理装置10の逆浸透膜の洗浄が行われる(洗浄工程)。ここで、標準化透過水量は、JIS K3802 1096にて定義されている補正フラックスと同義であり、単位時間あたり、単位膜面積あたり、単位圧力あたりの、25℃における透過水量のことである。具体的には、透過水量(m/d)を、逆浸透膜エレメントの膜面積(m)と操作圧力(MPa)で割り、水温(℃)による補正係数を乗じることで求められる。標準化透過水量と初期標準化透過水量との比率(%)は、(標準化透過水量/初期標準化透過水量)×100により求められる。なお、逆浸透膜の透過水量は通水開始直後には不安定であることが多いため、初期の透過水量は逆浸透膜の透過水量が安定してから測定することが望ましい。例えば、逆浸透膜への通水開始後24時間経過した時点で初期の透過水量を測定すればよい。 Here, the ion concentrations of F ions, Al ions, and Na ions in the concentrated water measured by an ion concentration measuring device are each 0.1 mg/L or more, and the ion concentrations of F ions, Al ions, and Na ions are The total amount of is 418 mg / L or more, for example, the flow rate of permeated water measured by a flow meter ( m / d), the pressure of permeated water measured by a pressure gauge (MPa), the permeated water measured by a water temperature gauge The ratio between the standardized permeation water amount (m / d / MPa at 25 ° C) calculated from the value of the water temperature (° C.) and the preset initial standardized permeation water volume (m / d / MPa at 25 ° C) is the specified value. When this occurs, the valve 20 is closed and the valve 22 is opened, and the water to be treated is passed so that the total ion concentration of F ions, Al ions, and Na ions in the concentrated water is less than 418 mg/L. The reverse osmosis membrane of the reverse osmosis membrane processing apparatus 10 is cleaned by switching to the flow of cleaning water (cleaning step). Here, the standardized permeate flow rate is synonymous with the corrected flux defined in JIS K3802 1096, and is the permeate flow rate at 25° C. per unit time, per unit membrane area, and per unit pressure. Specifically, it is obtained by dividing the permeated water amount (m 3 /d) by the membrane area (m 2 ) of the reverse osmosis membrane element and the operating pressure (MPa), and multiplying it by a correction coefficient based on the water temperature (°C). The ratio (%) between the standardized permeated water amount and the initial standardized permeated water amount is obtained by (standardized permeated water amount/initial standardized permeated water amount)×100. Since the amount of permeated water through the reverse osmosis membrane is often unstable immediately after the start of water flow, it is desirable to measure the initial amount of permeated water after the amount of permeated water through the reverse osmosis membrane stabilizes. For example, the initial amount of permeated water may be measured 24 hours after the start of water flow through the reverse osmosis membrane.

本発明者らは、例えば半導体工場の排水等のFイオン、Alイオン、Naイオンを含む排水を逆浸透膜処理するときに、主にヘキサフルオロアルミン酸三ナトリウム(NaAlF)によるスケーリングが発生することを見出した。NaAlFの水に対する溶解度(25℃)は418mg/Lと高く、NaAlFは一般的にはスケーリングがほとんど発生しない物質であると考えられる。しかし、Fイオン、Alイオン、Naイオンの3種のイオンがそれぞれ少なくとも0.1mg/L以上存在し、それらのイオン濃度の総量がNaAlFの溶解度である418mg/Lを超える水では、NaAlFが析出する可能性が考えられ、特に逆浸透膜を用いた水処理では濃度分極の効果も相まってNaAlFを主成分とするスケールの発生が促進されると考えられる。 The inventors of the present invention have found that when wastewater containing F ions, Al ions, and Na ions, such as wastewater from a semiconductor factory, is treated with a reverse osmosis membrane, scaling mainly by trisodium hexafluoroaluminate (Na 3 AlF 6 ) occurs. found to occur. The solubility of Na 3 AlF 6 in water (25° C.) is as high as 418 mg/L, and Na 3 AlF 6 is generally considered to be a substance that scarcely causes scaling. However, in water in which at least 0.1 mg/L or more of three types of ions, F ions, Al ions, and Na ions are present, and the total ion concentration exceeds 418 mg/L, which is the solubility of Na 3 AlF 6 , There is a possibility that Na 3 AlF 6 is precipitated, and particularly in water treatment using a reverse osmosis membrane, it is thought that the effect of concentration polarization also promotes the generation of scale mainly composed of Na 3 AlF 6 .

また、本発明者らは、さらに、このNaAlFを主成分とするスケールが、純水等の清澄な水で容易に洗浄されることも見出した。したがって、スケーリングを抑制するために、回収率を下げる、または薬品洗浄を実施する等の対応を行わなくてもよい。 The present inventors also found that the scale containing Na 3 AlF 6 as a main component can be easily washed with clear water such as pure water. Therefore, in order to suppress scaling, it is not necessary to take measures such as lowering the recovery rate or performing chemical cleaning.

洗浄水としては、Fイオン、Alイオン、Naイオンの濃度が低いことが第一に考えられ、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L未満である洗浄水を用いればよい。また、洗浄水として電気伝導率20μS/cm以下の水を用いることが好ましく、10μS/cm以下の水を用いることがより好ましい。洗浄水としては、有機物等他の汚染物質が含まれていないことが好ましく、例えば、逆浸透膜の前処理膜(MF膜、UF膜)の処理水、逆浸透膜の透過水、純水、超純水等が挙げられる。 Washing water is primarily considered to have low concentrations of F ions, Al ions, and Na ions, and washing water in which the total ion concentration of F ions, Al ions, and Na ions in concentrated water is less than 418 mg/L. should be used. Further, water having an electric conductivity of 20 μS/cm or less is preferably used as washing water, and water having an electrical conductivity of 10 μS/cm or less is more preferable. It is preferable that the washing water does not contain other contaminants such as organic substances. Ultrapure water etc. are mentioned.

洗浄工程のタイミングは、運転初期の透過水量を把握しておき、それがある規定値まで低減した時点で洗浄する手法が考えられる。また、このとき透過水量の算出には、圧力(MPa)、水温(℃)の測定データを用いて、圧力補正、温度補正を行うことで標準化透過水量を算出することによって、正確な判断が可能となる。すなわち、逆浸透膜処理工程における流量(m/d)、圧力(MPa)、水温(℃)の値から算出される標準化透過水量(m/d/MPa at 25℃)と、予め設定された初期標準化透過水量(m/d/MPa at 25℃)との比率が規定値となったときに、被処理水の通水を、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L未満である洗浄水の通水に切り替えればよい。 As for the timing of the cleaning process, it is conceivable to grasp the amount of permeated water at the beginning of the operation and perform cleaning when the amount has decreased to a specified value. In addition, for calculating the amount of permeated water at this time, accurate judgment is possible by calculating the standardized amount of permeated water by performing pressure correction and temperature correction using the measurement data of pressure (MPa) and water temperature (°C). becomes. That is, the flow rate (m 3 / d), pressure (MPa), water temperature (° C.) in the reverse osmosis membrane treatment process, and the standardized permeate flow rate (m / d / MPa at 25 ° C.) and the preset When the ratio with the initial standardized permeation water amount (m / d / MPa at 25 ° C) reaches the specified value, the water flow of the water to be treated is the total amount of ion concentrations of F ions, Al ions, and Na ions in the concentrated water is less than 418 mg/L.

この規定値は、高過ぎても洗浄頻度が多くなり過ぎ、低すぎると一度の洗浄で十分に回復しないことから、例えば50%から90%の範囲の値を設定すればよく、70%から80%の範囲の値を設定することが好ましい。 If this specified value is too high, the cleaning frequency will be too high, and if it is too low, sufficient recovery will not be achieved with one cleaning. It is preferable to set values in the % range.

上記洗浄工程を行う場合の被処理水は、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度がそれぞれ0.1mg/L以上であり、かつ、Fイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L以上となる水であるが、カチオンとアニオンとのバランス、Alイオンが多量に含まれることはほとんどないという点から、例えば、Fイオン、Naイオンのイオン濃度は、それぞれ100~300mg/L程度、好ましくは130~230mg/L程度であり、Alイオンのイオン濃度は、0.1~20mg/L程度、好ましくは1~3mg/L程度である。 The water to be treated when the above washing step is performed has an ion concentration of F ions, Al ions, and Na ions in the concentrated water of 0.1 mg/L or more, and an ion concentration of F ions, Al ions, and Na ions. Although the total amount of water is 418 mg / L or more, from the viewpoint of the balance between cations and anions and the fact that Al ions are rarely contained in large amounts, for example, the ion concentrations of F ions and Na ions are each 100 The ion concentration of Al ions is about 0.1 to 20 mg/L, preferably about 1 to 3 mg/L.

本実施形態に係る水処理方法および水処理装置の処理対象となる被処理水は、Fイオン、Alイオン、Naイオンを含み、逆浸透膜処理の濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度がそれぞれ0.1mg/L以上かつ、Fイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L以上となる水であればよく、特に制限はない。被処理水は、例えば、Fイオンのイオン濃度が290mg/L以上、Alイオンのイオン濃度が1.6mg/L以上、Naイオンのイオン濃度が270mg/L以上かつ、Fイオン、Alイオン、Naイオンのイオン濃度の総量が561.6mg/L以上となる水であり、逆浸透膜処理の濃縮水におけるFイオンのイオン濃度が483mg/L以上、Alイオンのイオン濃度が3.0mg/L以上、Naイオンのイオン濃度が437mg/L以上かつ、Fイオン、Alイオン、Naイオンのイオン濃度の総量が923mg/L以上となる水である。処理対象となる被処理水としては、例えば、半導体工場の排水、ガラス加工工場の排水等が挙げられる。 The water to be treated by the water treatment method and the water treatment apparatus according to the present embodiment contains F ions, Al ions, and Na ions. There is no particular limitation as long as the water has an ion concentration of 0.1 mg/L or more and a total ion concentration of F ions, Al ions, and Na ions of 418 mg/L or more. The water to be treated, for example, has an ion concentration of F ions of 290 mg/L or more, an ion concentration of Al ions of 1.6 mg/L or more, and an ion concentration of Na ions of 270 mg/L or more, and contains F ions, Al ions, Na The water has a total ion concentration of 561.6 mg/L or more, and the concentrated water from the reverse osmosis membrane treatment has an F ion concentration of 483 mg/L or more and an Al ion concentration of 3.0 mg/L or more. , the ion concentration of Na ions is 437 mg/L or more, and the total amount of the ion concentrations of F ions, Al ions, and Na ions is 923 mg/L or more. Examples of water to be treated include waste water from semiconductor factories and waste water from glass processing factories.

半導体工場の排水等を逆浸透膜で処理する際に、回収率を向上させるため、逆浸透膜処理で得られた濃縮水をさらに逆浸透膜処理することがある。後段の逆浸透膜処理では各種イオン濃度が高くなるため、後段の逆浸透膜処理の入口水(被処理水)にFイオン、Alイオン、Naイオンが合計418mg/L以上含まれる場合、スケールによる後段の逆浸透膜処理の透過水量の低下が懸念される。このような形態の水処理装置の例の概略構成を図2に示す。 When treating waste water from a semiconductor factory with a reverse osmosis membrane, the concentrated water obtained by the reverse osmosis membrane treatment may be further treated with a reverse osmosis membrane in order to improve the recovery rate. Since the concentration of various ions increases in the reverse osmosis membrane treatment in the latter stage, if the inlet water (water to be treated) of the latter reverse osmosis membrane treatment contains a total of 418 mg/L or more of F ions, Al ions, and Na ions, it may be caused by scale. There is a concern that the amount of permeated water in the reverse osmosis membrane treatment in the latter stage will decrease. FIG. 2 shows a schematic configuration of an example of such a form of water treatment apparatus.

図2の水処理装置3は、Fイオン、Alイオン、Naイオンを含む被処理水を逆浸透膜に通水して濃縮水と透過水とを得る逆浸透膜処理手段として逆浸透膜処理装置10と、逆浸透膜処理装置10の前段に前段逆浸透膜処理手段として前段逆浸透膜処理装置24とを備える。逆浸透膜処理装置10(逆浸透膜処理工程)の被処理水が、前段逆浸透膜処理装置24(前段逆浸透膜処理工程)で得られる濃縮水である。また、逆浸透膜処理装置10(逆浸透膜処理工程)で用いられる洗浄水として前段逆浸透膜処理装置24(前段逆浸透膜処理工程)で得られる透過水を用いてもよい。 The water treatment apparatus 3 of FIG. 2 is a reverse osmosis membrane treatment means as reverse osmosis membrane treatment means for obtaining concentrated water and permeated water by passing water to be treated containing F ions, Al ions, and Na ions through a reverse osmosis membrane. 10, and a pre-stage reverse osmosis membrane treatment device 24 as a pre-stage reverse osmosis membrane treatment means in the pre-stage of the reverse osmosis membrane treatment device 10. FIG. The water to be treated in the reverse osmosis membrane treatment device 10 (reverse osmosis membrane treatment step) is concentrated water obtained in the upstream reverse osmosis membrane treatment device 24 (early stage reverse osmosis membrane treatment step). In addition, the permeated water obtained in the upstream reverse osmosis membrane treatment apparatus 24 (primary reverse osmosis membrane treatment process) may be used as the washing water used in the reverse osmosis membrane treatment apparatus 10 (reverse osmosis membrane treatment process).

図2の水処理装置3において、前段逆浸透膜処理装置24の入口には、前段被処理水配管26が接続されている。前段逆浸透膜処理装置24の濃縮水出口には、前段濃縮水配管28がバルブ32を介して接続され、前段逆浸透膜処理装置24の透過水出口には、前段透過水配管30がバルブ34を介して接続されている。前段濃縮水配管28におけるバルブ32の上流側と、逆浸透膜処理装置10の入口とは、被処理水配管12によりバルブ20を介して接続されている。前段透過水配管30におけるバルブ34の上流側と、被処理水配管12におけるバルブ20の下流側とは、洗浄水配管14によりバルブ22を介して接続されている。逆浸透膜処理装置10の濃縮水出口には、濃縮水配管16が接続され、逆浸透膜処理装置10の透過水出口には、透過水配管18が接続されている。前段濃縮水配管28は、濃縮水配管16の途中に接続されていてもよい。濃縮水配管16には、濃縮水中のFイオン、Alイオン、Naイオン等のイオン濃度を測定するイオン濃度測定手段として、イオン濃度測定装置が設置されてもよい。透過水配管18には、透過水の流量を測定する流量測定手段として流量計と、透過水の圧力を測定する圧力測定手段として圧力計と、透過水の温度を測定する水温測定手段として水温計と、が設置されてもよい。 In the water treatment apparatus 3 shown in FIG. 2, the inlet of the upstream reverse osmosis membrane treatment apparatus 24 is connected to the upstream water pipe 26 to be treated. A pre-stage concentrated water pipe 28 is connected to the concentrated water outlet of the pre-stage reverse osmosis membrane treatment device 24 via a valve 32, and a pre-stage permeated water pipe 30 is connected to the permeated water outlet of the pre-stage reverse osmosis membrane treatment device 24 via a valve 34. connected via The upstream side of the valve 32 in the pre-stage concentrated water pipe 28 and the inlet of the reverse osmosis membrane treatment apparatus 10 are connected by the water to be treated pipe 12 via the valve 20 . The upstream side of the valve 34 in the pre-stage permeated water pipe 30 and the downstream side of the valve 20 in the water to be treated pipe 12 are connected by the washing water pipe 14 via the valve 22 . A concentrated water pipe 16 is connected to a concentrated water outlet of the reverse osmosis membrane treatment device 10 , and a permeated water pipe 18 is connected to a permeated water outlet of the reverse osmosis membrane treatment device 10 . The upstream concentrated water pipe 28 may be connected in the middle of the concentrated water pipe 16 . An ion concentration measuring device may be installed in the concentrated water pipe 16 as ion concentration measuring means for measuring the concentration of ions such as F ions, Al ions, and Na ions in the concentrated water. The permeated water pipe 18 is provided with a flow meter as a flow rate measuring means for measuring the flow rate of the permeated water, a pressure gauge as a pressure measuring means for measuring the pressure of the permeated water, and a water temperature gauge as a water temperature measuring means for measuring the temperature of the permeated water. and may be placed.

図2の水処理装置3において、Fイオン、Alイオン、Naイオンを含む前段被処理水は、バルブ32、バルブ22が閉状態、バルブ20、バルブ34が開状態とされ、前段被処理水配管26を通して前段逆浸透膜処理装置24へ送液され、前段逆浸透膜処理装置24において逆浸透膜に通水されて前段濃縮水と前段透過水とが得られる(前段逆浸透膜処理工程)。前段逆浸透膜処理で得られた前段濃縮水は、前段濃縮水配管28、被処理水配管12を通して被処理水として逆浸透膜処理装置10へ送液される。前段透過水は、前段透過水配管30を通して排出される。 In the water treatment apparatus 3 of FIG. 2 , the upstream water containing F ions, Al ions and Na ions is closed with the valves 32 and 22 closed, and with the valves 20 and 34 open. 26 to the upstream reverse osmosis membrane treatment device 24, and in the upstream reverse osmosis membrane treatment device 24, the water is passed through the reverse osmosis membrane to obtain the upstream concentrated water and the upstream permeated water (the upstream reverse osmosis membrane treatment process). The first-stage concentrated water obtained by the first-stage reverse osmosis membrane treatment is sent to the reverse osmosis membrane treatment apparatus 10 as the water to be treated through the first-stage concentrated water pipe 28 and the water to be treated pipe 12 . The former stage permeated water is discharged through the former stage permeated water pipe 30 .

前段逆浸透膜処理装置24(前段逆浸透膜処理工程)で得られた前段濃縮水の少なくとも一部は被処理水として、逆浸透膜処理装置10において逆浸透膜に通水されて濃縮水と透過水とが得られる(逆浸透膜処理工程)。逆浸透膜処理で得られた濃縮水は、濃縮水配管16を通して排出され、透過水は、透過水配管18を通して排出される。 At least part of the pre-stage concentrated water obtained in the pre-stage reverse osmosis membrane treatment apparatus 24 (pre-stage reverse osmosis membrane treatment step) is used as water to be treated, and is passed through the reverse osmosis membrane in the reverse osmosis membrane treatment apparatus 10 to form concentrated water. Permeated water is obtained (reverse osmosis membrane treatment step). The concentrated water obtained by the reverse osmosis membrane treatment is discharged through the concentrated water pipe 16 and the permeated water is discharged through the permeated water pipe 18 .

ここで、イオン濃度測定装置により測定された、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度がそれぞれ0.1mg/L以上であり、かつ、Fイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L以上となり、例えば流量計により測定された透過水の流量(m/d)、圧力計により測定された透過水の圧力(MPa)、水温計により測定された透過水の水温(℃)の値から算出される標準化透過水量(m/d/MPa at 25℃)と、予め設定された初期標準化透過水量(m/d/MPa at 25℃)との比率が規定値となったときに、バルブ20が閉状態、バルブ22、バルブ32が開状態とされ、被処理水の通水を、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L未満である洗浄水、すなわち前段透過水の通水に切り替え、逆浸透膜処理装置10の逆浸透膜の洗浄が行われる(洗浄工程)。これにより、前段逆浸透膜処理装置24で得られた前段透過水を用いて後段の逆浸透膜処理装置10の洗浄を行うことができる。このとき、バルブ34は、閉状態としてもよいし、開度を適宜調整してもよい。 Here, the ion concentrations of F ions, Al ions, and Na ions in the concentrated water measured by an ion concentration measuring device are each 0.1 mg/L or more, and the ion concentrations of F ions, Al ions, and Na ions are The total amount of is 418 mg / L or more, for example, the flow rate of permeated water measured by a flow meter ( m / d), the pressure of permeated water measured by a pressure gauge (MPa), the permeated water measured by a water temperature gauge The ratio between the standardized permeation water amount (m / d / MPa at 25 ° C) calculated from the value of the water temperature (° C.) and the preset initial standardized permeation water volume (m / d / MPa at 25 ° C) is the specified value. When this occurs, the valve 20 is closed and the valves 22 and 32 are opened, and the water to be treated is allowed to flow until the total ion concentration of F ions, Al ions, and Na ions in the concentrated water is 418 mg/L. The reverse osmosis membrane of the reverse osmosis membrane treatment apparatus 10 is washed by switching to the washing water of less than 100%, that is, passing through the pre-stage permeated water (washing step). As a result, the former stage permeated water obtained in the former stage reverse osmosis membrane treatment apparatus 24 can be used to clean the latter stage reverse osmosis membrane treatment apparatus 10 . At this time, the valve 34 may be closed, or its opening degree may be appropriately adjusted.

これにより、Fイオン、Alイオン、Naイオンを含む被処理水を逆浸透膜処理するときに発生するスケールを簡易な方法で除去することができる。 As a result, it is possible to remove the scale generated when the water to be treated containing F ions, Al ions and Na ions is treated with a reverse osmosis membrane by a simple method.

以下、実施例および比較例を挙げ、本発明をより具体的に詳細に説明するが、本発明は、以下の実施例に限定されるものではない。 EXAMPLES Hereinafter, the present invention will be described in more detail with reference to examples and comparative examples, but the present invention is not limited to the following examples.

<実施例1>
Fイオン、Alイオン、Naイオンをそれぞれ含む被処理水を、図1に示す水処理装置に通水した。逆浸透膜として日東電工社製LFC3を使用した。逆浸透膜処理の回収率を40%で運転したところ、濃縮水濃度で各イオンの総量が418mg/L以上となった。被処理水および濃縮水の水質を表1に示す。
<Example 1>
Water to be treated containing F ions, Al ions, and Na ions, respectively, was passed through the water treatment apparatus shown in FIG. LFC3 manufactured by Nitto Denko Corporation was used as a reverse osmosis membrane. When the reverse osmosis membrane treatment was operated at a recovery rate of 40%, the total concentration of each ion was 418 mg/L or more in the concentrated water concentration. Table 1 shows the quality of the water to be treated and the concentrated water.

Figure 0007116691000001
Figure 0007116691000001

通水をするにつれて、NaAlFを主成分とすると推定されるスケールにより逆浸透膜の透過水量が低下した。25℃、1MPaあたりに補正した標準化透過水量(m/d/MPa at 25℃)が、初期標準化透過水量(m/d/MPa at 25℃)と比較して規定値以下となった時点で純水による洗浄を実施した。規定値((標準化透過水量/初期標準化透過水量)×100)は実施例1では50~75%、実施例2では25~40%とした。洗浄用の純水には、電気伝導率20μS/cm以下のRO透過水(濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度の総量が0.1mg/L)を用いた。比較例では純水による洗浄を行わなかった。 As the water was passed through, the amount of water permeated through the reverse osmosis membrane decreased due to scale presumed to be mainly composed of Na 3 AlF 6 . 25 ° C., when the standardized permeation water volume (m / d / MPa at 25 ° C.) corrected per 1 MPa is below the specified value compared to the initial standardized permeation water volume (m / d / MPa at 25 ° C.) A water wash was performed. The specified value ((standardized permeated water amount/initial standardized permeated water amount)×100) was 50 to 75% in Example 1 and 25 to 40% in Example 2. As the pure water for washing, RO permeated water with an electric conductivity of 20 μS/cm or less (the total ion concentration of F ions, Al ions, and Na ions in the concentrated water is 0.1 mg/L) was used. In the comparative example, cleaning with pure water was not performed.

実施例1,2および比較例における、透過水量保持率(%)((標準化透過水量/初期標準化透過水量)×100)の経時変化を図3に示す。実施例1では洗浄の度に透過水量保持率がほぼ100%まで回復しているが、実施例2では100%まで回復していない。このことから、洗浄を実施する場合でも、標準化透過水量が初期標準化透過水量の50%以下となる前に洗浄を実施する方が、安定した運転を継続できるといえる。洗浄をまったく行わない比較例の場合、通水開始後400時間程度で透過水が得られなくなった。 FIG. 3 shows changes over time in permeate water retention rate (%) ((standardized permeate water amount/initial standardized permeate water amount)×100) in Examples 1 and 2 and Comparative Example. In Example 1, the permeated water retention rate was recovered to almost 100% at each washing, but in Example 2, it was not recovered to 100%. From this, it can be said that even when washing is performed, stable operation can be continued by washing before the standardized permeated water amount becomes 50% or less of the initial standardized permeated water amount. In the case of the comparative example in which no washing was performed, no permeated water was obtained after about 400 hours from the start of water flow.

このように、実施例の方法により、Fイオン、Alイオン、Naイオンを含む被処理水を逆浸透膜処理するときに発生するスケールを簡易な方法で除去することができた。 Thus, according to the method of the example, it was possible to remove the scale generated when the water to be treated containing F ions, Al ions and Na ions was treated with a reverse osmosis membrane by a simple method.

1,3 水処理装置、10 逆浸透膜処理装置、12 被処理水配管、14 洗浄水配管、16 濃縮水配管、18 透過水配管、20,22,32,34 バルブ、24 前段逆浸透膜処理装置、26 前段被処理水配管、28 前段濃縮水配管、30 前段透過水配管。 1, 3 water treatment device, 10 reverse osmosis membrane treatment device, 12 water to be treated pipe, 14 washing water pipe, 16 concentrated water pipe, 18 permeated water pipe, 20, 22, 32, 34 valve, 24 upstream reverse osmosis membrane treatment Apparatus, 26 pre-stage water to be treated pipe, 28 pre-stage concentrated water pipe, 30 pre-stage permeated water pipe.

Claims (10)

Fイオン、Alイオン、Naイオンを含む被処理水を逆浸透膜に通水して濃縮水と透過水とを得る逆浸透膜処理工程を含み、
前記濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度がそれぞれ0.1mg/L以上かつ、前記イオン濃度の総量が418mg/L以上であり、
前記逆浸透膜処理工程における流量(m/d)、圧力(MPa)、水温(℃)の値から算出される標準化透過水量(m/d/MPa at 25℃)と、予め設定された初期標準化透過水量(m/d/MPa at 25℃)との比率が規定値となったときに、前記被処理水の通水を、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L未満である洗浄水の通水に切り替えることを特徴とする水処理方法。
A reverse osmosis membrane treatment step of passing water to be treated containing F ions, Al ions, and Na ions through a reverse osmosis membrane to obtain concentrated water and permeated water,
The ion concentrations of F ions, Al ions, and Na ions in the concentrated water are each 0.1 mg/L or more, and the total amount of the ion concentrations is 418 mg/L or more,
Flow rate ( m / d), pressure (MPa), water temperature (° C.) in the reverse osmosis membrane treatment process Standardized permeate water volume (m / d / MPa at 25 ° C.), and a preset initial When the ratio to the standardized permeated water amount (m / d / MPa at 25 ° C.) reaches the specified value, the water flow of the water to be treated is the total amount of ion concentrations of F ions, Al ions, and Na ions in the concentrated water is less than 418 mg/L.
請求項1に記載の水処理方法であって、
前記比率の規定値として、50%から90%の範囲の値を設定することを特徴とする水処理方法。
The water treatment method according to claim 1,
A water treatment method, wherein a value in the range of 50% to 90% is set as the specified value of the ratio.
請求項1または2に記載の水処理方法であって、
前記洗浄水として電気伝導率20μS/cm以下の水を用いることを特徴とする水処理方法。
The water treatment method according to claim 1 or 2,
A water treatment method, wherein water having an electric conductivity of 20 μS/cm or less is used as the washing water.
請求項1~3のいずれか1項に記載の水処理方法であって、
前記逆浸透膜処理工程の前段に前段逆浸透膜処理工程を含み、前記被処理水が、前記前段逆浸透膜処理工程で得られる濃縮水であることを特徴とする水処理方法。
The water treatment method according to any one of claims 1 to 3,
A water treatment method comprising a reverse osmosis membrane treatment step before the reverse osmosis membrane treatment step, wherein the water to be treated is concentrated water obtained in the first reverse osmosis membrane treatment step.
請求項1~4のいずれか1項に記載の水処理方法であって、
前記洗浄水として前記前段逆浸透膜処理工程で得られる透過水を用いることを特徴とする水処理方法。
The water treatment method according to any one of claims 1 to 4,
A water treatment method, wherein permeated water obtained in the preceding reverse osmosis membrane treatment step is used as the washing water.
Fイオン、Alイオン、Naイオンを含む被処理水を逆浸透膜に通水して濃縮水と透過水とを得る逆浸透膜処理手段を備え、
前記濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度がそれぞれ0.1mg/L以上かつ、前記イオン濃度の総量が418mg/L以上であり、
前記逆浸透膜処理手段における流量(m/d)、圧力(MPa)、水温(℃)の値から算出される標準化透過水量(m/d/MPa at 25℃)と、予め設定された初期標準化透過水量(m/d/MPa at 25℃)との比率が規定値となったときに、前記被処理水の通水を、濃縮水におけるFイオン、Alイオン、Naイオンのイオン濃度の総量が418mg/L未満である洗浄水の通水に切り替えることを特徴とする水処理装置。
A reverse osmosis membrane treatment means for passing water to be treated containing F ions, Al ions, and Na ions through a reverse osmosis membrane to obtain concentrated water and permeated water,
The ion concentrations of F ions, Al ions, and Na ions in the concentrated water are each 0.1 mg/L or more, and the total amount of the ion concentrations is 418 mg/L or more,
A standardized permeate flow rate (m / d / MPa at 25 ° C.) calculated from the values of flow rate ( m / d), pressure (MPa), water temperature (° C.) in the reverse osmosis membrane treatment means When the ratio to the standardized permeated water amount (m / d / MPa at 25 ° C.) reaches the specified value, the water flow of the water to be treated is the total amount of ion concentrations of F ions, Al ions, and Na ions in the concentrated water is less than 418 mg/L.
請求項6に記載の水処理装置であって、
前記比率の規定値として、50%から90%の範囲の値を設定することを特徴とする水処理装置。
The water treatment device according to claim 6,
A water treatment apparatus, wherein a value in the range of 50% to 90% is set as the specified value of the ratio.
請求項6または7に記載の水処理装置であって、
前記洗浄水として電気伝導率20μS/cm以下の水を用いることを特徴とする水処理装置。
The water treatment device according to claim 6 or 7,
A water treatment apparatus, wherein water having an electric conductivity of 20 μS/cm or less is used as the washing water.
請求項6~8のいずれか1項に記載の水処理装置であって、
前記逆浸透膜処理手段の前段に前段逆浸透膜処理手段を備え、前記被処理水が、前記前段逆浸透膜処理手段で得られる濃縮水であることを特徴とする水処理装置。
The water treatment device according to any one of claims 6 to 8,
A water treatment apparatus comprising a former stage reverse osmosis membrane treatment means in a stage preceding said reverse osmosis membrane treatment means, wherein said water to be treated is concentrated water obtained by said former stage reverse osmosis membrane treatment means.
請求項6~9のいずれか1項に記載の水処理装置であって、
前記洗浄水として前記前段逆浸透膜処理手段で得られる透過水を用いることを特徴とする水処理装置。
The water treatment device according to any one of claims 6 to 9,
A water treatment apparatus, wherein permeated water obtained by the reverse osmosis membrane treatment means in the preceding stage is used as the washing water.
JP2019015087A 2019-01-31 2019-01-31 Water treatment method and water treatment equipment Active JP7116691B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2019015087A JP7116691B2 (en) 2019-01-31 2019-01-31 Water treatment method and water treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019015087A JP7116691B2 (en) 2019-01-31 2019-01-31 Water treatment method and water treatment equipment

Publications (2)

Publication Number Publication Date
JP2020121278A JP2020121278A (en) 2020-08-13
JP7116691B2 true JP7116691B2 (en) 2022-08-10

Family

ID=71993326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019015087A Active JP7116691B2 (en) 2019-01-31 2019-01-31 Water treatment method and water treatment equipment

Country Status (1)

Country Link
JP (1) JP7116691B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115916708A (en) * 2020-09-09 2023-04-04 栗田工业株式会社 Method for operating desalination device
JP7407750B2 (en) * 2020-09-09 2024-01-04 栗田工業株式会社 How to operate desalination equipment
JP7115522B2 (en) * 2020-09-14 2022-08-09 栗田工業株式会社 Operation method of desalting equipment
JP7400878B1 (en) * 2022-06-02 2023-12-19 栗田工業株式会社 Treatment method for water containing fluorine and aluminum

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016190220A (en) 2015-03-31 2016-11-10 旭化成株式会社 Membrane distillation system and operation method thereof
JP2018144033A (en) 2018-03-06 2018-09-20 栗田工業株式会社 Operation management method for reverse osmosis membrane apparatus and reverse osmosis membrane processing system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0695216B1 (en) * 1993-04-23 1998-07-22 Exxon Chemical Patents Inc. Layers containing crystalline molecular sieves and processes for their manufacture

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016190220A (en) 2015-03-31 2016-11-10 旭化成株式会社 Membrane distillation system and operation method thereof
JP2018144033A (en) 2018-03-06 2018-09-20 栗田工業株式会社 Operation management method for reverse osmosis membrane apparatus and reverse osmosis membrane processing system

Also Published As

Publication number Publication date
JP2020121278A (en) 2020-08-13

Similar Documents

Publication Publication Date Title
JP7116691B2 (en) Water treatment method and water treatment equipment
US8999069B2 (en) Method for producing cleaning water for an electronic material
JP4973853B2 (en) Pure water production system
JP4798644B2 (en) Desalination method using reverse osmosis membrane
TWI721213B (en) Substrate cleaning device and substrate cleaning method
JP2008086945A (en) Method for recovering performance of permselective membrane
JP6540154B2 (en) Reverse osmosis membrane cleaning method
JP6844281B2 (en) How to clean the reverse osmosis membrane
JP6848482B2 (en) How to clean the reverse osmosis membrane
JP7161280B2 (en) Cleaning control method for RO membrane
TWI694874B (en) Rapid cleaning method for ultrapure water piping system
JP2022176325A (en) Operational method of desalination apparatus
JP7449107B2 (en) Water treatment method and water treatment equipment
JP4180019B2 (en) Reverse osmosis membrane cleaning method and wastewater recovery method using this method
WO2023166905A1 (en) Method for operating desalting device
WO2020158895A1 (en) Method for determining cleaning conditions of filter
JP2017189739A (en) Deaeration method and device of liquid medicine
JP7115522B2 (en) Operation method of desalting equipment
JP7400878B1 (en) Treatment method for water containing fluorine and aluminum
JP5017767B2 (en) Sterilization method for pure water production apparatus and pure water production apparatus
JP2007203220A (en) Pure water production system
JP7290911B2 (en) Reverse osmosis membrane treatment method and reverse osmosis membrane treatment system
JP2007260211A (en) Method for antiseptically cleaning ultrapure water producing system
JP2022167144A (en) Water treatment method and water treatment device
JP2022187148A (en) Method for starting up water treatment device and washing method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20211013

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220629

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220719

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220729

R150 Certificate of patent or registration of utility model

Ref document number: 7116691

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150