JP7105925B2 - ディスプレイユニットの異物検査システム - Google Patents
ディスプレイユニットの異物検査システム Download PDFInfo
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- JP7105925B2 JP7105925B2 JP2020566826A JP2020566826A JP7105925B2 JP 7105925 B2 JP7105925 B2 JP 7105925B2 JP 2020566826 A JP2020566826 A JP 2020566826A JP 2020566826 A JP2020566826 A JP 2020566826A JP 7105925 B2 JP7105925 B2 JP 7105925B2
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- 238000007689 inspection Methods 0.000 title claims description 12
- 239000000356 contaminant Substances 0.000 title 1
- 238000001514 detection method Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 description 9
- 239000004973 liquid crystal related substance Substances 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 4
- 238000005286 illumination Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- NNJPGOLRFBJNIW-HNNXBMFYSA-N (-)-demecolcine Chemical compound C1=C(OC)C(=O)C=C2[C@@H](NC)CCC3=CC(OC)=C(OC)C(OC)=C3C2=C1 NNJPGOLRFBJNIW-HNNXBMFYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/70—Testing, e.g. accelerated lifetime tests
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/068—Optics, miscellaneous
- G01N2201/0683—Brewster plate; polarisation controlling elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
11:有機発光ディスプレイパネル
12:4分の1波長板
13:偏光板
100:ディスプレイユニットの異物検査システム
110:照明ユニット
120:異物検出部
Claims (3)
- 有機発光ディスプレイパネルと、前記有機発光ディスプレイパネル上に配置される4分の1波長板と、前記4分の1波長板上に配置される偏光板とを備えるディスプレイユニットの上側に配置され、前記ディスプレイユニットの方へ入射光を提供する照明ユニットと、
前記照明ユニットの一側に配置された異物検出部であって、前記入射光が前記ディスプレイユニットから反射して提供される反射光を受けて前記ディスプレイユニットの異物流入の有無を検出する異物検出部と、
を含むディスプレイユニットの異物検査システムであって、
前記異物検出部は、
前記反射光が提供されると判断されると、前記ディスプレイユニットに異物が流入したと判定する、ディスプレイユニットの異物検査システム。 - 前記照明ユニットは、
前記ディスプレイユニットに対して90゜より小さい傾斜入射角を有する前記入射光を提供する、請求項1に記載のディスプレイユニットの異物検査システム。 - 前記異物検出部は、
前記ディスプレイユニットを撮影する撮影ユニットと、
前記撮影ユニットからディスプレイユニットのイメージを受けて前記ディスプレイユニットの異物流入の有無を検出する制御部とを含む、請求項1又は2に記載のディスプレイユニットの異物検査システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020180072249A KR102233918B1 (ko) | 2018-06-22 | 2018-06-22 | 디스플레이 유닛의 이물 검사 시스템 |
KR10-2018-0072249 | 2018-06-22 | ||
PCT/KR2019/007473 WO2019245313A1 (ko) | 2018-06-22 | 2019-06-21 | 디스플레이 유닛의 이물 검사 시스템 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021525369A JP2021525369A (ja) | 2021-09-24 |
JP7105925B2 true JP7105925B2 (ja) | 2022-07-25 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020566826A Active JP7105925B2 (ja) | 2018-06-22 | 2019-06-21 | ディスプレイユニットの異物検査システム |
Country Status (6)
Country | Link |
---|---|
US (1) | US11906442B2 (ja) |
EP (1) | EP3786621B1 (ja) |
JP (1) | JP7105925B2 (ja) |
KR (1) | KR102233918B1 (ja) |
CN (1) | CN112219114A (ja) |
WO (1) | WO2019245313A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024084783A1 (ja) * | 2022-10-17 | 2024-04-25 | 浜松ホトニクス株式会社 | 画像取得装置、検査装置、及び画像取得方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150085200A1 (en) | 2013-09-23 | 2015-03-26 | Samsung Display Co., Ltd. | Liquid crystal modulator for detecting a defective substrate and inspection apparatus having the same |
Family Cites Families (24)
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JP2577920B2 (ja) * | 1987-07-24 | 1997-02-05 | 株式会社 堀場製作所 | 異物有無検査装置 |
IL96483A (en) * | 1990-11-27 | 1995-07-31 | Orbotech Ltd | Optical inspection method and apparatus |
JP3956942B2 (ja) * | 1998-09-18 | 2007-08-08 | 株式会社日立製作所 | 欠陥検査方法及びその装置 |
JP4487042B2 (ja) * | 2003-12-16 | 2010-06-23 | レーザーテック株式会社 | 光学装置、検査装置及び検査方法 |
JP3746287B2 (ja) * | 2004-01-15 | 2006-02-15 | 学校法人東京電機大学 | 応力測定方法とその装置 |
TW200540939A (en) * | 2004-04-22 | 2005-12-16 | Olympus Corp | Defect inspection device and substrate manufacturing system using the same |
KR100635734B1 (ko) | 2005-02-26 | 2006-10-17 | 삼성에스디아이 주식회사 | 리튬 이온 전지 |
KR100829501B1 (ko) * | 2005-03-09 | 2008-05-16 | 엘지전자 주식회사 | 디스플레이 패널 검사 장치 및 그 검사 방법 |
TWI404926B (zh) * | 2005-08-26 | 2013-08-11 | 尼康股份有限公司 | Surface defect inspection device and surface defect inspection method |
JP5051874B2 (ja) | 2006-01-11 | 2012-10-17 | 日東電工株式会社 | 積層フィルムの製造方法、積層フィルムの欠陥検出方法、積層フィルムの欠陥検出装置 |
KR101367922B1 (ko) * | 2007-04-16 | 2014-02-27 | 엘아이지에이디피 주식회사 | 높은 반사 및 투과 효율과 투과광의 위상 지연을 이용하여기판을 검사하는 방법 및 장치 |
JP4785944B2 (ja) * | 2008-04-16 | 2011-10-05 | 日東電工株式会社 | 光学表示装置の製造方法 |
KR101496792B1 (ko) * | 2008-08-08 | 2015-02-27 | 삼성디스플레이 주식회사 | 표시패널 검사용 지그, 이를 이용하는 표시패널 검사 시스템 및 방법 |
KR101316539B1 (ko) * | 2011-11-29 | 2013-10-15 | 주식회사 힘스 | 유기발광다이오드 이물검사기 |
KR20140001508U (ko) * | 2012-09-03 | 2014-03-12 | (주)쎄미시스코 | 기판 검사장치 |
CN102854631B (zh) * | 2012-09-27 | 2015-05-20 | 深圳市华星光电技术有限公司 | 立体影像显示设备以及其形成方法 |
KR101452214B1 (ko) * | 2012-12-11 | 2014-10-22 | 주식회사 에스에프에이 | 패널 검사장치 |
KR102250032B1 (ko) | 2014-12-29 | 2021-05-12 | 삼성디스플레이 주식회사 | 표시 장치의 검사 장치 및 표시 장치의 검사 방법 |
KR101678169B1 (ko) | 2015-05-08 | 2016-11-21 | 주식회사 나노프로텍 | 초박판 투명기판 상면 이물 검출 장치 |
US11493454B2 (en) * | 2015-11-13 | 2022-11-08 | Cognex Corporation | System and method for detecting defects on a specular surface with a vision system |
KR102598924B1 (ko) | 2015-12-15 | 2023-11-03 | 엘지디스플레이 주식회사 | 유기발광표시패널 |
KR102509462B1 (ko) | 2016-04-05 | 2023-03-10 | 삼성전자주식회사 | 유기 발광 장치 |
KR20180011921A (ko) * | 2016-07-25 | 2018-02-05 | 삼성디스플레이 주식회사 | 검사 장치 |
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2018
- 2018-06-22 KR KR1020180072249A patent/KR102233918B1/ko active IP Right Grant
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2019
- 2019-06-21 JP JP2020566826A patent/JP7105925B2/ja active Active
- 2019-06-21 WO PCT/KR2019/007473 patent/WO2019245313A1/ko unknown
- 2019-06-21 US US17/252,567 patent/US11906442B2/en active Active
- 2019-06-21 CN CN201980037559.2A patent/CN112219114A/zh active Pending
- 2019-06-21 EP EP19822795.1A patent/EP3786621B1/en active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150085200A1 (en) | 2013-09-23 | 2015-03-26 | Samsung Display Co., Ltd. | Liquid crystal modulator for detecting a defective substrate and inspection apparatus having the same |
Also Published As
Publication number | Publication date |
---|---|
EP3786621A1 (en) | 2021-03-03 |
KR102233918B1 (ko) | 2021-03-30 |
CN112219114A (zh) | 2021-01-12 |
EP3786621A4 (en) | 2021-06-23 |
EP3786621B1 (en) | 2023-11-01 |
JP2021525369A (ja) | 2021-09-24 |
KR20200000221A (ko) | 2020-01-02 |
US20210255115A1 (en) | 2021-08-19 |
US11906442B2 (en) | 2024-02-20 |
WO2019245313A1 (ko) | 2019-12-26 |
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